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Recent progress on nanostructured bimetallic electrocatalysts for water splitting and electroreduction of carbon dioxide

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Journal of Semiconductors 2020年第9期41卷 59-77页

作者： Can Cui Xiaosong Hu Liaoyong Wen Department of Materials Science and Engineering&Institute of Materials Science University of ConnecticutStorrsConnecticut06269-3136United States of America Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China

The exploitation of renewable energy as well as the elimination of the harmful impact of excessive carbon emission are worldwide concerns for sustainable development of the ecological environment on *** address that,the technologies regarding energy conversion systems,such as water splitting and electroreduction of carbon dioxide,have attracted significant attention for a few ***,to date,the production of green fuels and/or high energy density chemicals like hydrogen,methane,and ethanol,are still suffering from many drawbacks including high energy consumption,low selectivity,and sluggish reaction *** this regard,nanostructured bimetallic materials that is capable of taking the full benefits of the coupling effects between different elements/components with structure modification in nanoscale are considered as a promising strategy for high-performance ***,this review aims to outline the important progress of these nanostructured bimetallic *** starts with the introduction of some important fundamental background knowledge about the reaction mechanism to understand how these reactions ***,we summarize the most recent progress regarding how the nanostructured bimetallic electrocatalysts manipulate the activity and selectivity of catalytic reactions in the order of bimetallic alloying effect,interface/substrate effect of bi-component electrocatalyst,and nanostructuring effect.

关键词： bimetallic electrocatalysts nanostructures water splitting electroreduction of carbon dioxide

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Electrically programmable phase-change photonic memory for optical neural networks with nanoseconds in situ training capability

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Advanced Photonics 2023年第4期5卷 42-50页

作者： Maoliang Wei Junying Li Zequn Chen Bo Tang Zhiqi Jia Peng Zhang Kunhao Lei Kai Xu Jianghong Wu Chuyu Zhong Hui Ma Yuting Ye Jialing Jian Chunlei Sun Ruonan Liu Ying Sun Wei.E.I.Sha Xiaoyong Hu Jianyi Yang Lan Li Hongtao Lin Zhejiang University College of Information Science and Electronic EngineeringState Key Laboratory of Modern Optical InstrumentationKey Laboratory of Micro-Nano Electronics and Smart System of Zhejiang ProvinceHangzhouChina Westlake University School of EngineeringKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang ProvinceHangzhouChina Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhouChina Institute of Microelectronics of the Chinese Academy of Sciences BeijingChina Peking University School of PhysicsFrontiers Science Center for Nano-optoelectronicsState Key Laboratory for Mesoscopic PhysicsBeijingChina

Optical neural networks (ONNs), enabling low latency and high parallel data processing withoutelectromagnetic interference, have become a viable player for fast and energy-efficient processing andcalculation to meet the increasing demand for hash rate. Photonic memories employing nonvolatile phase-change materials could achieve zero static power consumption, low thermal cross talk, large-scale, andhigh-energy-efficient photonic neural networks. Nevertheless, the switching speed and dynamic energyconsumption of phase-change material-based photonic memories make them inapplicable for in situ ***, by integrating a patch of phase change thin film with a PIN-diode-embedded microring resonator,a bifunctional photonic memory enabling both 5-bit storage and nanoseconds volatile modulation wasdemonstrated. For the first time, a concept is presented for electrically programmable phase-changematerial-driven photonic memory integrated with nanosecond modulation to allow fast in situ training and zerostatic power consumption data processing in ONNs. ONNs with an optical convolution kernel constructedby our photonic memory theoretically achieved an accuracy of predictions higher than 95% when testedby the MNIST handwritten digit database. This provides a feasible solution to constructing large-scalenonvolatile ONNs with high-speed in situ training capability.

