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Multitarget gas alarm system for high-performance and anti-interference chemical warfare agents simulants detection

science China(Technological sciences) 2025年第3期68卷 349-358页

作者： Yubin YUAN Qiang WU Menglong JIAO Haiyang WU Weihua LIU Xuming WANG Xiangrui BU Gong LI Chuanyu HAN Long HU Xin LI Xiaoli WANG Shool of Microelectronics School of Electronics and Information EngineeringXi’an Jiaotong UniversityXi’an710049China The Key Lab of Micro-nano Electronics and System Integration of Xi’an City Xi’an710049China Hangzhou Institute for Advanced Study University of Chinese Academy of SciencesHangzhou310024China School of Automation and Information Engineering Xi’an University of TechnologyXi’an710048China Key Laboratory for Physical Electronics and Devices of the Ministry of Education Xi’an Jiaotong UniversityXi’an710049China School of Science Xi’an Jiaotong UniversityXi’an710049China

Chemical warfare agents(CWAs)can cause significant harm to health and even death in a very short time even when inhaled in small amounts(~100 mg min/m^(3)).Detection equipment based on conventional techniques,including gas chromatography-mass spectrometry,Raman spectroscopy,fluorescence spectroscopy,and ion mobility spectrometry,have the disadvantages of high cost,long detection time,and high power ***,portable,and convenient equipment for target CWAs detection under interference is a *** this study,we propose an alarm system comprising a multitype micro sensor array and a field-programmable gate array-based readout circuit for CWAs simulants *** common volatile organic compound,temperature,and water vapor interference,the proposed multitype sensor-based detection system realizes an alarm function in less than 20 s with thresholds of 1 ppm dimethyl methylphosphonate(DMMP),4.6 ppm 2,2'-dichlorodiethyl ether(DCE),and 20 ppm SO_(2).Furthermore,the proposed detection system was evaluated outside the laboratory and passed the wilderness test,demonstrating its reliability in the *** believe that the proposed alarm system will contribute to the development of intelligent,portable,low-cost,and anti-interference CWAs detection technology.

关键词： alarm system CWAs simulants surface acoustic wave sensor mixed gas anti-interference

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Rapid classification of proteins suspended in an evaporated sessile drop

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Talanta 2025年 294卷 128224页

作者： Liu, Maoxi Jiao, Feng He, Yongqing School of Chemical Engineering Kunming University of Science and Technology Kunming650500 China Chongqing Key Laboratory of Micro-Nano System and Intelligent Transduction National Research Base of Intelligent Manufacturing Service Chongqing Technology and Business University Chongqing400067 China

Reliable and accessible technologies for biological sample analysis are crucial for rapid, accurate illness diagnosis in resource-limited settings. Conventional methods like mass spectrometry and enzyme-linked immunosorbent assay (ELISA) often face challenges of technological complexity and equipment immobility, leading to delayed diagnoses and elevated costs. This study introduces evaporative deposition patterns from sessile droplets as a simple, cost-effective approach for classifying proteins in protein-salt mixtures, leveraging quantitative texture analysis to achieve high diagnostic accuracy. Using mixtures of potassium chloride (KCl) or sodium chloride (NaCl) with Bovine Serum Albumin (BSA) or Ovalbumin (OVA) as model systems, we varied salt (0.25–2 wt%) and protein (0.5–1.5 wt%) concentrations, observing distinct deposition morphologies such as coffee rings, cruciform/dendritic crystals at high salt levels, and volcano-shaped /spoke-like patterns at low or high protein levels. A novel quantitative framework integrating radial density distributions, gray-level co-occurrence matrix (GLCM) texture features, and receiver operating characteristic (ROC) curves achieved a 96.74 % classification accuracy for NaCl-protein mixtures, surpassing traditional texture analysis in simplicity and efficacy. These findings demonstrate the potential of evaporative deposition analysis as a simple tool for distinguishing molecular mixtures, laying the groundwork for future diagnostic applications. Unlike prior qualitative studies, this work provides a robust, quantitative method for protein classification, advancing the understanding of protein-salt interactions. © 2025 Elsevier B.V.

关键词： Body fluids

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Hafnium oxide-based nonvolatile ferroelectric memcapacitor array for high energy-efficiency neuromorphic computing

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nano Energy 2025年 140卷

作者： Wang, Xuepei Ye, Sheng Cui, Boyao Li, Yu-Chun Wei, Ye Xiao, Yu Liu, Jinhao Huang, Zi-Ying Wu, Yishan Wen, Yichen Wang, Ziming Wu, Maokun Ren, Pengpeng Fang, Hui Lu, Hong-Liang Wang, Runsheng Ji, Zhigang Huang, Ru National Key Laboratory of Science and Technology on Micro/Nano Fabrication Department of Micro/Nano Electronics Shanghai Jiao Tong University Shanghai200240 China State Key Laboratory of ASIC and System School of Microelectronics Shanghai Institute of Intelligent Electronics and Systems Fudan University Shanghai200433 China School of Integrated Circuits Peking University Beijing100871 China Department of Computer Science Loughborough University LoughboroughLE11 3TU United Kingdom

