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Annual International Conference of the IEEE engineering in Medicine and Biology Society (EMBC)

作者： Wei-Yi Feng Nan-Fu Chiu Hui-Hsin Lu Hsueh-Ching Shih Dongfang Yang Chii-Wann Lin Institute of Biomedical Engineering National Taiwan University Taiwan Institute of Electrical Engineering National Taiwan University Taiwan Center for Measurement Standards Industrial Technology and Research Institute Hsinchu Taiwan Intergrated Manufacturing National Research Council Technologies Institute London Canada Medical Micro Sensor and System Laboratory Institute of Biomedical Engineering National Taiwan University Taipei Taiwan

In this study, the design of a novel optical sensor that comprises surface plasmon resonance sensing chip and zinc oxide nano-film was proposed for the detection of nitric oxide gas. The electrical and optical properties of zinc oxide film vary in the presence of nitric oxide. This effect was utilized to prepare biochemical sensors with transduction based on surface plasmon resonance. Due to the refractive index of the transparent zinc oxide film that was deposited on the gold film, however, changes will be observed in the surface plasmon resonance spectra. For this reason, the thickness of zinc oxide film will be investigated and determined in this study. The interaction of nitric oxide with a 20 nm zinc oxide layer on gold leads to the shift of the resonance angle. The analysis on the reflectance intensity of light demonstrates that such effect is caused by the variation of conductivity and permittivity of zinc oxide film. Finally, a shift in surface plasmon resonance angle was measured in 25 ppm nitric oxide at 180C and a calibration curve of nitride oxide concentration versus response intensity was successfully obtained in the range of 250 to 1000 ppm nitric oxide at lower temperature of 150C. Moreover, these effects are quasi-reversible.

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Stress effect on optical nonlinear waveguide sensor

Stress effect on optical nonlinear waveguide sensor

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作者： El-Khozondar, H.J. El-Khozondar, R.J. Shabat, M.M. Koch, A.W. Islamic University Department of Electrical and Electronics Engineering Palestinian Authority P.O.Box 108 Gaza Strip Al-Aqsa University Physics Department Palestinian Authority Gaza Gaza Strip Islamic University Physics Department Palestinian Authority P.O.Box 108 Gaza Strip Technische Universität München Institute for Measurement Systems and Sensor Technology D-80290 München Germany Max Planck Institute for the Physics of Complex Systems Nöthnitzer Straße 38 01187 Dresden Germany

It has been observed in photoelectric devices that stresses and strains can cause inhomogeneous distribution of the refractive index which affects their performance. The purpose of this paper is to study the stress effect on the behavior of optical waveguide sensor containing a dielectric film sandwiched between a linear substrate and a nonlinear cladding. The cladding refractive index profile is assumed to have Kerr like intensity dependence. The effective refractive indices and mode shapes of the optical waveguide sensor subject to different stress states are calculated analytically. The effect of such variation on the light intensity and implications on the sensor sensitivity are investigated. It is found that stress can affect the optical sensitivity performance.

关键词： Optical sensors

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Nanometrology - Nanopositioning- and nanomeasuring machine with integrated nanoprobes

Nanometrology - Nanopositioning- and nanomeasuring machine w...

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2005 International Conference on Advanced Manufacture, ICAM2005

作者： Jäger, G. Hausotte, T. Manske, E. Büchner, H.-J. Mastylo, R. Dorozhovets, N. Füßl, R. Grünwald, R. Technische Universität Ilmenau Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PO Box 100 565 98684 Ilmenau Germany

ISBN: (纸本)0878499903

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm × 25 mm × 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

关键词： Nanoprobes

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Plane mirror interferometer for precision length measurements 5

Plane mirror interferometer for precision length measurement...

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5th International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2005

作者： Büchner, Hans-Joachim Jäger, Gerd Technische Universität Ilmenau Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology P.O. Box 100565 Ilmenau98684 Germany

In the present paper, an interferometer is presented which - in contrast to all other types of interferometers - contains only plane mirrors used as reflectors. The interference beam passes through a diaphragm and is then divided again for generating the quadrature signals. During the measurement, the plane measuring mirror can tilt at an angle which depends on the diameter of the diaphragm without influencing the phase position of the quadrature signals. Measuring errors just as further characteristic features of the plane mirror interferometer are described.

关键词： Interferometers

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Friction modelling of a linear high-precision actuator

Friction modelling of a linear high-precision actuator

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作者： Zimmermann, J. Sawodny, O. Hausotte, T. Jäger, G. Institute for Automation and Systems Engineering Technische Universität Ilmenau P.O. Box 100 565 D-98684 Ilmenau Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau P.O. Box 100 565 D-98684 Ilmenau Germany

ISBN: (纸本)008045108X

For control applications aiming accurate positioning and path tracking friction modelling and compensation can be very important, especially when working with small displacements as usual in nano technologies. The paper at hand describes friction identification and friction model application for a linear high-precision ball bearing guide driven by a voice coil actuator and using high-resolution position measurement equipment. After noting some friction models the characteristics of friction on nanometer scale are investigated with several experiments. At last some remarks on control design are given. Copyright © 2005 IFAC.