关键词： phase-change materials optical neural networks photonic memory silicon photonics reconfigurable photonics

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MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

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microsystems & nanoengineering 2021年第4期7卷 1-22页

作者： Hoa Thanh Le Rubaiyet I.Haque Ziwei Ouyang Seung Woo Lee Shelley I.Fried ding Zhao Min Qiu Anpan Han The Rowland Institute at Harvard Harvard UniversityCambridgeMAUSA Department of Mechanical Engineering Technical University of DenmarkLyngbyDenmark Department of Electrical Engineering Technical University of DenmarkLyngbyDenmark Department of Neurosurgery Massachusetts General HospitalHarvard Medical SchoolBostonMAUSA Boston VA Healthcare System BostonMAUSA Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhouChina Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhouChina

MEMS inductors are used in a wide range of applications in micro-and nanotechnology,including RF MEMS,sensors,power electronics,and *** technologies set the boundary conditions for inductor design and their electrical and mechanical *** review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication,presents recent advances in 3d additive fabrication technologies,and discusses the challenges and opportunities of MEMS inductors for two emerging applications,namely,integrated power electronics and *** the four top-down MEMS fabrication approaches,3d surface micromachining and through-substrate-via(TSV)fabrication technology have been intensively studied to fabricate 3d inductors such as solenoid and toroid in-substrate TSV *** 3d inductors are preferred for their high-quality factor,high power density,and low parasitic capacitance,in-substrate TSV inductors offer an additional unique advantage for 3d system integration and efficient thermal *** features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power *** another perspective,3d bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS ***,we discuss inspiring and emerging research opportunities for MEMS inductors.

关键词： inductor power lithography

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In-situ real-time monitoring of ultrafast laser processing using wide-field high-resolution snapshot compressive microscopy

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Light(Advanced Manufacturing) 2024年第3期5卷 52-61页

作者： Xiaodong Wang Miao Cao Ziyang Chen Jiao Geng Ting Luo Yufei dou Xing Liu Liping Shi Xin Yuan Zhejiang University Hangzhou 310027China School of Engineering Westlake UniversityHangzhou 310030China School of Physics Harbin Institute of TechnologyHarbin 150001China Hangzhou Institute of Technology Xidian UniversityHangzhou 311231China Westlake Institute for Optoelectronics FuyangHangzhou 311421China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province Westlake UniversityHangzhou 310024China

Over the last few decades,ultrafast laser processing has become a widely used tool for manufacturing microstructures and *** real-time monitoring of laser material processing provides opportunities to inspect processes and provide *** date,in-situ and real-time monitoring of laser material processing has rarely been *** this end,we propose dual-path snapshot compressive microscopy(dP-SCM)for high-speed,large field-of-view,and high-resolution imaging for in-situ and real-time ultrafast laser *** the evaluation of dP-SCM,the field of view,lateral resolution,and imaging speed were measured to be 2 mm,775 nm,and 500 fps,*** ultrafast laser processing,the laser scanning process is observed using a dP-SCM system when translating the sample stage and scanning the focused femtosecond ***,we monitored the development of a self-organized nanograting structure to validate the potential of our system for unveiling new material *** proposed method serves as an add-up(plug-and-play)module for any imaging setup and has vast potential for opening new avenues for high-throughput imaging in laser material processing.

关键词： Snapshot compressive imaging Femtosecond laser processing Laser-induced self-organization

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Nonvolatile silicon photonics based on monolithic back-end-of-line integration phase-change-materials platform for optical neural networks

Nonvolatile silicon photonics based on monolithic back-end-o...

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2024 Applied Optics and Photonics China: AI in Optics and Photonics, AOPC 2024

作者： Xu, Kai Wei, Maoliang Tang, Bo Li, Junying Li, Lan Lin, Hongtao The State Key Lab of Brain-Machine Intelligence Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Zhejiang University Hangzhou310027 China Institute of Microelectronics of the Chinese Academy of Sciences Beijing100029 China Hangzhou Institute for Advanced Study University of Chinese Academy of Sciences Hangzhou310024 China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Zhejiang Hangzhou310030 China Institute of Advanced Technology Westlake Institute for Advanced Study Zhejiang Hangzhou310024 China

