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检索条件"机构=Institute of Process Measurement and Sensor Technology"

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Improvements to the primary LNG mass flow standard 18

Improvements to the primary LNG mass flow standard

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18th International Flow measurement Conference, FLOMEKO 2019

作者： Schakel, M.D. van der Beek, M.P. Rahneberg, Ilko Schleichert, Jan Einenkel, Tobias Rogge, Norbert Fröhlich, Thomas VSL Delft Netherlands SIOS Messtechnik GmbH Ilmenau Germany Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Ilmenau Germany

In 2013 LNG mass flow meters were traceably calibrated by the gravimetric primary LNG mass flow standard with an estimated Calibration and measurement Capability (CMC) of 0.12% to 0.15%. Dominant uncertainty sources included the uncertainty associated with the correction for so-called parasitic forces. Modifications to the primary standard were made with the objective to reduce the measurement uncertainty associated with the parasitic forces. A Level Compensation System (LCS) was installed to control the level of the weighing vessel during the weighing process. Several experiments were performed, and the results analysed. It was demonstrated that the LCS has the potential to reduce the measurement uncertainty associated with the parasitic forces. An alternative method to reduce parasitic forces was made possible by the installation of a dry-break coupling. Future activities will aim to provide a proof of principle of the improvements due to the LCS and the dry-break coupling when using liquid medium (e.g., LNG) in the weighing process. © FLOMEKO 2019.

关键词： Uncertainty analysis

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Analysis of the cosine error in measurements using the nanopositioning and nanomeasuring machine

Analysis of the cosine error in measurements using the nanop...

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26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011

作者： Kreutzer, Philipp Füßl, Roland Manske, Eberhard University of Technology Ilmenau Institute of Process Measurement and Sensor Technology P.O: Box 100 565 D-98684 Ilmenau Germany

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Investigation on the impedance-frequency-response for a dynamic behaviour description of elecromagnetic force compensated load-cells

Investigation on the impedance-frequency-response for a dyna...

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20th IMEKO World Congress 2012

作者： Hilbrunner, F. Weis, H. Petzold, R. Fröhlich, T. Jäger, G. Sartorius Weighing Technology GmbH Göttingen Germany Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany

ISBN: (纸本)9781627481908

In this paper, a method for deriving significant parameters for the description of the dynamic behaviour of electromagnetic force compensated load-cells (EMC) from its impedance-frequency-response is presented. With these parameters, the dynamical behaviour of a load-cell can be depicted and classified near its main resonance frequency, or by going the inverse way the load-cell can be designed based on the favored parameters to fulfill the desired criteria concerning the dynamical behaviour. This method is based on the estimation of parameters describing the behaviour of electrodynamic speakers, called Thiele-Small-Parameters, which is state of the art for designing loudspeakers. It will be demonstrated that the controller design for the EMC load-cell can be based on the derived parameters.

关键词： Frequency response

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Pico litre volume measurement with a laser focus sensor on the nano measuring machine NMM-1 17

Pico litre volume measurement with a laser focus sensor on t...

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17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

作者： Ortlepp, Ingo Mastylo, Rostyslav Albrecht, Arne Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Germany Technische Universität Ilmenau Institute of Micro- and Nanotechnologies Germany

ISBN: (纸本)9780995775107

A novel approach of measuring small volumes is made in our project. The goal is to utilise the Nano Measuring Machine NMM-1 in combination with a laser focus sensor to determine the volume of small water droplets. The droplet surface is scanned by the focus sensor with picometre resolution. Based on the shape of the scan lines, the actual volume of the droplet can be calculated. However, due to the small distance between the water surface and the glass carrier, the laser focus sensor signal was distorted by undesired reflections from the glass carrier the droplets are deposited on. To reduce these undesired reflections, the BK7 carrier was anti-reflection coated. When a SiO2 layer of appropriate thickness is deposited on the carrier, the reflectance at the water - glass interface can be considerably lowered. This drastically improves the sensor signal, thus enables the correct measurement of the droplets' shapes and hence the calculation of their volume.

关键词： Antireflection coatings

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Investigation on the lithographic process for a high-precision direct laser writing system 20

Investigation on the lithographic process for a high-precisi...

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Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX 2023

作者： Häcker, Annika-Verena Stauffenberg, Jaqueline Manske, Eberhard Institute of Process Measurement and Sensor Technology Production and Precision Measurement Technology Group Technische Universität Ilmenau Gustav-Kirchhoff-Straße 1 Thuringia Ilmenau98693 Germany

ISBN: (纸本)9781510665200

The semiconductor industry is an unbelievable fast-growing field with an exponential growth in the space optimization. But also, other large industrial field are getting smaller in the structure size, for example the field of optics. On the other hand, the customer demands get more and more complex and individual. This leads to an enormous growth potential for micro- and nanofabrication with direct laser writing. Under this circumstance the idea for a micro- and nanostructuring possibility with high precision on large areas was born.1 A setup was developed to combine a nanopositioning and nanomeasuring machine (NMM-1) with an extremely high precision and a two-photon based illumination system to realize a high-precision direct laser writing system.2 Besides its high positioning resolution of 0.1 nm and its metrological traceability based on an interferometrical measurement setup, the NMM-1 offers a positioning range of 25mm x 25mm x 5mm34 The aim is to design a direct laser writing setup, which enables a trans-scale fabrication without any stitching or combination of different positioning systems necessary. In order to benefit from this high positional accuracy, studies have been made to investigated the 2 photon absoption process and reduce line widths. The presented research shows investigations, which were made with the developed laser writing setup, to invested illumination dose and the voxel position of the writing laser, in order to improve microstructuring and to reduce structure widths. © 2023 SPIE.

