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2024 IEEE International Electron devices Meeting, IEdM 2024

作者： Tang, Yingjie Wang, Lang Zhang, Siyu Zhang, Hui Wang, Yan Chen, Yitong Li, Fanfan Li, dingwei Ren, Huihui Liu, Guolei Huang, Qi Xu, Hua Wen, Liaoyong Zhu, Bowen Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou310024 China Westlake Institute for Optoelectronics Hangzhou311421 China Guangzhou New Vision Optoelectronic Technology Co. Ltd. Guangzhou510700 China

ISBN: (纸本)9798350365429

Flexible tactile sensor arrays are crucial to enable robotics with human-like tactile perception. However, there is a trade-off between high density and sensitivity in sensor arrays, because signal crosstalk among adjacent pixels gradually becomes serious with increased pixel density. In this work, we demonstrate a flexible active-matrix (AM) tactile sensor array (TSA) with both high pixel density and sensitivity, by monolithically integrating a 64 × 64 lanthanum-doped indium zinc oxide (Ln-IZO) thin-film transistor (TFT) array (4096 pixels, 1 × 1 cm2) with a hierarchically micro-/nanostructured high pressure-sensitive film. The flexible AM-TSA exhibits a high spatial resolution of 150 μm, high in-array tactile sensitivity of 51 kPa-1, fast response/recovery time (51/32 ms), a low detection limit of 2.5 Pa, and robust mechanical stability, feasible for applications in tactile robotics. © 2024 IEEE.

关键词： Thin film transistors

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Optoelectronic Synapses Based on Inorganic-Organic Hybrid Phototransistors 31

Optoelectronic Synapses Based on Inorganic-Organic Hybrid Ph...

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31st International Workshop on Active-Matrix Flatpanel displays and devices: TFT Technologies and FPd Materials, AM-FPd 2024

作者： Li, dingwei Chen, Yitong Ren, Huihui Tang, Yingjie Wang, Yan Huan, Qi Zhu, Bowen School of Engineering Westlake University Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province Hangzhou310024 China Zhejiang University Hangzhou310027 China Westlake Institute for Optoelectronics Hangzhou311421 China Institutc of Advanced Technology Westlake Institute for Advanced Study Hangzhou310024 China

ISBN: (纸本)9784991216961

Optoelectronic synapses are desirable for avoiding hardware latency and achieving high bandwidth and low crosstalk. We utilized the trapping and de-trapping effect in the inorganic-organic heterojunction to achieve optically controlled weight modulation for synaptic functions including long-term potentiation and depression depending on the incident light wavelength. The artificial synapses with optical responsivity could implement both sensing and processing functions, promising for constructing optogenetics-inspired neuromorphic vision networks. © 2024 FTFMd.

关键词： Optoelectronic devices

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Color-preserving passive radiative cooling for an actively temperature-regulated enclosure

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Light(Science & Applications) 2022年第6期11卷 1130-1138页

作者： Yining Zhu Hao Luo Chenying Yang Bing Qin Pintu Ghosh Sandeep Kaur Weidong Shen Min Qiu Pavel Belov Qiang Lie State Key Laboratory of Modern Optical Instrumentation College of Optical Science and EngineeringZhejiang University310027 HangzhouChina Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake University18 Shilongshan Road310024 HangzhouZhejiang ProvinceChina Institute of Advanced Technology Westlake Institute for Advanced Study18 Shilongshan Road310024 HangzhouZhejiang ProvinceChina Department of Physics and Engineering ITMO UniversitySaint PetersburgRussia

Active temperature control devices are widely used for the thermal management of enclosures,including vehicles and *** radiative cooling has been extensively studied;however,its integration with existing actively temperature regulated and decorative enclosures has slipped out of the research at status ***,we present a photonic-engineered dual-side thermal management strategy for reducing the active power consumption of the existing temperature-regulated enclosure without sacrificing its *** coating the exterior and interior of the enclosure roof with two visible-transparent films with distinctive wavelength-selectivity,simultaneous control over the energy exchange among the enclosure with the hot sun,the cold outer space,the atmosphere,and the active cooler can be implemented.A power-saving of up to 63%for active coolers of the enclosure is experimentally demonstrated by measuring the heat flux compared to the ordinary enclosure when the set temperature is around 26℃.This photonic-engineered dual-side thermal management strategy offers facile integration with the existing enclosures and represents a new paradigm toward carbon neutrality.

