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Effects of fabrication errors on diffraction efficiency for a diffractive membrane

Chinese Optics Letters 2016年第12期14卷 30-35页

作者：王若秋张志宇国成立薛栋林张学军 Key Laboratory of Optical System Advanced Manufacturing Technology of the Chinese Academy of Sciences Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China University of Chinese Academy of Sciences Beijing 100049 China

The demand for space-borne telescopes with an aperture of 20 m is forcing the development of large diameter diffractive Fresnel zone lenses（FZLs） on membranes. However, due to the fabrication errors of multi-level microstructures, the real diffraction efficiency is always significantly smaller than the theoretical value. In this Letter,the effects of a set of fabrication errors on the diffraction efficiency for a diffractive membrane are studied. In order to verify the proposed models, a 4-level membrane FZL with a diameter of 320 mm is fabricated. The fabrication errors of the membrane FZL are measured, and its diffraction efficiency in the ＋1 order is also *** results show that the tested diffraction efficiency is very close to the calculated value based on the proposed models. It is expected that the present work could play a theoretical guiding role in the future development of space-borne diffractive telescopes.

关键词： fabrication overlay aperture verify borne registration deviation etching Fresnel relaxation

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Infrared transparent frequency selective surface based on iterative metallic meshes

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Chinese Physics B 2015年第3期24卷 107-110页

作者：于淼徐念喜高劲松 Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and PhysicsChinese Academy of Sciences University of Chinese Academy of Sciences

In this paper, we present an infrared transparent frequency selective surface（ITFSS） based on iterative metallic meshes, which possesses the properties of high transmittance in infrared band and band-pass effect in millimeter wave band. Cross-slot units are designed on the iterative metallic meshes, which is composed of two same square metallic meshes with a misplaced overlap. In the infrared band of 3–5 μm, the ITFSS has an average transmittance of 80% with a Mg F2 substrate. In the millimeter wave band, a transmittance of-0.74 d B at the resonance frequency of 39.4 GHz is obtained. Moreover, theoretical simulations of the ITFSS diffractive characteristics and transmittance response are also investigated in detail. This ITFSS may be an efficient way to achieve the metamaterial millimeter wave/infrared functional film.

关键词： infrared band metallic meshes frequency selective surface

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Measurement method for the eccentricity of an off-axis asphere with a laser tracker

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中国光学快报（英文版） 2015年第S2期13卷 146-149页

作者： Ruigang Li Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

In this Letter, we present a method to measure the eccentricity of an off-axis asphere using a laser tracker during optical null testing. We first adjust the optical path of the null testing, and then probe some necessary reference surface on the compensator or the off-axis mirror's body with a laser tracker. Next, using the collected data to process, construct, build the coordinate system, solve, and so on, we obtain the eccentricity directly through comparing the central point of the asphere and the tested optical axis. A measurement experiment is conducted with a circular off-axis aspherical mirror;the result shows that the measurement accuracy can reach 0.1859 mm, 6.2% of its tolerance belt. © 2015 Chinese Optics Letters.

关键词： Laser mirrors

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Fabrication and calibration of an aspheric null lens in the testing of a large convex aspheric mirror

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中国光学快报（英文版） 2015年第S2期13卷 37-40页

作者： Donglin Xue Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

Null lenses are always used to test large convex aspheric mirrors. For large convex aspheric mirrors with large deviate wavefronts from the aspheric wavefront to its best sphere wavefront, a traditional null lens composed of a flat and a sphere cannot be used to test. An aspheric null lens needs to be designed and manufactured to test a large convex aspheric mirror with a large deviate wavefront. Another traditional null lens is used to guide the manufacture of the aspheric null lens. The accuracy and feasibility of the aspheric null lens are unknown and should be tested by a high precision computer-generated hologram (CGH). In the article, we introduce the principle of a null lens, designed an aspheric null lens to test a Φ338 mm aspheric SIC mirror whose radius of curvature is 1024 mm, the deviate wavefront from the aspheric wavefront to its best fit sphere wavefront is 66.5728λ PV (λ ¼ 632.8 nm). The result of the aspheric null lens that is tested by a CGH is 0.018λ RMS and satisfies the need of accuracy. The test result of the aspheric mirror is 0.030λ RMS. © 2015 Chinese Optics Letters.

关键词： Aspherics

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Cooperative testing of an optical system of an assembled space telescope

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中国光学快报（英文版） 2015年第S2期13卷 138-140页

作者： Feng Yan Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

A new method developed for wavefront error (WFE) testing of an assembled space telescope is described in this Letter. The main idea of this method is to image a small bright target on the focal plane array assembly by the space telescope itself;the imaging light beams can be reflected to the focal plane array by a plane mirror in front of the aperture of the system under test and two images (one is in-focus and the other is defocused) can be obtained. The WFE of the optical system can be calculated with a phase diversity algorithm according to two images of the target on the focal plane array assembly. The residual error and limitations of this method are discussed and a simulation result is shown, which shows the application potential of this technology. © 2015 Chinese Optics Letters.

