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Conference on Precision Electromagnetic measurements (CPEM)

作者： Markus Pabst Falko Hilbrunner Thomas Fröhlich Institute of Process Measurement and Sensor Technology TU Ilmenau Ilmenau Germany Department Mass Comparators Sartorius Lab Instruments GmbH&Co.KG Göttingen Germany

ISBN: (数字)9798350361049

ISBN: (纸本)9798350361056

An important part of a Planck, or Kibble balance, is the magnet system. It serves as an actuator in force mode and as a sensor in velocity mode. The performance of the magnet system in Planck balances is essential for mass calibration according to the International System of Units of 2019 [1]. This paper describes the further development of a lightweight magnet system for use in the Planck extension for high-precision vacuum mass comparators [4]. Based on the experience gained from investigations with a prototype magnetic system of the Planck extension, a further development of the magnetic system using simulation methods is presented.

关键词： Coils Vacuum systems Electromagnetic measurements Computational modeling Force Prototypes Gain measurement

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Deploying the high-power pulsed lasers in precision force metrology – SI traceable and practical force quantization by photon momentum

arXiv

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arXiv 2022年

作者： Vasilyan, Suren Fröhlich, Thomas Rogge, Norbert Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau 98683 Germany

Design and operational performance of table-top measurement apparatus is presented towards direct Planck constant traceable high accuracy and high precision small forces and optical power measurements within SI unit system. An electromagnetic force compensation weighing balances, highly reflective mirrors and high-energy pulsed laser unit (static average power 20 W) are tailored together with a specially developed opto-electro-mechanical measurement infrastructure for cross-mapping the scale-systems of precision small force measurements obtained with a state-of-the-art classical kinematic system employing Kibble balance principle in the range of 10 nN to 4000 nN in comparison with forces generated due to quantum-mechanical effect namely the transfer of the momentum of the photons from a macroscopic object. Detailed overview of the adapted measurement methodology, the static and the limits of dynamic measurement, the metrological traceability routes of the measurement parameters, quantities and their measurement uncertainties, parametric up(down)-scaling perspectives of the measurements are presented with respect to the state-of-the-art measurement principles and standard procedures within the newly redefined International System of Units (SI). © 2022, CC BY.

关键词： Pulsed lasers

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New Sartorius mass comparator for highest accuracy including fully automatic vacuum transfer system

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measurement: sensors 2024年

作者： Hilbrunner, Falko Schreiber, Mario Fröhlich, Thomas Fehling, Thomas Schwesinger, Folker Krapf, Gunter Sartorius Lab Instruments GmbH & Co. KG Mass Comparators Department Göttingen37079 Germany Institute of Process Measurement and Sensor Technology TU Ilmenau Ilmenau98684 Germany

Sartorius cooperated with Technische Universität Ilmenau to develop the innovative automatic mass comparator VMC1007. This facilitates highly accurate mass comparisons of weights between 100 g and 1 kg under controlled atmospheric conditions, and in a vacuum. For permanent storage of weights under vacuum conditions, the mass comparator can optionally be configured with a vacuum transfer system and corresponding containers. The device is very compact, has eight universal positions for directly handling weights of different shapes and allows for precise and fast mass comparisons. In order to make the processes for inserting and ejecting weights as simple and safe as possible, all mechanical movement axes are motorised. Mass comparisons can be controlled, monitored and analysed easily and irrespective of the operating system using web-based user interface. In all processes, the user is intuitively guided through the individual steps to enable safe, efficient and convenient work. © 2024

关键词： Comparators (optical)

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Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine

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Nanomanufacturing and Metrology 2021年第3期4卷 149-155页

作者： Laura Mohr-Weidenfeller Annika-Verena Hacker Carsten Reinhardt Eberhard Manske Microsystems Technology Group Ilmenau University of TechnologyMax-Planck-Ring 12IlmenauGermany Institute for Process Measurement and Sensor Technology Ilmenau University of TechnologyGustav-Kirchhoff-Str.1IlmenauGermany Bremen University of Applied Science Neustadtswall 30BremenGermany

