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Emerging material platforms for integrated microcavity photonics

science China(Physics,Mechanics & Astronomy) 2022年第10期65卷 10-28页

作者： Jin Liu Fang Bo Lin Chang Chun-Hua Dong Xin Ou Blake Regan Xiaoqin Shen Qinghai Song Baicheng Yao Wenfu Zhang Chang-Ling Zou Yun-Feng Xiao State Key Laboratory of Optoelectronic Materials and Technologies School of PhysicsSun Yat-sen UniversityGuangzhou 510000China MOE Key Laboratory of Weak-Light Nonlinear Photonics TEDA Institute of Applied Physics and School of PhysicsNankai UniversityTianjin 300071China State Key Laboratory of Advanced Optical Communications System and Networks School of ElectronicsPeking UniversityBeijing 100871China CAS Key Lab of Quantum Information University of Science and Technology of ChinaHefei 230026China State Key Laboratory of Functional Material for Informatics Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China School of Mathematical and Physical Sciences University of Technology SydneyUltimo 2007Australia School of Physical Science and Technology ShanghaiTech UniversityShanghai 201210China Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Harbin Institute of TechnologyShenzhen 518055China Key Laboratory of Optical Fiber Sensing and Communications(Ministry of Education) University of Electronic Science and Technology of ChinaChengdu 611731China State Key Laboratory of Transient Optics and Photonics Xi’an Institute of Optics and Precision MechanicsChinese Academy of SciencesXi’an 710119China State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics School of PhysicsPeking UniversityBeijing 100871China

Many breakthroughs in technologies are closely associated with the deep understanding and development of new material *** the main material used in microelectronics,Si also plays a leading role in the development of integrated *** indirect bandgap,absence ofχ(2)nonlinearity and the parasitic nonlinear absorptions at the telecom band of Si imposed technological bottlenecks for further improving the performances and expanding the functionalities of Si microcavities in which the circulating light intensity is dramatically *** past two decades have witnessed the burgeoning of the novel material platforms that are compatible with the complementary metal-oxide-semiconductor(COMS)*** particular,the unprecedented optical properties of the emerging materials in the thin film form have resulted in revolutionary progress in microcavity *** this review article,we summarize the recently developed material platforms for integrated photonics with the focus on chip-scale microcavity *** material characteristics,fabrication processes and device applications have been thoroughly discussed for the most widely used new material *** also discuss open challenges and opportunities in microcavity photonics,such as heterogeneous integrated devices,and provide an outlook for the future development of integrated microcavities.

关键词： microcavity integrated optics nonlinear optics

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Data-driven design of high-performance MASnxPb1-xI3 perovskite materials by machine learning and experimental realization

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Light(science & Applications) 2022年第9期11卷 2115-2126页

作者： XIA CAI FENGCAI LIU ANRAN YU JIAJUN QIN MOHAMMAD HATAMVAND IRFAN AHMED JIAYAN LUO YIMING ZHANG HAO ZHANG YIQIANG ZHAN School of Information Science and Technology Fudan UniversityShanghai 200433China College of Information Mechanical and Electrical EngineeringShanghai Normal UniversityShanghai 200234China Center of Micro-Nano System Fudan UniversityShanghai 200433China Department of Physics Chemistry and BiologyLinkoping UniversityLinkoping SE-58183Sweden Key Laboratory of Micro and Nano Photonic Structures and Department of Optical Science and Engineering Fudan UniversityShanghai 200433China Yiwu Research Institute of Fudan University Chengbei RoadYiwu CityZhejiang 322000China

