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Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive 22

Investigations on the tracking control and performance of a ...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Huaman, Alex S. Gorges, Stephan Katzschmann, Michael Hesse, Steffen Fröhlich, Thomas Manske, Eberhard Ilmenau98693 Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau98693 Germany

ISBN: (纸本)9781998999118

This paper presents an approach to equip an existing planar nanoprecision drive system with specially designed lifting and actuating units (LAUs), which can lift several kilograms along a vertical stroke of 10 mm with nanometer precision. These modules contain a pneumatic actuator to counteract the weight force along the entire travel range without introducing significant heat into the measurement space. An additional parallel acting electromagnetic actuator provides the precision positioning forces. As an initial step toward a full 6D system, each LAU is set up individually on a test bench. Using an included laser interferometric measurement system and emulated loads, allows for the development and evaluation of different control strategies within the simulation framework and via real-time experiments. Designing a controller for a single LAU involves an in-depth research into its overactuated nature and the derivation of a detailed model of the drive as well as the motion system. The proposed control strategy achieves subnanometer precision by integrating a feedforward stage for trajectory tracking and an output-feedback stage for stabilization and disturbance rejection. In this context, the output-feedback controller highlights a composite state and disturbance observer. In order to accomplish an adequate tradeoff between performance and robustness, the controller tuning is performed in the time and frequency domain based on systematic LQR/LQG design methods. The effectiveness of the presented control strategy is verified via real-time experimentation, where the overall control scheme allows RMS positioning errors below 0.3 nm which seem to be dominated by the measurement noise. Moreover, it renders very low heat dissipation of about 54 nW to carry a 4 kg payload. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Nanotechnology

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High speed temperature sensors in emission systems of combustion engines

High speed temperature sensors in emission systems of combus...

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20th IMEKO World Congress 2012

作者： Augustin, S. Fröhlich, F. Ament, C. Güther, T. Institute for Process Measurement and Sensor Technology Ilmenau University of Technology Ilmenau Germany Department of System Analysis Ilmenau University of Technology Ilmenau Germany

ISBN: (纸本)9781627481908

Temperature sensors used in emission systems of combustion engines must register enormous temperature differences within the shortest periods of time. This serves to protect the engine parts with respect to their temperature stability and to govern the energy efficient functioning of the engine. Numerical calculations according to the Finite Elements Method are used to estimate static-thermal measurement errors and dynamic characteristics primarily concerning medium specificity and construction of the temperature sensors. Prediction models are used to correct the dynamic behavior and to predict the medium temperature faster accurately. Copyright © (2012) by the International measurement Federation (IMEKO).

关键词： Forecasting

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The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1

The Metrological Basis and Operation of Nanopositioning and ...

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作者： Jäger, Gerd Manske, Eberhard Hausotte, Tino Büchner, Hans-Joachim Ilmenau University of Technology Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PF 100 565 98684 Ilmenau Germany

After an explanation of the set-up of a nanomeasuring machine NMM-1, its high performance is described with a metrological analysis. This analysis shows some of today's limits of nanopositioning and nanomeasuring engineering. Single, double and triple beam plane mirror interferometers are applied in the nanomeasuring machine in order to measure and control the six degrees of freedom of the 3D nanopositioning stage. The various applications of the nanomeasuring machine are based on the installation of optical and tactile nanoprobes above the 3D nanopositioning stage. The set-up, function and measurement results of some zero-point nanoprobes in combination with the nanomeasuring machine are explained. Zusammenfassung Nach einer Erläuterung des Aufbaus der Nanomessmaschine NMM-1 wird deren hohe Leistungsfähigkeit anhand einer metrologischen Analyse dargestellt. Diese Analyse zeigt einige der heutigen Grenzen der Nanopositionier- und Na- nomesstechnik auf. Planspiegelinterferometer mit einem, zwei oder drei Strahlen werden in der Nanomessmaschine verwendet, um die sechs Freiheitsgrade des 3D- Nanopositioniertisches zu messen und zu regeln. Der Einsatz von optischen und taktilen sensoren ermöglicht die Anwendungen der Nanomessmaschine bei verschiedensten Messaufgaben. Aufbau, Funktion und Mess- ergebnisse einiger Nullpunktsensoren in Verbindung mit der Nanomessmaschine werden erklärt. ©Oldenbourg Wissenschaftsverlag.

