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advanced Patterning Solutions (IWAPS), International Workshop on

作者： Yuguang Chen Sikun Li Jianfang He Libin Zhang Weijie Shi Ming Tang Yayi Wei Xiangzhao Wang Laboratory of Information Optics and Opto-Electronic Technology Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Science Shanghai China School of Optical and Electronic Information Huazhong University of Science and Technology Wuhan China Laboratory of Information Optics and Opto-Electronic Technology Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China Integrated Circuit Advanced Process R&D Center Institute of Microelectronics Chinese Academy of Sciences Beijing China Dongfang Jingyuan Electron Limited Beijing China Wuhan National Laboratory for Optoelectronics (WNLO) & National Engineering Laboratory for Next Generation Internet Access System School of Optical and Electronic Information Huazhong University of Science and Technology Wuhan China Laboratory of Information Optics and Opto-Electronic Technology Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

ISBN: (纸本)9781665420808

A scanner matching method based on interior-point BFGS algorithm is proposed. This method minimizes the critical dimension (CD) differences by optimizing parameters of illumination sources, including inner partial coherence factor, outer partial coherence factor, numerical aperture and opening angle of illumination poles for dipole and quadrupole sources. Simulations of scanner matching are performed. Scanners with annular, dipole and quadrupole sources are matched in the simulations. Through-pitch Line/space patterns are used as the matching targets. The results of these simulations show that, the proposed method can reduce root-mean-square of CD differences after matching. In the majority of the simulation cases, the proposed method is faster than methods based on the Levenberg-Marquardt algorithm, and could even achieve better result. Analyses on the proposed method are given.

关键词： Simulation Lighting Optimization methods Coherence Stability analysis Numerical models Pattern matching

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Novel Insulator Isolated Si NW Sensors Fabricated using Bulk Substrate with Low-cost and High-quality

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Journal of Physics: Conference Series 2020年第1期1622卷

作者： Qingzhu Zhang Ruonan Liu Hailing Tu Siqi Tang Jiang Yan Bo Li Jing Zhang Zhaohao Zhang Qianhui Wei Huaxiang Yin Integrated Circuit Advanced Process Center (ICAC) Institute of Microelectronics CAS Beijing 100029 China State key Laboratory of Advanced Materials for Smart Sensing GRINM Group Co. Ltd. Beijing 100088 China GRIMAT Engineering Institute Co. Ltd. Beijing 101402 China Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics CAS Beijing 100029 China High-Tech Innovation Institute North China University of Technology Beijing 100144 China University of Chinese Academy of Sciences 100049 Beijing China

In this paper, insulator isolated Si NW array were fabricated using self-allied spacer image transfer (SIT), multi-step time division multiplexing (TDM) etching and linear oxidation processes. The insulator isolated Si NWs owe a pentagonal shape, well single crystal morphology and high nanowire quality. The fabricated Si NW array were used to fabricate insulator isolated Si NW sensors. The low-cost insulator isolated Si NW sensor fabricated from bulk silicon substrates exhibits a linearly variation of current response to the laser at this wavelength, exhibiting good repeatability and the prospect of replacing SOI materials. The proposed approach of Si NW materials and sensors fabrication realizes the high efficiency, low cost and small fluctuation of Si NW pattern and device preparation, overcoming the problems of low efficiency for e-beam lithography and the difficulty of large-scale array formation.

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Feasibility temperature effect study of ABS-fused filament fabrication (FFF) extrusion process using desktop filament extruder machine on tensile and impact properties

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AIP Conference Proceedings 2024年第1期2991卷

作者： M. R. A. Alias K. Kamarudin Aziq Fikri Mohd Razi I. Raman Noor Hasliza Kamarudin A. Ahmad Norrizal Mustaffa Innovative Manufacturing Technology Focus Group (IMT) Faculty of Engineering Technology Universiti Tun Hussein Onn Malaysia 84600 Pagoh Johor Malaysia Department of Mechanical Politeknik Merlimau 77300 Merlimau Melaka Malaysia Integrated Material and Process Advanced Manufacturing and Material Center (AMMC) Institute for Integrated Engineering (I2E) Universiti Tun Hussein Onn Malaysia 86400 Batu Pahat Johor Malaysia Faculty of Engineering Technology Universiti Tun Hussein Onn Malaysia 84600 Pagoh Johor Malaysia