Since the first realization of two-photon direct laser writing(DLW)in Maruo et al.(Opt Lett 22:132-134,1997),the manufacturing using direct laser writing techniques spread out in many laboratories all over the *** materials with different material properties open a new field for micro-and *** achievable structuring resolution using this technique is reported to be sub-100 nm(Paz et *** *** Appl.24:042004,2012),while a smallest linewidth of 25 nm could be shown in Tan et al.(Appl Phys Lett 90:071106,2007).In our approach,the combination of DLW with the nanopositioning and nanomeasuring machine NMM-1 offers an improvement of the technique from the engineering side regarding the ultra-precise positioning(Weidenfeller et *** Adv Fabr Technol Micro/Nano Opt Photon Ⅺ 10544:105440E,2018).One big benefit besides the high positioning resolution of 0.1 nm is offered by the positioning range of 25 mm×25 mm×5 mm(Jager et *** Technisches Messen 67:319-323,2000;Manske et *** Meas Sci Technol 18:520-527,2007).Thus,a trans-scale fabrication without any stitching or combination of different positioning systems is *** immense synergy between the highly precise positioning and the DLW is demonstrated by the realization of resist lines and trenches whose center-to-center distance undergoes the modified diffraction limit for two-photon *** precise positioning accuracy enables a defined distance between illuminated ***,with a comparable huge width of the trenches of 1.655|im due to a low effective numerical aperture of 0.16,a resist line of 30 nm between two written trenches could be *** the interrelationships for achieving such narrow trenches have not yet been clarified,much smaller resist lines and trench widths are possible with this approach in the near future.

关键词： Direct laser writing Nanopositioning and nanomeasuring machine Two-photon absorption Laser power controlling

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Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for measurement and Fabrication Purposes

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Nanomanufacturing and Metrology 2021年第3期4卷 156-164页

作者： Ralf Schienbein Florian Fern Rene Theska Shraddha Supreeti Roland FuBl Eberhard Manske Department of Mechanical Engineering Institute of Design and Precision Engineering.Technical University of Ilmenau.IlmenauGermany Institute of Process Measurement and Sensor Technology Department of Mechanical EngineeringTechnical University of IlmenauIlmenauGermany Electronics Technology Group Department of Electrical Engineering and Information TechnologyTechnical University of IlmenauIlmenauGermany

The majority of nanopositioning and nanomeasuring machines(NPMMs)are based on three independent linear movements in a Cartesian coordinate *** in combination with the specific nature of sensors and tools limits the addressable part *** enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer *** this purpose,a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate *** taken show high potential for three linear movements of the object in combination with two angular movements of the *** influence of the additional rotation systems on the existing structure of NPMMs has been investigated further *** series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are *** a result of these test series,the necessity of in situ position determination of the tool became very *** tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry-Perot *** optimization has been used to enhance the overall system structure with regard to reproducibility and long-term *** have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the *** knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.

关键词： Multiaxial nanopositioning and nanomanufacturing Ultra-precision machine designs 5-Axis operation Ultraprecision rotations

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Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines

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Nanomanufacturing and Metrology 2021年第3期4卷 181-189页

作者： Florian Weigert Roman Hebenstreit Roland FuBl Rene Theska Institute for Design and Precision Engineering Precision Engineering GroupTechnische Universitat IlmenauGustav-Kirchhoff-Platz.298693 IlmenauGermany Institute for Process Measurement and Sensor Technology Technische Universitat IlmenauGustav-Kirchhoff-Str.198693 IlmenauGermany

Nanomeasuring machines developed at the Technische Universitat Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest *** to the requirements for these processes,a highly reproducible and long-term stable tool changing system is *** this purpose,kinematically determined couplings are widely *** state-of-the-art investigations on those are not sufficient for the highest demands on the reproducibility required for this application.A theoretical determination of the reproducibility based on analytical or numerical methods is possible,however not in the desired nanometer *** to this,a measurement setup for the determination of the reproducibility in five degrees of freedom with nanometer uncertainty was ***,potential measuring devices are systematically examined and measurement principles were developed out of this.A three-dimensional vector-based uncertainty analysis is performed to prove the feasibility of the measurement principle and provides a basis for further *** a result,a transla-tory measurement uncertainty of 10 nm and a rotatory uncertainty of 11 nrad can be ***,the measurement setup is designed,focusing on the metrological frame and the lift-off *** developed setup exceeds the uncertainties of the measurement setups presented in the state-of-the-art by an order of magnitude,allowing new in-depth investigations of the reproducibility of kinematic couplings.

关键词： Tool changing Kinematic coupling measurement setup Uncertainty analysis Precision design

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First prototype of a positioning device with subatomic resolution 22

First prototype of a positioning device with subatomic resol...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Hebenstreit, Roman Wedrich, Karin Strehle, Steffen Manske, Eberhard Theska, René Technische Universität Ilmenau Department of Mechanical Engineering Institute for Design and Precision Engineering Precision Engineering Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Micro- and Nanotechnologies Microsystems Technology Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Germany