关键词： optical systems

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Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

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中国光学快报（英文版） 2015年第S2期13卷 134-137页

作者： Xu Wang Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

This Letter reports a series of experiments on examining the removal function of a 400 mm magnetorheological finishing (MRF) polishing wheel which is aimed at large optical component fabrication. This MRF equipment is assembled on the large computer numerical control center whose effective axial length is 3000 mm. The two different removal functions of the wheel are used to virtually fabricate a 1450 mm concave fused silica aspherical optical mirror. The total fabrication times are 110 and 309 h, respectively. The final surface errors are eventually reduced to 0.014λ and 0.024λ after the process, and the convergence rates are 97.46% and 95.65% in one virtual fabrication cycle. The power spectrum density is used to analyze the spacial frequency based on the final simulating surface error, and the middle and low spacial frequency surface error controlling ability is analyzed in terms of different removal functions. © 2015 Chinese Optics Letters.

关键词： Fused silica

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Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology

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中国光学快报（英文版） 2015年第S2期13卷 141-145页

作者： Xu Wang Binzhi Zhang Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

We use inductively coupled plasma chemical etching technology (PCET) operating at atmospheric pressure to fabricate an optical mirror whose materials are fused silica, reaction bonded SiC, sintered SiC, and Si for the first time, to our best knowledge. This Letter is focused on a primary study of the mirror surface roughness fabricated with a plasma torch on different wafers. The four wafers' surface roughness after PCET fabrication are Ra 0.053, 0.223, 0.612, and 0.027 μm, respectively (increased 5, 40, 1.07, and 2 times, respectively). The micro-transformation principle of the surface roughness is researched with an Olympus LEXT 450. We analyze the main reasons that underpin the surface roughness increase. The experimental results show that the new technology is valid for fabricating Si-based materials. Consequently, inductively coupled PCET operating at atmospheric pressure shows promise for the future. © 2015 Chinese Optics Letters.

关键词： Atmospheric pressure

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Manufacture of a large off-axis SiC parabolic mirror

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中国光学快报（英文版） 2015年第S2期13卷 155-158页

作者： Xiaokun Wang Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

The advantages of manufacturing a space aspheric mirror of SiC material are analyzed, and the key methods and technology of fabricating and measuring SiC aspheric surfaces are introduced and researched. The off-axis SiC aspheric mirror is ground and polished by computer controlled optical surfacing (CCOS) technology with a FSGJ-2 numerical control machine, the contour and optical parameters are measured and controlled by a coordinate measuring machine (CMM) and laser tracker. Finally, an example for fabricating and testing an off-axis parabolic mirror with an aperture of 820 mm is given. A null lens is specifically designed and customized in order to test the large aspheric mirror by interferometry and null compensation. The resulting PV and RMS of the surface error are 0.335λ and 0.018λ (λ is 632.8 nm), respectively, which meets the requirements of the optical design. © 2015 Chinese Optics Letters.

关键词： Silicon carbide

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Electrical properties of zinc-oxide-based thin-film transistors using strontium-oxide-doped semiconductors

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Chinese Physics B 2015年第10期24卷 599-603页

作者：吴绍航张楠胡永生陈红蒋大鹏刘星元 State Key Laboratory of Luminescence and Applications Changchun Institute of OpticsFine Mechanicsand PhysicsChinese Academy of Sciences University of Chinese Academy of Sciences Key Laboratory of Optical System Advanced Manufacturing Technology Chinese Academy of Sciences

Strontium-zinc-oxide（SrZnO） films forming the semiconductor layers of thin-film transistors（TFTs） are deposited by using ion-assisted electron beam evaporation. Using strontium-oxide-doped semiconductors, the off-state current can be dramatically reduced by three orders of magnitude. This dramatic improvement is attributed to the incorporation of strontium, which suppresses carrier generation, thereby improving the TFT. Additionally, the presence of strontium inhibits the formation of zinc oxide（ZnO） with the hexagonal wurtzite phase and permits the formation of an unusual phase of ZnO, thus significantly changing the surface morphology of ZnO and effectively reducing the trap density of the channel.

关键词： thin-film transistor ZnO electron beam evaporation

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Fabrication method for inductive mesh film on spherical substrates

Fabrication method for inductive mesh film on spherical subs...

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作者： Feng, Xiaoguo Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics and Fine Mechanics and Physics Chinese Academy of Science Dong Nanhu Road Changchun Jilin3888 China

To fabricate an inductive mesh film with a micron grade line width on a concave spherical substrate, we put forward a laser direct writing method of concentric optical scan, and it means that the intersecting point of three kinematic axes and an optical axis is the curvature centre of concavity. The specific scanning way is separated into four steps. Firstly, a concave spherical substrate of coating photoresist is installed erectly on a horizontal shafting, and a laser beam is focused on the edge of photoresist surface. Afterward, the substrate and horizontal shafting rotate as a whole with the rotary of an erect shafting, a line is written on the photoresist surface while a rotation period is accomplished. Then, the laser beam is turned an angle at the pitching direction, and the substrate is rotated again a cycle, so another line is written. Repeating this way, we get a set of latitude lines. Finally, the substrate makes a quarter turn around the horizontal axis, and repeating preceding processes, we get a mesh figure of intersecting latitude lines. In the experiment part, we fabricate an inductive mesh film with a period 600 μm and a line width 7 μm on a concave spherical substrate. Copyright © 2015 Inderscience Enterprises Ltd.

关键词： Laser beams

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