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Automated Nanomanipulation for Repairing Defects on Nanoimprint Lithography Masters

IEEE Transactions on Automation Science and engineering 2025年 22卷 14967-14975页

作者： Meng, Siyuan Jiang, Jiankang Wang, Fubo Zhu, Junhui Zhang, Qianjun Wang, Yong Dong, Wei Ru, Changhai Harbin Institute of Technology State Key Laboratory of Robotics and System Harbin 150000 China JITRI Micro-Nano Automation System and Equipment Technology Research Institute Jiangsu 21500 China Suzhou University of Science and Technology School of Electronic and Information Engineering Suzhou 215000 China

The fabrication of Nanoimprint Lithography (NIL) masters serves as the initial process in the manufacturing of devices such as silicon photonic chips using NIL. Repairing defects and modifying structures on an NIL master accurately is critical for NIL manufacturing. This study proposes an innovative scanning electron microscope (SEM)-based in-situ nanomanipulation technique to address the macro-micro-nano cross-scale nanopositioning issues necessary for repair functions. A macro/micro closed-loop control system was designed, which includes a frequency/voltage (f/u) proportional controller, a real-time direct inverse hysteresis compensation feedforward controller, a grating displacement sensor, and a cross-scale nanopositioning platform. The performance testing of the nano-manipulation approach resulted in a repair range of 22.18×20.92×10.06 mm³, meeting the repair requirements for most silicon photo chip NIL masters in terms of size. The system achieved a repair accuracy at 4.946 nm (X-axis), 4.663 nm (Y-axis), and 4.679 nm (Z-axis). As a demonstrate, the repair functionality testing confirmed the ability of the system to remove target structures such as cantilever beams and detach adhered particles from a master surface. © 2004-2012 IEEE.

关键词： cross-scale nanopositioning nanomanipulation NIL master repair piezoelectric actuation scanning electron microscope

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Relative Localizability and Localization for Multirobot systems

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IEEE Transactions on robotics 2025年 41卷 2931-2949页

作者： Chen, Liangming Liang, Chenyang Yuan, Shenghai Cao, Muqing Xie, Lihua Southern University of Science and Technology School of System Design and Intelligent Manufacturing Guangdong Provincial Key Laboratory of Fully Actuated System Control Theory and Technology Shenzhen518055 China Harbin Institute of Technology School of Mechanical Engineering and Automation Shenzhen518055 China Southern University of Science and Technology School of System Design and Intelligent Manufacturing Shenzhen518055 China Nanyang Technological University School of Electrical and Electronic Engineering 639798 Singapore Carnegie Mellon University Robotics Institute PittsburghPA15213 United States

Inter-robot relative positions are crucial for executing various multirobot missions, such as formation maneuvering and collaborative inspection. However, the current sensing technology usually provides part of relative position information, such as inter-robot distances, bearings and angles. This prompts the study of determining inter-robot relative positions, i.e., relative localization, from these partial measurements. Based on the existing results of static networks' localizability and mobile robots' relative localization, we propose a novel concept, relative localizability to describe whether a multirobot system is relatively localizable. Given each robot's self-displacement measurements and inter-robot partial measurements in d (d ≤ 4) sampling instants, we show that a multirobot system's relative localization can be achieved in a purely algebraic and distributed manner, in which the multirobot system is said to be d-step relatively localizable. To make the results more general, we consider that the multirobot system consists of landmarks, leaders, and followers, and that the inter-robot measurements can be distances, bearings or angles. When robots' coordinate frames have different orientations, we show that the given local measurements can be used to determine robots' relative positions and their coordinate frames' relative orientations simultaneously. Simulations and experiments of relative localization for ground robots are conducted to validate the obtained results. © 2004-2012 IEEE.

关键词： Multipurpose robots

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Mechanical Properties Inside Origami-Inspired Structures: An Overview

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Applied Mechanics Reviews 2025年第1期77卷 011001页

作者： Yan, Peng Huang, Hailin Meloni, Marco Li, Bing Cai, Jianguo Department of Mechanical Engineering and Automation Harbin Institute of Technology Shenzhen518052 China Harbin Institute of Technology Shenzhen518052 China Key Laboratory of C & PC Structures of Ministry of Education National Prestress Engineering Research Center Southeast University Nanjing211189 China State Key Laboratory of Robotics and System Harbin Institute of Technology Harbin150001 China Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics Harbin Institute of Technology Shenzhen518052 China Key University Laboratory of Mechanism Machine Theory and Intelligent Unmanned Systems of Guangdong Habin Institute of Technology Shenzhen518052 China

