This article deals with a high-precision three-dimensional positioning and measuring machine and its application as a metrological long-range scanning force microscope. At the institute of processmeasurement and Sens...
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This article deals with a high-precision three-dimensional positioning and measuring machine and its application as a metrological long-range scanning force microscope. At the institute of process measurement and sensor technology of the Technische Universität Ilmenau an interferometric nanopositioning and nanomeasuring machine has been developed. Which is able to achieve a resolution of less than 0.1 nm over the entire positioning and measurement range of 25 mm × 25 mm × 5 mm and is traceable to the length standard. The Abbe offset-free design in conjunction with a corner mirror as a reference coordinate system provides extraordinary accuracy. The integration of several probe systems and nanotools (AFM, STM, focus sensor, tactile probes) makes the nanopositioning and nanomeasuring machine suitable for various tasks in the micro- and nanotechnologies. Various probe systems have been integrated in the last few years. For example, a commercial piezo tube AFM was integrated and tested. Additionally, interferometeric measurement systems of the nanopositioning and nanomeasuring machine enables the calibration of probe systems. Also in order to achieve the best possible measurement results special probe systems have been developed and tested and are discussed briefly.
In the present paper, an interferometer is presented which - in contrast to all other types of interferometers - contains only plane mirrors used as reflectors. The interference beam passes through a diaphragm and is ...
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In the present paper, an interferometer is presented which - in contrast to all other types of interferometers - contains only plane mirrors used as reflectors. The interference beam passes through a diaphragm and is then divided again for generating the quadrature signals. During the measurement, the plane measuring mirror can tilt at an angle which depends on the diameter of the diaphragm without influencing the phase position of the quadrature signals. Measuring errors just as further characteristic features of the plane mirror interferometer are described.
For control applications aiming accurate positioning and path tracking friction modelling and compensation can be very important, especially when working with small displacements as usual in nano technologies. The pap...
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For control applications aiming accurate positioning and path tracking friction modelling and compensation can be very important, especially when working with small displacements as usual in nano technologies. The pap...
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For control applications aiming accurate positioning and path tracking friction modelling and compensation can be very important, especially when working with small displacements as usual in nano technologies. The paper at hand describes friction identification and friction model application for a linear high-precision ball bearing guide driven by a voice coil actuator and using high-resolution position measurement equipment. After noting some friction models the characteristics of friction on nanometer scale are investigated with several experiments. At last some remarks on control design are given.
In this paper, some special features found during phase transformations of binary alloys which can influence their potential utilization as reproducible temperature fixed points are described. Furthermore, some experi...
In this paper, some special features found during phase transformations of binary alloys which can influence their potential utilization as reproducible temperature fixed points are described. Furthermore, some experiences gained when applying alloys as phase transformation materials in miniature fixed‐point cells are presented. For a number of selected binary alloys, some investigations have been carried out for determining their melting and solidification temperatures as well as their reproducibility under laboratory conditions. In addition, substantial results are presented concerning the influence of the mixing ratio on the phase transformation plateaus which can be measured using miniature fixed‐point cells. So far, miniature fixed‐point thermocouples with binary alloys as fixed‐point material have been successfully applied, even under industrial conditions, for realizing an automatic single‐point recalibration of the temperature measurement system, with even a multiple‐point recalibration being possible when special alloys are used.
We investigated a method of solid-phase epitaxy (SPE) using low-vacuum, low-pressure chemical vapor deposition (LPCVD) equipment without the load lock chamber that is usually used for the Si LSI process. This is a new...
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We investigated a method of solid-phase epitaxy (SPE) using low-vacuum, low-pressure chemical vapor deposition (LPCVD) equipment without the load lock chamber that is usually used for the Si LSI process. This is a new method of clean surface formation in which the Si substrate is heated after seed formation in an atmosphere of SiH4 gas. Using this method, an L-SPE length of 4 mu m was obtained. The reason for the success of this method appears to be that the seed surface cleaned by HF dipping is preserved by the SiH4 gas. To evaluate the quality of the silicon-on-insulator (SOI) layer formed by this method, a MOSFET and a PN diode were experimentally produced. The MOSFET exhibited normal transistor action, which confirmed that the SOI layer had satisfactory quality without any problem in manufacturing the MOSFET. However, it was found that the n value of the forward direction current characteristic of the PN diode was 1.156 and that the SOI layer had more recombination centers than the Si substrate (n = 1.050). (C) 1997 Scripta Technica, Inc.
This paper presents a measurement technique which makes it possible to scan varying interference patterns by using the incremental procedure (forward-backward counting method). The essence of this procedure is that th...
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