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Single-channel vector magnetic information detection method based on diamond NV color center

Chinese Physics B 2021年第8期30卷 275-281页

作者： Qin-Qin Wang Rui-Rong Wang Jin-Ping Liu Shao-Zhuo Lin Liang-Wei Wu Hao Guo Zhong-Hao Li Huan-Fei Wen Jun Tang Zong-Min Ma Jun Liu Key Laboratory of Instrumentation Science and Dynamic Measurement School of Instrument and ElectronicsNorth University of ChinaTaiyuan 030051China

A method of detecting the single channel triaxial magnetic field information based on diamond nitrogen-vacancy(NV)color center is ***,the incident angle of the bias magnetic field which can achieve the equal frequency difference optically-detected magnetic resonance(ODMR)spectrum of diamond NV color center is calculated theoretically,and the triaxial magnetic information solution model is also ***,the microwave time-controlled circuit module is designed to generate equal timing and equal frequency difference microwave pulse signals in one *** with the optical detection magnetic resonance technology,the purpose of sequentially locking and detecting the four formant signals on one side of the diamond NV color center(m_(s)=-1 state signal)is achieved,and the vector magnetic field information detection is accomplished by combining the triaxial magnetic information solution *** system can obtain magnetic field detection in a range of 0 mT-0.82 *** system's magnetic noise sensitivity is 14.2 nT/Hz^(1/2),and the deviation angle errors of magnetic field detectionθ_(x) andθ_(y) are 1.3° and 8.2° respectively.

关键词： nitrogen-vacancy(NV)color center vector electron spin magnetic detection

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High performance rotary triboelectric nanogenerator based on wool charge supplementation strategy with low wear

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science China(Technological sciences) 2024年第11期67卷 3535-3545页

作者： CAI MingZhe HAO CongCong WANG ZeKun ZHAI Cong ZHENG YongQiu XUE ChenYang Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education North University of ChinaTaiyuan030051China

Triboelectric nanogenerator(TENG)is an emerging method for harvesting mechanical *** traditional rotary TENGs(RTENGs),the mutual friction between positive and negative friction materials significantly shortens their operational *** non-contact triboelectric nanogenerator addresses this issue effectively;however,its low output performance still limits practical *** this work,we introduce a novel charge supplementation strategy to enhance the performance of *** strategy involves directly affixing wool between the Cu electrodes of the NCR-TENG,while the negative friction material is modified by doping with MXene,resulting in a substantial enhancement of *** voltage,current,and charge transfer increased by 4.5,4.5,and 4.8 times,respectively,reaching 451 V,21.2μA and 47 ***,NCR-TENG demonstrates remarkable stability,maintaining 100%output characteristics after 33,600 *** output power reaches2.3 mW when load resistance is 107Ω.It takes only 0.8 s to charge a 0.1μF capacitor to 10 *** work not only improves the output performance of the NCR-TENG but also retains the capability of low-speed startup while maintaining high wear *** simple and effective charge supplementation strategy proposed here provides a new perspective for further improving the output characteristics of ***-TENG has potential application prospects in harvesting wind energy to power traffic flow sensor networks,detecting environmental and vehicle information,and optimizing traffic signal control.

关键词： triboelectric nanogenerators charge supplementation strategy high wear resistance wind energy harvesting

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Design and characterization of a multi-ring nested CMUT array for hydrophone

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Journal of Semiconductors 2024年第11期45卷 58-62页

作者： Licheng Jia Rihui Xue Fansheng Meng The Key Laboratory of Instrumentation Science and Dynamic Measurement North University of ChinaTaiyuan 030051China

This paper presents the design,fabrication,packaging,and characterization of a high-performance CMUT *** array,which features rectangular cells fabricated using a sacrificial release process,achieves a receiving sensitivity of-231.44 d B(re:1 V/μPa)with a 40 d B ***,the CMUT array exhibits a minimal sensitivity variation of just 0.87 d B across a temperature range of 0 to 60°***,the output voltage non-linearity at 1 k Hz is approximately 0.44%.These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial *** high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications.

