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advanced Patterning Solutions (IWAPS), International Workshop on

作者： Jiaxin Lin Lisong Dong Taian Fan Xu Ma Rui Chen Yayi Wei a Integrated Circuit Advanced Process Center Institute of Microelectronics of Chinese Academy of Sciences b University of Chinese Academy of Sciences Beijing China a Integrated Circuit Advanced Process Center Institute of Microelectronics of Chinese Academy of Sciences Beijing China c Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China School of Optics and Photonics Beijing Institute of Technology Beijing China Integrated Circuit Advanced Process Center Institute of Microelectronics of Chinese Academy of Sciences University of Chinese Academy of Sciences Beijing China

ISBN: (数字)9781728175775

ISBN: (纸本)9781728175782

Near-field calculation for thick mask is a fundamental task in lithography simulations. This paper proposes a fully convolution network (FCN) method to improve the efficiency of three-dimensional (3D) mask near-field calculation compared to the rigorous electromagnetic field (EMF) simulation methods. Taking into account the 3D mask effects, the network is trained based on a set of mask samples and the corresponding near-field data obtained by the EMF simulator. During the testing stage, the trained FCN is used to rapidly predict the diffraction near-field of the testing mask patterns. The performance of the proposed FCN approach is evaluated by simulations based on EUV lithography.

关键词： Solid modeling Extreme ultraviolet lithography Three-dimensional displays Convolution Diffraction Task analysis Testing

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Permafrost‒vegetation controls on water availability over the Qinghai‒Tibet Plateau

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Advances in Climate Change Research 2025年

作者： Fang Ji Lin-Feng Fan Shan-Shui Yuan Xing-Xing Kuang Liu-Jun Zhu Jun-Liang Jin Ying-Ying Yao Jian-Yun Zhang Chun-Miao Zheng The National Key Laboratory of Water Disaster Prevention Hohai University Nanjing 210024 China Yangtze Institute for Conservation and Development Hohai University Nanjing 210024 China Key Laboratory of Mountain Hazards and Engineering Resilience Institute of Mountain Hazards and Environment Chinese Academy of Sciences Chengdu 610213 China Key Laboratory of Hydrologic-Cycle and Hydrodynamic-System of Ministry of Water Resources Hohai University Nanjing 210024 China State Environmental Protection Key Laboratory of Integrated Surface Water-Groundwater Pollution Control School of Environmental Science and Engineering Southern University of Science and Technology Shenzhen 518055 China Department of Earth and Environmental Science School of Human Settlements and Civil Engineering Xi’an Jiaotong University Xi’an 710049 China State Key Laboratory of Hydrology-Water Resources and Hydraulic Engineering Nanjing Hydraulic Research Institute Nanjing 210029 China Eastern Institute for Advanced Study Eastern Institute of Technology Ningbo 315200 China

Permafrost degradation substantially affects water resources within the cryosphere. It is crucial to elucidate the dynamics of water availability influenced by both permafrost degradation and climate change to fully comprehend the water cycle in cold regions, such as the Qinghai‒Tibet Plateau (QTP). While existing studies have established the hydrological consequences of permafrost degradation through altered soil hydraulics and water storage capacity, the complex interplay between thawing permafrost and vegetation dynamics—particularly their synergistic regulation of precipitation partitioning and runoff generation through root-zone water accessibility—are poorly understood, creating critical knowledge gaps in predicting long-term water availability trajectories. In this study, we explore the influence of permafrost-vegetation interactions on regional water availability on the QTP by integrating the effects of permafrost degradation on vegetation into the Budyko-Fu model. Our results reveal a consistent increase in surface runoff ( R ) of the permafrost regions from 1981 to 2100, predominantly driven by rising precipitation. However, shifts in vegetation patterns, prompted by permafrost degradation, significantly modify hydrological partitioning, leading to non-monotonic variations in the runoff to precipitation ratio ( R/P ). Notably, early-stage permafrost thaw enhances vegetation growth and evapotranspiration, which results in a decrease in R/P . Conversely, deeper permafrost thaw ( e.g ., beyond the root zone of vegetation) can lead to vegetation degradation, which subsequently reduces evapotranspiration and consequently increasing the R/P ratio. These findings underscore the pivotal role of vegetation in regulating the hydrological cycle and affecting water availability in permafrost-affected regions.

