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Flexible and transparent triboelectric nanogenerator based on high performance well-ordered porous PDMS dielectric film

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nano Research 2016年第12期9卷 3714-3724页

作者： Xianming He Xiaojing Mu Quan Wen Zhiyu Wen Jun Yang Chenguo Hu Haofei Shi Department of Applied Physics Chongqing University Chongqing 400044 China Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044 China Microsystem Research Center Chongqing University Chongqing 400044 China Key Laboratory of Multi-Scale Manufacturing Technology Chongqing Institute of Green and Intelligent Technology Chinese Academy of Sciences Chongqing 400714 China

A flexible and transparent triboelectric nanogenerator （FT-TENG） has great potential for application in self-powered biosensor systems, electronic skin and wearable electronic devices. However, improving the output performance with little damage to its optical properties is challenging. Herein, we have developed an FT-TENG that has a well-ordered nest-like porous polydimethylsiloxane （NP-PDMS） film and graphene transparent electrodes. The NP-PDMS film with ordered pores is fabricated by hydrochloric acid etching of 500 nm sized ZnO spheres made of aggregated nanoparticles, having a light transmittance of 81.8% and a water contact angle of 118.62°. The FT-TENG based on the NP-PDMS film with a porosity of 12%, gives a maximum output of 271 V and 7.8 μA, which are respectively, 3.7 and 2.1-fold of those of a TENG with a flat PDMS film. The peak output power reaches 0.39 mW with a load resistance of 9.01 MΩ. The dielectric constant and effective thickness of the NP-PDMS film and the capacitance and charge transfer of the FT-TENG are systematically investigated. This work provides a novel and effective method to enhance the performance of FT-TENGs with little damage to their optical properties.

关键词： porouspolydimethylsiloxane（PDMS） surface charge density nanogenerator flexibility transparent electrode

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A comprehensive review of miniatured wind energy harvesters

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nano Materials science 2021年第2期3卷 170-185页

作者： Quan Wen Xianming He Zhuang Lu Reinhard Streiter Thomas Otto Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing UniversityChongqing400044People's Republic of China Microsystem Research Center Chongqing UniversityChongqing400044People's Republic of China Fraunhofer Institute for Electronic Nano Systems(ENAS) Chemnitz09131Germany

Following the current rapid development of the Internet of Things(IoT)and wireless condition monitoring systems,energy harvesters which use ambient energy have become a key part of achieving an energy-autonomous *** wind energy harvesters have attracted widespread attention because of their great potential of power density as well as the rich availability of wind energy in many possible areas of *** article provides readers with a glimpse into the state-of-the-art of miniature wind energy *** crucial factors for them to achieve high working efficiency under lower operational wind speed excitation are *** potential energy coupling mechanisms are discussed in *** approaches for broadening operational wind-speed-range given a variety of energy coupling mechanisms are also presented,as observed in the *** enhancement mechanisms including hydrodynamic configuration optimization,and non-linear vibration pick-up structure are *** are drawn and the outlook for each coupling mechanisms is presented.

关键词： Energy harvester Wind energy Miniature wind-induced vibration energy harvester Energy coupling mechanism Performance enhancement mechanisms

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Stress control of silicon nitride films deposited by plasma enhanced chemical vapor deposition

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Optoelectronics Letters 2016年第4期12卷 285-289页

作者：李东玲冯小飞温志渝尚正国佘引 National Key Laboratory of Fundamental Science of Novel Micro/Nano Device and System Technology Chongqing University Chongqing 400030 China Key Laboratory of Optoelectronic Technology and System of the Education Ministry of China Chongqing University Chongqing 400030 China No.24 Reaearch Institute of China Electronics Technology Group Corporation Chongqing 400060 China

Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS.

关键词： Deposition Deposition rates Integrated circuits MEMS Nitrides Optical properties Plasma CVD Refractive index Silicon nitride Stresses Vapor deposition

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Analysis of the p^+/p window layer of thin film solar cells by simulation

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Journal of Semiconductors 2012年第2期33卷 23-27页

作者： Lin Aiguo Ding Jianning Yuan Ningyi Wang Shubo Cheng Guanggui Lu Chao Center of Micro/Nano Science&Technology Jiangsu UniversityZhenjiang 212013China Center of Low-Dimension Materials Micro/Nano Device and SystemChangzhou UniversityChangzhou 213164China Jiangsu Laboratory for Solar Cell Materials and Technology Changzhou 213164China

The application of a p~＋/p configuration in the window layer of hydrogenated amorphous silicon thin film solar cells is simulated and analyzed utilizing an AMPS-ID *** differences between p~＋-p-i-n configuration solar cells and p-i-n configuration solar cells are pointed *** effects of dopant concentration, thickness of p~＋-layer,contact barrier height and defect density on solar cells are *** results indicate that solar cells with a p~＋-p-i-n configuration have a better *** open circuit voltage and short circuit current were improved by increasing the dopant concentration of the p~＋ layer and lowering the front contact barrier *** defect density at the p/i interface which exceeds two orders of magnitude in the intrinsic layer will deteriorate the cell property.

