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检索条件"机构=Key Laboratory of Fundamental Science on Micro/Nano Device and System Technology"
170 条 记 录,以下是141-150 订阅
排序:
Calculation of surface acoustic waves in a multilayered piezoelectric structure
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Journal of Semiconductors 2013年 第1期34卷 6-11页
作者: 张祖伟 温志渝 胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center Chongqing University
The propagation properties of the surface acoustic waves(SAWs) in a ZnO-SiO2-Si multilayered piezoelectric structure are calculated by using the recursive asymptotic *** phase velocities and the electromechanical co... 详细信息
来源: 评论
Smearing model and restoration of star image under conditions of variable angular velocity and long exposure time
Smearing model and restoration of star image under condition...
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作者: Sun, Ting Xing, Fei You, Zheng Wang, Xiaochu Li, Bin Department of Precision Instrument Tsinghua University Beijing 100084 China State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua University Beijing 100084 China Collaborative Innovation Center for Micro/Nano Fabrication Device and System Tsinghua University Beijing 100084 China
The star tracker is one of the most promising attitude measurement devices widely used in spacecraft for its high accuracy. High dynamic performance is becoming its major restriction, and requires immediate focus and ... 详细信息
来源: 评论
The fabrication of vibration energy harvester arrays based on AlN piezoelectric film
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Journal of Semiconductors 2013年 第11期34卷 79-82页
作者: 尚正国 李东玲 温志渝 赵兴强 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center of Chongqing University
: The fabrication and measurement results of the vibration energy harvester arrays based on the piezoelectric aluminum nitride (AlN) film are presented. The structure design and fabrication process of the device ar... 详细信息
来源: 评论
Low temperature Si/Si wafer direct bonding using a plasma activated method
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Journal of Zhejiang University-science C(Computers and Electronics) 2013年 第4期14卷 244-251页
作者: Dong-ling LI Zheng-guo SHANG Sheng-qiang WANG Zhi-yu WEN National Key Laboratory of Fundamental Science of Novel Micro/Nano Device and System Technology Chongqing University MOE Key Laboratory of Optoelectronic Technology & Systems Chongqing University Microsystem Research Center Chongqing University
Manufacturing and integration of micro-electro-mechanical systems (MEMS) devices and integrated circuits (ICs) by wafer bonding often generate problems caused by thermal properties of materials. This paper present... 详细信息
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Study of high-precision earth sensor with triple-FOV
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Instrumentation 2014年 第2期1卷 23-29页
作者: WANG Hongjian XING Fei YOU Zheng CHU Daping ZHENG Lungui Collaborative Innovation Center for Micro/Nano Fabrication Device and SystemTsinghua UniversityBeijing 100084P.R.China State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua UniversityBeijing 100084P.R.China Department of Precision Instruments Tsinghua UniversityBeijing 100084P.R.China Department of Engineering Electrical Engineering DivisionUniversity of CambridgeCambridge CB30FAU.K. School of Instrument and Electronics North University of ChinaTaiyuan 030051P.R.China
Earth sensors are widely used in spacecraft for attitude determination. They need to have a very large field of view(FOV)( > 120°) and relatively low accuracy while being used in the aircrafts around orbit. A ... 详细信息
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LONGITUDINAL WAVE RESONANT FREQUENCY CALCULATION AND VERIFICATION OF THE BULK ACOUSTIC RESONATOR
LONGITUDINAL WAVE RESONANT FREQUENCY CALCULATION AND VERIFIC...
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2013 5th IEEE International Conference on Broadband Network & Multimedia technology
作者: Yi HE Yang GAO Bin ZHOU Junru LI School of Information Engineering Southwest University of Science and Technology Institute of Electronic Engineering China Academy of Engineering Physics National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University
Thickness and material of electrode, piezoelectric and supporting layer film of the Film Bulk Acoustic Resonator (FBAR) are main influence factors of resonant frequency, desired resonance frequency can be achieved by ... 详细信息
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Studies on Static Temperature Compensation for Vibrating Beam Accelerometer
Studies on Static Temperature Compensation for Vibrating Bea...
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2013 3rd International Conference on Mechanical Materials and Manufacturing Engineering(ICMMME 2013)
作者: Lishuang Feng He Wang Zhen Zhou Gongliu Yang Fundamental Science on Novel Inertial Instrument & Navigation System Technology Laboratory Beihang University Key Laboratory of Micro-nano Measurement-manipulation and Physics (Ministry of Education) Beihang University
Static temperature model identification and compensation of vibrating beam accelerometer(VBA)are studied in this *** relationships between scale factor K1,zero bias K0 with temperature are obtained through static roll... 详细信息
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Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction
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Journal of Semiconductors 2012年 第4期33卷 51-56页
作者: 张祖伟 温志渝 胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China National Center for International Research of Micro/Nano-System and New Material Technology Chongqing UniversityChongqing 400030China Microsystem Research Center of Chongqing University Chongqing 400030China
The design and simulation of a novel microoptoelectromechanical system (MOEMS) accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system tec... 详细信息
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Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction
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Journal of Semiconductors 2012年 第9期33卷 82-88页
作者: 张祖伟 温志渝 尚正国 李东玲 胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Chongqing 400030China Microsystem Research Center of Chongqing University Chongqing 400030China
A novel micro-opto-electro-mechanical system (MOEMS) accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental the... 详细信息
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Structural Design of a Compact in-Plane nano-Grating Accelerometer
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Chinese Physics Letters 2012年 第11期29卷 219-223页
作者: YAO Bao-Yin ZHOU Zhen FENG Li-Shuang WANG Wen-Pu WANG Xiao Key Laboratory of Micro-nano Measurement-manipulation and Physics(Ministry of Education) Beihang UniversityBeijing 100191 Fundamental of Science on Novel Inertial Instrument&Navigation System Technology Laboratory Beihang UniversityBeijing 100191
A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating... 详细信息
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