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Four-step FBAR Filters Design Method and SOI BOX Buffered Via-hole Etching Scheme

Four-step FBAR Filters Design Method and SOI BOX Buffered Vi...

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2016 13th IEEE International Conference on Solid-State and Integrated Circuit technology (ICSICT)

作者： GAO Yang CAI Xun HE Xuefeng Institute of Electronic Engineering China Academy of Engineering Physics State Key Laboratory of Particle Detection and Electronics Institute of High Energy PhysicsCAS School of Information Engineering Southwest University of Science and Technology National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University

In this paper, we present an easy to use 4-step design method for film bulk acoustic resonator(FBAR) filters, and demonstrated by a FDD-LTE band 7 FBAR Rx filter design case. According to the center frequency and bandwidth of FBAR filter, we determine thickness of each film in the FBAR film stack at the step 1. The step 2 gets the filter's circuit architecture. In the step 3, we obtain the active area of each FBAR unit. To get this, we made the resonance area value of series FBAR units and the ratio of resonance area value of parallel FBAR units and series FBAR units into two types of optimization parameters reasonably. Taking the given insertion loss and out-of-band rejection of filter as the optimization objective, we obtained the optimized values by the algorithm based on gradient in ADS software. The last step 4 aiming at minimizing filter passband ripple. In the design case, this aim is fulfilled by a novel FBARs' electrode layer thickness adjusting method, and intentionally slightly mismatches the series resonant frequency of the series FBAR units with the parallel resonant frequency of the parallel FBAR units. As in the design case results, a only 300 nm thick SiO 2 support layer need to survive the backside via-hole etching micro-fabrication process, so we proposed a buried oxide layer(BOX) buffered 2-step via-hole etching scheme, which taking advantage of the etching self-stop characteristic of BOX. Design case results show that insertion loss of the Rx filter is 0.6 d B, rejection in Tx frequency band is 40.4 d B and passband ripple is 0.4 d B. Thus we validate the feasibility of the design method.

关键词： Four-step FBAR Filters Design Method and SOI BOX Buffered Via-hole Etching Scheme filter SOI

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Safety Analysis on a Novel Solid State Thermal Mechanical Discriminator

Safety Analysis on a Novel Solid State Thermal Mechanical Di...

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2016 13th IEEE International Conference on Solid-State and Integrated Circuit technology (ICSICT)

作者： JIA Le GAO Yang WANG Yu-hang LV Jun-guang School of Information Engineering Southwest University of Science and Technology Institute of Electronic Engineering China Academy of Engineering Physics National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University State Key Laboratory of Particle Detection and Electronics Institute of High Energy Physics CAS

In order to strengthen safety in abnormal environment, we analyze safety on the Solid State Thermal Mechanical Discriminator(SSTMD). Firstly, we calculate the number of Thermo-Mechanical Switches(TMSs) by means of a method with probability theory when the probability of unintentional unlock on the SSTMD is less than 10-6. Then the probability of safety failure on the SSTMD is estimated by analyzing the relationship between probability of a TMS from OFF state to ON state and temperature in abnormal high temperature environment. We put forward two design criteria for the layout of the SSTMD by analyzing working principle of the Trap TMSs played a role as intrinsic thermal weaklink to reduce the probability of safety failure on SSTMD in abnormal high temperature environment. There are two design rules to enhance the thermal weaklink effect. Firstly, TMSs can be classed as two groups: the Route TMSs and the Trap TMSs, and those two class TMSs should be evenly layout as far as possible, to obtain equal probability of contacting hotspot for the Trap TMSs to work in abnormal high-temperature environment. Secondly, we choose lower melting point of materials on the Trap TMSs to make them preemptively switch to the ON state before the Route TMSs. Additionally, we find the intrinsic shock weaklink effect in the Route TMSs, and enhanced this beneficial effect by etching an annular groove on the back of insulating film membrane of the Route TMSs, to ensure the safety of the SSTMD in abnormal shock/vibration environments. By revealing and taking advantage of those two weaklink effects, we get a novel SSTMD architecture with integrated thermal and shock weaklink functions, which would be quite suitable for the high consequence system applications.

关键词： TMS Safety Analysis on a Novel Solid State Thermal Mechanical Discriminator

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Design of a graphene capacitive pressure sensor for ultra-low pressure detection

Design of a graphene capacitive pressure sensor for ultra-lo...

