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Hydrogen iodide (HI) neutral beam etching characteristics of InGaN and GaN for micro-LED fabrication

Nanotechnology 2023年第36期34卷 365302-365302页

作者： Ohori, Daisuke Ishihara, Takahiro Wang, Xuelun Endo, Kazuhiko Hsieh, Tsou-Hwa Li, Yiming Natori, Nobuhiro Matsui, Kazuma Samukawa, Seiji Institute of Fluid Science Tohoku University 2-1-1 Katahira Aoba-ku Sendai980-8577 Japan Furo-cho Chikusa-ku Nagoya464-8601 Japan Institute of Materials and Systems for Sustainability Nagoya University Furo-cho Chikusa-ku Nagoya464-8601 Japan Institute of Communications Engineering College of Electrical and Computer Engineering National Yang Ming Chiao Tung University Hsinchu300093 Taiwan Department of Electronics and Electrical Engineering College of Electrical and Computer Engineering National Yang Ming Chiao Tung University Hsinchu300093 Taiwan Center for mmWave Smart Radar System and Technologies National Chiao Tung University Hsinchu300 Taiwan Advanced Institute for Materials Research Tohoku University 2-1-1 Katahira Aoba-ku Sendai980-8577 Japan Resonac Corporation 5-1 Ohgimachi Kawasaki-ku Kanagawa Kawasaki210-0867 Japan

We investigated the etching characteristics of hydrogen iodide (HI) neutral beam etching (NBE) of GaN and InGaN and compared with Cl2 NBE. We showed the advantages of HI NBE versus Cl2 NBE, namely: higher InGaN etch rate, better surface smoothness, and significantly reduced etching residues. Moreover, HI NBE was suppressed of yellow luminescence compared with Cl2 plasma. InCl x is a product of Cl2 NBE. It does not evaporate and remains on the surface as a residue, resulting in a low InGaN etching rate. We found that HI NBE has a higher reactivity with In resulting in InGaN etch rates up to 6.3 nm min−1, and low activation energy for InGaN of approximately 0.015 eV, and a thinner reaction layer than Cl2 NBE due to high volatility of In-I compounds. HI NBE resulted in smoother etching surface with a root mean square average (rms) of 2.9 nm of HI NBE than Cl2 NBE (rms: 4.3 nm) with controlled etching residue. Moreover, the defect generation was suppressed in HI NBE compared to Cl2 plasma, as indicated by lower yellow luminescence intensity increase after etching. Therefore, HI NBE is potentially useful for high throughput fabrication of μLEDs. © 2023 The Author(s). Published by IOP Publishing Ltd.

关键词： Etching

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Exploring diabetes through the lens of AI and computer vision: Methods and future prospects

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computers in Biology and Medicine 2025年 185卷 109537-109537页

作者： Chundi, Ramesh G., Sasikala Basivi, Praveen Kumar Tippana, Anitha Hulipalled, Vishwanath R. N., Prabakaran Simha, Jay B. Kim, Chang Woo Kakani, Vijay Pasupuleti, Visweswara Rao School of Computer Applications Dayananda Sagar University Bangalore India School of Computer Science and Applications REVA University Rukmini Knowledge Park Bangalore560064 India Pukyong National University Industry-University Cooperation Foundation Pukyong National University Busan48513 Korea Republic of Department of Biotechnology School of Applied Sciences REVA University Rukmini Knowledge Park Bangalore560064 India School of Computing and Information Technology REVA University Rukmini Knowledge Park Bangalore560064 India School of Computer Science and Engineering Vellore Institute of Technology Tamilnadu Vellore632014 India Abiba Systems CTO and RACE Labs REVA University Rukmini Knowledge Park Bangalore560064 India Department of Nanotechnology Engineering College of Engineering Pukyong National University Busan48513 Korea Republic of Integrated System Engineering Inha University 100 Inha-ro Nam-gu Incheon22212 Korea Republic of School of Biosciences Taylor's University Lakeside Campus Selangor Subang Jaya47500 Malaysia Faculty of Earth Sciences Universiti Malaysia Kelantan Campus Jeli Jeli Kelantan17600 Malaysia

Early diagnosis and timely initiation of treatment plans for diabetes are crucial for ensuring individuals’ well-being. Emerging technologies like artificial intelligence (AI) and computer vision are highly regarded for their ability to enhance the accessibility of large datasets for dynamic training and deliver efficient real-time intelligent technologies and predictable models. The application of AI and computer vision techniques to enhance the analysis of clinical data is referred to as eHealth solutions that employ advanced approaches to aid medical applications. This study examines several advancements and applications of machine learning, deep learning, and machine vision in global perception, with a focus on sustainability. This article discusses the significance of utilizing artificial intelligence and computer vision to detect diabetes, as it has the potential to significantly mitigate harm to human life. This paper provides several comments addressing challenges and recommendations for the use of this technology in the field of diabetes. This study explores the potential of employing Industry 4.0 technologies, including machine learning, deep learning, and computer vision robotics, as effective tools for effectively dealing with diabetes related aspects. © 2024 Elsevier Ltd