ISBN: (纸本)9781998999118

In the forthgoing work on a device that enables subatomic resolved highly reproducible positioning, a first prototype is here presented. The entire positioning system including the actuator, sensor and guiding mechanism, is realized as a micro-electro-mechanical system (MEMS) on chip level, based on silicon-on-insulator (SOI) technology. A modular printed circuit board acts as the mechanical as well as the electrical contacting interface for the silicon chip. First variants of a linear positioning system comprising axisymmetric double parallel crank structure are investigated. Pivot joints as flexure hinges with concentrated compliance are deployed. These hinges show minimal rotational axis displacement for small angles of deflection, thus ensuring smallest deviations to a straight-line path of the linear guiding mechanism. An electrostatic comb actuator transmits forces contactless to minimize over constraints. A measuring bridge in differential mode utilizes the same comb structures to measure the table position based on the capacitance change. Estimating the position resolution, limited by the resolution of the capacitive sensor, a measurable step width below 50 pm can be expected. In further steps, the device will be a platform to be equipped with a lattice-scale-based position measurement system according to achieve an even higher resolution and reproducibility. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Capacitive sensors

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Heterodyne Standing-Wave Interferometer with Improved Phase Stability

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Nanomanufacturing and Metrology 2021年第3期4卷 190-199页

作者： Ingo Ortlepp Jens-Peter Zollner Ivo W.Rangelow Eberhard Manske Institute of Process Measurement and Sensor Technology Technische Universitat IlmenauEhrenbergstraBe 2998693 IlmenauGermany Microelectronic and Nanoelectronic Systems Group Technische Universitat IlmenauIlmenauGermany Nanoscale Systems Group Technische Universitat IlmenauIlmenauGermany

This paper describes a standing-wave interferometer with two laser sources of different wavelengths,diametrically opposed and emitting towards each *** resulting standing wave has an intensity profile which is moving with a constant velocity,and is directly detected inside the laser beam by two thin and transparent photo *** first sensor is at a fixed position,serving as a phase reference for the second one which is moved along the optical axis,resulting in a frequency shift,proportional to the *** phase difference between both sensors is evaluated for the purpose of interferometric length measurements.

关键词： Standing wave Interferometer Heterodyne Ultrathin photo diode

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In-Situ Calibration Method for Thermocouples in Accelerating Rate Calorimeter Based on Multiple Fixed-Points and Joule Heat

SSRN

引用

SSRN 2023年

作者： Liang, Weixiang Chen, Jinyu Jiang, Juncheng Schalles, Marc Marin, Sebastian Augustin, Silke Fröhlich, Thomas Ding, Jiong College of Metrology and Measurement Engineering China Jiliang University Zhejiang Hangzhou China College of Safety Science and Engineering Nanjing Tech University Nanjing China Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany

To solve the problem of temperature drift of thermocouples in accelerating rate calorimeter caused by long-term operation, an in-situ calibration method based on multiple fixed-points and Joule heat is proposed in this article. Firstly, the heat transfer model of the calorimeter is established, and the validity of the method is verified by numerical simulation. Secondly, a multiple fixed-points graphite calibrator and a cylindrical electronic resistance element are designed. Finally, the in-situ calibration is carried out. The calibration results show that the maximum permissible measurement error of the sample thermocouple after calibration is better than 0.220 °C and that the bias of consistency in-situ calibration method is smaller than 0.110 °C. In addition, a di-tert-butyl peroxide in toluene solution with a mass percent of 20% is selected as the experimental sample. The sample experiment results show that the kinetic and thermodynamic parameters are closer to the reference values after thermocouples calibration. © 2023, The Authors. All rights reserved.

关键词： Thermocouples

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On the development of five axes nanopositioning machines for measurement and fabrication purposes based on Cartesian systems 21

On the development of five axes nanopositioning machines for...

引用

21st International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2021

作者： Schienbein, Ralf Theska, René Fern, Florian Füßl, Roland Manske, Eberhard Precision Engineering Group Department of Mechanical Engineering Technische Universität Ilmenau Germany Institute of Process Measurement and Sensor Technology Department of Mechanical Engineering Technische Universität Ilmenau Germany

ISBN: (纸本)9780995775190

The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable part geometries. An enhancement of a NPMM is introduced by the implementation of rotational movements while keeping the precision untouched. For this purpose, a parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate substructures. Evaluations taken, show high potential for three linear movements of the object in combination with two angular movements of the tool. The influence of the additional rotation systems on the existing structure of NPMMs has been investigated further on. Test series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are realized. As a result of these test series, the necessity of in situ position determination of the tool became very clear. The tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry Pérot interferometers. FEA optimization has been used to enhance the overall system structure with regard to reproducibility and long term stability. Residual deviations to the ideal moving pathes have been experimentally investigated by replacing the tool by a retroreflector and utelization of the various laser interferometers of the NPMM. The knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines. © 2021 Proceedings of the 21st International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2021. All rights reserved.

关键词： Machine design

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