Recent advancements in neuromorphic computing hardware have led to significant progress in image classification, speech recognition, and fuzzy computing, outperforming traditional von Neumann computing paradigm. However, the widely-investigated memristor-based neuromorphic computing hardware still suffers high writing/reading currents and serious variability issue as well as sneak path challenges, leading to high power consumption and peripheral circuit design complication. Memcapacitor-based neuromorphic computing is expected to alleviate these problems, while the limited memory windows and endurance hindered the practical applications. Here, we present a hafnium oxide-based ferroelectric memcapacitor developed through work function engineering. The memcapacitor demonstrates an overall excellent performance in memory windows (∼7.8 fF/μm2), endurance (>109 cycles), retention (>10 years), dynamic energy consumption (31 fJ/inference), and near-zero standby static power consumption. The fabricated memcapacitor array shows high linearity and device-to-device variations, and can perform complete multiplication-accumulation (MAC) operation. The constructed artificial neural network (ANN) achieves 96.68 % accuracy on the MNIST data set after 200 epochs. Our findings underscore the potential of ferroelectric memcapacitor device as a robust candidate for high energy-efficiency neuromorphic computing applications in intelligent terminals. © 2025 Elsevier Ltd

关键词： Speech recognition

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Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices

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Optoelectronics Letters 2016年第3期12卷 182-187页

作者：李东玲温志渝尚正国佘引 National Key Laboratory of Fundamental Science of Novel Micro/Nano Device and System Technology Key Laboratory of Optoelectronic Technology and System of the Education Ministry of China Micro System Reaserch CenterChongqing University

Thick SU8 microstructures with high aspect ratio and good side wall quality were fabricated by ultraviolet （UV） lithography, and the processing parameters were comprehensively studied. It proves that the adhesion of SU8 on silicon （Si） substrates is influenced by Si-OH on the surface, and can be improved by the HF treatment. Cracks and de- lamination are caused by large internal stress during fabrication process, and are significantly influenced by soft bake and post-exposure bake processes. The internal stress is reduced by a low post-exposure bake exposure tem- perature of 85 ℃ for 40 rain. A three-step soft bake enhances the reflowing ofSU8 photoresist, and results in uni- form surface and less air bubbles. The vertical side wall is obtained with the optimized exposure dose of 800 mJ/cm2 for the thickness of 160 μm. Using the optimized fabrication process combined with a proper structure design, dense SU8 micro pillars are achieved with the aspect ratio of 10 and the taper angle of 89.86°. Finally, some possible ap- plications of SU8 in micro-electromechanical system （MEMS） device are developed and demonstrated.

关键词： MEMS器件紫外光刻微结构应用微机电系统烘烤过程编写宽带

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Calculation of surface acoustic waves in a multilayered piezoelectric structure

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Journal of Semiconductors 2013年第1期34卷 6-11页

作者：张祖伟温志渝胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center Chongqing University

The propagation properties of the surface acoustic waves（SAWs） in a ZnO-SiO2-Si multilayered piezoelectric structure are calculated by using the recursive asymptotic *** phase velocities and the electromechanical coupling coefficients for the Rayleigh wave and the Love wave in the different ZnO-SiO2-Si structures are calculated and *** Love mode wave is found to be predominantly generated since the c-axis of the ZnO film is generally perpendicular to the *** order to prove the calculated results,a Love mode SAW device based on the ZnO-SiO2-Si multilayered structure is fabricated by micromachining,and its frequency responses are *** experimental results are found to be mainly consistent with the calculated ones,except for the slightly larger velocities induced by the residual stresses produced in the fabrication process of the *** deviation of the experimental results from the calculated ones is reduced by thermal annealing.

关键词： SAW RAM multilayered structure

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Development of Raman acousto-optic frequency shifter based on SAW

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Journal of Semiconductors 2014年第8期35卷 104-109页

作者：王春梅温志渝张祖伟张颖异 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center of Chongqing University

A Raman acousto-optic frequency shifter （AOFS） based on surface acoustic wave （SAW） is presented. It consists of a double-ended SAW resonator and optical waveguide system. The structure parameters of the SAW resonator are optimized using COM software and the optical waveguide system is designed using an effective index method. The AOFS prototype fabricated using MEMS technology is detected. The optical beat signals su- perimposed by ± 1st-order and ±2nd-order diffracted beams are detected. The frequency shift of 78.2201 MHz related to the 1 st-order diffracted beams and 156.2306 MHz related to the 2nd-order diffracted beams are obtained respectively.