关键词： p~＋/p configuration thin film solar cells hydrogenated amorphous silicon solar cells window layer

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Numerical optimization approach of the gap between the magnet and coil for electromagnetic vibration energy harvesters design

Numerical optimization approach of the gap between the magne...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Key Laboratory of Fundamental Science on Micro/Nano Device and System Technology Chongqing University China National Center for International Research of Micro/Nano System and New Material Technology Chongqing University China Micro System Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

In the design of the micro electromagnetic vibration harvester, an important goal is maximization of the magnetic flux linkage gradient, which directly determines the induced voltage and output power of the electromagnetic vibration harvester. This paper established a numerical model based on structure of the electromagnetic vibration energy harvester. An analytic expression for the magnetic field of rectangular permanent magnets is used to build up an electromagnetic coupling model. The magnetic field distribution of the rectangular permanent magnet was analyzed. The effects of the gap between the magnet and the coil on the load voltage of the electromagnetic vibration energy harvester were investigated. According to the formula, the magnetic flux linkage and flux gradient were calculated to optimize the geometrical parameter of the magnet and coil. The method and boundary conditions of optimizing the gap between the magnet and coil were presented. The maximum output voltage can be obtained by optimizing the gap between the magnet and the coil. A simple prototype was fabricated and measured to validate the theoretical deducing and the feasibility of method. © (2015) Trans Tech Publications, Switzerland.

关键词： Energy harvesting

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Bionics-inspired highly robust and fatigue-resistant hydrogel composite elastomers with multi-applications

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Chemical Engineering Journal 2025年 516卷

作者： Jiaxin Shen Haizhou Huang Chen Li Huihui Shi Shisheng Hou Kuibo Yin Hengchang Bi Shu Wan Litao Sun SEU-FEI Nano-Pico Center Key Laboratory of MEMS of Ministry of Education Collaborative Innovation Center for Micro/Nano Fabrication Device and System Southeast University Nanjing 210096 China Key Laboratory of Opto-Electronic Science and Technology for Medicine of Ministry of Education Fujian Provincial Key Laboratory of Photonics Technology College of Photonic and Electronic Engineering Fujian Normal University Fuzhou 350117 China Chongqing Key Laboratory of Precision Optics Chongqing Institute of East China Normal University Chongqing 401120 China In Situ Devices Center School of Integrated Circuits East China Normal University Dongchuan Road Shanghai 200241 China Key Laboratory of Optoelectronic Technology and Systems Ministry of Education Key Disciplines Laboratory of Novel Micro-Nano Devices and System Technology School of Optoelectronics Engineering Chongqing University Chongqing 400044 China

The key factors limiting the potential applications of hydrogels are their weak mechanical properties, specifically fatigue and hysteresis, which arise from the breakage of low-energy amorphous polymer chains within the hydrogels. To address this issue, this study presents a universal approach for fabricating composite hydrogels that exhibit remarkable elasticity and mechanical stability. The Ecoflex elastomer backbone was integrated into the organic hydrogel to mimic the cytoskeletal structure.. This innovation serves to bolster the material’s fatigue resistance and eliminate hysteresis. The findings reveal that the organic hydrogel/porous Ecoflex (OHPE) composite displays impressive mechanical stability. Remarkably, it can endure up to 5,000 load-unload cycles, even at a 250 % strain, with minimal alteration in its mechanical properties. Furthermore, OHPE exhibits excellent resistance to dewatering and freezing, making it a robust material for various applications. Additionally, OHPE performs admirably as strain sensors, temperature sensors, and triboelectric nanogenerators, highlighting its versatility and potential for widespread use.

关键词： Hydroelasticity

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Design and Comparison of micro electromagnetic vibration energy harvesters

Design and Comparison of micro electromagnetic vibration ene...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Chen, Li Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University China Microsystem Research Center of Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

This paper presents two electromagnetic vibration energy harvesters based on micro-electro-mechanical (MEMS) technology. Two prototypes with different vibration structures were designed and fabricated. The energy harvester includes a permanent magnet attached on vibration structure (resonator) made by Si and a fixed wire-wound coil, with the total volume of 0.9 cm3. Two energy harvesters with different resonator are tested and compared. Experiments show that: in the same acceleration and a load resistance, the resonant frequency of prototype B is approximately 95% of prototype A;The peak-peak voltage and the maximum power of prototype B is 1.6 times and 2.7 times of prototype A respectively. The test results was analyzed simply and it indicated that the electromagnetic energy harvesting with the spring B has better performance;also proved that the potential ability of the non-linear spring could extend the frequency bandwidth and improve output voltage. © (2015) Trans Tech Publications, Switzerland.

