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Carbon nanostructure field emission devices

Journal of Vacuum science and Technology B: Microelectronics and Nanometer Structures 2006年第2期24卷 1008-1012页

作者： Wong, Y.M. Kang, W.P. Davidson, J.L. Soh, K.L. Choi, B.K. Hofmeister, W. Department of Electrical Engineering and Computer Science Vanderbilt University Nashville TN 37235 Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville TN 37235 Department of Chemical Engineering Vanderbilt University Nashville TN 37235

The microwave plasma chemical vapor deposition (MPCVD) method is capable of synthesizing various forms of carbon allotropes such as diamond, carbon nanotubes (CNTs), and diamondlike carbon (DLC) while varying the growth parameters or utilizing substrate coated with catalytic thin film. In this article, needlelike carbon nanostructures (CNs) were synthesized utilizing high power (5 kW) and high working pressure (120 Torr) MPCVD on a thin catalytic film of nickel with a diffusion barrier layer of titanium on a micropatterned silicon substrate. The effects of in situ doping by trimethylboron (TMB) on the morphologies and field emission properties of the CNs were also investigated. Straight, needlelike CNs with random orientation were obtained for 15 min growth time with or without TMB doping. However, the CNs appear to transform into diamondlike nanocrystals after prolonged growth of 30 min with TMB doping. Unlike MPCVD grown CNTs, it was found that the CNs have strong adhesion to the substrate and could withstand postgrowth processing such as ultrasonic agitation cleaning in solvents. Field emission tests performed show that in situ TMB doping of the patterned needlelike CNs lowers the turn-on field of the cathode. A vacuum field emission triode with self-aligned gate utilizing CNs as the field emitter is also fabricated. © 2006 American Vacuum Society.

关键词： Carbon nanotubes

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Accelerated oxidation of silicon due to x-ray irradiation

Accelerated oxidation of silicon due to x-ray irradiation

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12th European Conference on Radiation and Its Effects on Component and Systems, RADECS 2011

作者： Bhandaru, Shweta Zhang, En Xia Fleetwood, Daniel M. Reed, Robert A. Weller, Robert A. Weiss, Sharon M. Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville TN 37235 United States Department of Electrical Engineering and Computer Science Vanderbilt University Nashville TN 37235 United States

Enhanced rates of oxide growth have been observed on silicon when exposed to high-energy x-ray irradiation. This observed effect could potentially be utilized for remote total ionizing dose-sensing applications. ©... 详细信息

ISBN: (纸本)9781457705878

关键词： Silicon

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Carbon nanotube growth from Cu–Co alloys for field emission applications

Journal of Vacuum Science & Technology B: Microelectronics a...

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Journal of Vacuum science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 2004年第3期22卷 1286-1289页

作者： W. Hofmeister W. P. Kang Y. M. Wong J. L. Davidson Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville Tennessee 37235 Interdisciplinary Graduate Program in Material Science and Department of Electrical Engineering and Computer Science Vanderbilt University Nashville Tennessee 37235 Department of Electrical Engineering and Computer Science Vanderbilt University Nashville Tennessee 37235

We have developed a method of catalyst preparation for carbon nanotube (CNT) growth that uses solid-state diffusion to precipitate Co particles in a Cu matrix and control the size and size distribution of catalyst particles. Copper is an excellent electrical and thermal conductor, and has a small or negligible solubility for Co. Cu–Co alloys of approximately 5 atm% Co were formed in bulk by splat quenching the liquid alloy and on Si substrates by e-beam evaporation of the alloy, sputtering of the alloy, and sputter deposition of thin films of pure Cu and Co. The Co easily precipitates from dilute solutions of Cu–Co with heat treatment. These alloys and films were used to generate uniform distributions of Co precipitates, and CNTs were successfully grown by plasma enhanced chemical vapor deposition (PE-CVD) and thermal CVD on the materials. These alloys can be patterned by photolithography and sputtering in order to grow CNTs in defined locations. Therefore, the technique is amenable to very large scale silicon integration for field emission applications. The results of this work and data from field emission studies are presented herein.

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Accelerated oxidation of silicon due to x-ray irradiation

Accelerated oxidation of silicon due to x-ray irradiation

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European Conference on Radiation and its Effects on Components and Systems (RADECS)

作者： Shweta Bhandaru En Xia Zhang Daniel M. Fleetwood Robert A. Reed Robert A. Weller Sharon M. Weiss Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville TN USA Department of Electrical Engineering and Computer Science Vanderbilt University Nashville TN USA

关键词： Silicon Radiation effects Oxidation Atomic measurements Temperature measurement Optical sensors Atomic layer deposition

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Carbon nanotube growth from Cu-Co alloys for field emission applications

Carbon nanotube growth from Cu-Co alloys for field emission ...