Acrylonitrile Butadiene Styrene (ABS) is a tough, long-lasting substance which have high tolerance toward high-temperature that are suitable for filament fabrication. ABS is known to be perfect for 3D printing due to low melting point and facile to utilize. In this work, the temperature processing parameter (220 to 270°C) of ABS (from China) filaments for Fused Filament Fabrication (FFF) by using the Desktop Filament Extruder machine was studied. The printed specimens were fabricated according to ASTM standards for tensile test (D638) and Izod impact test (D256). From the findings, the filament of 3D printers were successfully fabricated at temperatures of 220 °C, 230 °C, and 240 °C. The sample were tested on mechanical characteristics, given tensile strength, elastic modulus, impact strength and impact energy of 40.146 MPa, 1691.12 MPa, 11.01 kJ/m2, and 1.84 J, respectively. The findings indicate that the strongest filament are the one that produce at extrusion temperature of 220 °C. For the better understanding in future research, this paper concluded proof of the variety of ABS pellets can be designated as an extruded filament fabrication.

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Fabrication and characterization of modified ZnO-kapok fiber for separating surfactant-free oil-in-water emulsions

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AIP Conference Proceedings 2024年第1期2925卷

作者： M. Adam Bukhori Hamidon R. Hussin Z. Harun M. Z. Yunos A. R. Ainuddin Department of Mechanical Engineering Technology Faculty of Engineering Technology Universiti Tun Hussein Onn Malaysia Pagoh Higher Education Hub 84600 Muar Malaysia Integrated Material and Process Advanced Manufacturing & Materials Centre Faculty of Mechanical and Manufacturing Engineering Universiti Tun Hussein Onn Malaysia Parit Raja 86400 Malaysia Nano Structure and Surface Modification (NanoSurf) Faculty of Mechanical and Manufacturing Engineering Universiti Tun Hussein Onn 86400 Malaysia

Natural sorbents have several benefits, including high sorption capacity, superior biodegradability, and low cost. Kapok is one of the natural fibers that can be used as absorbent material. These distinctive qualities give kapok fibers greater oil sorption capacity than other oil sorbents currently on the market. However, it is difficult to hold oil properly due to its waxy coating and smooth fiber surface. Thus, in this study, the rough surface fiber has been coated using ZnO via the hydrothermal method. Considering that ZnO is instinctually hydrophilic, this modification of the fiber compounds increases the adsorption of oil in fiber. The surface morphology interaction has been proven with an experiment using a scanning electron microscope (SEM) for morphology investigation, Fourier-transform infrared spectroscopy (FTIR) for identifying organic or inorganic materials, and physical interaction (contact angle analysis). The results obtained display a significant difference between modified kapok fiber with ZnO and raw kapok fiber. The FTIR analysis shows that the modified kapok exhibits the peak’s level of intensity at 3268.88 cm−1 (stretching vibration peak of surface –OH decreases obviously as compared with that of raw kapok fiber, an absorption peak (symmetric stretching vibration of Zn–O–Zn) is observed at 652.28 cm−1. These results suggested that the whole sum of –OH was diminished, and hydrophobic ZnO nanoparticles were developed on the kapok fiber’s surface. A surface morphology analysis using SEM shows that ZnO particles are present on the kapok fiber surface while comparing it to the raw kapok. Modified kapok shows a higher contact angle (138°) compared to raw kapok (125.5°). This can conclude that the kapok fiber modification was successfully achieved using the hydrothermal method.

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ZnO/TiO2 thin films for photocatalytic application

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AIP Conference Proceedings 2019年第1期2068卷

作者： Rosniza Hussin Go Hock Seng Nur Syahraain Zulkiflee Zawati Harun Mohamed Nasrul Mohamed Hatta Muhamad Zaini Yunos 1Department of Mechanical Engineering Technology Faculty of Engineering Technology Universiti Tun Hussein Onn Malaysia Pagoh Johor Malaysia 3Integrated Material and Process Advanced Manufacturing & Materials Centre Faculty of Mechanical and Manufacturing Engineering Universiti Tun Hussein Onn Malaysia Parit Raja 86400 Batu Pahat Johor Malaysia 2Faculty of Mechanical and Manufacturing Engineering Universiti Tun Hussein Onn Malaysia Parit Raja Batu Pahat Johor Malaysia