关键词： Water availability Permafrost degradation Vegetation Climate change Qinghai‒Tibet Plateau

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Gradient piezoelectric composites for ultrasonic transducer design and imaging applications

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Journal of Materiomics 2025年第6期11卷

作者： Chenxue Hou Zhaoxi Li Chunlong Fei Qibo Lin Xiaofei Luo Xiongwei Wei Yiheng Yang Qi Lu Yi Quan Guangzhi Dong Zeyu Chen Xiaozhou Lü Weimin Bao Yintang Yang Shaanxi Provincial Key Laboratory of Integrated Circuit and System Integration Faculty of Integrated Circuit Xidian University Xi'an 710071 China The State Key Laboratory of Analog and Mixed-Signal VLSl Institute of Microelectronics University of Macau Macao 999078 China School of Aerospace Science and Technology Xidian University Xi'an 710071 China State Key Laboratory of Precision Manufacturing for Extreme Service Performance College of Mechanical and Electrical Engineering Central South University Changsha 410083 China College of Automotive and Mechanical Engineering Changsha University of Science and Technology Changsha 410114 China Hunan Province University Key Laboratory of Intelligent Testing and Control Technology for Engineering Equipment Changsha 410114 China School of Advanced Materials and Nanotechnology Xidian University Xi'an 710126 China Furong Laboratory (Precision Medicine) Changsha 410008 China National Engineering Research Center of Personalized Diagnostic and Therapeutic Technology Xiangya Hospital Central South University Changsha 410008 China Hunan Engineering Research Center of Skin Health and Disease Xiangya Hospital Central South University Changsha 410008 China

Ultrasonic imaging technology has advanced rapidly, the escalating demand for imaging quality has driven the continuous development of ultrasonic transducers featuring high-performance. Among them, the crucial factors constraining the further enhancement of imaging quality are the frequency of the device and the intensity of the echo signal. Piezoelectric composites have become a hotspot for ultrasonic transducers and imaging applications due to their excellent properties. However, due to the limitations of the accuracy of the cutting process, the development of piezoelectric/polymer composites is often undermined by undesirable pseudo-vibrations, especially in high-frequency applications, which will significantly reduce energy conversion efficiency. In this study, a novel design method of 1–3 piezoelectric composites with gradient nanoparticle doped polymer is proposed to eliminate the undesired lateral vibrations. Based on the optimized composites, a high-performance composite ultrasonic transducer with a center frequency of 8.51 MHz is prepared. Compared with the traditional composite transducer, the optimized transducer improves the echo voltage amplitude significantly, reaching nearly 3 times. The above advantages are further verified in high-quality ultrasound and photoacoustic imaging. The optimization method has valuable guidance for the design of high-frequency composite transducers, which have great potential in ultrasonic and photoacoustic imaging applications.

关键词： Piezoelectric composites Ultrasonic transducer Imaging applications Lateral vibration Finite element analysis

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Machine learning approach for the prediction of electron inelastic mean free paths

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Physical Review Materials 2021年第3期5卷 033802-033802页

作者： Xun Liu Lihao Yang Zhufeng Hou Bo Da Kenji Nagata Hideki Yoshikawa Shigeo Tanuma Yang Sun Zejun Ding Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics University of Science and Technology of China Hefei Anhui 230026 People's Republic of China Research and Services Division of Materials Data and Integrated System National Institute for Materials Science 1-1 Namiki Tsukuba Ibaraki 305-0044 Japan State Key Laboratory of Structural Chemistry Fujian Institute of Research on the Structure of Matter Chinese Academy of Sciences Fuzhou 350002 China Research Center for Advanced Measurement and Characterization National Institute for Materials Science 1-2-1 Sengen Tsukuba Ibaraki 305-0047 Japan Department of Applied Physics and Applied Mathematics Columbia University New York NY 10027 USA