关键词： radiative passive preserving

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Balancing efficiency and transparency in organic transparent photovoltaics

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npj Flexible Electronics 2022年第1期6卷 391-400页

作者： Ruiqian Meng Qianqing Jiang dianyi Liu Zhejiang University Hangzhou 310013 Zhejiang ProvinceChina Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province Research Center for Industries of the Future and School of EngineeringWestlake University18 Shilongshan RoadHangzhou 310024 Zhejiang ProvinceChina Institute of Advanced Technology Westlake Institute for Advanced Study18 Shilongshan RoadHangzhou 310024 Zhejiang ProvinceChina

The challenges in transparent photovoltaic(TPV)fields are still that the device transparency and efficiency are difficult to be balanced to meet the requirements of practical *** this study,we systematically investigated the interrelationship between photovoltaic film properties,optical transmission,and photovoltaic performances in the near-infrared harvesting organic *** results indicate that the photovoltaic film thickness determines the TPV’s transparency and meanwhile affects the device efficiency;by contrast,the donor-acceptor ratio only affects device efficiency and has little effect on *** controlling the film thickness and donor-acceptor ratio,the average visible transmission(AVT)of TPVs can be precisely managed in the range of 40%-85%,and the device efficiency can achieve as high as 4.06%and 2.38%while the AVT exceeds 70%and 80%,***,the large area(~10 cm^(2))TPV modules and ultra-flexible devices were then successfully prepared based on the systematical study.

关键词： transparent transparency donor

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A Generalized Polymer Precursor Ink design for 3d Printing of Functional Metal Oxides

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nano-micro Letters 2023年第10期15卷 433-448页

作者： Hehao Chen Jizhe Wang Siying Peng dongna Liu Wei Yan Xinggang Shang Boyu Zhang Yuan Yao Yue Hui Nanjia Zhou Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering and Research Center for Industries of the FutureWestlake UniversityHangzhou 310030People’s Republic of China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024People’s Republic of China School of Materials Science and Engineering Zhejiang UniversityHangzhou 310027People’s Republic of China School of Chemical Engineering and Advanced Materials the University of AdelaideAdelaide 5005Australia

Three-dimensional-structured metal oxides have myriad applications for optoelectronic *** to conventional lithography-based manufacturing methods which face significant challenges for 3d device architectures,additive manufacturing approaches such as direct ink writing offer convenient,on-demand manufacturing of 3d oxides with high resolutions down to sub-micrometer ***,the lack of a universal ink design strategy greatly limits the choices of printable ***,a universal,facile synthetic strategy is developed for direct ink writable polymer precursor inks based on metal-polymer coordination ***,polyethyleneimine functionalized by ethylenediaminetetraacetic acid is employed as the polymer matrix for adsorbing targeted metal ***,glucose is introduced as a crosslinker for endowing the polymer precursor inks with a thermosetting property required for 3d printing via the Maillard *** demonstrations,binary(i.e.,ZnO,CuO,In_(2)O_(3),Ga_(2)O_(3),TiO_(2),and Y_(2)O_(3)) and ternary metal oxides(i.e.,BaTiO_(3) and SrTiO_(3)) are printed into 3d architectures with sub-micrometer resolution by extruding the inks through ultrafine *** thermal crosslinking and pyrolysis,the 3d microarchitectures with woodpile geometries exhibit strong light-matter coupling in the mid-infrared *** design strategy for printable inks opens a new pathway toward 3d-printed optoelectronic devices based on functional oxides.

关键词： 3d printing Maillard reaction Polymer-assisted deposition Metal oxide Photonic crystal

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Nonvolatile Reconfigurable Phase-change-materials Integrated Silicon Photonics

Nonvolatile Reconfigurable Phase-change-materials Integrated...

