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Structural Design of a Compact in-Plane nano-Grating Accelerometer

Chinese Physics Letters 2012年第11期29卷 219-223页

作者： YAO Bao-Yin ZHOU Zhen FENG Li-Shuang WANG Wen-Pu WANG Xiao Key Laboratory of Micro-nano Measurement-manipulation and Physics(Ministry of Education) Beihang UniversityBeijing 100191 Fundamental of Science on Novel Inertial Instrument&Navigation System Technology Laboratory Beihang UniversityBeijing 100191

A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is ***,the numbers of diffraction orders are ***,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration ***,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam *** on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/*** nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent *** results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.

关键词： accelerometer beam integrating

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Preparation and Electrochemical Characteristics of Three-dimensional Manganese Oxide micro-supercapacitor Electrode

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Chinese Journal of Chemical Physics 2012年第2期25卷 209-213,I0004页

作者： Chun-ming Wen Zhi-yu Wen Zheng You Xiao-feng Wang Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China Microsystem Research Center Chongqing UniversityChongqing 400030China Department of Precision Instruments and Mechanics Tsinghua UniversityBeijing 100084China

In order to increase the electrode surface area and enhance the charge storage capacity, we study the micro electro mechanical system technology to fabricate three-dimensional high aspect ratio micro-electrode structure based on glass. The anodic constant potential method is employed to deposit manganese oxide as electroactive substances on the micro-electrode surface. Cyclic voltammetry and constant current charge-discharge method are both used to prepare electrode electrochemical performance testing, with a two-dimensional electrode without structure for comparison. Experimental results show that three-dimensional elec- trode structure can effectively enhance the charge storage capacity. At 1.0 mA/cm2 charge- discharge density, the three-dimensional electrode shows a capacitance of 17.88 mF/cm2, seven times higher than the two-dimensional electrode.

关键词： micro-supercapacitor micro electro mechanical system Three-dimensional electrode Manganese oxide

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Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology

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science China(Technological sciences) 2012年第7期55卷 2013-2018页

作者： WEN ChunMing WEN ZhiYu YOU Zheng WANG XiaoFeng Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China Microsystem Research Center Chongqing UniversityChongqing 400030China Department of Precision Instruments and Mechanics Tsinghua UniversityBeijing 100084China

The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the *** enhance the charge storage capacity with a reduced volume,silicon is used as the electrode material,and three-dimensional electrode structure is prepared to increase the electrode surface area on the footprint area by inductively coupled plasma reactive etching(ICP) *** anodic constant current deposition method is employed to deposit manganese oxide on the electrode surface as the electroactive *** comparison,samples without slot are prepared with a two-dimensional *** Electron microscopy(SEM) and Energy Dispersive Spectroscopy(EDS) are used to characterize the surface morphology of the electrode structure and the deposited electroactive *** properties of the electrode are characterized by the cyclic voltammetry(CV) and the constant current charge-discharge *** results show that our approach can effectively increase the electrode surface area with more electroactive substances,and hence can increase storage capacity of the micro-supercapacitor.

关键词： micro Electro Mechanical system（MEMS） micro-supercapacitors three-dimensional electrode inductively coupled plasma reactive etching manganese oxide silicon

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Analysis of the p^+/p window layer of thin film solar cells by simulation

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Journal of Semiconductors 2012年第2期33卷 23-27页

作者： Lin Aiguo Ding Jianning Yuan Ningyi Wang Shubo Cheng Guanggui Lu Chao Center of Micro/Nano Science&Technology Jiangsu UniversityZhenjiang 212013China Center of Low-Dimension Materials Micro/Nano Device and SystemChangzhou UniversityChangzhou 213164China Jiangsu Laboratory for Solar Cell Materials and Technology Changzhou 213164China

The application of a p~＋/p configuration in the window layer of hydrogenated amorphous silicon thin film solar cells is simulated and analyzed utilizing an AMPS-ID *** differences between p~＋-p-i-n configuration solar cells and p-i-n configuration solar cells are pointed *** effects of dopant concentration, thickness of p~＋-layer,contact barrier height and defect density on solar cells are *** results indicate that solar cells with a p~＋-p-i-n configuration have a better *** open circuit voltage and short circuit current were improved by increasing the dopant concentration of the p~＋ layer and lowering the front contact barrier *** defect density at the p/i interface which exceeds two orders of magnitude in the intrinsic layer will deteriorate the cell property.