关键词： cmut array mirco-electro-mechanical systems(mems) receiving sensitivity non-linearity

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Effect of temperature on phase transition behavior of antiferroelectric (Pb_(0.97)La_(0.02) )(Zr_(0.75)Sn_(0.25-x)Ti_x)O_3 ceramics

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Journal of Semiconductors 2014年第3期35卷 16-19页

作者：陈婷婷刘冰丑修建刘俊薛晨阳张文栋 National Key Laboratory for Electronic Measurement Technology Key Laboratory of Instrumentation Science & Dynamic Measurement North University of ChinaMinistry of Education

Pb0：97La0：02（Zr0：75Sn0：25x Ti x/O3（x D0.10, 0.105, 0.11）（PLZST） antiferroelectric ceramics with highly preferred-（110） orientation were successfully fabricated via the conventional solid-state reaction *** antiferroelectric nature of PLZST ceramics induced by electric field was demonstrated by the dielectric constant-temperature（D-T） and the polarization-electric field（P-E） measurement. Typical phase transition from ferroelectric（FE） to antiferroelectric（AFE）, and then to paraelectric（PE） is obtained. The results indicate that the phase transition behavior is suppressed with increasing of x, and T c is remarkably shifted to higher temperature of168 ℃, 170 ℃ and 174 ℃, respectively. Besides, high phase transition current（110 6A, 810 7A and 610 7A, respectively） is obtained with temperature induced. Consequently, the excellent electric properties and the restraint between temperature and electric field would provide basis on the application of PLZST antiferroelectric ceramics in microelectronic integrated systems and sophisticated weapons systems.

关键词： PLZST antiferroelectric ceramics electrical properties high sensitivity of temperature

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Design and test of a capacitance detection circuit based on a transimpedance amplifier

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Journal of Semiconductors 2015年第7期36卷 140-147页

作者：穆林枫张文栋何常德张睿宋金龙薛晨阳 Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & Measurement North University of China

This paper presents a transimpedance amplifier （TIA） capacitance detection circuit aimed at detecting micro-capacitance, which is caused by ultrasonic stimulation applied to the capacitive micro-machined ultrasonic transducer （CMUT）. In the capacitance interface, a TIA is adopted to amplify the received signal with a center frequency of 400 kHz, and finally detect ultrasound pressure. The circuit has a strong anti-stray property and this paper also studies the calculation of compensation capacity in detail. To ensure high resolution, noise analysis is conducted. After optimization, the detected minimum ultrasound pressure is 2.1 Pa, which is two orders of magni- tude higher than the former. The test results showed that the circuit was sensitive to changes in ultrasound pressure and the distance between the CMUT and stumbling block, which also successfully demonstrates the functionality of the developed TIA of the analog-front-end receiver.

关键词： TIA capacitance detection CMUT high resolution distance test

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The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology

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Journal of Semiconductors 2014年第6期35卷 80-89页

作者：张娟婷何常德张慧李玉平张永平杜春晖张文栋 Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & Measurement North University of China

A cycle bridge detection method, which uses a piezoresistive triaxial accelerometer, has been described innovatively. This method just uses eight resistors to form a cycle detection bridge, which can detect the signal of the three directions for real time. It breaks the law of the ordinary independent Wheatstone bridge detection method, which uses at least 12 resistors and each four resistors connected as a Wheatstone bridge to detect the output signal from a specific direction. In order to verify the feasibility of this method, the modeling and simulating of the sensor structure have been conducted by ANSYS, then the dual cycle bridge detection method and independent Wheatstone bridge detection method are compared, the result shows that the former method can improve the sensitivity of the sensor effectively. The sensitivity of the x, y-axis used in the former method is two times that of the sensor used in the latter method, and the sensitivity of the z-axis is four times. At the same time, it can also reduce the cross-axis coupling degree of the sensor used in the dual cycle bridge detection method. In addition, a signal amplifier circuit and adder circuit have been provided, Finally, the test result of the ＂eight-beams/mass＂ triaxial accelerometer, which is based on the dual cycle bridge detection method and the related circuits, have been provided. The results of the test and the theoretical analysis are consistent, on the whole.