关键词： Artificial intelligence computer vision Diabetes Deep learning Machine learning

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Efficient Random Subspace Decision Forests with A Simple Probability Dimensionality Setting Scheme

SSRN

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SSRN 2022年

作者： Wang, Quan Wang, Fei Li, Zhongheng Jiang, Peilin Ren, Fuji Nie, Feiping Institute of Artificial Intelligence and Robotics Xi’an Jiaotong University Shaanxi Xi’an710049 China Beijing Key Laboratory of Intelligent Space Robotic Systems Technology and Applications Beijing Institute of Spacecraft System Engineering Beijing100094 China School of Software Engineering Xi’an Jiaotong University Shaanxi Xi’an710049 China School of Computer Science and Engineering University of Electronic Science and Technology of China Sichuan Chengdu611731 China Northwestern Polytechnical University Shaanxi Xi’an710072 China

The random subspace concept is widely used in decision forests. However, there is not a reasonable approach to specify the appropriate number of randomly selected features. Previous random subspace decision forests simply specify the random subspace dimensionality d s to a preset function value such as [log 2 d ] or [√ d ] where d is the number of the total feature dimensions. Actually, this preset value may be a relatively poor choice for high dimensional data sets. In this paper, a novel framework named Efficient Random Subspace decision forest (ERS) is proposed which pays attention to how to set the random subspace dimensionality for each decision tree of decision forests. Specifically, a simple discrete uniform distribution is employed to set with probability the number of randomly selected features for each tree in random subspace decision forests. The proposed Half Range Discrete Uniform distribution-based Varied Dimensionality setting (HRDUVD) method removes the hesitation of how to preset an appropriate d s for different data sets but also results in good enough classification performance along with relatively short running time. Plenty of experiments on public benchmark data sets have demonstrated the effectiveness and the efficiency of the proposed ERS. © 2022, The Authors. All rights reserved.

关键词： Decision trees

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Modeling and analysis of three properties of mobile interactive systems based on variable Petri nets

arXiv

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arXiv 2021年

作者： Yang, Ru Ding, Zhijun Jiang, Changjun Zhou, MengChu The Key Laboratory of Embedded System and Service Computing Ministry of Education Tongji University The Department of Computer Science and Technology Tongji University Shanghai201804 China The Institute of Systems Engineering Macau University of Science and Technology 999078 China The Department of Electrical and Computer Engineering New Jersey Institute of Technology NewarkNJ07102 United States

Due to the mobility and frequent disconnections, the correctness of mobile interaction systems, such as mobile robot systems and mobile payment systems, are often difficult to analyze. This paper introduces three critical properties of systems, called system connectivity, interaction soundness and data validity, and presents a related modeling and analysis method, based on a kind of Petri nets called VPN. For a given system, a model including component nets and interaction structure nets is constructed by using VPNs. The component net describes the internal process of each component, while the interaction structure net reflects the dynamic interaction between components. Based on this model, three properties are defined and analyzed. The case study of a practical mobile payment system shows the effectiveness of the proposed method. Copyright © 2021, The Authors. All rights reserved.

关键词： Petri nets

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PAM-4 Optical Transmission Beyond 224 Gbps Based on an Ultrahigh-Bandwidth Slow-light Silicon Modulator

PAM-4 Optical Transmission Beyond 224 Gbps Based on an Ultra...

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Conference on Lasers and Electro-Optics (CLEO)

作者： Changhao Han Jun Qin Qipeng Yang Zhao Zheng Haowen Shu Yunhao Zhang Yichen Wu Yu Sun Junde Lu Yan Zhou Zhangfeng Ge Lei Wang Zhixue He Shaohua Yu Weiwei Hu Chao Peng John E. Bowers Xingjun Wang State Key Laboratory of Advanced Optical Communications System and Networks School of Electronics Peking University Beijing China Department of Electrical and Computer Engineering University of California Santa Barbara CA US Key Laboratory of Information and Communication Systems Ministry of Information Industry Beijing Information Science and Technology University Beijing China Frontiers Science Center for Nano-optoelectronics Peking University Beijing China Peng Cheng Laboratory Shenzhen China Peking University Yangtze Delta Institute of Optoelectronics Nantong China

We experimentally demonstrate PAM-4 optical transmission beyond 224 Gbps based on an ultrahigh-bandwidth slow-light silicon modulator in C-band with the combination of the artificial neural network equalizers.