In recent decades, origami has transitioned from a traditional art form into a systematic field of scientific inquiry, characterized by attributes such as high foldability, lightweight frameworks, diverse deformation modes, and limited degrees-of-freedom. Despite the abundant literature on smart materials, actuation methods, design principles, and manufacturing techniques, comprehensive reviews focusing on the mechanical properties of origami-inspired structures are relatively rare and unsystematic. This review aims to fill this void by analyzing and summarizing the significant studies conducted on the mechanical properties of origami-inspired structures from 2013 to 2023. We begin with an overview that includes essential definitions of origami, classical origami patterns, and their associated tessellated or stacked structures. Following this, we delve into the principal dynamic modeling method for origami and conduct an in-depth analysis of the key mechanical properties of origami-inspired structures. These properties include tunable stiffness, bistability and multistability, metamechanical properties demonstrated by origami-based metamaterials, and bio-inspired mechanical properties. Finally, we conclude with a comprehensive summary that discusses the current challenges and future directions in the field of origami-inspired structures. Our review provides a thorough synthesis of both the mechanical properties and practical applications of origami-inspired structures, aiming to serve as a reference and stimulate further research. © 2025 American Society of Mechanical Engineers (ASME). All rights reserved.

关键词： Degrees of freedom (mechanics)

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Kirigami-inspired continuum soft arm with embedded sensing for non-destructive inspection and sorting

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Science China Materials 2025年第2期68卷 552-560页

作者： Jinsui Xu Boyi Xu Honghao Yue Yifan Lu Zheping Wang Zongquan Deng Fei Yang State Key Laboratory of Robotics and System School of Mechatronics EngineeringHarbin Institute of TechnologyHarbin 150001China Wu Xianming School of Intelligent Engineering South China University of TechnologyGuangzhou 510641China

The sensing capabilities of a soft arm are ofparamount importance to its overall performance as they allow precise control of the soft arm and enhance its interactionwith the surrounding environment. However, the actuationand sensing of a soft arm are not typically integrated into amonolithic structure, which would impede the arm’s movement and restrict its performance and application scope. Toaddress this limitation, this study proposes an innovativemethod for the integrated design of actuator structures andsensing. The proposed method combines the art of kirigamiwith soft robotics technology. In the proposed method, sensorsare embedded in the form of kirigami structures into actuatorsusing laser cutting technology, achieving seamless integrationwith a soft arm. Compared to the traditional amanogawakirigami and fractal-cut kirigami structures, the proposedmiddle-cut kirigami (MCK) structure does not buckle duringstretching and exhibits superior tensile performance. Based onthe MCK structure, an advanced interdigitated capacitivesensor with a high degree of linearity, which can significantlyoutperform traditional kirigami sensors, is developed. Theexperimental results validate the effectiveness of the proposedsoft arm design in actual logistics sorting tasks, demonstratingthat it is capable of accurately sorting objects based on sensorsignals. In addition, the results indicate that the developedcontinuum soft arm and its embedded kirigami sensors havegreat potential in the field of logistics automation *** work provides a promising solution for high-precisionclosed-loop feedback control and environmental interaction ofsoft arms.

关键词： kirigami embedded sensing continuous soft arm non-destructive inspection

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Augmented Reality Based Navigation system for Endoscopic Transnasal Optic Canal Decompression

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Journal of Shanghai Jiaotong university(Science) 2025年第1期30卷 34-42页

作者： FU Hang XU Jiangchang LI Yinwei ZHOU Huifang CHEN Xiaojun Institute of Biomedical Manufacturing and Life Quality Engineering State Key Laboratory System and VibrationSchool of Mechanical EngineeringShanghai Jiao Tong UniversityShanghai 200240China Department of Ophthalmology Shanghai Ninth People's HospitalShanghai Jiao Tong University School of MedicineShanghai 200011China Institute of Medical Robotics Shanghai Jiao Tong UniversityShanghai 200240China Shanghai Key Laboratory of Orbital Diseases and Ocular Oncology Shanghai 200011China

Endoscopic transnasal optic nerve decompression surgery plays a crucial role in minimal invasive treatment of complex traumatic optic ***,a major challenge faced during the procedure is the inability to visualize the optic nerve *** address this issue,an endoscopic image-based augmented reality surgical navigation system is developed in this *** system aims to virtually fuse the optic nerve onto the endoscopic images,assisting surgeons in determining the optic nerve’s position and reducing surgical ***,a calibration algorithm based on a checkerboard grid of immobile points is proposed,building upon existing calibration ***,to tackle accuracy issues associated with augmented reality technology,an optical navigation and visual fusion compensation algorithm is proposed to improve the intraoperative tracking *** evaluate the system’s performance,model experiments were meticulously designed and *** results confirm the accuracy and stability of the proposed system,with an average tracking error of(0.99±0.46)*** outcome demonstrates the effectiveness of the proposed algorithm in improving the augmented reality surgical navigation system’s ***,the system successfully displays hidden optic nerves and other deep tissues,thus showcasing the promising potential for future applications in orbital and maxillofacial surgery.

