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micropatterned piezoelectric films induced by modulated corona field for weak signal detection

Chemical Engineering Journal 2025年 517卷

作者： Fu Lv Chenghang Yu Bing Liu Jiamin Lin Zijian Hong Yongjun Wu Zhaohui Ren Qilong Zhang Shurong Dong Jikui Luo Juan Li Yuhui Huang School of Materials Science and Engineering Cyrus Tang Center for Sensor Materials and Applications Innovation Center of Yangtze Delta Institute of Fundamental and Transdisciplinary Research Zhejiang University Hangzhou Zhejiang 310058 China Nanhu Brain-computer Interface Institute Hangzhou Zhejiang 311100 China School of Engineering Hangzhou City University Hangzhou Zhejiang 310015 China College of Electronic Information and Engineering Hangzhou Dianzi University Hangzhou Zhejiang 310018 China Zhejiang Key Laboratory of Advanced Solid State Energy Storage Technology and Applications Taizhou Institute of Zhejiang University Taizhou Zhejiang 318000 China College of Information Science and Electronic Engineering Key Lab of Advanced Micro/Nano Electronic Devices & Smart Systems of Zhejiang Zhejiang University Hangzhou Zhejiang 310027 China College of Materials and Science Engineering Zhejiang University of Technology Hangzhou Zhejiang 310014 China

Enhancing the inherent piezoelectricity and introducing innovative structural designs are the two fundamental strategies for enhancing the pressure sensitivity of P(VDF-TrFE)-based sensors. In this study, we propose a scalable and cost-effective manufacturing approach that utilizes a modulated corona field to create micropatterns on the surface of P(VDF-TrFE) films, and enhance their piezoelectric properties during the annealing and recrystallization process. The micropatterned P(VDF-TrFE) films exhibit a distinctive “wavy” microstructure and possess ultrahigh piezoelectric properties (d 33 ∼ 35.6 pC/N), resulting in excellent sensitivity (∼477.94 mV/kPa). To unravel the underlying mechanism responsible for this superior performance, we employ finite element modeling and phase-field simulations. Our findings reveal that the modulated corona field generates an equipotential surface with a characteristic “wavy” distribution and promotes the creation of nucleation sites for the polar β phase in P(VDF-TrFE) films. A real-time monitoring system is further exploited with the obtained micropatterned P(VDF-TrFE) films for detecting radial artery pulse signals. The results obtained from this work hold great promise for the development of highly sensitive sensors, with wide-ranging applications in healthcare and environmental monitoring.

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Transverse Patterns and Dual-Frequency Lasing in a Low-Noise Nonplanar-Ring Orbital-Angular-Momentum Oscillator

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Physical Review Applied 2020年第2期13卷 024067-024067页

作者： Yaqin Cao Ping Liu Cuifang Hou Yanne K. Chembo Zehuang Lu Guoping Lin MOE Key Laboratory of Fundamental Physical Quantities Measurement Hubei Key Laboratory of Gravitation and Quantum Physics PGMF and School of Physics Huazhong University of Science and Technology Wuhan 430074 China Institute for Research in Electronics and Applied Physics (IREAP) and Department of Electrical and Computer Engineering University of Maryland College Park Maryland 20742 USA Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System School of Science Harbin Institute of Technology Shenzhen 518055 China

Monolithic optical cavities employing total internal reflections are appealing compact platforms for a wide range of applications from fundamental physics to industry applications. We characterize the transverse patterns of a millimeter-size monolithic nonplanar ring vortex laser pumped by a Gaussian beam. Vortex beams carrying orbital angular momentum (OAM) up to 30 together with vortex crystals and petal patterns are observed. The rigid nature of the monolithic cavity brings along its low-noise lasing performance for these beams. A frequency noise floor as low as 0.1Hz/Hz1/2 corresponding to sub-Hz instantaneous linewidth is measured. Furthermore, we demonstrate low-noise dual-frequency lasing with phase noise as low as −118dBc/Hz at 10-kHz offset for the beatnote at 8.2 GHz. We expect that such versatile and compact OAM laser sources can facilitate multiple applications including optical communications, optical tweezers, and laser metrology such as dual-frequency Doppler lidar.