ZnO/TiO2 thin films have some advantages such as can enhance the surface state and surface atomic mobility which are useful for improving the photocatalytic activity. The motivation to used double layer of ZnO and TiO2 is to enhance photocatalytic activity using the different deposition temperature between the layer. The structural properties and photocatalytic activity of ZnO/TiO2 thin films with calcination temperature as parameter were studied. It is found that ZnO (600 °C)/TiO2 (500 °C) thin film consists of ZnO with zincite structure and TiO2 with anatase structure while the other ZnO/TiO2 thin films only exhibit TiO2 with anatase structure. The X-Ray Diffraction (XRD) patterns become more intense and sharper when the calcination temperature increases. Field Emission Scanning Electron Microscope (FESEM) was used to determine the surface morphology of ZnO/TiO2 thin films. The results showed that surface morphology of ZnO/TiO2 thin film becomes rougher but homogeneous. Size of particles also becomes smaller when the calcination temperature increases. The photocatalytic activity of ZnO/TiO2 thin films was analyzed using photodegradation of methylene blue (MB) solution. A higher calcination temperature of ZnO buffer layer leads to enhance the degradation efficiency of MB dye using ZnO/TiO2 thin films as photocatalysts. It is proposed that the ZnO/TiO2 thin film with higher calcination temperature can be an efficient photocatalyst under UV irradiation.

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Erratum: “Spin wave propagation in a ferrimagnetic thin film with perpendicular magnetic anisotropy” [Appl. Phys. Lett. 117, 232407 (2020)]

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Applied Physics Letters 2021年第2期118卷

作者： Lutong Sheng Yawen Liu Jilei Chen Hanchen Wang Jianyu Zhang Mingfeng Chen Ji Ma Chuanpu Liu Sa Tu Ce-Wen Nan Haiming Yu 1Fert Beijing Institute School of Integrated Circuit Science and Engineering Beijing Advanced Innovation Center for Big Data and Brain Computing Beihang University Beijing 100191 China 2Department of Physics and Astronomy University of California Riverside California 92521 USA 3State Key Lab of New Ceramics and Fine Processing School of Materials Science and Engineering Tsinghua University Beijing 100084 China

In the original article,1 the line spectrum in Fig. 2(b) is missing. The correct Fig. 2(b), given here, shows how we get the frequency difference from this spec

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Metals by micro-scale additive manufacturing: Comparison of microstructure and mechanical properties

arXiv

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arXiv 2019年

作者： Reiser, Alain Koch, Lukas Dunn, Kathleen A. Matsuura, Toshiki Iwata, Futoshi Fogel, Ofer Kotler, Zvi Zhou, Nanjia Charipar, Kristin Piqué, Alberto Rohner, Patrik Poulikakos, Dimos Lee, Sanghyeon Seol, Seung K. Utke, Ivo Van Nisselroy, Cathelijn Zambelli, Tomaso Wheeler, Jeffrey M. Spolenak, Ralph Laboratory for Nanometallurgy Department of Materials ETH Zurich Vladimir-Prelog-Weg 1-5/10 Zürich8093 Switzerland College of Nanoscale Science & Engineering SUNY Polytechnic Institute 257 Fuller Road AlbanyNY12203 United States Graduate School of Integrated Science and Technology Shizuoka University Johoku Naka-ku Hamamatsu432-8561 Japan Additive Manufacturing Laboratory Orbotech Ltd. P.O. Box 215 Yavne81101 Israel Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University 18 Shilongshan Road Hangzhou Zhejiang Province310024 China Institute of Advanced Technology Westlake Institute for Advanced Study 18 Shilongshan Road Hangzhou Zhejiang Province310024 China Naval Research Laboratory Materials Science and Technology Division 4555 Overlook Ave. SW WashingtonDC20375 United States Laboratory of Thermodynamics in Emerging Technologies Department of Mechanical and Process Engineering ETH Zurich Sonneggstr. 3 Zürich8092 Switzerland Changwon-Si Gyeongsangnam-do51543 Korea Republic of Changwon-Si Gyeongsangnam-do51543 Korea Republic of Laboratory of Mechanics for Materials and Nanostructures Empa Feuerwerkerstrasse 39 Thun3602 Switzerland Laboratory of Biosensors and Bioelectronics Department of Information Technology and Electrical Engineering ETH Zurich Gloriastrasse 35 Zürich8092 Switzerland