关键词： Lithography

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Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas

Nanopositioning and nanomeasuring machine for high accuracy ...

引用

Optical Fabrication, Testing, and Metrology II

作者： Manske, E. Hausotte, T. Mastylo, R. Hofmann, N. Jäger, G. Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau P.O. Box 100565 98684 Ilmenau Germany

Driven by increasing precision and accuracy requirements due to miniaturization and performance enhancement, measuring technologies need alternative ways of positioning, probing and measurement strategies. The paper describes the operation of the high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm × 25 mm × 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. Three plane-mirror miniature interferometers and two angular sensors are arranged, to realize in all three coordinates zero Abbe offset measurements. Therefore, this device closes a gap in coordinate-measuring technique regarding resolution, accuracy and measuring range. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, step height standards.

关键词： Nanotechnology

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Nanomeasuring and nanopositioning engineering

引用

6th International Workshop on Advanced Optical Metrology, Fringe 2009

作者： Jäger, Gerd Manske, Eberhard Hausotte, Tino Büchner, Hans-Joachim Ilmenau University of Technology Faculty of Mechnical Engineering Institute of Process Measurement and Sensor Technology P.O. Box 100 565 98684 Ilmenau Germany

ISBN: (纸本)9783642030505

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of the high-precision nanomeasuring machine having a resolution of 0,1 nm over the range of 25 mm x 25 mm x 5 mm is explained. Single beam-, double beam- and triple beam interferometer arranged with an Abbe offset-free design are installed into the nanomeasuring machine in order to measure and control the six degrees of freedom. The high performance of the machine is described with a metrological analysis. This analysis shows some todays limits of nanopositioning and nanomeasuring engineering. © Springer-Verlag Berlin Heidelberg 2009.

关键词： Degrees of freedom (mechanics)

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Generating ideal reference geometry for cutting edges 22

Generating ideal reference geometry for cutting edges

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22nd World Congress of the International measurement Confederation, IMEKO 2018

作者： Karatas, Abdullah Seewig, Jörg University of Kaiserslautern Department of Mechanical and Process Engineering Institute for Measurement and Sensor-Technology Gottlieb-Daimler-Str. KaiserslauternD-67663 Germany

In the last years, many different techniques for rating cutting edges were presented. Nevertheless an automatic measurement and indication of quality from cutting edges was covered less attention. Although the state of cutting edges is very important in many cases during the manufacturing process. An automatic indication of quality can roughly be realised in three steps. The step, generating an ideal reference geometry from measured data, will be discussed in this paper. Therefore different types of splines and a robust filtering method is used. The other two steps, mainly measuring and estimating quantification parameters, were discussed in diverse sources. © 2018 institute of Physics Publishing. All rights reserved.

关键词： Geometry

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Excitation frequency dependent deviations during the "velocity mode" of Bl measurements in the Planck-Balance 23

Excitation frequency dependent deviations during the "veloci...

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23rd IMEKO TC4 International Symposium on Electrical and Electronic measurements Promote Industry 4.0

作者： Rogge, Norbert Lin, Shan Rothleitner, Christian Vasilyan, Suren Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau98684 Germany Physikalisch-Technische Bundesanstalt Bundesallee 100 Braunschweig38116 Germany Physikalisch-Technische Bundesanstalt Bundesallee 100 Braunschweig38116 Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau98684 Germany

The Planck-Balance is a table-top device that utilizes the concept of a Kibble balance. In contrast to a standard electromagnetic force compensated balance, the force factor Bl is not determined by calibration with mass pieces. Instead of this static calibration, the Planck-Balance applies a sinusoidal motion on the coil and determines the Bl based on measurements of induced voltage, displacement and frequency. In order to obtain valid force calibration for the weighing experiment, one has to ensure that the determined factor does not depend on the excitation frequency of the coil. A linearization of the control loop is established in order to reduce the harmonic distortion of the measurement signals. This work presents a method for reducing the frequency dependency caused by mechanical tilt oscillations and proposes a set-up to reduce the standard deviation of the determination of the Bl. © 2019 IMEKO TC4 International Symposium Electrical and Electronic measurements Promote Industry 4.0. All rights reserved.

关键词： Calibration

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Multi-component force measurement in micromachining

Multi-component force measurement in micromachining

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作者： Marangoni, Rafael R. Schleichert, Jan Rahneberg, Ilko Mastylo, Rostyslav Manske, Eberhard Fröhlich, Thomas Technische Universität Ilmenau Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PF 100 565 Ilmenau98684 Germany

An experimental setup for performing micro-scratching tasks and measuring the forces involved in the process is presented in this paper. The main component of the system is a multi-component force and torque sensor based on the principle of electromagnetic force compensation (EMFC). With this device it is possible to perform the micromachining process itself while simultaneously measuring the interaction forces between the tool tip and the test specimen. Experiments were performed with specimens of polished steel, silicon and glass. Planar micro-structures could be produced and tool point interaction forces in the order of some millinewtons were measured during the process. © 2017 Walter de Gruyter Berlin/Boston.

关键词： Micromachining

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