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Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction

Journal of Semiconductors 2012年第9期33卷 82-88页

作者：张祖伟温志渝尚正国李东玲胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Chongqing 400030China Microsystem Research Center of Chongqing University Chongqing 400030China

A novel micro-opto-electro-mechanical system （MOEMS） accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental theories and principles of the device are introduced briefly. A flexural plate-wave delay-line oscillator is designed to work as an acousto-optic （AO） shifter, which has a Klein-Cook parameter of 0.38. Single-mode optical strip waveguides of 2 μm in width and thicknesses of 0.6 μm are designed by using the effective index method for light transmission. The E^y00 mode waveguide polarizers are designed to ensure the consistency of the light polarization in the waveguides. The fabrication process, based on （100） oriented, 450-#m-thick silicon wafers is proposed in detail, and some difficulties in the process are discussed carefully. At last, a series of process tests are undertaken to solve the proposed problems. The results indicate that the proposed design and fabrication process of the device is dependable and realizable.

关键词： accelerometer MOEMS Raman-Nath diffraction design process test

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An on-line water quality monitoring system for the reservoirs based on android

An on-line water quality monitoring system for the reservoir...

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作者： Dai, Zi Wen Liao, Hai Yang National Key Laboratory of Fundamental Science of Micro/Nano-Device and system Technology Chongqing University Chongqing 400044 China

ISBN: (纸本)9783038351221

According to the demand of water quality automatic monitoring in many large or medium reservoirs, we proposed an on-line water quality monitoring system. It is composed of wireless sensor networks and an embedded monitoring platform. We built a novel early-warning model to well adapt to the regular pattern of water quality change in the reservoirs. As a result, an Android application with outstanding control experience is achieved for real-time monitoring, water pollution early warning and water quality comprehensive assessment. Experimental results show that the system can work stably for a long time and provide accurate monitoring information continuously. It can also detect the abnormal signals of water quality in time and alarm. The system efficiently satisfies the requirement of water quality on-line automatic monitoring. © (2014) Trans Tech Publications, Switzerland.

关键词： Water quality

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Continuous surface potential versus voltage equation of intrinsic surrounding-gate MOSFETs and analytic solution from accumulation to strong inversion region

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Journal of Semiconductors 2010年第6期31卷 27-33页

作者：何进郑睿张立宁张健林信南陈文新 Department of Electronics and Computer Engineering Hong Kong University of Science & Technology Micro & Nano Electric Device and Integrated Technology Group Key Laboratory of Integrated MicrosystemsPeking UniversityShenzhen Graduate School Micro & Nano Electric Device and Integrated Technology Group Key Laboratory of Integrated Microsystems Peking UniversityShenzhen Graduate School

A continuous surface potential versus voltage equation is proposed and then its solution is further discussed for a long channel intrinsic surrounding-gate（SRG） MOSFET from the accumulation to strong inversion *** original equation is derived from the exact solution of a simplified Poisson equation and then the empirical correction is performed from the mathematical condition required by the continuity of the solution,which results in a continuous surface potential versus voltage equation,allowing the surface potential and the related derivatives to be described by an analytic solution from the accumulation to strong inversion region and from linear to the saturation region accurately and *** these results,the dependences of surface potential and centric potential characteristics on device geometry are analyzed and the results are also verified with the 3-D numerical simulation from the aspect of accuracy and continuity tests.

关键词： non-classical CMOS surrounding-gate MOSFETs device physics surface potential accuracy continuity issue

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An On-line Multiparametric Water Quality Monitoring system Based on Visible Spectrophotometry

An On-line Multiparametric Water Quality Monitoring System B...