Many emerging applications in microscale engineering rely on the fabrication of three-dimensional architectures in inorganic materials. Small-scale additive manufacturing (AM) aspires to provide flexible and facile access to these geometries. Yet, the synthesis of device-grade inorganic materials is still a key challenge towards the implementation of AM in microfabrication. Here, we present a comprehensive overview of the microstructural and mechanical properties of metals fabricated by most state-of-the-art AM methods that offer a spatial resolution ≤10 μm. Standardized sets of samples were studied by cross-sectional electron microscopy, nanoindentation and microcompression. We show that current microscale AM techniques synthesize metals with a wide range of microstructures and elastic and plastic properties, including materials of dense and crystalline microstructure with excellent mechanical properties that compare well to those of thin-film nanocrystalline materials. The large variation in materials performance can be related to the individual microstructure, which in turn is coupled to the various physico-chemical principles exploited by the different printing methods. The study provides practical guidelines for users of small-scale additive methods and establishes a baseline for the future optimization of the properties of printed metallic objects - a significant step towards the potential establishment of AM techniques in microfabrication. Copyright © 2019, The Authors. All rights reserved.

关键词： 3D printers

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Deposition of ZnO-Al (AZO) thin films for optical properties

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AIP Conference Proceedings 2021年第1期2339卷

作者： R. Hussin S. Z. S. Anuar S. A. Ibharim Z. Kamdi A. R. Ainuddin Z. Harun 1Department of Mechanical Engineering Technology Faculty of Engineering Technology Universiti Tun Hussein Onn Malaysia(UTHM) Edu Hub Jalan Pagoh 84600 Pagoh Johor Malaysia 3Integrated Material Process Advanced Materials and Manufacturing Centre Universiti Tun Hussein Onn Malaysia 86400 Parit Raja Batu Pahat Johor Malaysia 2Faculty of Mechanical and Manufacturing Engineering University Tun Hussein Onn Malaysia 86400 Batu Pahat Johor Malaysia

Zinc Oxide (ZnO) is an inorganic compound and it is doped with aluminum to increase its capabilities. Aluminum Zinc Oxide (AZO) thin films are semiconductor materials that have band gap energy of 3.3eV. Various method of deposition have been study to growth AZO thin films. It has been extensively use in solar cell application, display application, gas sensing purposes, and thin film transistors (TFTs). In this work, sol gel method and spin coating was used to deposited AZO thin films. The ZnO sol-gel were synthesized using zinc acetate dihydrate as precursor, isopropanol as solvent, diethanolamine as sol stabilizer, and distilled water as oxidation agent. Then, synthesized ZnO were doped with different mole ratio of aluminum nitrate nanohydrate to produced AZO. The glass substrate was used as substrate and AZO thin films were then calcinated at 300°C and 500°C. The characterization of AZO thin film were done using X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), Ultraviolet-visible spectroscopy (UV-Vis), Field Emission Scanning Electron Microscope (FESEM), and Energy Dispersive X-ray spectroscopy (EDX). The XRD results show that the ZnO with hexagonal wurtzite-type structure and temperature does have effect on the film intensity which related to crystallinity of thin films. Through AFM analysis, the value of RMS decreases from 3.018 nm to 2.240 nm as the temperature increases. Meanwhile, from UV-Vis result, it can be seen that AZO thin film have a high transmittance percentage above 90% after wavelength 400 nm with band gap value of 3.3 eV. FESEM image show that the grain boundary of AZO decrease with both parameter (mole ratio and calcinations temperature). Both parameters do have effect on AZO thin film. EDX analysis shows that there are existence of zinc, oxide, and aluminum.

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Publisher Correction: Polymer-acid-metal quasi-ohmic contact for stable perovskite solar cells beyond a 20,000-hour extrapolated lifetime

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Nature communications 2024年第1期15卷 2314页