关键词： optic nerve decompression endoscopy augmented reality surgical navigation

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Semi-Autonomous Navigation Based on Local Semantic Map for Mobile Robot

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Journal of Shanghai Jiaotong university(Science) 2025年第1期30卷 27-33页

作者： ZHAO Yanfei XIAO Peng WANG Jingchuan GUO Rui Department of Automation Institute of Medical RoboticsShanghai Jiao Tong UniversityShanghai200240China State Key Laboratory of System Control and Information Processing Ministry of Education of ChinaShanghai200240China Shanghai Engineering Research Center of Intelligent Control and Management Shanghai200240China State Grid Intelligence Technology Co. Ltd.Jinan250013China

Mobile robots represented by smart wheelchairs can assist elderly people with mobility *** paper proposes a multi-mode semi-autonomous navigation system based on a local semantic map for mobile robots,which can assist users to implement accurate navigation(e.g.,docking)in the environment without prior *** order to overcome the problem of repeated oscillations during the docking of traditional local path planning algorithms,this paper adopts a mode-switching method and uses feedback control to perform docking when approaching semantic *** last,comparative experiments were carried out in the real *** show that our method is superior in terms of safety,comfort and docking accuracy.

关键词： semi-autonomous navigation mobile robot semantic map voice interaction

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FWAF-VID: A Flapping-Wing Aggressive Flight Benchmark Dataset for Visual-Inertial Localization

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IEEE robotics and Automation Letters 2025年第6期10卷 6328-6335页

作者： Jiang, Jizhou Pan, Erzhen Xu, Wenfu Sun, Wei Ye, Jingyang School of Robotics and Advanced Manufacture Harbin Institute of Technology Shenzhen China Guangdong Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics Shenzhen China Guangdong Biomimetic Intelligent Unmanned System Engineering Technology Research Center Shenzhen518052 China

Accurate state estimation of micro aerial vehicles (MAVs) in high-speed and dynamic environments poses a significant challenge for visual-inertial odometry (VIO) algorithms. Flapping-wing aerial vehicles (FWAVs), as an emerging flight platform, have attracted significant attention for stealth capabilities and efficient flight characteristics. Despite the availability of numerous MAV visual-inertial datasets for six-degree-of-freedom (6-DoF) state estimation, these datasets are not applicable for FWAVs with pronounced vibrations and agile maneuverability. To address this gap, we propose a large-scale flapping-wing aggressive flight visual-inertial dataset FWAF-VID. It contains diverse integrations of synchronized onboard cameras and IMU sensors. A total of 28 sequences include static flapping, calibration, and real-world flights collected in outdoor and indoor environments. The 17 flight sequences feature variations in illuminations, speeds, trajectories, camera perspectives, and flight modalities. We provide precisely aligned ground truth RTK and UWB measurements for algorithm evaluation. Furthermore, a comprehensive benchmark comparison is conducted, qualitatively and quantitatively evaluating the positioning accuracy of state-of-theart VIO algorithms. The experimental results indicate that despite the degradation in localization accuracy in high-dynamic environments, FWAF-VID can effectively support the further development of VIO algorithms for FWAVs. To the best of our knowledge, this is the first onboard benchmark dataset tailored for aggressive flight in flapping-wing airborne platforms. © 2016 IEEE.

关键词： Micro air vehicle (MAV)

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Study on wear mechanism of small ball-end grinding wheel and surface integrity of complex component under high-speed machining condition

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Wear 2025年

作者： Qin, Biao Liu, Henan Cheng, Jian Tian, Jinchuan Sun, Jiangang Chen, Mingjun School of Mechatronics Engineering Harbin Institute of Technology Heilongjiang Harbin150001 China State Key Laboratory of Robotics and System Harbin Institute of Technology Heilongjiang Harbin150001 China Zhengzhou Research Institute Harbin Institute of Technology Zhengzhou450000 China