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IEEE International Conference on Vacuum Microelectronics (IVMC)

作者： W. Hofmeister W.P. Kang Y.M. Wong J.L. Davidson Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville TN USA Department of Electrical Engineering and Computer Science Vanderbilt University Nashville TN USA

We have used Cu-Co alloy to generate uniform distribution of Co precipitates, and successfully grown CNTs by CVD on the Cu support.

关键词： Carbon nanotubes Conducting materials Transistors Application software Cobalt alloys Copper alloys materials science and technology Hydrocarbons Chemical vapor deposition Nanocrystals

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Transistor characteristics of thermal chemical vapor deposition carbon nanotubes field emission triode

Journal of Vacuum Science & Technology B: Microelectronics a...

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Journal of Vacuum science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 2005年第2期23卷 868-873页

作者： Y. M. Wong W. P. Kang J. L. Davidson W. Hofmeister S. Wei J. H. Huang Department of Electrical Engineering and Computer Science Vanderbilt University Nashville Tennessee 37235 Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville Tennessee 37235 Department of Materials Science and Engineering National Tsing Hua University Hsinchu 300 Taiwan Republic of China

A study of thermal chemical vapor deposition (CVD) grown carbon nanotubes (CNTs) field emitters in a triode amplifier configuration is reported. The CNT transistor characteristics were examined by integrating gate and anode with CNT cathode in two structural forms, utilizing a TEM grid (transmission electron microscope specimen holder) as the gate electrode and a micropatterned CNT with self-aligned gate. The TEM-grid CNT triode displayed clearly gate-controlled current modulation behavior with distinct cutoff, linear, and saturation regions, and a reasonable gate turn-on field of ∼5.4V∕μm despite a large cathode-gate spacing of ∼120μm . The field emission result established the basic transistor characteristics of CNTs in a triode configuration. A CNT triode construct with a self-aligned gated fabrication technique was also developed to realize a monolithic triode structure with shorter gate-cathode spacing, lowering gate voltage, and enhancing emission current. The triode exhibited a significantly lower gate turn-on voltage of ∼40V , and gate-controlled modulation of the emission current. An anode current density of ∼30mA∕cm2 was achieved at a gate voltage of ∼80V and an anode voltage of ∼200V . The dc characteristics for both of the CNT triodes were investigated, including Ia versus Va for different Vg . Moreover, dc parameters such as transconductance, amplification factors, and anode resistance of the triode amplifier were determined. The CNT triodes exhibited useful amplification factor and high output impedance.

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Transistor characteristics of thermal CVD carbon nanotubes field emission triode

Transistor characteristics of thermal CVD carbon nanotubes f...

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International Conference on Vacuum Nanoelectronics (IVNC)

作者： Y.M. Wong W.P. Kang J.L. Davidson W. Hofmeister S. Wei J.H. Huang Dept. of Electrical Engineering and Computer Science Vanderbilt Univ. Nashville TN USA Interdisciplinary Graduate Program in Material Science Vanderbilt Univ. Nashville TN USA Dept. of Materials Science and Engineering National Tsing Hua Univ. Hsinchu Taiwan ROC

In this paper, the study of thermal CVD grown CNT field emitters in a triode amplifier configuration is reported. The DC characteristics of the CNT triode are investigated, including I/sub a/ vs. V/sub a/ for different V/sub g/. Moreover, DC parameters such as transconductance, amplification factor and anode resistance of the triode amplifier are determined. It was shown that a higher amplification factor can be achieved with optimum gate-anode-cathode spacing such that the cathode is effectively shielded from the anode by the gate but the anode still collects all electrons emitted from the cathode. High emission current at low gate voltage is key to achieving high transconductance. This can be obtained by optimum configuration of high-density CNTs array in a triode structure with a common gate.

关键词： Carbon nanotubes Voltage Anodes materials science and technology Current measurement Palladium Silicon Furnaces Temperature Cathodes

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The effects of process parameters on size, density, structure, and field emission properties of Pd-catalyzed carbon nanotubes synthesized by thermal chemical vapor deposition

The effects of process parameters on size, density, structur...