ISBN: (纸本)9798350369311

关键词： Equalizers C-band Optical computing Artificial neural networks Electro-optic modulators Optical fiber networks Silicon photonics Ultrafast optics Optical modulation Passband

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Scanning Acoustic Microscopy for Quantifying Two-phase Transfer in Operando Alkaline Water Electrolyzer

arXiv

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arXiv 2024年

作者： Dou, Zehua Rox, Hannes Ramos, Zyzi Baumann, Robert Ravishankar, Rachappa Czurratis, Peter Yang, Xuegeng Lasagni, Andrés Fabian Eckert, Kerstin Czarske, Juergen Weik, David Faculty of Electrical and Computer Engineering Laboratory of Measurement and Sensor System Technique Technische Universität Dresden Helmholtzstraße 18 Dresden01069 Germany Institute of Fluid Dynamics Helmholtz-Zentrum Dresden-Rossendorf Bautzner Landstraße 400 Dresden01328 Germany PVA TePla Analytical Systems GmbH Deutschordenstraße 38 Westhausen73463 Germany Institute of Manufacturing Science and Engineering Technische Universität Dresden George-Baehr-Straße 3c Dresden01069 Germany Fraunhofer Institute for Material and Beam Technology IWS Winterbergstraße 28 Dresden01277 Germany Institute of Process Engineering and Environmental Technology Technische Universität Dresden Helmholtzstraße 14 Dresden01069 Germany Hydrogen Lab School of Engineering Technische Universität Dresden Helmholtzstraße 14 Dresden01062 Germany Institute for Emerging Electronic Technologies Leibniz Institute for Solid State and Materials Research Dresden Helmholtzstraße 20 Dresden01069 Germany

Improved understandings of two-phase transport in electrochemical gas-evolving systems are increasingly demanded, while high-performance imaging techniques using simplified instrumentations are not readily available. This work presents volumetric scanning acoustic microscopy (SAM) imaging for quantifying the dynamics of gas bubbles and electrolyte in porous Nickel electrodes with different wettability and structures during alkaline water electrolysis (AWE). We realize high-resolution 3D imaging at 10's µm level using high frequency spherically focused ultrasound. The high resolution allowed us to clearly visualize the spatial distributions of produced bubbles in the porous electrodes over time. Moreover, we are able to quantify the residual gas volume in an electrode and its coverage due to bubble evolution, which dominate its transport overpotential. Taking these advantages, we elucidate the impacts of electrodes' wettability and structures on their electrolysis performance, on a regular laboratory base. The obtained knowledge provides us important optimization guidelines of AWE designs and operating schemes. Copyright © 2024, The Authors. All rights reserved.

关键词： Mass transfer

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Characterizing environmental pollution with civil complaints and social media data: A case of the Greater Taipei Area

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Journal of Environmental Management 2023年 348卷 119310页

作者： Guo, Mengdi Lin, Yu Shyu, Rong-Juin Huang, Jianxiang School of Architecture Tianjin University No. 92 Weijin Road Nankai District Tianjin China School of Data Science City University of Hong Kong 16-201 16/F Lau Ming Wai Academic Building 83 Tat Chee Avenue Hong Kong SAR China Department of System Engineering and Naval Architecture National Taiwan Ocean University Keelung Taiwan Department of Urban Planning and Design Faculty of Architecture the University of Hong Kong Pok Fu Lam Rd Hong Kong SAR China The University of Hong Kong Shenzhen Institute of Research and Innovation 5/F Key Laboratory Platform Building Shenzhen Virtual University Park No.6 Yuexing 2nd Rd Nanshan Shenzhen China Urban Systems Institute The University of Hong Kong Pokfulam Road Hong Kong Special Administrative Region of China China

Environmental pollution is a major cause of nuisance and ill health among urban residents. Complaints are traditionally self-reported through phone-based systems. Social media provide novel channels to detect pollution-related incidents;however, their reliability has not been sufficiently evaluated. This study aimed to compare pollution incidents expressed on Twitter with those extracted from phone-based systems and to identify the built environment and socioeconomic attributes that can predict the likelihood of pollution incidents. A total of 639,746 tweets were retrieved from the Greater Taipei Area in 2017 and 110,716 self-reported pollution incidents were extracted from the Public Nuisance Petition system during the same period. The results suggest that complaints collected from phone-based systems and Twitter were found to have correlated with each other spatially, albeit they differ in temporal profiles and by the proportion of pollution categories. Catering businesses and the entertainment activities they attract appear to be the main sources of pollution complaints and can be precisely captured by geotagged tweets. This can serve as a strong predictor for pollution incidents, more than traditional indicators such as population density or industrial activities, as suggested by earlier studies. Social media analytics, with their ability to monitor and analyze online discussions in a timely manner, can be a valuable supplement to existing phone-based pollution monitoring procedures. The methodologies developed in this study have the potential to support the proactive management of urban environmental pollution, in which resources can be prioritized in key areas to further enhance the quality of urban services. © 2023 Elsevier Ltd