ISBN: (数字)9781510687943

ISBN: (纸本)9781510687936

Benefiting from high parallelism and low latency, photonic integrated circuits (PICs) constructed from on-chip building blocks with diverse functions have emerged as a promising technology in the realm of optical neural networks (ONN). Tunable components, through the utilization of physical mechanisms such as thermo-optic effect and free-carrier plasma dispersion effect, structural motion like microelectromechanical systems (MEMS), or material properties including liquid crystal and two-dimensional materials, play a pivotal role in enabling reconfigurability within PICs. Among these reconfiguration schemes, chalcogenide phase change materials (PCMs) based photonic devices have attracted extensive attention owing to their high energy efficiency and integration density brought by huge refractive index contrasts and nonvolatility of PCMs. However, this nonvolatile modulation method meets difficulty in scalability since the process flow of integrating PCMs into silicon photonics is insupportable in the foundries. Here, we demonstrated a back-end-of-line (BEOL) integration platform for the monolithic integration of PCMs into silicon photonic devices without modification in standard process design kits (PdK). This is achieved by fabricating a low-loss oxide trench to expose the waveguide core at the functional area from the top dielectric layer, with assistance from a silicon nitride etch stop layer. On this basis, integrated photonic devices with stable switching performance and repeatable multi-bit storage capability have been developed, possessing the potential for crucial blocks of PICs in ONN applications that require infrequent reconfiguration, such as hardware error correction before training and data storage in pre-trained models. © 2024 SPIE.

关键词： Silicon nitride

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Nonvolatile electrically reconfigurable silicon photonics enabled by back-end-of-line integration of phase change materials 12

Nonvolatile electrically reconfigurable silicon photonics en...

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Optoelectronic devices and Integration XII 2023

作者： Li, Junying Wei, Maoliang Xu, Kai Tang, Bo Yun, Yiting Zhang, Peng Wu, Yingchun Bao, Kangjian Lei, Kunhao Chen, Zequn Ma, Hui Sun, Chunlei Liu, Ruonan Li, Ming Li, Lan Lin, Hongtao State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Zhejiang University Hangzhou310027 China Hangzhou Institute for Advanced Study University of Chinese Academy of Sciences Hangzhou310024 China Institute of Microelectronics of the Chinese Academy of Sciences Beijing100029 China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Zhejiang Hangzhou310030 China State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing100083 China

ISBN: (纸本)9781510667778

Nonvolatile light-field manipulation via electrically-driven phase transition of chalcogenide phase change materials (PCMs) is regarded as one of the most powerful solutions to low-power-consumption and compact integrated reconfigurable photonics. However, before the breakthrough in large-scale integration approaches linked to wafer foundries, phase-change non-volatile reconfigurable photonics could hardly see their widespread practical applications. Here we demonstrate nonvolatile photonic devices fabricated by back-end-of-line (BOEL) integration of PCMs into the commercial silicon photonics platform. A narrow trench etched into the BOEL dielectric layer exposed the waveguide core and allowed for the direct deposition of various PCM films on the waveguide in the functional areas. Fine-tuning the nonvolatile phase transition of Sb2Se3 via a PIN microheater was verified by realizing the post-fabrication trimming of silicon photonic devices. Our work highlights a reliable platform for large-scale PCM-integrated photonics and validates its precise nonvolatile reconfigurability. © 2023 SPIE.

关键词： Phase change materials

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Pulsed polarized vortex beam enabled by metafiber lasers

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PhotoniX 2024年第1期5卷 110-120页

作者： Chenxi Zhang Lei Zhang He Zhang Bo Fu Jiyong Wang Min Qiu Key Laboratory of Precision Opto-Mechatronics Technology of Education Ministry School of Instrumentation and Optoelectronic EngineeringBeihang UniversityBeijing 100191China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake University18 Shilongshan RoadHangzhou 310024Zhejiang ProvinceChina Institute of Advanced Technology Westlake Institute for Advanced Study18 Shilongshan RoadHangzhou 310024Zhejiang ProvinceChina QianYuan National Laboratory Hangzhou 310000China Key Laboratory of Big Data-Based Precision Medicine Ministry of Industry and Information Technology School of Engineering MedicineBeihang UniversityBeijing 100191China Ministry of Education Engineering Research Center of Smart Microsensors and Microsystems School of Electronics and InformationHangzhou Dianzi UniversityHangzhou 310018China Westlake Institute for Optoelectronics FuyangHangzhou 311421China

Pulsed polarized vortex beams,a special form of structured light,are generated by tailoring the light beam spatiotemporally and witness the growing application demands in nonlinear optics such as ultrafast laser processing and surface plasma ***,existing techniques for generating polarized vortex beams suffer from either low compactness due to the use of bulky components or limited controlment of pulse ***,an all-fiber technique combining plasmonic metafibers with mode conversion method is harnessed to generate high-performance pulsed polarized vortex *** metafibers are utilized as saturable absorbers to produce Q-switched pulses with micro-second duration,while the offset splicing method is employed to partially convert the fundamental transverse mode(LP_(01))to higher-order mode(LP_(11)).Eventually,a polarized vortex beams laser is achieved at the telecom band with a repetition frequency of 116.0 *** impact of geometrical parameters including period of metafibers and offset of splicing on the spatiotemporal properties of pulsed polarized vortex beams is systematically *** findings could pave the way for design,control and generation of all-fiber pulsed polarized vortex beams,and also offer insights into the development of other types of structured laser sources.