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International Conference on Vacuum Nanoelectronics (IVNC)

作者： S. Wei W.P. Kang W.H. Hofmeister J.L. Davidson Y.M. Wong J.H. Huang Interdisciplinary Graduate Program in Material Science Vanderbilt University Nashville TN USA Department of Electrical Engineering and Computer Science Vanderbilt University Nashville TN USA Department of Chemical Engineering Vanderbilt University Nashville TN USA Department of Materials Science and Engineering National Tsing Hua University Hsinchu Taiwan

In this study, various thicknesses of Pd catalytic films were deposited on Ti/Si substrates and pretreated with NH/sub 3/. The effects of catalyst deposition parameters and NH/sub 3/ pretreatment time (0, 1, and 10 minutes) on the size distribution of Pd catalytic particles, and subsequently, on the diameter and density of synthesized carbon nanotubes (CNTs) were investigated. The CNTs were synthesized by thermal CVD at 750/spl deg/C using methane (CH/sub 4/) as the carbon source, and a mixture of Ar/H/sub 2/ (80 vol.%/20 vol.%) as the carrier gas.

关键词： Carbon nanotubes Chemical vapor deposition Argon Hydrogen Scanning electron microscopy Morphology Substrates materials science and technology Transmission electron microscopy Carbon dioxide

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Technology Roadmap for Flexible Sensors

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ACS NANO 2023年第6期17卷 5211-5295页

作者： Luo, Yifei Abidian, Mohammad Reza Ahn, Jong-Hyun Akinwande, Deji Andrews, Anne M. Antonietti, Markus Bao, Zhenan Berggren, Magnus Berkey, Christopher A. Bettinger, Christopher John Chen, Jun Chen, Peng Cheng, Wenlong Cheng, Xu Choi, Seon-Jin Chortos, Alex Dagdeviren, Canan Dauskardt, Reinhold H. Di, Chong-an Dickey, Michael D. Duan, Xiangfeng Facchetti, Antonio Fan, Zhiyong Fang, Yin Feng, Jianyou Feng, Xue Gao, Huajian Gao, Wei Gong, Xiwen Guo, Chuan Fei Guo, Xiaojun Hartel, Martin C. He, Zihan Ho, John S. Hu, Youfan Huang, Qiyao Huang, Yu Huo, Fengwei Hussain, Muhammad M. Javey, Ali Jeong, Unyong Jiang, Chen Jiang, Xingyu Kang, Jiheong Karnaushenko, Daniil Khademhosseini, Ali Kim, Dae-Hyeong Kim, Il-Doo Kireev, Dmitry Kong, Lingxuan Lee, Chengkuo Lee, Nae-Eung Lee, Pooi See Lee, Tae-Woo Li, Fengyu Li, Jinxing Liang, Cuiyuan Lim, Chwee Teck Lin, Yuanjing Lipomi, Darren J. Liu, Jia Liu, Kai Liu, Nan Liu, Ren Liu, Yuxin Liu, Yuxuan Liu, Zhiyuan Liu, Zhuangjian Loh, Xian Jun Lu, Nanshu Lv, Zhisheng Magdassi, Shlomo Malliaras, George G. Matsuhisa, Naoji Nathan, Arokia Niu, Simiao Pan, Jieming Pang, Changhyun Pei, Qibing Peng, Huisheng Qi, Dianpeng Ren, Huaying Rogers, John A. Rowe, Aaron Schmidt, Oliver G. Sekitani, Tsuyoshi Seo, Dae-Gyo Shen, Guozhen Sheng, Xing Shi, Qiongfeng Someya, Takao Song, Yanlin Stavrinidou, Eleni Su, Meng Sun, Xuemei Takei, Kuniharu Tao, Xiao-Ming Tee, Benjamin C. K. Thean, Aaron Voon-Yew Trung, Tran Quang Wan, Changjin Wang, Huiliang Wang, Joseph Wang, Ming Wang, Sihong Wang, Ting Wang, Zhong Lin Weiss, Paul S. Wen, Hanqi Xu, Sheng Xu, Tailin Yan, Hongping Yan, Xuzhou Yang, Hui Yang, Le Yang, Shuaijian Yin, Lan Yu, Cunjiang Yu, Guihua Yu, Jing Yu, Shu-Hong Yu, Xinge Zamburg, Evgeny Zhang, Haixia Zhang, Xiangyu Zhang, Xiaosheng Zhang, Xueji Zhang, Yihui Zhang, Yu Zhao, Siyuan Zhao, Xuanhe Zheng, Yuanjin Zheng, Yu-Qing Zheng, Zijian Zhou, Tao Zhu, Bowen Zhu, Ming Zhu, Rong Zhu, Yangzhi Zhu, Yong Zou, Guijin Chen, Xiaodong 08-03 Innovis Singapore 138634 Republic of Singapore Innovative Centre for Flexible Devices (iFLEX) School of Materials Science and Engineering Nanyang Technological University Singapore 639798 Singapore Department of Biomedical Engineering University of Houston Houston Texas 77024 United States School of Electrical and Electronic Engineering Yonsei University Seoul 03722 Republic of Korea Department of Electrical and Computer Engineering The University of Texas at Austin Austin Texas 78712 United States Microelectronics Research Center The University of Texas at Austin Austin Texas 78758 United States Department of Chemistry and Biochemistry California NanoSystems Institute and Department of Psychiatry and Biobehavioral Sciences Semel Institute for Neuroscience and Human Behavior and Hatos Center for Neuropharmacology University of California Los Angeles Los Angeles California 90095 United States Colloid Chemistry Department Max Planck Institute of Colloids and Interfaces 14476 Potsdam Germany Department of Chemical Engineering Stanford University Stanford California 94305 United States Laboratory of Organic Electronics Department of Science and Technology Campus Norrköping Linköping University 83 Linköping Sweden Wallenberg Initiative Materials Science for Sustainability (WISE) and Wallenberg Wood Science Center (WWSC) SE-100 44 Stockholm Sweden Department of Materials Science and Engineering Stanford University Stanford California 94301 United States Department of Biomedical Engineering and Department of Materials Science and Engineering Carnegie Mellon University Pittsburgh Pennsylvania 15213 United States Department of Bioengineering University of California Los Angeles Los Angeles California 90095 United States School of Chemistry Chemical Engineering and Biotechnology Nanyang Technological University Singapore 637457 Singapore Nanobionics Group Department of Chemical and Biological Engineering Monash University Clayton Australia 3800 Monash