关键词： Electromagnetic induction

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Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis

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microsystems and nanoengineering 2025年第1期11卷 1-12页

作者： Liu, Zehan Wang, Xihan He, Yiyang Hong, Weiqiang Sun, Peng Liu, Weitao Ye, Dong Yang, Zhuoqing Wang, Xuewen Wu, Mengxi Wang, Liding Liu, Junshan State Key Laboratory of High-performance Precision Manufacturing Dalian University of Technology Liaoning Dalian116024 China Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Liaoning Dalian116024 China State Key Laboratory of Digital Manufacturing Equipment and Technology Huazhong University of Science and Technology Wuhan430074 China National Key Laboratory of Science and Technology on Micro and Nano Fabrication School of Electronic Information and Electrical Engineering Shanghai Jiao Tong University Shanghai200240 China Institute of Flexible Electronics Northwestern Polytechnical University Xi’an710072 China

Thermotherapy is a conventional and effective physiotherapy for arthritis. However, the current thermotherapy devices are often bulky and lack real-time temperature feedback and self-adjustment functions. Here, we developed a multifunctional wearable system for real-time thermotherapy of arthritic joints based on a multilayered flexible electronic device consisting of homomorphic hollow thin-film sensors and heater. The kirigami−serpentine thin-film sensors provide stretchability and rapid response to changes in environmental temperature and humidity, and the homomorphic design offers easy de-coupling of dual-modal sensing signals. Based on a closed-loop control, the thin-film Joule heater exhibits rapid and stable temperature regulation capability, with thermal response time © The Author(s) 2025.

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High-Q unidirectional polarization singularities

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Physical Review Applied 2025年第5期23卷 054020-054020页

作者： Chuanlin Li Wenhao Wang Jianfeng Chen Mengqi Liu Aobo Ren Cheng-Wei Qiu Hongxing Xu Zhiming Wang Jiang Wu Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 China Division of Physics and Applied Physics School of Physical and Mathematical Sciences Nanyang Technological University Singapore 637371 Singapore Centre for Disruptive Photonic Technologies The Photonics Institute Nanyang Technological University Singapore 637371 Singapore Department of Electrical and Computer Engineering National University of Singapore Singapore 117583 Singapore Institute of Engineering Thermophysics School of Mechanical Engineering Shanghai Jiao Tong University Shanghai 200240 China School of Physics and Technology Center for Nanoscience and Nanotechnology and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education Wuhan University Wuhan 430072 China

Unidirectional guided resonances (UGRs), which are eigenstates that radiate exclusively in a single channel, are promising for advancing diverse photonic devices. However, existing approaches face an inherent trade-off between achieving high-Q factors and maximizing the radiation-asymmetry ratios. To address this challenge, we propose a scheme that exploits both out-of-plane and in-plane couplings to generate bound states in the continuum with precise radial and rotational control in momentum space. This approach effectively decouples the Q factors of UGRs from their radiation-asymmetry ratios. As a result, we achieve UGRs with Q factors exceeding 104, which is 1–2 orders of magnitude higher than traditional UGRs. Furthermore, we demonstrate the ability to reverse the emission direction of these UGRs, leading to a broad range of radiation-asymmetry ratios from −53 to 55 dB. We further validate the practical realization of high-Q UGRs using a silicon-on-silica system. Our findings provide a versatile method for generating high-Q UGRs, offering alternative pathways for innovations in nonlinear optics, light-matter interactions, and advanced optoelectronic applications.

关键词： Nonlinear optics

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Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester

Fabrication of aluminum nitride films by reactive pulse DC m...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Shang, Zhengguo Li, Dongling Wang, Shengqiang National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing China Microsystem Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

Aluminum nitride(AlN) film as a piezoelectric material has been used widely, particularly in vibration energy harvester due to its unique and enhanced properties such as high temperature resistance and compatibility with CMOS processes. In this work, AlN film with (002) preferred orientation was prepared on silicon wafers by pulse DC reactive magnetron sputtering(RMS), and the properties such as peak intensity, full width at half maximum (FWHM) and surface morphology were investigated by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The preferred orientation was found to be sensitive to deposition conditions such as gas flow rate, power, bottom electrodes materials and substrates temperature. The results shows that the intensity was 1.1×105 counts, the FWHM was 1.9°when the temperature was 260°C. The film was used to fabricate the vibrated energy harvester successful and the power density reached about 3000uW/cm3 at the vibration frequency under 1g acceleration. © (2015) Trans Tech Publications, Switzerland.

关键词： Magnetron sputtering

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