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2024 Photonics and Electromagnetics Research Symposium, PIERS 2024

作者： Xu, Kai Wei, Maoliang Tang, Bo Li, Junying Yun, Yiting Lei, Kunhao Wu, Yingchun Li, Lan Lin, Hongtao Zhejiang University State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Hangzhou China Institute of Microelectronics of the Chinese Academy of Sciences Beijing China University of Chinese Academy of Sciences Hangzhou Institute for Advanced Study Hangzhou China Westlake University Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Hangzhou China Westlake Institute for Advanced Study Institute of Advanced Technology Hangzhou China

ISBN: (纸本)9798350375909

The emergence of integrated photonic technology provides an attractive solution of high speed, broad bandwidth and strong parallelism for large-scale information transmission and processing in interconnection, communication and computing. Reconfigurability is necessary for photonic processors to adapt varieties of application scenarios in the fields of data exchange, microwave photonics and neural networks. As yet, thermo-optical effect and carrier plasma dispersion effect are the most common phenomena for optical modulation. However, the volatility not only requires continuous power supply to maintain the devices' state, but also accompanies with serious thermal crosstalk induced by active regions. Hence, the nonvolatile methods that can reconfigure and fix on the current state for a long time after a single external excitation are considered as one of the significant technologies in the next generation of integrated photonics. Nonvolatile reconfiguration has been achieved through trapped-charge effect, bistable micro-electromechanical system (MEMS) with nano-latch mechanism and ferroelectric materials, which suffer from high loss, lower stability and complex process flow. Chalcogenide phase change materials (PCM) have become a promising method to realize compact and nonvolatile reconfigurable integrated photonic devices due to the high optical constant contrast between amorphous state and crystalline state, superiorly stable property and low temperature deposition possibility. Here, we developed a monolithic back-end-of-line integration technology of PCM in silicon photonics, supporting "Zero-change"heterogeneous integration platform at wafer scale. On this basis, nonvolatile integrated photonic devices with excellent performance have been fabricated. It lays a foundation for improving the energy efficiency and integration density of integrated photonic processors and suppressing thermal crosstalk between integrated photonic devices. © 2024 IEEE.

关键词： Silicon wafers

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Flexible multifunctional platform based on piezoelectric acoustics for human–machine interaction and environmental perception

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microsystems & nanoengineering 2022年第5期8卷 91-103页

作者： Qian Zhang Yong Wang dongsheng Li Jin Xie Ran Tao Jingting Luo Xuewu dai Hamdi Torun Qiang Wu Wai Pang Ng Richard Binns YongQing Fu The State Key Laboratory of Fluid Power and Mechatronic Systems Zhejiang University310027 HangzhouChina Faculty of Engineering and Environment University of NorthumbriaNewcastle upon Tyne NE18STUK Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake University310024 HangzhouChina Key Laboratory of Optoelectronic Devices and Systems of Education Ministry and Guangdong Province College of Physics and Optoelectronic EngineeringShenzhen University518060 ShenzhenChina

Flexible human–machine interfaces show broad prospects for next-generation flexible or wearable electronics compared with their currently available bulky and rigid ***,compared to their rigid counterparts,most reported flexible devices(e.g.,flexible loudspeakers and microphones)show inferior performance,mainly due to the nature of their ***,it is of great significance to improve their performance by developing and optimizing new materials,structures and design *** this paper,a flexible acoustic platform based on a zinc oxide(ZnO)thin film on an aluminum foil substrate is developed and optimized;this platform can be applied as a loudspeaker,a microphone,or an ambient sensor depending on the selection of its excitation *** used as a speaker,the proposed structure shows a high sound pressure level(SPL)of~90 dB(with a standard deviation of~3.6 dB),a low total harmonic distortion of~1.41%,and a uniform directivity(with a standard deviation of~4 dB).Its normalized SPL is higher than those of similar devices reported in the recent *** used as a microphone,the proposed device shows a precision of 98%for speech recognition,and the measured audio signals show a strong similarity to the original audio signals,demonstrating its equivalent performance compared to a rigid commercial *** a flexible sensor,this device shows a high temperature coefficient of frequency of−289 ppm/K and good performance for respiratory monitoring.