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2nd International Conference on Manufacturing science and Engineering

作者： Liao, Haiyang Tian, Peng Du, Yu Wen, Zhiyu National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology China Microsystem Research Center Chongqing University Chong Qing 400044 China

ISBN: (纸本)9783037850312

Water quality monitoring plays an important role in contamination control and environment protection. This paper describes an on-line multiparametric water quality monitoring system based on visible spectrophotometry, which combines embedded technology with GPRS telecommunication technology. This system can realize online wireless monitoring to concentrations of chromium (Cr), plumbum (Pb), A surfactant (AS), chemical oxygen demand (COD), ammonia nitrogen (AN), total phosphorus (TP) and total phenol (TPh) in real time. The mechanical structure, hardware circuit and software design of the system are completed. The absorption spectrums of pure water and MB-SDS complex have been measured. Preliminary experiments using a model machine show that each mechanism of the system runs well. Moreover, the monitor possesses many advantages, such as high degree of automation, high reliability, high efficiency, compact structure, small size, and so on.

关键词： Water Quality Monitoring Visible Spectrophotometry Embedded technology GPRS

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micrograting Displacement Sensor with Integrated Electrostatic Actuation

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Chinese Physics Letters 2014年第7期31卷 214-217页

作者：姚保寅冯丽爽王潇刘惟芳刘美华 Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) Beihang University Beijing 100191 Fundamental of Science on Novel Inertial Instrument & Navigation System Technology Laboratory Beihang University Beijing 100191

A high-resolution micro-grating displacement sensor with diffraction-based and integrated electrostatic actuation is proposed and experimentally demonstrated. The Ai reflecting membrane is fabricated at the bottom of a silicon moving part and the Au micro-gratings are patterned on a transparent substrate. This structure forms a phase sensitive diffraction grating, providing the displacement sensitivity of the micro-grating interferometer. It shows sensitivity adjustment and self-calibration capabilities with electrostatic actuation. Additional system components include a coherent light source, photodiodes, and required electronics. Experimental results show that the displacement sensor has a sensitivity of about 1.8 m V /nm and a resolution of less than 1 nm in the linear region. This displacement sensor is very promising in the fields requiring high sensitivity, broad dynamic range, and immunity to electromagnetic interference.

关键词： ELECTROSTATIC actuators DISPLACEMENT (Mechanics) DIFFRACTION gratings SENSITIVITY analysis SILICON

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Structural Design of a Compact in-Plane nano-Grating Accelerometer

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Chinese Physics Letters 2012年第11期29卷 219-223页

作者： YAO Bao-Yin ZHOU Zhen FENG Li-Shuang WANG Wen-Pu WANG Xiao Key Laboratory of Micro-nano Measurement-manipulation and Physics(Ministry of Education) Beihang UniversityBeijing 100191 Fundamental of Science on Novel Inertial Instrument&Navigation System Technology Laboratory Beihang UniversityBeijing 100191

A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is ***,the numbers of diffraction orders are ***,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration ***,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam *** on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/*** nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent *** results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.

关键词： accelerometer beam integrating

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Preparation and Electrochemical Characteristics of Three-dimensional Manganese Oxide micro-supercapacitor Electrode

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Chinese Journal of Chemical Physics 2012年第2期25卷 209-213,I0004页

作者： Chun-ming Wen Zhi-yu Wen Zheng You Xiao-feng Wang Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China Microsystem Research Center Chongqing UniversityChongqing 400030China Department of Precision Instruments and Mechanics Tsinghua UniversityBeijing 100084China

In order to increase the electrode surface area and enhance the charge storage capacity, we study the micro electro mechanical system technology to fabricate three-dimensional high aspect ratio micro-electrode structure based on glass. The anodic constant potential method is employed to deposit manganese oxide as electroactive substances on the micro-electrode surface. Cyclic voltammetry and constant current charge-discharge method are both used to prepare electrode electrochemical performance testing, with a two-dimensional electrode without structure for comparison. Experimental results show that three-dimensional elec- trode structure can effectively enhance the charge storage capacity. At 1.0 mA/cm2 charge- discharge density, the three-dimensional electrode shows a capacitance of 17.88 mF/cm2, seven times higher than the two-dimensional electrode.

