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20th IMEKO World Congress 2012

作者： Hilbrunner, F. Weis, H. Petzold, R. Fröhlich, T. Jäger, G. Sartorius Weighing Technology GmbH Göttingen Germany Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany

ISBN: (纸本)9781627481908

In this paper, a method for deriving significant parameters for the description of the dynamic behaviour of electromagnetic force compensated load-cells (EMC) from its impedance-frequency-response is presented. With these parameters, the dynamical behaviour of a load-cell can be depicted and classified near its main resonance frequency, or by going the inverse way the load-cell can be designed based on the favored parameters to fulfill the desired criteria concerning the dynamical behaviour. This method is based on the estimation of parameters describing the behaviour of electrodynamic speakers, called Thiele-Small-Parameters, which is state of the art for designing loudspeakers. It will be demonstrated that the controller design for the EMC load-cell can be based on the derived parameters.

关键词： Frequency response

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CALIBRATION OF A NOVEL SIX-DEGREE-OF-FREEDOM FORCE/TORQUE measurement SYSTEM

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International Journal of Modern Physics: Conference Series 2013年第24期ijmpcs卷

作者： JAN SCHLEICHERT ILKO RAHNEBERG THOMAS FRÖHLICH Institute of Process Measurement and Sensor Technology Department of Mechanical Engineering Ilmenau University of Technology P.O. Box 100565 98693 Ilmenau Germany

Multi-component force/torque transducers are used in a large field of scientific and industrial applications like robotics, biomechanics and even fluid mechanics. These sensors need to be calibrated for traceable measurements. As the calibration procedure determines the measurement uncertainty, it plays an important role in sensor development for reaching the required measurement specifications. For the application in local Lorentz Force Velocimetry (Ref. 1) a six degree of freedom force/torque sensor for measurement ranges of ± 0.2 N and ± 5 mNm was developed. This sensor can also be adapted to other applications that require multi-dimensional force/torque feedback in the μN- and μNm-range such as tactile dimensional measurements and micro-manipulation. This paper discusses the calibration and the evaluation of the properties of the calibration device and the calibration procedure of the sensor system. After a brief introduction of the sensor design and its working principle the calibration setup is described and the uncertainty contributions to the forces and torques are calculated. Then the calibration procedure is presented and the resulting output signals of the sensor are depicted. As a result of the calibration, the calibration matrix is given with a discussion of its major components.

关键词： Multi-component force/torque measurement 6-DoF calibration procedures sensor development

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Fiber coupled plane mirror heterodyne laser interferometer with two phase locked loop coupled He-Ne lasers

Fiber coupled plane mirror heterodyne laser interferometer w...

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16th International Conference on Mechatronics technology, ICMT 2012

作者： Sternkopf, Christian Wurmus, Jens Gerhardt, Uwe Manske, Eberhard Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Germany SIOS Meßtechnik GmbH Am Vogelherd 46 98693 Ilmenau Germany

ISBN: (纸本)9787900769428

This article presents the setup of a fiber coupled two frequency laser interferometer with a pair of two phase locked loop (PLL) coupled lasers for precision metrological measurement tasks. The laser system consists of two He-Ne laser tubes which are frequency offset coupled by a PLL control system. This laser source and the interferometer head are connected by two optical fibers, one fiber per laser. The interferometer head has the typical plane mirror Michelson configuration and a very compact design. First measurement results are shown.

关键词： Phase locked loops

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Challenges and limitations of nanomeasuring technology

Challenges and limitations of nanomeasuring technology

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IEEE Instrumentation and measurement technology Conference

作者： Gerd Jaeger Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Ilmenau Germany

The paper describes traceable nanometrology based on nanomeasuring machines. The high performance of the machines is explained with a metrological analysis. This analysis shows some of today's limits of nanomeasuring technology. The limits are based, for instance, on the metre definition, the influence of the refractive index of the air, the violation of the Abbe comparator principle and on the instability of the machines metrological frame. There are various coordinate measuring machines which are based on different working modes: scanning probe mode, mixed scanning mode and sample scanning mode. These modes are analyzed with respect to uncertainties of measurement. The wide applications of nanomeasuring machines is realized by means of integration of optical and tactile nanoprobes.

关键词： Interferometers Probes measurement by laser beam measurement uncertainty Uncertainty Optical interferometry Mirrors

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Lorentz Force Velocimetry for Poorly Conducting Fluids-Development and Validation of a Novel Flow Rate measurement Device

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Journal of Iron and Steel Research International 2012年第S2期19卷 613-616页

作者： WEGFRASS Andre RESAGK Christian DIETHOLD Christian FRHLICH Thomas WERNER Michael HALBEDEL Bernd THESS Andre Institute of Thermodynamics and Fluid Mechanics Department of Mechanical EngineeringIlmenau University of Technology Institute of Process Measurement and Sensor Technology Department of Mechanical EngineeringIlmenau University of Technology Institute of Inorganic-nonmetallic Materials Department of Mechanical EngineeringIlmenau University of Technology

The paper demonstrated the feasibility of Lorentz Force Velocimetry for flow rate measurements of weakly conducting electrolytes using experimental results on salt water flow exposed to a permanent magnet *** innovative flow measurement technique allows the non-contact determination of flow rates and relies on the interaction between a magnetic field and a moving conducting *** an electrically conducting fluid moves through the magnetic field a Lorentz force is generated and acts on the measurement *** present report provides an overview about the experimental setups and the first measurement results.