关键词： Ball bearings

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FRICTION MODELLING OF A LINEAR HIGH-PRECISION ACTUATOR

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IFAC Proceedings Volumes 2005年第1期38卷 133-138页

作者： J. Zimmermann O. Sawodny T. Hausotte G. Jäger Technische Universität Ilmenau Institute for Automation and Systems Engineering P.O. Box 100 565 D-98684 Ilmenau Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 D-98684 Ilmenau Germany

关键词： friction models friction identification high resolution measuring

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A solid-phase epitaxy with clean surface formation using SiH4 and evaluation of SOI layer

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第12期79卷 71-78页

作者： Kodama, M Funabashi, H Mitsushima, Y Taga, Y Toyota Central R&D Laboratories Inc. Nagakute Aichi-ken Japan 480-11 Received his B.S. and M.S. degrees in electronics from Gifu University in 1985 and 1987 respectively. He joined Toyota Central R&D Laboratories in 1987 and has been working in the field of LST process technology. Received his B.S. degree in electrical engineering from Nagoya Institute of Technology in 1982. He joined Toyota Central R&D Laboratories in 1982 and has been working in the field of sensor technology. Received his B.S. and Ph.D. degrees in nuclear engineering from Nagoya University in 1975 and 1980 respectively. He joined Sanyo Electric Co. in 1980 and in 1991 he transferred to Toyota Central R&D Laboratories where he has been engaged in research on LSI process technology. Received his B.S. and M.S. degrees in measurement engineering from Nagoya Institute of Technology in 1968 and 1970 respectively. In 1970 he joined Toyota Central R&D Laboratories where he has been engaged in research on the surface interface physics and development of thin film material. He is presently a principal research fellow at the Toyota Central R&D Laboratories.

We investigated a method of solid-phase epitaxy (SPE) using low-vacuum, low-pressure chemical vapor deposition (LPCVD) equipment without the load lock chamber that is usually used for the Si LSI process. This is a new method of clean surface formation in which the Si substrate is heated after seed formation in an atmosphere of SiH4 gas. Using this method, an L-SPE length of 4 mu m was obtained. The reason for the success of this method appears to be that the seed surface cleaned by HF dipping is preserved by the SiH4 gas. To evaluate the quality of the silicon-on-insulator (SOI) layer formed by this method, a MOSFET and a PN diode were experimentally produced. The MOSFET exhibited normal transistor action, which confirmed that the SOI layer had satisfactory quality without any problem in manufacturing the MOSFET. However, it was found that the n value of the forward direction current characteristic of the PN diode was 1.156 and that the SOI layer had more recombination centers than the Si substrate (n = 1.050). (C) 1997 Scripta Technica, Inc.

关键词： SOI MOSFET LPCVD SPE

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Enzyme biosensor based on surface acoustic wave device

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第7期79卷 69-75页

作者： Kondoh, J Imayama, T Matsui, Y Shiokawa, S Faculty of Engineering Shizuoka University Hamamatsu Japan 432 Received his B.S. and Ph.D. degrees from Shizuoka University in 1990 and 1995 respectively. Since 1993 he has been a Research Fellow of the Japanese Academic Committee. He received the Awaya Award and Ando Memorial Award in 1994. He has been involved in research on chemical and bio-sensors using SAW devices. He is a member of the Acoustic Society the Japanese Society of Applied Physics and the IEEE. Received a B.S. from Shizuoka University in 1995. He joined Toshiba in the same year. He was involved in the research of SAW enzyme sensors. Graduated from Shizuoka Industrial College in 1968. He became a technical officer in Shizuoka University in 1966. He has been involved in the research and development of mechanical sensors ultrasonic actuators and surface plasma on sensors. He is a member of the Japanese Society of Measurement and Automation and Acoustic Society. Received her B.S. from Tohoku University in 1965 her M.S. from Tokyo Electric Communication University in 1968 and her Ph.D. from Tokyo Institute of Technology in 1971. She became a Research Associate in Tokyo Institute of Technology in 1971. She was a research fellow in Bordeaux University France in 1980 ∼ 1981. She became an Associate Professor and Professor of Shizuoka University in 1986 and 1991 respectively. She has been involved in the research of chattering phenomenon in relays holography observation of surface wave measurement of ultrasonic wave in liquid and surface plasmoc sensor. She is a member of the Japanese Society of Applied Physics the Acoustic Society the Japanese Electrical Society and the IEEE.

In a shear horizontal surface acoustic wave (SH-SAW) propagating through a piezoelectric crystal, shear wave and piezoelectric potential due to piezoelectric effect are combined. SH-SAW can be useful for chemical sensing in the liquid phase. When the load liquid and propagation surface are in contact, the change in the electrical property of the liquid can be detected due to the acoustoelectric interaction. This paper describes a new type of acoustoelectric biosensor with an enzyme membrane on the SH-SAW propagating plane for detecting pH change in liquid and reports that the SH-SAW enzyme sensor with urease is highly sensitive in detecting urea. In addition, this paper describes the detection limit, aging characteristic, and high sensitivity of the detector.

关键词： shear horizontal surface wave acoustoelectric interaction enzyme sensor urease high sensitivity

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miRNomics 2

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丛书名： Methods in Molecular Biology

1000年

作者： Jens Allmer Malik Yousef

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Proteogenomics 1

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丛书名： Methods in Molecular Biology

1000年

作者： Jens Allmer Abhishek Kumar

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