The prediction of electron inelastic mean free paths (IMFPs) from simple material parameters is a challenging problem in studies using electron spectroscopy and microscopy. Herein, we propose a machine learning (ML) approach to predict IMFPs from some basic material property data. The ML model showed excellent performance based on the calculated IMFPs for a group of 41 elemental materials [Li, Be, C (graphite), C (diamond), C (glassy), Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au, and Bi] from a previous paper [Shinotsuka et al., Surf. Interface Anal. 47, 871 (2015); Surf. Interface Anal. 47, 1132 (2015)]. which was comparable with that of the robust Tanuma-Powell-Penn (TPP-2M) formula. The developed ML model was then extended to materials that do not have reported IMFPs in the database. The IMFPs for 18 transition and lanthanide metals (Mn, Zn, Zr, Tc, Cd, La, Ce, Pr, Nd, Pm, Sm, Eu, Ho, Er, Tm, Yb, Lu, and Hg) were predicted by the ML model. In the comparison with full-Penn algorithm-calculated IMFPs through two newly found experimental energy loss functions (ELFs), i.e., Mn and Zr, the Gaussian process regression-predicted IMFPs not only agreed well with those calculated using the TPP-2M formula in the energy range >50 eV but were also consistent with the trend of IMFPs calculated through experimental ELFs in the range of 2.7–50 eV, where the TPP-2M formula cannot be used. Our findings suggest that ML is very powerful and efficient and has great potential to complete a database of IMFPs for materials that can prove solutions closer to reality than empirical models on materials with similar physical and chemical properties and can be applied to other different situations for correlated information prediction.

关键词： Data analysis Machine learning Spectroscopy

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Non-Linear 3d Reconstruction For Compressive X-Ray Tomosynthesis

Non-Linear 3d Reconstruction For Compressive X-Ray Tomosynth...

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IEEE International Conference on Image Processing

作者： Qile Zhao Xu Ma Angela Cuadros Gonzalo R. Arce Rui Chen Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China School of Optics and Photonics Beijing Institute of Technology Beijing China Department of Electrical and Computer Engineering University of Delaware USA Integrated Circuit Advanced Process Center Institute of Microelectronics of Chinese Academy of Sciences Beijing China

ISBN: (数字)9781728163956

ISBN: (纸本)9781728163963

Compressive X-ray tomosynthesis is an emerging technology that can be used for medical diagnosis, safety inspection and industrial non-destructive testing. Traditional compressive X-ray tomosynthesis uses sequential illumination to interrogate the object of interest, which generates non-overlapping projection measurements. However, when multiple X-ray sources emit simultaneously, the projections corresponding to different sources overlap creating multiplexed measurements. Such measurement strategy leads to a non-linear reconstruction problem. The reconstruction of the three-dimensional (3D) object from multiplexed projections is an important problem. This paper proposes a non-linear 3D reconstruction approach for compressive X-ray tomosynthesis, where a set of coding masks are used to generate structured illumination and reduce radiation dose. The effectiveness of the method is verified by simulation experiments. It is shown that the proposed approach can reconstruct high-quality images with just a few snapshots.

关键词： Image reconstruction X-ray imaging Detectors Biomedical imaging Three-dimensional displays Encoding

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DeePMD-kit v3: A Multiple-Backend Framework for Machine Learning Potentials

arXiv

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arXiv 2025年

作者： Zeng, Jinzhe Zhang, Duo Peng, Anyang Zhang, Xiangyu He, Sensen Wang, Yan Liu, Xinzijian Bi, Hangrui Li, Yifan Cai, Chun Zhang, Chengqian Du, Yiming Zhu, Jia-Xin Mo, Pinghui Huang, Zhengtao Zeng, Qiyu Shi, Shaochen Qin, Xuejian Yu, Zhaoxi Luo, Chenxing Ding, Ye Liu, Yun-Pei Shi, Ruosong Wang, Zhenyu Bore, Sigbjørn Løland Chang, Junhan Deng, Zhe Ding, Zhaohan Han, Siyuan Jiang, Wanrun Ke, Guolin Liu, Zhaoqing Lu, Denghui Muraoka, Koki Oliaei, Hananeh Singh, Anurag Kumar Que, Haohui Xu, Weihong Xu, Zhangmancang Zhuang, Yong-Bin Dai, Jiayu Giese, Timothy J. Jia, Weile Xu, Ben York, Darrin M. Zhang, Linfeng Wang, Han School of Artificial Intelligence and Data Science Unversity of Science and Technology of China Hefei China AI for Science Institute Beijing100080 China DP Technology Beijing100080 China Academy for Advanced Interdisciplinary Studies Peking University Beijing100871 China State Key Lab of Processors Institute of Computing Technology Chinese Academy of Sciences Beijing100871 China University of Chinese Academy of Sciences Beijing China Baidu Inc. Beijing China Department of Computer Science University of Toronto TorontoON Canada Department of Chemistry Princeton University PrincetonNJ08540 United States University of Chinese Academy of Sciences Beijing100871 China State Key Laboratory of Physical Chemistry of Solid Surfaces iChEM College of Chemistry and Chemical Engineering Xiamen University Xiamen361005 China College of Integrated Circuits Hunan University Changsha410082 China State Key Laboratory of Advanced Technology for Materials Synthesis and Processing Center for Smart Materials and Device Integration School of Material Science and Engineering Wuhan University of Technology Wuhan430070 China College of Science National University of Defense Technology Changsha410073 China Hunan Key Laboratory of Extreme Matter and Applications National University of Defense Technology Changsha410073 China ByteDance Research Beijing100098 China Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences Ningbo315201 China College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences Beijing100049 China Key Laboratory of Theoretical and Computational Photochemistry of Ministry of Education College of Chemistry Beijing Normal University Beijing100875 China Department of Geosciences Princeton University PrincetonNJ08544 United States Department of Applied Physics and Applied Mathematics Columbia University New YorkNY10027 United States IKKEM Fujian Xiamen361005 China Graduate