Humans rely increasingly on sensors to address grand challenges and to improve quality of life in the era of digitalization and big data. For ubiquitous sensing, flexible sensors are developed to overcome the limitations of conventional rigid counterparts. Despite rapid advancement in bench-side research over the last decade, the market adoption of flexible sensors remains limited. To ease and to expedite their deployment, here, we identify bottlenecks hindering the maturation of flexible sensors and propose promising solutions. We first analyze continued...challenges in achieving satisfactory sensing performance for real-world applications and then summarize issues in compatible sensor-biology interfaces, followed by brief discussions on powering and connecting sensor networks. Issues en route to commercialization and for sustainable growth of the sector are also analyzed, highlighting environmental concerns and emphasizing nontechnical issues such as business, regulatory, and ethical considerations. Additionally, we look at future intelligent flexible sensors. In proposing a comprehensive roadmap, we hope to steer research efforts towards common goals and to guide coordinated development strategies from disparate communities. Through such collaborative

关键词： soft materials mechanics engineering flexible electronics conformable sensors bioelectronics human-machine interfaces body area sensor networks technology translation sustainable electronics

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Organic Solar Cells: Highly Efficient and Bendable Organic Solar Cells with Solution‐Processed Silver Nanowire Electrodes (Adv. Funct. Mater. 34/2013)

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Advanced Functional materials 2013年第34期23卷

作者： Myungkwan Song Dae Sung You Kyounga Lim Sujin Park Sunghoon Jung Chang Su Kim Dong‐Ho Kim Do‐Geun Kim Jongk‐Kuk Kim Juyun Park Yong‐Cheol Kang Jinhee Heo Sung‐Ho Jin Jong Hyun Park Jae‐Wook Kang Surface Technology Division Korea Institute of Materials Science Changwon 641‐831 Republic of Korea Department of Chemistry Pukyong National University Busan 608‐737 Republic of Korea Advanced Characterization and Analysis Department Korea Institute of Materials Science Changwon 641‐831 Republic of Korea Department of Chemistry Education and Interdisciplinary Program of Advanced Information and Display Materials Pusan National University Busan 609‐735 Republic of Korea Material R&D Department LG Display Co. Ltd. Gyeonggi‐do 413‐811 Republic of Korea Professional Graduate School of Flexible and Printable Electronics Department of Flexible and Printable Electronics Chonbuk National University Jeonju 561‐756 Republic of Korea

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