关键词： Metafiber Q-switched pulse Polarized vortex beam

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Flexible Photonic Probes for New-Generation Brain−Computer Interfaces

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Accounts of Materials Research 2021年第5期2卷 315-318页

作者： Zequn Chen Lan Li Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China

*** The brain−computer interface(BCI)refers to the direct connection created between human or animal brains and external devices to realize the information exchange between the brain and the device,which has developed rapidly in the past few decades in both regulating and recording neural *** are utilizing these interfaces to map and analyze the brain’s neural network.1 Since 2005,the emergence of optogenetics technology in neuroscience has made high spatial and cellular resolution stimulation possible,enabling neurons to be turned on and off with unprecedented precision.1 This offers a great opportunity for clinical applications because it provides a way to activate or inactivate specific neurons and directly modulate the neural signal for external activities,bringing hope to patients with neurological disorders such as epilepsy,2 Parkinson’s disease,3 hearing impairment,4 and vision impairment.5 Therefore,it is highly desirable to develop implantable optogenetic devices with the capability of single-cell resolution stimulation and ultrafast neural signal recording that can be positioned at an arbitrary region and depth inside the brain.

关键词： stimulation epilepsy neural

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Visible Chalcogenide Metadevices

Visible Chalcogenide Metadevices

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Progress in Electromagnetic Research Symposium (PIERS)

作者： Hao dai Yilin Shi Jieren Song Lan Li Hongtao Lin State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Zhejiang University Hangzhou China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China

ISBN: (数字)9798350375909

ISBN: (纸本)9798350375916

With the evolution of the consumer electronics field, applications such as smart wearable devices, autonomous driving, AR/VR, and smartphones are setting forth more requirements for optical components, emphasizing the necessity for enhanced multifunctionality, miniaturization, and cost-efficiency. Metasurfaces composed of subwavelength nanostructures have introduced a revolutionary approach to address these requirements, undergoing significant theoretical and applied research over the past decade. However, metasurface technology still encounters challenges in optical wavelength extension, reconfigurability, and optical nonlinearities. In comparison to widely utilized metasurface materials such as HfO 2 for ultraviolet, Si 3 N 4 , TiO 2 , GaN for visible, and aSi for near-infrared to mid-infrared, chalcogenide materials exhibit high refractive and transparency at broad optical frequencies. Additionally, chalcogenide materials hold the potential for phase change and nonlinear characteristics, rendering them ideal materials for multifunctional metasurface devices. In this study, we present the inaugural demonstration of chalcogenide metasurface in visible. We designed and fabricated foundational optical devices like metalens and vortex beam, and conducted comprehensive tests to characterize the optical performance of these devices, laying the groundwork for the expansion of chalcogenide visible metasurfaces.

关键词： Chalcogenides Performance evaluation Optical device fabrication Optical vortices Metasurfaces Nonlinear optical devices Solids

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Chalcogenides Phase Change Materials for PICs

Chalcogenides Phase Change Materials for PICs

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IEEE International Conference on Group IV Photonics

作者： Kai Xu Maoliang Wei Kunhao Lei Boshu Sun Yiting Yun Junying Li Lan Li Hongtao Lin College of Information Science and Electronic Engineering State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province Zhejiang University Hangzhou China School of Engineering Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province Westlake University Hangzhou China

A "zero-change" platform for monolithic back-end-of-line integration of phase-change materials (PCM) in silicon photonics was proposed and high performance nonvolatile PCM/Si heterogeneous integrated devices... 详细信息

ISBN: (数字)9798350394047

ISBN: (纸本)9798350394054

关键词： Phase change materials Performance evaluation Chalcogenides Optical losses Power demand Nonvolatile memory Memory management

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