关键词： SAW Raman AOFS frequency shift

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The fabrication of vibration energy harvester arrays based on AlN piezoelectric film

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Journal of Semiconductors 2013年第11期34卷 79-82页

作者：尚正国李东玲温志渝赵兴强 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center of Chongqing University

： The fabrication and measurement results of the vibration energy harvester arrays based on the piezoelectric aluminum nitride （AlN） film are presented. The structure design and fabrication process of the device are introduced. The key material, the AIN film with crystal orientation （002）, was deposited by pulsed-DC magnetron sputtering and characterized by X-ray diffraction （XRD）. The resonant frequency, power out, and the open circuit voltage of the device are detected. The optimized load of 80 kΩ and a remarkable maximum power out of 30.4 μW are obtained when the acceleration of 0.9g （g is standard gravity acceleration） is applied. key words： A1N; crystal orientation; harvester arrays; vibration energy

关键词： AlN crystal orientation harvester arrays vibration energy

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Low temperature Si/Si wafer direct bonding using a plasma activated method

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Journal of Zhejiang University-science C(Computers and Electronics) 2013年第4期14卷 244-251页

作者： Dong-ling LI Zheng-guo SHANG Sheng-qiang WANG Zhi-yu WEN National Key Laboratory of Fundamental Science of Novel Micro/Nano Device and System Technology Chongqing University MOE Key Laboratory of Optoelectronic Technology & Systems Chongqing University Microsystem Research Center Chongqing University

Manufacturing and integration of micro-electro-mechanical systems （MEMS） devices and integrated circuits （ICs） by wafer bonding often generate problems caused by thermal properties of materials. This paper presents a low temperature wafer direct bonding process assisted by 02 plasma. Silicon wafers were treated with wet chemical cleaning and subsequently activated by 02 plasma in the etch element of a sputtering system. Then, two wafers were brought into contact in the bonder followed by annealing in N2 atmosphere for several hours. An infrared imaging system was used to detect bonding defects and a razor blade test was carried out to determine surface energy. The bonding yield reaches 90%--95% and the achieved surface energy is 1.76 J/m2 when the bonded wafers are annealed at 350 ~C in N2 atmosphere for 2 h. Void formation was systematically observed and eli-mination methods were proposed. The size and density of voids greatly depend on the annealing temperature. Short O2 plasma treatment for 60 s can alleviate void formation and enhance surface energy. A pulling test reveals that the bonding strength is more than 11.0 MPa. This low temperature wafer direct bonding process provides an efficient and reliable method for 3D integration, system on chip, and MEMS packaging.

关键词： Low temperature Wafer direct bonding O2 plasma activation Surface energy Void formation

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Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester

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key Engineering Materials 2015年 645卷 1133-1138页

作者： Shang, Zhengguo Li, Dongling Wang, Shengqiang National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing China Microsystem Research Center Chongqing University Chongqing China

Aluminum nitride(AlN) film as a piezoelectric material has been used widely, particularly in vibration energy harvester due to its unique and enhanced properties such as high temperature resistance and compatibility with CMOS processes. In this work, AlN film with (002) preferred orientation was prepared on silicon wafers by pulse DC reactive magnetron sputtering(RMS), and the properties such as peak intensity, full width at half maximum (FWHM) and surface morphology were investigated by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The preferred orientation was found to be sensitive to deposition conditions such as gas flow rate, power, bottom electrodes materials and substrates temperature. The results shows that the intensity was 1.1×105 counts, the FWHM was 1.9° when the temperature was 260°C. The film was used to fabricate the vibrated energy harvester successful and the power density reached about 3000uW/cm3 at the vibration frequency under 1g acceleration. © 2015 Trans Tech Publications, Switzerland.

关键词： Magnetron sputtering

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Templated self-assembly of Au-TiO_2 binary nanoparticles-nanotubes

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Chinese Chemical Letters 2014年第6期25卷 874-878页

作者： Yu-Xin Zhang Xiao-Dong Hao Zeng-Peng Diao College of Materials Science and Engineering Chongqing University National Key Laboratory of Fundamental Science of Micro/Nano-Devices and System Technology Chongqing University

In this work, we developed a templated self-assembly approach to fabricate self-supporting Au/TiO2 binary nanoparticles-nanotubes （NPNTs） for the first time. The stable Au/TiO2 nanoparticles colloids were pre-synthesized and then deposited onto an AAO template, following by a mild calcination process. Au/TiO2 binary NPNTs can be achieved after removing the AAO template by NaOH solution. In addition, Au/TiO2 NPNTs with different thicknesses and size distributions could be achieved by tailoring the process parameters, such as the molar ratio of AuNPs to TiO2NPs, deposition modes and calcinations conditions. Therefore, these findings made controllable formation of Au/TiO2 NPNTs attractive for promising fabrication methodologies of metal/metal oxides NPNTs.

关键词： Au/TiO2 colloids nanoparticies-nanotubes Self-assembly AAO template

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