关键词： Angular momentum of light Optical quantum information processing Optical sources & detectors Optical vortices Photonics Solid state lasers Spatial profiles of optical beams Cavity resonators

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Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline𝛽β-Ga_(2)O_(3)thin film on SiC

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fundamental Research 2021年第6期1卷 691-696页

作者： Wenhui Xu Tiangui You Yibo Wang Zhenghao Shen Kang Liu Lianghui Zhang Huarui Sun Ruijie Qian Zhenghua An Fengwen Mu Tadatomo Suga Genquan Han Xin Ou Yue Hao Xi Wang State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China The State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology School of MicroelectronicsXidian UniversityXi’an 710071China School of Science and Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System Harbin Institute of TechnologyShenzhen 518055China Department of Physics State Key Laboratory of Surface PhysicsInstitute of Nanoelectronic Devices and Quantum ComputingFudan UniversityShanghai 200433China High-Frequency High-Voltage Device and Integrated Circuits R&D Center Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China Collaborative Research Center Meisei UniversityHinoJapan Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

The semiconductor,β-Ga_(2)O_(3)is attractive for applications in high power electronic devices with low conduction loss due to its ultra-wide bandgap(∼4.9 eV)and large Baliga’s figure of ***,the thermal conductivity of𝛽β-Ga_(2)O_(3)is much lower than that of other wide/ultra-wide bandgap semiconductors,such as SiC and GaN,which results in the deterioration of𝛽β-Ga_(2)O_(3)-based device performance and reliability due to *** overcome this problem,a scalable thermal management strategy was proposed by heterogeneously integrating wafer-scale single-crystalline𝛽β-Ga_(2)O_(3)thin films on a highly thermally conductive SiC *** of the transferred𝛽β-Ga_(2)O_(3)thin film indicated a uniform thickness to within±2.01%,a smooth surface with a roughness of 0.2 nm,and good crystalline quality with an X-ray rocking curves(XRC)full width at half maximum of 80 *** thermoreflectance measurements were employed to investigate the thermal *** thermal performance of the fabricated𝛽β-Ga_(2)O_(3)/SiC heterostructure was effectively improved in comparison with that of the𝛽β-Ga_(2)O_(3)bulk wafer,and the effective thermal boundary resistance could be further reduced to 7.5 m 2 K/GW by a post-annealing *** barrier diodes(SBDs)were fabricated on both a𝛽β-Ga_(2)O_(3)/SiC heterostructured material and a𝛽β-Ga_(2)O_(3)bulk *** thermal imaging revealed the temperature increase of the SBDs on𝛽β-Ga_(2)O_(3)/SiC to be one quarter that on the𝛽β-Ga_(2)O_(3)bulk wafer with the same applied power,which suggests that the combination of the𝛽-Ga_(2)O_(3)thin film and SiC substrate with high thermal conductivity promotes heat dissipation in𝛽β-Ga_(2)O_(3)-based devices.

关键词： Thermal management Heterogeneous integration Wafer scale𝛽β-Ga_(2)O_(3)on SiC Ion-cutting technique Schottky barrier diodes(SBDs) Transient thermoreflectance(TTR) measurements

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Pressure-induced emission in 0D metal halide(EATMP)SbBr5 by regulating exciton-phonon coupling

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Chinese Journal of Structural Chemistry 2024年第7期43卷 47-53页

作者： Jiayuan Liang Xin Mi Songhao Guo Hui Luo Kejun Bu Tonghuan Fu Menglin Duan Yang Wang Qingyang Hu Rengen Xiong Peng Qin Fuqiang Huang Xujie Lü Center for High Pressure Science and Technology Advanced Research(HPSTAR) Shanghai201203China State Key Laboratory of High Performance Ceramics and Superfine Microstructure Shanghai Institute of CeramicsChinese Academy of SciencesShanghai200050China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Center of Micro-Nano System School of Information Science and TechnologyFudan UniversityShanghai200433China Ordered Matter Science Research Center Nanchang UniversityNanchang330031China State Key Lab of Metal Matrix Composites School of Materials Science and EngineeringShanghai Jiao Tong UniversityDongchuan Road 800Shanghai200240China Shanghai Key Laboratory of Material Frontiers Research in Extreme Environments(MFree) Shanghai Advanced Research in Physical Sciences(SHARPS)PudongShanghai201203China