The photovoltaic performance of perovskite solar cell is determined by multiple interrelated factors,such as perovskite compositions,electronic properties of each transport layer and fabrication parameters,which makes it rather challenging for optimization of device performances and discovery of underlying ***,we propose and realize a novel machine learning approach based on forward-reverse framework to establish the relationship between key parameters and photovoltaic performance in high-profile MASnxPb1-xI3 perovskite *** proposed method establishes the asymmetrically bowing relationship between band gap and Sn composition,which is precisely verified by our *** on the analysis of structural evolution and SHAP library,the rapid-change region and low-bandgap plateau region for small and large Sn composition are explained,*** establishing the models for photovoltaic parameters of working photovoltaic devices,the deviation of short-circuit current and open-circuit voltage with band gap in defective-zone and low-bandgap-plateau regions from Shockley-Queisser theory is captured by our models,and the former is due to the deep-level traps formed by crystallographic distortion and the latter is due to the enhanced susceptibility by increased Sn4+*** more difficulty for hole extraction than electron is also concluded in the models and the prediction curve of power conversion efficiency is in a good agreement with Shockley-Queisser *** the help of search and optimization algorithms,an optimized Sn:Pb composition ratio near 0.6 is finally obtained for high-performance perovskite solar cells,then verified by our *** constructive method could also be applicable to other material optimization and efficient device development.

关键词： perovskite performance optimization

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3D printed-electrospun PCL/hydroxyapatite/MWCNTs scaffolds for the repair of subchondral bone

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Regenerative Biomaterials 2023年第1期10卷 294-305页

作者： Yanyan Cao Lei Sun Zixian Liu Zhizhong Shen Wendan Jia Peiyi Hou Shengbo Sang College of Information Science and Engineering Hebei North UniversityZhangjiakou 075000China Shanxi Key Laboratory of Micro Nano Sensors&Artificial Intelligence Perception College of Information and ComputerTaiyuan University of TechnologyTaiyuan 030024China Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education Taiyuan University of TechnologyTaiyuan 030024China Shanxi Research Institute of 6D Artificial Intelligence Biomedical Science Taiyuan 030031China

Osteochondral defect caused by trauma or osteoarthritis exhibits a major challenge in clinical treatment with limited symptomatic effects at *** regeneration and remodeling of subchondral bone play a positive effect on cartilage regeneration and further promotes the repair of osteochondral *** use of the strengths of each preparation method,the combination of 3D printing and electrospinning is a promising method for designing and constructing multi-scale scaffolds that mimic the complexity and hierarchical structure of subchondral bone at the microscale and nanoscale,*** this study,the 3D printed-electrospun poly(ɛ-caprolactone)/nano-hydroxyapatites/multi-walled carbon nanotubes(PCL/nHA/MWCNTs)scaffolds were successfully constructed by the combination of electrospinning and layer-by-layer 3D *** resulting dual-scale scaffold consisted of a dense layer of disordered nanospun fibers and a porous microscale 3D scaffold layer to support and promote the ingrowth of subchondral ***,the biomimetic PCL/nHA/MWCNTs scaffolds enhanced cell seeding efficiency and allowed for higher cell-cell interactions that supported the adhesion,proliferation,activity,morphology and subsequently improved the osteogenic differentiation of bone marrow mesenchymal stem cells in ***,this study elucidates that the construction of 3D printed-electrospun PCL/nHA/MWCNTs scaffolds provides an alternative strategy for the regeneration of subchondral bone and lays a foundation for subsequent in vivo studies.

关键词： additive manufacturing 3D printing electrospinning subchondral bone

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Enrichment efficiency optimization of dielectrophoresis cell chip based on interdigitated microelectrodes array

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key Engineering Materials 2015年 645卷 1255-1260页

作者： Gu, Wenwen Huang, Jie Department of Electronic and Control Engineering College of Engineering and Technology Southwest University Chongqing400715 China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing400030 China

At present, the majority dielectrophoresis chip designs optimize their performance by electric simulation and fluid field simulation. The lack of further cells force analysis and movement prediction results in a limited cell dielectrophoresis enrichment efficiency. The HepG2 hepatoma carcinoma cell movement under the action of dielectrophoresis force, fluid force and gravity was analyzed respectively by Comsol Multiphysics software. The preliminary optimization conditions for the cell enrichment were obtained. According to the simulation results, the experiments were carried out to investigate the enrichment effect of the HepG2 hepatoma carcinoma cells. The experiment result demonstrated the enrichment efficiency of HepG2 hepatoma carcinoma cells was reached to 88.89% under the 5 V amplitude and 4 MHz frequency sinusoidal signal excitation. © 2015 Trans Tech Publications, Switzerland.