In recent years, machine learning potentials (MLPs) have become indispensable tools in physics, chemistry, and materials science, driving the development of software packages for molecular dynamics (MD) simulations and related applications. These packages, typically built on specific machine learning frameworks such as TensorFlow, PyTorch, or JAX, face integration challenges when advanced applications demand communication across different frameworks. The previous TensorFlow-based implementation of DeePMD-kit exemplified these limitations. In this work, we introduce DeePMD-kit version 3, a significant update featuring a multi-backend framework that supports TensorFlow, PyTorch, JAX, and PaddlePaddle backends, and demonstrate the versatility of this architecture through the integration of other MLPs packages and of Differentiable Molecular Force Field. This architecture allows seamless backend switching with minimal modifications, enabling users and developers to integrate DeePMD-kit with other packages using different machine learning frameworks. This innovation facilitates the development of more complex and interoperable workflows, paving the way for broader applications of MLPs in scientific research. Copyright © 2025, The Authors. All rights reserved.

关键词： Molecular dynamics

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Comprehensive Theoretical Quantification of Secondary Electron Emission from Silicon

SSRN

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SSRN 2023年

作者： Khan, Muhammad Saadat Shakoor Mao, Shifeng Zou, Yanbo Lu, Dabao Da, Bo Li, Yonggang Ding, Zejun Department of Physics University of Science and Technology of China Anhui Hefei230026 China Hefei National Research Center for Physical Sciences at the Microscale University of Science and Technology of China Anhui Hefei230026 China Department of Nuclear Science and Engineering University of Science and Technology of China Anhui Hefei230026 China School of Physics and Electronic Engineering Xinjiang Normal University Xinjiang Urumchi830054 China Microscope Science and Technology Limited Anhui Hefei230093 China Research and Services Division of Materials Data and Integrated System National Institute for Materials Science 1-1 Namiki Ibaraki Tsukuba305-0044 Japan Research Center for Advanced Measurement and Characterization National Institute for Materials Science 1-2-1 Sengen Ibaraki Tsukuba305-0047 Japan Key Laboratory of Materials Physics Insititute of Solid State Physics Chinese Academy of Sciences Anhui Hefei230031 China

Though intensive experimental studies have been carried out on electron emission properties in past decades, the reliable data from accurate experimental measurements for clean and smooth surfaces are still quite limited. In this work, we have performed a comprehensive Monte Carlo simulation of electron emission yields, the secondary electron yield (SEY,δ), backscattered electron coefficient (BSC,η) and total electron yield (TEY,σ=δ+η), from silicon and the uncertainty quantification of the theoretical calculation results for the first time. The considered uncertainty factors in the physical modelling include work function data, optical energy loss function data, dielectric function models for electron inelastic scattering and the scattering potentials for electron elastic scattering. The calculation results show that δ is significantly influenced by the work function while the dielectric function model has a slight effect. Elastic scattering potential and energy loss function affects both δ and η. Our simulatedσ η data agree with most of the experimental measurements while the simulated mean σ data are well below most of the experimental data. The experimental σ data measured by Goto lie within the uncertainty range of our simulation results. This work has provided sufficient ground for the necessity of building a theoretical database of electron emission yield. © 2023, The Authors. All rights reserved.