关键词： Lorentz force velocimetry flow measurement electrolytes non-contact measurement

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Lorentz Force Velocimetry for Poorly Conducting Fluids- Development and Validation of a Novel Flow Rate measurement Device

Lorentz Force Velocimetry for Poorly Conducting Fluids- Deve...

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第七届冶金与材料电磁过程国际会议（EPM2012）

作者： WEGFRASS Andre RESAGK Christian DIETHOLD Christian FROHLICH Thomas WERNER Michael HALBEDEL Bernd THESS Andre Institute of Thermodynamics and Fluid Mechanics Department of Mechanical EngineeringIlmenau University of Technology Institute of Process Measurement and Sensor Technology Department of Mechanical EngineeringIlmenau University of Technology Institute of Inorganic-nonmetallic Materials Department of Mechanical EngineeringIlmenau University of Technology

The paper demonstrated the feasibihty of Lorentz Force Velocimetry for flow rate measurements of weakly conducting electrolytes using experimental results on salt water flow exposed to a permanent magnet *** innovative flow measurement technique allows the non-contact determination of flow rates and relies on the interaction between a magnetic field and a moving conducting *** an electrically conducting fluid moves through the magnetic field a Lorentz force is generated and acts on the measurement *** present report provides an overview about the experimental setups and the first measurement results.

关键词： Lorentz force velocimetry flow measurement electrolytes non-contact measurement

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Surface and coordinate measurements with nanomeasuring machines

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International Journal of Nanomanufacturing 2012年第5-6期8卷 467-483页

作者： Hausotte, Tino Balzer, Felix-Gerhard Vorbringer-Dorozhovets, Nataliya Manske, Eberhard Manufacturing Metrology University Erlangen-Nuremberg Naegelsbachstrasse 25 D-91052 Erlangen Germany Institute of Process Measurement and Sensor Technology Ilmenau University of Technology P.O. Box 100 565 D-98684 Ilmenau Germany

The nanomeasuring machine (NMM-1) was designed for surface and coordinate measurements within a measurement volume of 25 mm × 25 mm × 5 mm. The machine is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. Various measurement tasks are possible depending on the probe system installed. Most of the sensors utilised are one-dimensional tactile or optical surface sensors or probes. In recent years, measurements of three-dimensional features and sidewalls are becoming more important. For these more complex measurements, probe systems with two or three directions of sensitivity are necessary and were therefore integrated into the NMM-1. The article gives an overview of the operation and properties of the NMM-1, its use for surface and coordinate measurements, of integrated probe systems and of two probing systems developed. Copyright © 2013 Inderscience Enterprises Ltd.

关键词： Interferometers

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Analysis of the cosine error in measurements using the nanopositioning and nanomeasuring machine

Analysis of the cosine error in measurements using the nanop...

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26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011

作者： Kreutzer, Philipp Füßl, Roland Manske, Eberhard University of Technology Ilmenau Institute of Process Measurement and Sensor Technology P.O: Box 100 565 D-98684 Ilmenau Germany

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Active probe control of a metrological Atomic Force Microscopy

Active probe control of a metrological Atomic Force Microsco...

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作者： Shen, J.C. Dorozhovets, N. Hausotte, T. Manske, E. Jywe, W.Y. Liu, C.H. Department of Automation Engineering National Formosa University Huwei Yunlin 632 Taiwan Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Ilmenau Thuringia Germany Institute of Electro-Optical and Materials Science National Formosa University Huwei Yunlin 632 Taiwan

ISBN: (纸本)9783902661937

This article considers the force control of an active probe for Atomic Force Microscopy (AFM). Firstly, the structure of this active probe is described. For designing the force controller, the model of this active probe was identified. Based on the measured frequency response, two notch filters were used to remove the resonant peak in open-loop frequency response. Then, a PI controller was designed to regulate the force of the probe. This controller was then implemented in a Digital Signal processor (DSP). Experimental results were given to compare the actual performance of this controller with the conventional PI controller. It is shown that the controller with notch filters reduces the control error considerably and enables faster scan speed at weaker tip-sample interaction forces. © 2011 IFAC.

关键词： Frequency response

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Active Probe Control of a Metrological Atomic Force Microscopy

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IFAC Proceedings Volumes 2011年第1期44卷 3533-3538页

作者： J.C. Shen N. Dorozhovets T. Hausotte E. Manske W.Y. Jywe C.H. Liu Department of Automation Engineering National Formosa University Huwei Yunlin 632 Taiwan Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Ilmenau Thuringia Germany Institute of Electro-Optical and Materials Science National Formosa University Huwei Yunlin 632 Taiwan

Abstract This article considers the force control of an active probe for Atomic Force Microscopy (AFM). Firstly, the structure of this active probe is described. For designing the force controller, the model of this active probe was identified. Based on the measured frequency response, two notch filters were used to remove the resonant peak in open-loop frequency response. Then, a PI controller was designed to regulate the force of the probe. This controller was then implemented in a Digital Signal processor (DSP). Experimental results were given to compare the actual performance of this controller with the conventional PI controller. It is shown that the controller with notch filters reduces the control error considerably and enables faster scan speed at weaker tip-sample interaction forces.

关键词： Atomic force microscope Force control PI controller Notch filters

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