关键词： p~＋/p configuration thin film solar cells hydrogenated amorphous silicon solar cells window layer

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A nano-metallic-particles-based CMOS image sensor for DNA detection

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Chinese Physics B 2012年第7期21卷 416-421页

作者：何进苏艳梅马玉涛陈沁王若楠叶韵马勇梁海浪 Micro&Nano Electronic Device and Integrated Technology Center School of Electronics Engineering and Computer SciencePeking University Peking University Shenzhen SOC Key Laboratory PKU-HKUST Shenzhen-Honggang InstitutionW303West TowerIER Bldg.Hi-Tech Industrial Park South

In this paper we report on a study of the CMOS image sensor detection of DNA based on self-assembled nano- metallic particles, which are selectively deposited on the surface of the passive image sensor. The nano-metallic particles effectively block the optical radiation in the visible spectrum of ordinary light source. When such a technical method is applied to DNA detection, the requirement for a special UV light source in the most popular fluorescence is eliminated. The DNA detection methodology is tested on a CMOS sensor chip fabricated using a standard 0.5 gm CMOS process. It is demonstrated that the approach is highly selective to detecting even a signal-base mismatched DNA target with an extremely-low-concentration DNA sample down to 10 pM under an ordinary light source.

关键词： CMOS image sensor nano-metallic particles DNA detection 0.5 gm CMOS process

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Methods and techniques for MEMS dynamic characteristics measurement under the harsh environment

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micro and nanosystems 2012年第1期4卷 48-55页

作者： She, D.S. Wang, X.D. Wang, T. Zhang, X.W. Wang, L.D. Key Laboratory of Micro/Nano Technology and System of Liaoning Provice Research Center for MST Dalian University of Technology Nr. 2 Ling-Gong Road 116024 China School of mechanical Engineering Wuhan University of Science and Technology Nr.947 He-ping road 430081 China

In order to study the dynamic characteristics of microstructures under high-g acceleration and harsh temperature environment, dynamic measurement techniques were presented and the corresponding testing systems were established. For testing in high-g acceleration environment, the acceleration was generated by high speed rotation plate, and over 10000 g acceleration environment was created. The base excitation device designed with piezoelectric ceramic (PZT) was used to excite the microstructures. Piezoresistive cantilevers with typical beam-proof mass structure were designed and fabricated for obtaining the vibration signal. For testing in harsh temperature environment, two instruments were designed to realize the low temperature environment and high temperature environment, respectively. A thermoelectric refrigerator was modified to vary the temperature of microstructures from room temperature down to -55°C. A small alumina ceramics heater (MCH) was used to heat microstructures up to 350°C. The base excitation device with PZT was also used to excite microstructures under harsh temperature environment. Laser Doppler Vibrometer (LDV) was adopted to obtain the vibration signals through the viewport of these instruments. The dynamic characteristics of silicon microcantilevers were tested under these harsh environment. The results show that the resonance frequencies of microcantilevers increase with the elevated external high load as soon as the deformation of micro-beam is in the geometrically nonlinear state, and also the resonance frequencies slightly and linearly decrease with the increasing temperature. © 2012 Bentham science Publishers.

关键词： microstructure

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An On-line Multiparametric Water Quality Monitoring system Based on Visible Spectrophotometry

An On-line Multiparametric Water Quality Monitoring System B...

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2nd International Conference on Manufacturing science and Engineering

作者： Liao, Haiyang Tian, Peng Du, Yu Wen, Zhiyu National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology China Microsystem Research Center Chongqing University Chong Qing 400044 China

ISBN: (纸本)9783037850312

Water quality monitoring plays an important role in contamination control and environment protection. This paper describes an on-line multiparametric water quality monitoring system based on visible spectrophotometry, which combines embedded technology with GPRS telecommunication technology. This system can realize online wireless monitoring to concentrations of chromium (Cr), plumbum (Pb), A surfactant (AS), chemical oxygen demand (COD), ammonia nitrogen (AN), total phosphorus (TP) and total phenol (TPh) in real time. The mechanical structure, hardware circuit and software design of the system are completed. The absorption spectrums of pure water and MB-SDS complex have been measured. Preliminary experiments using a model machine show that each mechanism of the system runs well. Moreover, the monitor possesses many advantages, such as high degree of automation, high reliability, high efficiency, compact structure, small size, and so on.

