A film-formation technology called spin-coating film transfer and hot pressing (STP) has been developed to seal three-dimensional microelectromechanical systems (MEMS) structures that include cavities and thereby prot...
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A film-formation technology called spin-coating film transfer and hot pressing (STP) has been developed to seal three-dimensional microelectromechanical systems (MEMS) structures that include cavities and thereby protect movable parts from contamination in practical environments, The critical process in STP is film transfer. This is accomplished in a special apparatus designed for that purpose and through a process for controlling the film shape. STP was applied to the fabrication of MEMS fingerprint sensors, and the results show that sealing the cavities in the sensors enables stable fingerprint sensing.
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