关键词： Nanoprobes

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Double-pass modulated differential confocal microscopy for closed-loop axial control of direct laser writing 13

Double-pass modulated differential confocal microscopy for c...

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Optical measurement Systems for Industrial Inspection XIII 2023

作者： Belkner, Johannes Stauffenberg, Jaqueline Tenorio, Christian Görner Ortlepp, Ingo Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Max-Planck-Ring 12 Ilmenau98693 Germany

ISBN: (数字)9781510664463

ISBN: (纸本)9781510664456

Direct laser writing is a popular method for mask-less lithography that already achieved commercial grade. However, it is still challenging to realize homogeneously exposed structures on 3D-shaped substrates. A common source of the variation in exposure is a changing distance of the substrate surface with the photoresist towards the plane of the narrowest waist of the exposure beam. To tackle this issue, we propose a differential confocal probe that employs a spatially modulated pinhole. This phase-modulated lock-in principle enables highly resolved depth sensing without ambiguity about the direction of the deviation from the focal plane. However, the modulation contrast must be high enough to achieve this, which is why the measuring beam passes the pinhole twice. This probe is integrated into the nanopositioning and nanomeasuring machine via a position-based controller. We demonstrate the capability to follow 10◦ inclined substrates. © 2023 SPIE.

关键词： Confocal microscopy

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Long-term wavelength stabilisation of widely modulated lasers 13

Long-term wavelength stabilisation of widely modulated laser...

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Optical measurement Systems for Industrial Inspection XIII 2023

作者： Wiseman, Kieran B. Kissinger, Thomas Tatam, Ralph P. Centre for Engineering Photonics Cranfield University United Kingdom Institute of Process Measurement and Sensor Technology Technical University of Ilmenau Germany

ISBN: (数字)9781510664463

ISBN: (纸本)9781510664456

In this paper, we present a novel technique for stabilisation of widely wavelength modulated lasers (>100pm) over long time scales, where modulation depths exceed the spectral width of standard reference features, such as gas absorption lines, by over an order of magnitude. The technique operates by controlling the temporal separation between successive appearances of a gas absorption line on the up and down sweeps of a sinusoidal laser wavelength modulation waveform. The influence of the signal distortions introduced by the laser intensity modulation that are associated with laser diode injection current modulation are also addressed. The technique is applied to a range-resolved interferometric system interrogating a Mach-Zehnder interferometer operating in thermally stable conditions, using an absorption feature from a fibre-coupled gas cell as a reference. Proof-of-principle measurement results achieved using this technique are presented, demonstrating a notional fractional stability of 3.9×10−7 without further correction. © 2023 SPIE.

关键词： Stabilization

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The Planck-Balance - Primary mass metrology for industrial applications 22

The Planck-Balance - Primary mass metrology for industrial a...

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22nd World Congress of the International measurement Confederation, IMEKO 2018

作者： Günther, L. Rothleitner, C. Schleichert, J. Rogge, N. Vasilyan, S. Hartig, F. Fröhlich, T. Bundesallee 100 Braunschweig38116 Germany Institute of Process Measurement and Sensor Technology Technische Universitat Ilmenau Ilmenau98684 Germany

The Planck-Balance is a new weighing instrument, that utilizes the Kibble principle for mass measurements. In contrast to existing Kibble experiments the balance is aimed at applications in industrial or research use. The proposed new definition of the kilogram with a fixed value of the Planck constant will allow primary mass measurements with electrical measurements using the Kibble principle. Two instruments, PB2 and PB1 will be developed in a joint research project of the Physikalisch-Technische Bundesanstalt (PTB) and the Technische Universitat Ilmenau, funded by the German Federal Ministry of Education and Research. The aimed measurement range is from 1 mg to 100 g and 1 mg to 1 kg with a relative measurement uncertainty according to E2 and E1 accuracy classes, respectively, as specified in OIML R 111-1. For the determination of the measurement uncertainty a virtual Planck-Balance will be set up, that uses Monte Carlo simulation to determine measurement uncertainties during the measurement process. © 2018 Web Portal IOP. All rights reserved.