Zero-dimensional(0D)hybrid metal halides are considered as promising light-emitting materials due to their unique broadband emission from self-trapped excitons(STEs).Despite substantial progress in the development of these materials,the photoluminescence quantum yields(PLQY)of hybrid Sb-Br analogs have not fully realized the ca-pabilities of these materials,necessitating a better fundamental understanding of the structure-property ***,we have achieved a pressure-induced emission in 0D(EATMP)SbBr5(EATMP=(2-aminoethyl)trimethylphosphanium)and the underlying mechanisms are investigated using in situ experimental characterization and first-principles *** pressure-induced reduction in the overlap between the STE states and ground states(GSs)results in the suppression of phonon-assisted non-radiative *** photoluminescence(PL)evo-lution is systematically demonstrated to be controlled by the pressure-regulated exciton-phonon coupling,which can be quantified using Huang-Rhys *** detailed studies of the S-PLQY relation in a series of 0D hybrid antimony halides,we establish a quantitative structure-property relationship that regulating S value toward 21 leads to the optimized *** work not only sheds light on pressure-induced emission in 0D hybrid metal halides but also provides valuable insights into the design principles for enhancing the PLQY in this class of materials.

关键词： 0D hybrid metal halides Pressure-induced emission Structure-property relationship Huang-Rhys factor Exciton-phonon coupling

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Hundredfold increase of stimulated Brillouin-scattering bandwidth in whispering-gallery mode resonators

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Photonics Research 2023年第6期11卷 917-924页

作者： GUOPING LIN JINGYI TIAN TANG SUN QINGHAI SONG YANNE K.CHEMBO Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System School of ScienceHarbin Institute of TechnologyShenzhen 518055China Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems Shenzhen 518055China Department of Electrical and Computer Engineering&Institute for Research in Electronics and Applied Physics(IREAP) University of MarylandCollege ParkMaryland 20742USA

Backward stimulated Brillouin scattering(SBS)is widely exploited for various applications in optics and *** typically features a narrow gain bandwidth of a few tens of megahertz in fluoride *** we report a hundredfold increase of SBS bandwidth in whispering-gallery mode *** crystalline orientation results in a large variation of the acoustic phase velocity upon propagation along the periphery,from which a broad Brillouin gain is *** 2.5 GHz wide Brillouin gain profile is theoretically found and experimentally *** phenomena with Brillouin shift frequencies ranging from 11.73 to 14.47 GHz in ultrahigh Q Z-cut magnesium fluoride cavities pumped at the telecommunication wavelength are ***,the Brillouin-Kerr comb in this device is *** 400 comb lines spanning across a spectral window of 120 nm are *** finding paves a new way for tailoring and harnessing the Brillouin gain in crystals.

关键词： scattering pumped Brillouin

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Magnetic phase transitions in the triangular-lattice spin-1 dimer compound K2Ni2(SeO3)3

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Physical Review B 2024年第21期109卷 214430-214430页

作者： Lei Yue Ziyou Lu Kun Yan Le Wang Shu Guo Ruixin Guo Peng Chen Xiaobin Chen Jia-Wei Mei Department of Physics School of Science and State Key Laboratory on Tunable Laser Technology and Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Shenzhen Institute for Quantum Science and Engineering International Quantum Academy Shenzhen 518048 China Dongguan Guangdong 523808 China Shenzhen Key Laboratory of Advanced Quantum Functional Materials and Devices

In our study, we conduct magnetization and heat capacity measurements to investigate field-induced magnetic phase transitions within the newly synthesized compound K2Ni2(SeO3)3, a spin-1 dimer system arranged on a triangular lattice. From our first-principles simulations, we determine that the spin system in K2Ni2(SeO3)3 can be represented as a two-dimensional triangular-lattice spin-1 dimer model, including an intra-dimer exchange of J1=0.32meV, an inter-dimer exchange of J2=0.79meV, and an easy-axis anisotropy of D=0.14meV. The presence of easy-axis magnetic anisotropy explains the distinct magnetic phase diagrams observed under c-axis directional and in-plane magnetic fields. Notably, our investigation unveils a two-step phase transition with the magnetic field aligned with the c direction. Our findings yield valuable insights into the magnetic phase transitions inherent to geometrically frustrated magnetic systems featuring dimer structures.