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IEEE International Conference on nano/micro Engineered and Molecular systems (NEMS)

作者： Yangxi Zhang Yiming Gui Fanrui Meng Chengchen Gao Yilong Hao Institute of Microelectronics Peking University Beijing China National Key Laboratory of Science and Technology on Micro/Nano Fabrication Beijing China Device and system Collaborative Innovation Center for Micro/Nano Fabrication Beijing China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

ISBN: (纸本)9781509019489

This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range. As the size of single suspend graphene diaphragm is limited by fabrication process, a parallel connected sensor array is designed to achieve detectable capacitance change and redundancy. In calculation, a sensor array with 40,000 5μm radius suspend graphene diaphragm cells in 4mm×4mm size can provide 288fF/Pa sensitivity to pressure load.

关键词： Graphene Capacitance Pressure sensors Sensor arrays Films Electrodes Sensitivity

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Numerical optimization approach of the gap between the magnet and coil for electromagnetic vibration energy harvesters design

Numerical optimization approach of the gap between the magne...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Key Laboratory of Fundamental Science on Micro/Nano Device and System Technology Chongqing University China National Center for International Research of Micro/Nano System and New Material Technology Chongqing University China Micro System Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

In the design of the micro electromagnetic vibration harvester, an important goal is maximization of the magnetic flux linkage gradient, which directly determines the induced voltage and output power of the electromagnetic vibration harvester. This paper established a numerical model based on structure of the electromagnetic vibration energy harvester. An analytic expression for the magnetic field of rectangular permanent magnets is used to build up an electromagnetic coupling model. The magnetic field distribution of the rectangular permanent magnet was analyzed. The effects of the gap between the magnet and the coil on the load voltage of the electromagnetic vibration energy harvester were investigated. According to the formula, the magnetic flux linkage and flux gradient were calculated to optimize the geometrical parameter of the magnet and coil. The method and boundary conditions of optimizing the gap between the magnet and coil were presented. The maximum output voltage can be obtained by optimizing the gap between the magnet and the coil. A simple prototype was fabricated and measured to validate the theoretical deducing and the feasibility of method. © (2015) Trans Tech Publications, Switzerland.

关键词： Energy harvesting

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Design and Comparison of micro electromagnetic vibration energy harvesters

Design and Comparison of micro electromagnetic vibration ene...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Chen, Li Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University China Microsystem Research Center of Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

This paper presents two electromagnetic vibration energy harvesters based on micro-electro-mechanical (MEMS) technology. Two prototypes with different vibration structures were designed and fabricated. The energy harvester includes a permanent magnet attached on vibration structure (resonator) made by Si and a fixed wire-wound coil, with the total volume of 0.9 cm3. Two energy harvesters with different resonator are tested and compared. Experiments show that: in the same acceleration and a load resistance, the resonant frequency of prototype B is approximately 95% of prototype A;The peak-peak voltage and the maximum power of prototype B is 1.6 times and 2.7 times of prototype A respectively. The test results was analyzed simply and it indicated that the electromagnetic energy harvesting with the spring B has better performance;also proved that the potential ability of the non-linear spring could extend the frequency bandwidth and improve output voltage. © (2015) Trans Tech Publications, Switzerland.

关键词： Electromagnetic induction

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Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester

Fabrication of aluminum nitride films by reactive pulse DC m...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Shang, Zhengguo Li, Dongling Wang, Shengqiang National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing China Microsystem Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

Aluminum nitride(AlN) film as a piezoelectric material has been used widely, particularly in vibration energy harvester due to its unique and enhanced properties such as high temperature resistance and compatibility with CMOS processes. In this work, AlN film with (002) preferred orientation was prepared on silicon wafers by pulse DC reactive magnetron sputtering(RMS), and the properties such as peak intensity, full width at half maximum (FWHM) and surface morphology were investigated by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The preferred orientation was found to be sensitive to deposition conditions such as gas flow rate, power, bottom electrodes materials and substrates temperature. The results shows that the intensity was 1.1×105 counts, the FWHM was 1.9°when the temperature was 260°C. The film was used to fabricate the vibrated energy harvester successful and the power density reached about 3000uW/cm3 at the vibration frequency under 1g acceleration. © (2015) Trans Tech Publications, Switzerland.