作者： Junsheng Luo Bowen Liu Haomiao Yin Xin Zhou Mingjian Wu Hongyang Shi Jiyun Zhang Jack Elia Kaicheng Zhang Jianchang Wu Zhiqiang Xie Chao Liu Junyu Yuan Zhongquan Wan Thomas Heumueller Larry Lüer Erdmann Spiecker Ning Li Chunyang Jia Christoph J Brabec Yicheng Zhao National Key Laboratory of Electronic Films and Integrated Devices School of Integrated Circuit Science and Engineering University of Electronic Science and Technology of China 611731 Chengdu PR China. Institute of Materials for Electronics and Energy Technology (i-MEET) Department of Materials Science Friedrich-Alexander University Erlangen-Nürnberg Martensstr. 7 91058 Erlangen Germany. Shenzhen Institute for Advanced Study University of Electronic Science and Technology of China 518110 Shenzhen PR China. Institute of Micro- and Nanostructure Research & Center for Nanoanalysis and Electron Microscopy (CENEM) Department of Materials Science FriedrichAlexander-Universität Erlangen-Nürnberg Cauerstr. 3 D-91058 Erlangen Germany. Helmholtz-Institute Erlangen-Nürnberg (HI-ERN) Immerwahrstr. 2 91058 Erlangen Germany. National Key Laboratory of Electronic Films and Integrated Devices School of Integrated Circuit Science and Engineering University of Electronic Science and Technology of China 611731 Chengdu PR China. zqwan@***. Shenzhen Institute for Advanced Study University of Electronic Science and Technology of China 518110 Shenzhen PR China. zqwan@***. Institute of Polymer Optoelectronic Materials and Devices State Key Laboratory of Luminescent Materials and Devices South China University of Technology 510640 Guangzhou PR China. National Key Laboratory of Electronic Films and Integrated Devices School of Integrated Circuit Science and Engineering University of Electronic Science and Technology of China 611731 Chengdu PR China. cyjia@***. Shenzhen Institute for Advanced Study University of Electronic Science and Technology of China 518110 Shenzhen PR China. cyjia@***. Institute of Materials for Electronics and Energy Technology (i-MEET) Department of Materials Science Friedrich-Alexander University Erlangen-Nürnberg Martensstr. 7 91058 Erlangen Germany. christoph.brabec@fau.de. Helmholtz-Institute Erlangen-Nürnberg (HI-ERN) Immerwahrstr. 2 91058 Erlangen Germa

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Nonreciprocal transport in a bilayer of MnBi2Te4 and Pt

arXiv

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arXiv 2022年

作者： Ye, Chen Xie, Xiangnan Lv, Wenxing Huang, Ke Yang, Allen Jian Jiang, Sicong Liu, Xue Zhu, Dapeng Qiu, Xuepeng Tong, Mingyu Zhou, Tong Hsu, Chuang-Han Chang, Guoqing Lin, Hsin Li, Peisen Yang, Kesong Wang, Zhenyu Jiang, Tian Wang, Xiao Renshaw Division of Physics and Applied Physics School of Physical and Mathematical Sciences Nanyang Technological University 21 Nanyang Link 637371 Singapore State Key Laboratory of High Performance Computing College of Computer Science and Technology National University of Defense Technology Changsha410073 China Physics Laboratory Industrial Training Center Shenzhen Polytechnic Guangdong Shenzhen518055 China Department of NanoEngineering Program of Chemical Engineering University of California La Jolla San DiegoCA92093-0448 United States Program of Materials Science and Engineering University of California La Jolla San DiegoCA92093-0418 United States Institutes of Physical Science and Information Technology Anhui University Hefei230601 China Fert Beijing Institute MIIT Key Laboratory of Spintronics School of Integrated Circuit Science and Engineering Beihang University Beijing100191 China Beihang-Goertek Joint Microelectronics Institute Qingdao Research Institute Beihang University Qingdao266000 China Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology School of Physics Science and Engineering Tongji University Shanghai200092 China College of Advanced Interdisciplinary Studies National University of Defense Technology Changsha410073 China Insitute of Physics Academia Sinica Taipei115229 Taiwan College of Intelligence Science and Technology National University of Defense Technology Changsha410073 China National Innovation Institute of Defense Technology Academy of Military Sciences PLA China Beijing100010 China Beijing Academy of Quantum Information Sciences Beijing100084 China Beijing Institute for Advanced Study National University of Defense Technology Changsha410073 China School of Electrical and Electronic Engineering Nanyang Technological University 50 Nanyang Ave 639798 Singapore

MnBi2Te4 (MBT) is the first intrinsic magnetic topological insulator with the interaction of spin-momentum locked surface electrons and intrinsic magnetism, and it exhibits novel magnetic and topological phenomena. Recent studies suggested that the interaction of electrons and magnetism can be affected by the Mn-doped Bi2Te3 phase at the surface due to inevitable structural defects. Here we report an observation of nonreciprocal transport, i.e. current-direction-dependent resistance, in a bilayer composed of antiferromagnetic MBT and nonmagnetic Pt. The emergence of the nonreciprocal response below the Néel temperature confirms a correlation between nonreciprocity and intrinsic magnetism in the surface state of MBT. The angular dependence of the nonreciprocal transport indicates that nonreciprocal response originates from the asymmetry scattering of electrons at the surface of MBT mediated by magnon. Our work provides an insight into nonreciprocity arising from the correlation between magnetism and Dirac surface electrons in intrinsic magnetic topological insulators. © 2022, CC BY.

关键词： Magnetism

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