关键词： Monte Carlo methods

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Vacuum transfer system for loading the sartorius prototype mass comparator CCL1007

Vacuum transfer system for loading the sartorius prototype m...

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21st Conference on measurement of Force, Mass and Torque Together with HARDMEKO 2010 and 2nd Meeting on Vibration measurement, IMEKO TC3, TC5 and TC22 Conferences

作者： Fröhlich, Thomas Fehling, Thomas Heydenbluth, Detlef Geyer, Matthias Schüler, Ralf Ilmenau University of Technology Institute of Process Measurement and Sensor Technology Germany Sartorius AG Göttingen Germany SIOS GmbH Ilmenau Germany

ISBN: (纸本)9781618390219

The Vacuum Transfer System (VTS) is designed for fully automatic loading of weights into the Sartorius Prototype Mass Comparator CCL1007. The system enables the user to transfer weights from air to air/neutral gas, air to vacuum and back, as well as from vacuum to vacuum conditions. A detailed description of the technical parameters and the different operation modes will be presented.

关键词： Comparators (optical)

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CAPACITIVE CALIBRATION CAPABILITIES IN AN EMFC BALANCE 24

CAPACITIVE CALIBRATION CAPABILITIES IN AN EMFC BALANCE

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24th IMEKO TC3 Conference on measurement of Force, Mass and Torque 2022, Together with the 14th TC5 Conference on the measurement of Hardness, the 6th TC16 Conference on Pressure and Vacuum measurement, and the 5th TC22 Conference on Vibration measurement

作者： Cherkasova, V. Fröhlich, T. Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau PF 10 05 65 Ilmenau98684 Germany

ISBN: (纸本)9781713870203

The article describes the possibilities of calibrating the force constant in an electromagnetic force compensation (EMFC) load cell using the electrostatic force compensation principle. The static and dynamic principles of calibration of the Kibble balance for the electrostatic force constant, as well as calibration by means of compensation of the electrostatic force by the electromagnetic force, are considered. The combination of the two compensation principles in the load cell allows the measurement of forces in the range of 20 pN to 2.2 mN and ensures traceability to national standards. The relative uncertainty in the measurement of forces of about 100 nN is estimated to be about 0.001. © 2023 *** All Rights Reserved.

关键词： Calibration

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Corner loading and its influence on the tilt sensitivity of precision weighing cells 20

Corner loading and its influence on the tilt sensitivity of ...

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20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020

作者： Darnieder, Maximilian Pabst, Markus Fröhlich, Thomas Theska, René Institute for Design and Precision Engineering Precision Engineering Group Technische Universität Ilmenau Department of Mechanical Engineering Institute for Process Measurement and Sensor Technology Process Measurement Technology Group Technische Universität Ilmenau Department of Mechanical Engineering

ISBN: (纸本)9780995775176

Corner loading and ground tilt are relevant error sources for precision weighing cells. The sensitive compliant mechanism of the weighing cell is subject to large dead weights with the aim to resolve small mass differences. Tilting of the base or an eccentric load application relative to the centre of the weighing pan result in lateral force components, apart from those in measurement direction. This changes the indication of the balance resulting in measurement errors. In this paper, a finite element model of the weighing cell was used to evaluate the corner load sensitivity in three directions and the tilt sensitivity in two directions. Based on a parametric study, an optimal attachment point for the weighing cell was found where all considered mechanical errors can be reduced to second order effects. Copyright © Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020. All rights reserved.

关键词： Cytology

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Investigations of metrological models for the nanomeasuring and nanopositioning machine with respect to the measurement uncertainty by means of a Monte Carlo simulation

Investigations of metrological models for the nanomeasuring ...

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25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010

作者： Kreutzer, Philipp Füßl, Roland Manske, Eberhard Dorozhovets, Nataliya University of Technology Ilmenau Institute of Process Measurement and Sensor Technology P.O: Box 100 565 D-98684 Ilmenau Germany

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