关键词： Magnetron sputtering

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Enrichment efficiency optimization of dielectrophoresis cell chip based on interdigitated microelectrodes array

Enrichment efficiency optimization of dielectrophoresis cell...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Gu, Wenwen Huang, Jie Department of Electronic and Control Engineering College of Engineering and Technology Southwest University Chongqing400715 China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

At present, the majority dielectrophoresis chip designs optimize their performance by electric simulation and fluid field simulation. The lack of further cells force analysis and movement prediction results in a limited cell dielectrophoresis enrichment efficiency. The HepG2 hepatoma carcinoma cell movement under the action of dielectrophoresis force, fluid force and gravity was analyzed respectively by Comsol Multiphysics software. The preliminary optimization conditions for the cell enrichment were obtained. According to the simulation results, the experiments were carried out to investigate the enrichment effect of the HepG2 hepatoma carcinoma cells. The experiment result demonstrated the enrichment efficiency of HepG2 hepatoma carcinoma cells was reached to 88.89% under the 5 V amplitude and 4 MHz frequency sinusoidal signal excitation. © (2015) Trans Tech Publications, Switzerland.

关键词： Efficiency

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Parameter extraction for sensing optimization of nanoparticle basednano fluidics sensor 19

Parameter extraction for sensing optimization of nanoparticl...

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19th International Conference on Miniaturized systems for Chemistry and Life sciences, microTAS 2015

作者： Li, Siwei Huang, Jie Wang, Wei Institute of Microelectronics Peking University China National Key Laboratory of Science and Technology on Micro/Nano Fabrication Innovation Center for Micro-Nano-Electronics and Integrated System Beijing100871 China

ISBN: (纸本)9780979806483

nanofluidic sensor had a funnel nanochannel with few nanoparticles stuck at the tip has been demonstrated as a simple, fast and inexpensive way to prepare biosensor with high sensitivity. However, the parameter of this kind of sensor was difficult to obtain so that theoretical analyzation of the experimental results was necessary. Herein, we discussed further on how to extract the device parameter and optimize the sensitivity of the sensing device. © 15CBMS-0001.

关键词： Parameter extraction

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LED induced fluorescence detector integrated in microfluidic cell chip

LED induced fluorescence detector integrated in microfluidic...

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作者： Gu, Wenwen Huang, Jie Tan, Weimin College of Engineering and Technology Southwest University No. 2 Tiansheng Road BeiBei District Chongqing400715 China National Key Laboratory of Fundamental Science of Micro Nano-Device and System Technology Chongqing University No. 174 Shazheng Shapingba Chongqing400044 China

A light-emitting diode (LED) induced fluorescence detector for the microfluidic cell chip has been proposed in this contribution. Compared with the other competitor, the optical path does not require re-calibration after the microfluidic chip has been reloaded and relocated. Last but not the least, the system has a compact size and is more energy efficient. The model selection of the excitation light module, filter sets, aperture and photoelectric detector were analysed. The angle between the exciting light path and fluorescence optical path was optimised to be 135 degrees by experiment. The optimal value of photomultiplier (PMT) working voltage and LED working current were experimentally optimised to be 3.5 V and 200 mA. HepG2 hepatoma carcinoma cells were used to validate the cell counting function of the fluorescence detector. The experimental results showed that the output was peak signals that can be obviously distinguished from background noise;there were eight peak signals with an average value of 0.7 V within 250 s, which agreed with that of fluorescence microscope imaging results. It provides a new technological approach for novel micro total cell analysis system. Copyright © 2015 Inderscience Enterprises Ltd.

关键词： microfluidic chips

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Graphene water transfer printing for 3D surface

Graphene water transfer printing for 3D surface

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IEEE International Conference on micro Electro Mechanical systems

作者： Yangxi Zhang Yiming Gui Fanrui Meng Linyu Li Chencheng Gao Hongwei Zhu Yilong Hao Institute of Microelectronics Peking University Beijing China National Key Laboratory of Nano/Micro Fabrication Technology Beijing China School of Materials Science & Engineering Tsinghua University Beijing China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

ISBN: (纸本)9781509006090

In this paper, we report a novel water transfer printing method, which can transfer chemical vapor deposition (CVD) graphene from copper foil to 3D surface. By the aid of surface tension and Van der Waals force, multilayer graphene film can be transferred to various substrates with smooth surface including glass sheet, colophony filament, silicon oxide micro structure, polyimide (PI) film, polymethyl methacrylate (PMMA) tube and optical fibers. As the graphene film can be selectively transferred to assigned position in 3D surface, this simple room temperature transfer method has promising application potential in flexible MEMS and device on curved surface.

关键词： Graphene Films Surface treatment Copper Printing Three-dimensional displays Substrates

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