关键词： acoustics piezoelectric speakers

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Interface Engineering on Inorganic-Organic Hybrid Phototransistors for High-Responsive Near-Infrared Sensing

Interface Engineering on Inorganic-Organic Hybrid Phototrans...

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IEEE Electron devices Technology and Manufacturing Conference (EdTM)

作者： dingwei Li Huihui Ren Yingjie Tang Yitong Chen Yan Wang Qi Huang Bowen Zhu Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China Westlake Institute for Optoelectronics Hangzhou China

ISBN: (数字)9798331504168

ISBN: (纸本)9798331504175

Flexible and high-responsive phototransistors are highly demanded for wearable near-infrared (NIR) image sensors. Hybrid phototransistors utilizing the photogating effect, featuring separate sensing and transport layers, show considerable potential. However, optimizing the photogating effect remains a significant challenge. Here, we proposed a facile interface reduction processing to oxide semiconductors, enabling high-performance $\text{In}_{2}\mathrm{O}_{3}/\mathrm{Y}6$ heterojunction phototransistors with enhanced photo-gating effect for NIR sensing.

关键词： Image sensors fabrication Electric potential Metals Heterojunctions Organic semiconductors Sensors Phototransistors Wearable devices

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Smart bioelectronics and biomedical devices

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Bio-design and Manufacturing 2022年第1期5卷 1-5页

作者： Nanjia Zhou Liang Ma Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China State Key Laboratory of Fluid Power and Mechatronic Systems Zhejiang UniversityHangzhou 310058China School of Mechanical Engineering Zhejiang UniversityHangzhou 310058China

The development of smart bioelectronics and biomedical devices has significantly advanced the field of biomedical engineering,enabling a myriad of applications from basic biomedical research to clinical medicine and *** at the intersection of materials science,mechanical,electrical,and bioengineering,this fascinating field has attracted considerable attention from researchers all over the world,providing new healthcare solutions which were impossible *** brain–machine interface to biomedical nano/micro-robots,different materials and manufacturing methodologies have been developed to advance the functionalities of the bioelectronic systems to meet the ever-increasing demand of biological and bioinspired applications(Fig.1).

关键词： Smart interface electrical

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In-situ real-time monitoring of ultrafast laser processing using wide-field high-resolution snapshot compressive microscopy

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Light(Advanced Manufacturing) 2024年第3期5卷 52-61页

作者： Xiaodong Wang Miao Cao Ziyang Chen Jiao Geng Ting Luo Yufei dou Xing Liu Liping Shi Xin Yuan Zhejiang University Hangzhou 310027China School of Engineering Westlake UniversityHangzhou 310030China School of Physics Harbin Institute of TechnologyHarbin 150001China Hangzhou Institute of Technology Xidian UniversityHangzhou 311231China Westlake Institute for Optoelectronics FuyangHangzhou 311421China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province Westlake UniversityHangzhou 310024China

Over the last few decades,ultrafast laser processing has become a widely used tool for manufacturing microstructures and *** real-time monitoring of laser material processing provides opportunities to inspect processes and provide *** date,in-situ and real-time monitoring of laser material processing has rarely been *** this end,we propose dual-path snapshot compressive microscopy(dP-SCM)for high-speed,large field-of-view,and high-resolution imaging for in-situ and real-time ultrafast laser *** the evaluation of dP-SCM,the field of view,lateral resolution,and imaging speed were measured to be 2 mm,775 nm,and 500 fps,*** ultrafast laser processing,the laser scanning process is observed using a dP-SCM system when translating the sample stage and scanning the focused femtosecond ***,we monitored the development of a self-organized nanograting structure to validate the potential of our system for unveiling new material *** proposed method serves as an add-up(plug-and-play)module for any imaging setup and has vast potential for opening new avenues for high-throughput imaging in laser material processing.

关键词： Snapshot compressive imaging Femtosecond laser processing Laser-induced self-organization

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