关键词： piezoresistive triaxial accelerometer cycle detection bridge MEMS

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Development of a novel accelerometer based on an overlay detection bridge

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Journal of Semiconductors 2013年第2期34卷 52-59页

作者：杜春晖何常德葛晓洋张永平于佳琪宋小鹏张文栋 Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & Measurement North University of China

This paper describes the design, simulation, processing and test result of a high sensitivity accelerometer based on the piezoresistive effect which uses an overlay bridge detection method. The structure of this accelerometer is supersymmetric ＂mass-beams＂. This accelerometer has 8 beams, where two varistors are put in the two ends. Four varistors compose a Wheatstone bridge and the output voltages of the 4 Wheatstone bridges have been superimposed as the final output voltage. The sensitivity of the accelerometer can be improved effectively by these clever methods. A simplified mathematical model has been created to analyze the mechanical properties of the sensor, then the finite element modeling and simulation have been used to verify the feasibility of the accelerometer. The results show that the sensitivity of the accelerometer is 1.1381 mV/g, which is about four times larger than that of the single bridge accelerometers and series bridge sensor. The bandwidth is 0-1000 Hz which is equal to that of the single bridge accelerometers and the series bridge sensor. The comparison reveals that the new overlay detection bridge method can improve the sensitivity of the sensor in the same bandwidth. Meanwhile, this method provides an effective method to improve the sensitivity of piezoresistive sensors.

关键词： accelerometer MEMS piezoresistive overlay detection bridge

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Raman investigation of stress for shallow trench

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Defect and Diffusion Forum 2007年 265卷 1-6页

作者： Sang, Shengbo Xue, Chenyang Zhang, Wendong Xiong, Jijun Key Lab. on Instrumentation Science and Dynamic Measurement Ministry of Education North University of China Taiyuan 030051 China

A trench is used as a storage capacitor in dynamic memory (DRAM) technologies (deep storage trenches), or as an isolation structure in CMOS, bipolar and BiCMOS technologies. But a shallow trench structure has also been shown to be a major factor in substrate defect generation during processing. Such defect generation is directly related to mechanical stresses existing around the trench. This stress can be monitored, using Raman spectroscopy, to a stress resolution of 1OMPa and a spatial resolution of 0.2μm. In this paper, a trench structure is designed and fabricated, and the test results for local stresses within the trench are shown to be in good correspondence with theory.

关键词： dynamic random access storage

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Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

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Journal of Semiconductors 2013年第7期34卷 116-122页

作者：于佳琪何常德宛克敬廉德钦薛晨阳张文栋 Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & Measurement North University of China

A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the *** the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation *** boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic *** membrane-beam microstructure is fabricated integrally by MEMS manufacturing ***,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated *** sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.

关键词： MEMS piezoresistive ultrasonic sensor ANSYS membrane-beams

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Enhancing the Robustness of the Microcavity Coupling System

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Chinese Physics Letters 2011年第3期28卷 100-103页

作者： YAN Ying-Zhan JI Zhe YAN Shu-Bin LIU Jun XUE Chen-Yang ZHANG Wen-Doug XIONG Ji-Jun Key Laboratory of Instrumentation Science and Dynamic Measurement North University of ChinaTaiyuan 030051 Science and Technology on Electronic Test and Measurement Laboratory North University of ChinaTaiyuan 030051

A novel method to enhance the robustness of the microcavity coupling system(MCS)is presented by encapsulating and solidifying the MCS with a low refractive index(RI)curable UV *** encapsulating process is illustrated in detail for a typical microsphere with a radius of R about 240μ*** differences of the resonant characteristics before and after the package are observed and *** first two differences refer to the enhancement of the coupling strength and the shift of the resonant spectrum to the longer wavelength,which are both mainly because of the microsphere surrounding RI *** difference is the quality factor(Q-factor)which decreases from 7.8×10^(7)to 8.7×10^(6)after the package due to the polymer ***,rotation testing experiments have been carried out to verify the robustness of the package *** results demonstrate that the packaged MCR has much better robust performance than the un-package *** enhancement of the robustness greatly promotes the microcavity research from fundamental investigations to application fields.

关键词： resonant coupling rotation

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