关键词： Water Quality Monitoring Visible Spectrophotometry Embedded technology GPRS

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Study on the 3D non-contact measurement method of hyaloid and closed container

Study on the 3D non-contact measurement method of hyaloid an...

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International Conference on systems and Informatics (ICSAI)

作者： Wei Pei Zheng Xu Yong Ying Zhu Chen Xiang Wang Environmental Science and Engineering College Dalian Maritime University Dalian Liaoning China Ocean and Civil Engineering Department Dalian Ocean University Dalian Liaoning China Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian Liaoning China

The research of microfluidic chip is a vital domain and the forefront of micro total analysis systems (μTAS). Compared with the development of microfluidic chip, the research of detecting systems for microfluidic chip is backward. The micro stereo vision system is a good solution for non-contact measurement of microfluidic chip. However, it often meets refraction of light and occlusion. In this paper, based on optical theory and digital image processing, the micro stereo imaging principle of stereo light microscope (SLM) is studied and the refraction correction and micro stereo occlusion correction algorithms are proposed to achieve microfluidic chip detection. These algorithms quantize the influence of cover plate and occlusion on the measurement accuracy, and realize nondestructive, non-contact and precise 3D measurement of a hyaloid and closed container.

关键词： Stereo vision microfluidics Semiconductor device measurement Sea measurements Adaptive optics Optical imaging Optical refraction

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Analysis and Experiment of Encoding Errors for MOEMS micro Mirror Spectrometer

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Physics Procedia 2011年 19卷 285-290页

作者： MO Xiang-xia WEN Zhi-yu ZHANG Zhi-hai GUO Yuanjun National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044 China The Key Laboratory for Opto-eletronic Technology and System under Ministry of Education Chongqing University Chongqing 400044 China

micro mirror arrays used in the novel spectrometer to achieve the modulation of Hadamard transformation (HT) and spectrum detection by a single detector can also be considered as a blazed grating. During the modulation, spectrum can not be completely reflected by micro mirror array s on the “on” state. While on the “off” state, there will be still light incidence into detector, since the way of light modulation by mirror arrays is diffraction rather than reflection. This will then cause encoding errors. To diminish these encoding errors, a blazed grating model for mirror arrays is proposed. In this paper, both encoding error and compensation are analyzed for the algorithm of HT. Firstly, establish a theoretic model of micro mirror arrays modulation, and calculate the light field distribution based on the Fraunhofer diffraction theory. Then use MathCAD software and Matlab software to simulate and correct the HT encoding errors. Finally, some experimental tests have been done on the micro mirror sp ectrometer system. The “on” state errors caused by micro mirror can be eliminated by dividing the background or rectifying the HT mask encoding. However, the “off” state errors can only be eliminated by constructing a comp ensation HT matrix. Both the “on” and “off” state errors are coexisted in the real situation. Exp eriment not only can reduce the encoding errors, but also increase signal-to-noise ratio.

关键词： micro mirror spectrometer encoding mirror Hadamard blazed grat ing

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A Novel MOEMS NIR Spectrometer

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Physics Procedia 2011年 19卷 110-114页

作者： Zhang Zhihai Mo Xiangxia Guo Yuanjun Wang Wei The Key Laboratory for Opto-eletronic Technology and System under Ministry of Education Chongqing University Chongqing 400044China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044China

In order to detect luminous intensity of light signal in NIR (Near-infrared) wavelength range, a novel MOEMS(micro-Opto-Electro-Mechanical systems) NIR spectrometer is proposed in the paper. It uses DMD (Digital micro-mirror device) to band filter the input spectrum. The merits of DMD are small size, low price and high scan speed. Especially, when DMD acts as a Hadamard Transform encoding mask, the SNR (signal-to-noise-ratio) can be improved by multiplexing the light intensities. The structure and the theory of this spectrometer are analyzed. The Hadamard-S matrix and mask of 63-order and 127-order are designed. The output spectrum of the new spectrometer coincides with experimental result of Shimadzu spectrometer. The resolution of the new spectrometer is 19 nm over the spectral range between 900∼1700 nm while single scan time is only 2.4S. The SNR is 44.67:1. The size of optical path is 70mm × 130 mm, and it has a weight less than 1Kg. It can meet the requirement of real time measurement and portable application.

关键词： MOEMS NIR spectrometer Digital micro-mirror device Hadamard transform portable application

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