The small ball-end fine diamond grinding wheel is well-suited for machining complex components with small curved surface structures, demonstrating high-precision and high-quality machining capabilities. By increasing the speed of the workpiece, the issue of poor grinding performance caused by the small diameter of the ball-end grinding wheel can be effectively overcome. However, this strategy inevitably increases wheel wear and affects surface integrity. To address these challenges, this paper systematically investigates the grinding characteristics of the small ball-end grinding wheel. First, grinding experiments were performed to investigate the influence of workpiece speed, feed rate, and grinding depth on the material removal rate, wheel wear, and surface integrity. Then, the wear mechanism of the grinding wheel was analyzed. The wear modes of the grinding wheel at high workpiece speeds include metal adhesive wear and abrasive grain fracture, which enhance the self-sharpening of the grinding wheel while accelerating its wear. Furthermore, the surface morphology creation mechanism of fused silica under different material removal modes was revealed. Moreover, the correlation between material removal rate and surface roughness caused by wheel wear was revealed. A high-speed grinding strategy was subsequently proposed based on the relationship between the grinding characteristics and grinding parameters of the small ball-end grinding wheel under various grinding conditions. Finally, the feasibility of this grinding strategy was validated through its application to the machining of the complex curved fused silica hemispherical resonator (HSR). Experimental results indicate that under the high workpiece speed condition, the best surface roughness of HSR decreases from 90.5 nm to 62.2 nm, while the maximum grinding wheel wear increases from 9.7 μm to 11.5 μm, with minimal impact on surface integrity. Therefore, the high-speed grinding strategy proposed in this study ho

关键词： Fused silica

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A Pilot Study on Fabric-based Pneumatic Soft Gloves for Assisting Patients with Severe Brachial Plexus Injury

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IEEE Transactions on Biomedical engineering 2025年 PP卷 PP页

作者： Feng, Miao Yang, Dezhi Sun, Jianing Lao, Jie Rui, Jing Gu, Guoying Shanghai Jiao Tong University Robotics Institute State Key Laboratory of Mechanical System and Vibration School of Mechanical Engineering Shanghai Key Laboratory of Intelligent Robotics Meta Robotics Institute Shanghai200240 China Southwest Technology and Engineering Research Institute Chongqing400039 China Fudan University Department of Hand Surgery Huashan Hospital China NHC Key Laboratory of Limbs Reconstruction Shanghai Key Laboratory of Peripheral Nerve and Microsurgery Shanghai200040 China

Objective: Robotic gloves show promise in hand assistance due to their wearability and home-based potential, yet empirical research remains limited. This pilot study presents a fabric-based pneumatic soft glove, aiming to identify its potential and challenges in clinical practice by evaluating its effectiveness in assisting patients with severe brachial plexus injury (BPI). Methods: The glove integrates a thumb abduction actuator and four bidirectional fabric-based pneumatic actuators (FPAs) with asymmetric chambers for high output force. Sixteen healthy volunteers and five individuals with BPI, all of whom lacked active hand and wrist movements, were recruited. Participants performed object grasping across 25 cm. The healthy group performed seven tasks using objects weighing up to 2 kg, with muscle activities recorded for analysis. The BPI group further performed tasks with eight objects from the action research arm test (ARAT) and twelve objects for activities of daily living (ADLs), encompassing various sizes, weights, and geometries. Results: In the healthy group, sEMG showed a decrease in 89.3% of trials, with 56.0% of these decreases being significant (p © 1964-2012 IEEE.

关键词： Pneumatic actuators

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Muscle Activation Estimation by Optimizing the Musculoskeletal Model for Personalized Strength and Conditioning Training

arXiv

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arXiv 2025年

作者： Wu, Xi Li, Chenzui Zou, Kehan Xi, Ning Chen, Fei Department of Mechanical and Automation Engineering T-Stone Robotics Institute The Chinese University of Hong Kong Hong Kong Department of Industrial and Manufacturing System Engineering The University of Hong Kong Hong Kong

Musculoskeletal models are pivotal in the domains of rehabilitation and resistance training to analyze muscle conditions. However, individual variability in musculoskeletal parameters and the immeasurability of some internal biomechanical variables pose significant obstacles to accurate personalized modelling. Furthermore, muscle activation estimation can be challenging due to the inherent redundancy of the musculoskeletal system, where multiple muscles drive a single joint. This study develops a whole-body musculoskeletal model for strength and conditioning training and calibrates relevant muscle parameters with an electromyography-based optimization method. By utilizing the personalized musculoskeletal model, muscle activation can be subsequently estimated to analyze the performance of exercises. Bench press and deadlift are chosen for experimental verification to affirm the efficacy of this approach. Copyright © 2025, The Authors. All rights reserved.

关键词： Electromyography

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