关键词： Frustrated magnetism Magnetic phase transitions Triangular lattice Magnetization measurements Specific heat measurements X-ray diffraction

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Recent advances in wireless epicortical and intracortical neuronal recording systems

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science China(Information sciences) 2022年第4期65卷 5-22页

作者： Bowen JI Zekai LIANG Xichen YUAN Honglai XU Minghao WANG Erwei YIN Zhejun GUO Longchun WANG Yuhao ZHOU Huicheng FENG Honglong CHANG Jingquan LIU Unmanned System Research Institute Northwestern Polytechnical University Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace School of Mechanical EngineeringNorthwestern Polytechnical University Collaborative Innovation Center of Northwestern Polytechnical University NEURACLE TECH (China) Co. Ltd. College of Electronics and Information Hangzhou Dianzi University Defense Innovation Institute Academy of Military Sciences (AMS) Tianjin Artificial Intelligence Innovation Center (TAIIC) National Key Laboratory of Science and Technology on Micro/Nano Fabrication Department of Micro/Nano ElectronicsShanghai Jiao Tong University

An implantable brain-computer interface(BCI) has proven to be effective in the field of sensory and motor function restoration and in the treatment of neurological disorders. Using a BCI recording system,we can transform current methods of human interaction with machines and the environment, especially to help those with cognitive and mobility disabilities regain mobility and reintegrate into society. However,most reported work has focused on a simple aspect of the whole system, such as electrodes, circuits, or data transmission, and only a very small percentage of systems are wireless. A miniature, lightweight, wireless,implantable microsystem is key to realizing long-term, real-time, and stable monitoring on freely moving animals or humans in their natural conditions. Here, we summarize typical wireless recording systems, from recording electrodes, processing chips and controllers, wireless data transmission, and power supply to the system-level package for either epicortical electrocorticogram(ECo G) or intracortical local field potentials(LFPs)/spike acquisition, developed in recent years. Finally, we conclude with our vision of challenges in next-generation wireless neuronal recording systems for chronic and safe applications.

关键词： wireless implant neuronal recording system recording electrodes processing chips wireless data transmission power supply system-level package

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Nonvolatile silicon photonics based on monolithic back-end-of-line integration phase-change-materials platform for optical neural networks

Nonvolatile silicon photonics based on monolithic back-end-o...

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2024 Applied Optics and Photonics China: AI in Optics and Photonics, AOPC 2024

作者： Xu, Kai Wei, Maoliang Tang, Bo Li, Junying Li, Lan Lin, Hongtao The State Key Lab of Brain-Machine Intelligence Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Zhejiang University Hangzhou310027 China Institute of Microelectronics of the Chinese Academy of Sciences Beijing100029 China Hangzhou Institute for Advanced Study University of Chinese Academy of Sciences Hangzhou310024 China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Zhejiang Hangzhou310030 China Institute of Advanced Technology Westlake Institute for Advanced Study Zhejiang Hangzhou310024 China

ISBN: (数字)9781510687943

ISBN: (纸本)9781510687936

Benefiting from high parallelism and low latency, photonic integrated circuits (PICs) constructed from on-chip building blocks with diverse functions have emerged as a promising technology in the realm of optical neural networks (ONN). Tunable components, through the utilization of physical mechanisms such as thermo-optic effect and free-carrier plasma dispersion effect, structural motion like microelectromechanical systems (MEMS), or material properties including liquid crystal and two-dimensional materials, play a pivotal role in enabling reconfigurability within PICs. Among these reconfiguration schemes, chalcogenide phase change materials (PCMs) based photonic devices have attracted extensive attention owing to their high energy efficiency and integration density brought by huge refractive index contrasts and nonvolatility of PCMs. However, this nonvolatile modulation method meets difficulty in scalability since the process flow of integrating PCMs into silicon photonics is insupportable in the foundries. Here, we demonstrated a back-end-of-line (BEOL) integration platform for the monolithic integration of PCMs into silicon photonic devices without modification in standard process design kits (PDK). This is achieved by fabricating a low-loss oxide trench to expose the waveguide core at the functional area from the top dielectric layer, with assistance from a silicon nitride etch stop layer. On this basis, integrated photonic devices with stable switching performance and repeatable multi-bit storage capability have been developed, possessing the potential for crucial blocks of PICs in ONN applications that require infrequent reconfiguration, such as hardware error correction before training and data storage in pre-trained models. © 2024 SPIE.