关键词： Machine learning

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Pre-Chirper Free Nonlinear Fiber Amplifier Generating Tunable Picosecond Pulses for Coherent Anti-Stokes Raman Imaging

Pre-Chirper Free Nonlinear Fiber Amplifier Generating Tunabl...

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Pacific Rim Conference on Lasers and Electro-Optics (CLEO/Pacific Rim)

作者： Jiaying Li Jiamei Wu Kangwen Yang Qiang Hao Minbiao Ji Ming Yan Kun Huang Heping Zeng Shanghai Key Laboratory of Modern Optical System and Engineering Research Center of Optical Instrument and System Ministry of Education School of Optical Electrical and Computer Engineering University of Shanghai for Science and Technology Shanghai China State Key Laboratory of Surface Physics and Department of Physics Human Phenome Institute Multiscale Research Institute of Complex Systems Academy for Engineering and Technology Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education) Fudan University Shanghai China State Key Laboratory of Precision Spectroscopy East China Normal University Shanghai China Chongqing Institute of East China Normal University Chongqing China Jinan Institute of Quantum Technology Jinan China

A pre-chirper free, core-pumped nonlinear fiber amplifier was demonstrated to generate parabolic pulse with spectral bandwidth of 53 nm, these pulses were filtered and passively synchronized for conducting coherent an...

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Blockchain based Public Auditing Outsourcing for Cloud Storage

Blockchain based Public Auditing Outsourcing for Cloud Stora...

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International Conference on Parallel and Distributed systems (ICPADS)

作者： Yangfei Lin Jie Li Shigetomo Kimura Yongbing Zhang Yusheng Ji Yang Yang Graduate School of Systems and Information Engineering University of Tsukuba Tsukuba Ibaraki Japan Shanghai Jiao Tong University Shanghai China Faculty of Engineering Information and Systems University of Tsukuba Tsukuba Ibaraki Japan Information Systems Architecture Research Division National Institute of Informatics Tokyo Japan School of Mathematics and Computer Science Fuzhou University Fuzhou China

ISBN: (纸本)9781665408790

Cloud storage services offer flexible, convenient solutions for business and personal users to store data. Traditionally, Third Party Auditors (TPAs) are introduced to ensure data integrity for public auditing. However, TPAs may also be untrusted for forging the auditing results or colluding with cloud storage servers to deceive users. In this paper, we propose a novel Blockchain-based Public Auditing Outsourcing system without TPAs (BPAO), in which the computationally expensive operations in public auditing are outsourced through blockchain to the cloud servers without risking users' privacy. Our security analysis indicates that BPAO achieves soundness and robustness. The experimental results show that BPAO is computationally efficient for cloud storage user.

关键词： Cloud computing Privacy Data integrity Conferences Smart contracts Robustness Outsourcing

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Digital engineering school on the way to digital production 1

Digital engineering school on the way to digital production

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1st International Scientific Conference on Advances in Science, engineering and Digital Education, ASEDU 2020

作者： Kovshov, E.E. Lesin, S.M. Kuvshinnikov, V.S. JSC "Research and Development Institute of Construction Technology - tomstroy" Scientific Engineering and Educational Laboratory of Digital Computer Systems and Automation Moscow Russia Moscow City University Laboratory of Research of Educational Policy of Department of the Strategic Growth Institute of System Projects Laboratory of Professional Development in Education Moscow Russia

Identifies approaches for improving and enhancing the quality of pre, basic, and additional school' engineering education according to key paradigm "Industry 4.0" based on the development and wide application of information and communication technology with opportunities in research areas of Industrial Informatics. As an example of implementation, innovative research and educational project of the Digital engineering school is considered, including designed for the practical implementation of continuous engineering education "School-University-Enterprise". The main objectives of the project "Digital engineering school" are formulated and disclosed, the approach to teaching programming in high-level languages using microcontrollers and microprocessor technology is highlighted, practical recommendations are given for its implementation in the structure of school education for both students and teachers. © 2020 institute of Physics Publishing. All rights reserved.

关键词： engineering education

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