关键词： micro-supercapacitor micro electro mechanical system Three-dimensional electrode Manganese oxide

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Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology

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science China(Technological sciences) 2012年第7期55卷 2013-2018页

作者： WEN ChunMing WEN ZhiYu YOU Zheng WANG XiaoFeng Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China Microsystem Research Center Chongqing UniversityChongqing 400030China Department of Precision Instruments and Mechanics Tsinghua UniversityBeijing 100084China

The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the *** enhance the charge storage capacity with a reduced volume,silicon is used as the electrode material,and three-dimensional electrode structure is prepared to increase the electrode surface area on the footprint area by inductively coupled plasma reactive etching(ICP) *** anodic constant current deposition method is employed to deposit manganese oxide on the electrode surface as the electroactive *** comparison,samples without slot are prepared with a two-dimensional *** Electron microscopy(SEM) and Energy Dispersive Spectroscopy(EDS) are used to characterize the surface morphology of the electrode structure and the deposited electroactive *** properties of the electrode are characterized by the cyclic voltammetry(CV) and the constant current charge-discharge *** results show that our approach can effectively increase the electrode surface area with more electroactive substances,and hence can increase storage capacity of the micro-supercapacitor.

关键词： micro Electro Mechanical system（MEMS） micro-supercapacitors three-dimensional electrode inductively coupled plasma reactive etching manganese oxide silicon

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Sensitivity analysis of light force accelerometer based on optical trapping Mie microsphere

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Optoelectronics Letters 2014年第1期10卷 77-80页

作者：冯丽爽焦洪臣姚保寅 Key Laboratory of Micro-nano Measurement-Manipulation and Physics Ministry of EducationFundamental Science on Novel Inertial Instrument & Navigation System Technology LaboratoryBeijing University of Aeronautics and Astronautics

For achieving the greatest sensitivity,numerical simulation is proposed to optimize the parameters of light force accelerometer(LFA).Firstly,the basic principle of the LFA is analyzed,and the mathematical model is established to describe the axial and radial optical trapping forces on microspheres in the fundamental mode Gaussian laser ***,the axial and radial optical trapping forces applied on Mie spheres are simulated to obtain the optimal parameters of open-loop *** show that the sensitivity can reach 103μm/***,the LFA system is proposed based on the closed-loop scheme with dual *** can provide reference for the design and fabrication of LFA in future.

关键词：敏感度分析加速度计捕获光学数值模拟高斯激光束数学模型最优参数

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Flexible and transparent triboelectric nanogenerator based on high performance well-ordered porous PDMS dielectric film

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nano Research 2016年第12期9卷 3714-3724页

作者： Xianming He Xiaojing Mu Quan Wen Zhiyu Wen Jun Yang Chenguo Hu Haofei Shi Department of Applied Physics Chongqing University Chongqing 400044 China Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044 China Microsystem Research Center Chongqing University Chongqing 400044 China Key Laboratory of Multi-Scale Manufacturing Technology Chongqing Institute of Green and Intelligent Technology Chinese Academy of Sciences Chongqing 400714 China

A flexible and transparent triboelectric nanogenerator （FT-TENG） has great potential for application in self-powered biosensor systems, electronic skin and wearable electronic devices. However, improving the output performance with little damage to its optical properties is challenging. Herein, we have developed an FT-TENG that has a well-ordered nest-like porous polydimethylsiloxane （NP-PDMS） film and graphene transparent electrodes. The NP-PDMS film with ordered pores is fabricated by hydrochloric acid etching of 500 nm sized ZnO spheres made of aggregated nanoparticles, having a light transmittance of 81.8% and a water contact angle of 118.62°. The FT-TENG based on the NP-PDMS film with a porosity of 12%, gives a maximum output of 271 V and 7.8 μA, which are respectively, 3.7 and 2.1-fold of those of a TENG with a flat PDMS film. The peak output power reaches 0.39 mW with a load resistance of 9.01 MΩ. The dielectric constant and effective thickness of the NP-PDMS film and the capacitance and charge transfer of the FT-TENG are systematically investigated. This work provides a novel and effective method to enhance the performance of FT-TENGs with little damage to their optical properties.

关键词： porouspolydimethylsiloxane（PDMS） surface charge density nanogenerator flexibility transparent electrode

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