关键词： Silicon nitride

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Magnetoelectric Coupling Based on Protons in Ammonium Sulfate

arXiv

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arXiv 2024年

作者： Meng, Lei He, Chen Yen, Fei State Key Laboratory on Tunable Laser Technology Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System The School of Science Harbin Institute of Technology Shenzhen China University Town Guangdong Shenzhen518055 China

Most ferroelectric crystals have their own set of unique characteristics and ammonium sulfate (NH4)2SO4 is no exception. We report on two previously unidentified features in ammonium sulfate: 1) that there are at least two successive transitions instead of one occurring at the Curie temperature TC = 223 K according to dielectric constant measurements;and 2) pronounced step-like anomalies are found in the magnetic susceptibility χ(T) exactly at TC. To explain these results, we take into account that there exists a previously unidentified linear coupling between the magnetic and electric dipole moments of the NH4+ tetrahedra due to their rapid reorientations and distorted geometry, respectively. The magnetic moments are small, 0.0016 μB for every C3 reorientation which involve three protons (H+) undergoing orbital motion. Nevertheless, short-range correlations exist in the paraelectric phase because the magnetic moments are restricted to only point along 14 possible orientations due to the symmetry and periodic nature of the potential wells. At TC, C2 reorientations (involving four protons) are no longer energetically feasible so the reduction in the degrees of freedom to 8 further enhances the effect of the magnetic interactions. This triggers long-range ordering of the orbital moments in an antiferromagnetic configuration along the ab-plane, which via Dzyaloshinskii–Moriya interactions, end up canting slightly toward the c-axis direction. Since there exists two types of inequivalent NH4+ groups that reorient at different frequencies with temperature and do not have the same degree of distortion, the emerging polar phase is ferrielectric. This previously unidentified 'magnetoprotonic' effect can be further extended toward understanding the fundamental causes of the spontaneous polarization in many other ferroelectric crystals as well as provide the missing link toward understanding the enhanced functionalities of many hydrogen-based compounds and organic-inorganic hy

关键词： Sulfur compounds

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Modeling and Optimization of MEMS microphone Dust Protection Mesh for improved for Acoustic Performance using Finite Element Method Simulation 3

Modeling and Optimization of MEMS Microphone Dust Protection...

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3rd International Conference on New Materials, Machinery, and Vehicle Engineering, NMMVE 2024

作者： Zhang, Shiwang Li, Jiazhu Yuan, Jiawei Li, Zixuan Yuan, Zheng Qin, Shaohui Zhao, Zilong Tan, Hongqiang Luo, Ruiyan Zhao, Yihe Li, Jie Gao, Wendi Li, Zhikang Zhao, Libo State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies Xi'an710049 China Research Institute for Intelligent Sensing Technology and System Xi'an710049 China School of Instrument Science and Technology Xi'an Jiaotong University Xi'an710049 China School of Mechanical Engineering Xi'an Jiaotong University Xi'an710049 China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai265503 China College of Mechanical and Electrical Engineering Shaanxi University of Science and Technology Xi'an710021 China

ISBN: (纸本)9781510686267

Currently, research on micro-Electro-Mechanical systems (MEMS) microphone dust protection meshes has predominantly focused on dust prevention capabilities, with scant attention given to acoustic performance, and there is a lack of systematic studies on the patterns of acoustic performance variation. This study utilizes finite element analysis to investigate the impact of structural parameters such as perforation radius, perforation rate, number of perforations, and perforation distribution patterns, as well as material properties like the density of the expanded-polytetrafluoroethylene (e-PTFE) membrane, on acoustic impedance and sound transmission loss. It was found that, at a constant perforation rate, a larger perforation radius results in lower acoustic impedance and sound transmission loss. This research provides a theoretical basis for the subsequent design of MEMS microphone dust protection meshes. Furthermore, an intelligent dust protection device based on metasurfaces has been proposed, which achieves an organic integration of dust prevention and sound wave control functions, and exhibits high sensitivity and robustness, laying the foundation for the development of future smart auditory technologies. © 2024 SPIE.

关键词： Acoustic impedance

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