关键词： Silicon

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The China groundwater crisis: A mechanistic analysis with implications for global sustainability

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Sustainable Horizons 2022年 4卷

作者： Lancia, Michele Yao, Yingying Andrews, Charles B. Wang, Xiaoli Kuang, Xingxing Ni, Jinren Gorelick, Steven M. Scanlon, Bridget R. Wang, Yanxin Zheng, Chunmiao State Environmental Protection Key Laboratory of Integrated Surface Water-Groundwater Pollution Control School of Environmental Science and Engineering Southern University of Science and Technology Shenzhen China EIT Institute for Advanced Study Ningbo China Department of Earth and Environmental Sciences School of Human Settlements and Civil Engineering Xi'an Jiaotong University Xi'an China S.S. Papadopulos & Associates Inc. RockvilleMD United States Department of Civil Engineering The University of Hong Kong Hong Kong Hong Kong College of Environmental Sciences and Engineering Peking University Beijing China Department of Earth System Science Stanford University StanfordCA United States Bureau of Economic Geology Jackson School of Geosciences University of Texas at Austin AustinTX United States China University of Geosciences Wuhan China

Over the past several decades, China has rapidly depleted groundwater storage, and has lagged in managing and protecting this resource. As a result, dried up rivers, land subsidence, saltwater intrusion, and wetland losses are extensive. To assist with managing this vital groundwater resource, we constructed the first national-scale numerical groundwater flow model of China to provide a comprehensive overview and understanding of the subsurface flow dynamics. The groundwater model is three-dimensional with a 10 km by 10 km horizontal resolution and five discretized vertical layers (up to 1700 m below the land surface). The calibrated model matched calculated to observed water levels and sufficiently reproduced water budgets. The model was used to reconstruct groundwater depletion by retracing the different stages of Chinese economic development. From 1945 to 2020, the northern provinces are characterized by an average groundwater depletion of ∼16.7 km3/yr (equivalent to 30% of the Yellow River's annual flow) while southern China has experienced no substantial groundwater depletion. Groundwater depletion is consistent with a large observed reduction in groundwater discharge as baseflow to the Yellow River (-23%) relative to negligible variation in baseflow in the Yangtze River. Our study provides a holistic tool to support development of nationwide water management strategies and temper the effects of a future water crisis that China's growing economy could propagate at the global scale. © 2022

关键词： Groundwater resources

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Laser Study for DICE-based Registers in a Commercial 130nm Process Technology

Laser Study for DICE-based Registers in a Commercial 130nm P...

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International Conference on integrated Circuits and Microsystems (ICICM)

作者： Lei Li Xianjun Tan Wanting Zhou Lei Xie Yu Song Key Laboratory of Advanced Integrated Electronic System Ministry of Education (AIES) UESTC Chengdu China China Academy of Engineering Physics Microsystem and Terahertz Research Center Chengdu China

In this paper, DICE-based register with SET filter architecture was developed for examining the single event vulnerability of DICE-Flip/Flop. Five DICE-based shift register chains each comprised of 1000 flip-flops have been implemented in a commercial 130nm bulk CMOS process. Measured SEE immunity in laser testing, and test results are described. A threshold laser energy of about 0.73nJ at VDD = 1. 2 V under room temperature is demonstrated. And the statured cross section is about 2×10 -9 cm 2 /bit. The designed DICE-based Flip/Flop is immune to SEL in the laser testing. These testing results demonstrate that the designed DICE-based registers can be used for space applications.

关键词： Delays Testing Computer architecture Logic gates Single event upsets Measurement by laser beam Transistors

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Improved joint antenna selection and user scheduling for massive MIMO systems 16

Improved joint antenna selection and user scheduling for mas...

引用

16th IEEE/ACIS International Conference on Computer and Information Science, ICIS 2017

作者： Dong, Yuhan Tang, Yuanyuan Shenzhen, Kai Zhang Key Laboratory of Advanced Sensor and Integrated System Graduate School at Shenzhen Tsinghua University China

ISBN: (纸本)9781509055074

Massive multi-input multi-output (MIMO) technology is promising by employing a large number of antennas at the base station to support a large amount of users. However, due to the limitation of analog front-ends at the base station, the antenna selection and user scheduling strategies are essential to achieve spatial diversity and reduce hardware cost at the same time. In this work, we consider the strategy of joint antenna selection and user scheduling (JASUS) for uplink massive MIMO systems and propose a greedy two-step JASUS algorithm referred to as largest minimum singular value based JASUS (LMSV-JASUS). In its first step, a simplified downward branch and bound based JASUS is used to find a near-optimal antenna and user sets whose channel matrix has the near-largest MSV. In its second step, a swapping-based algorithm is proposed to find a better solution by swapping antennas and users between the selected and the discarded. The numerical results suggest that the proposed algorithm outperforms traditional approaches in terms of system sum-rate and computational complexity. © 2017 IEEE.

关键词： Antennas

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