关键词： Efficiency

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Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments

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Journal of Zhejiang University-science A(Applied Physics & Engineering) 2017年第1期18卷 67-74页

作者： Wei-zhong WANG Ji LIANG Yong RUAN Wei PANG Zheng YOU Collaborative Innovation Center for Micro/Nano Fabrication Device and System State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision Instrument Tsinghua University Beijing 100084 China State Key Laboratory of Precision Measurement Technology and lnstruments Tianjin University Tianjin 300072 China

Surface acoustic wave （SAW） sensors and micro-electromechanical system （MEMS） technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator （size： 1107μm× 721 μm） based on the AlN/4H-SiC multilayer structure is designed and simulated. A MEMS-compatible fabrication process is employed to fabricate the resonator. The results show that highly c-axis-oriented AlN thin films deposited on the 4H-SiC substrate are obtained, with that the diffraction peak of AlN is 36.10° and the lowest full width at half maximum （FWHM） value is only 1.19°. The test results of the network analyzer are consistent with the simulation curve, which is very encouraging and indicates that our work is a significant attempt to solve the measurement problems mainly including high temperature stability of sensitive structures and the heat transmission of leads in harsh environments. It is essential to get the best performance of SAW resonator, optimize and characterize the behaviors in high temperatures in future research.

关键词： Surface acoustic wave （SAW） resonator AlN/4H-SiC Harsh environment micro-electromechanical system（MEMS） technology Gas turbine

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Evaluation of properties of lapped PZT ceramics and silicon cantilever based on eutectic bonding and dicing process

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作者： Li, Yigui Sun, Jian Liu, Jingquan Yang, Chunsheng He, Dannong Tanaka, Katsuhiko Sugiyama, Susumu National Key Laboratory of Micro/Nano Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University Shanghai 200240 China National Engineering Research Center for Nanotechnology Shanghai 200241 China Department of Micro System Technology Rtsumeikan University 1-1-1 Noji-Higashi Kusatsu Shiga Japan

ISBN: (纸本)0878492119

Piezoelectric sensor can produce voltage when deflected (function as an energy harvester) while piezoelectric actuator can deflect when a voltage is applied. Different device applications have different requirements on the thickness and in-plane geometry of the Lead Zirconate Titanate(PZT) piezoelectric layers and thus have their own processing difficulties. In this paper, PZT-Au-Si cantilever is fabricated by eutectic bonding and dicing *** properties of lapped PZT ceramics and silicon cantilever is also evaluated. The PZT-Au-Si cantilever applications for both piezoelectric actuators and energy harvesters have been confirmed. © (2011) Trans Tech Publications.

关键词： Lead zirconate titanate

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The micro-structure and optical properties of Mn-doped ZnO thin film fabricated by sol-gel technique

The micro-structure and optical properties of Mn-doped ZnO t...

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IEEE International Conference on nano/micro Engineered and Molecular systems

作者： Wang, Xiu-Qin Ding, Jian-Ning Yuan, Ning-Yi Ding, Gu-Qiao Ni, JianLin Kan, Bao Center of Low-dimension Materials Micro/Nano Device and System Jiangsu Polytechnic University Changzhou 213164 China Center of Micro/Nano Science and Technology College of Mechanical Engineering Jiangsu University Zhenjiang 212013 China Key Laboratory of New Energy Source Changzhou 213164 China School of Mathematics and Physics Jiangsu Polytechnic University Changzhou 213164 China

ISBN: (纸本)9781424465439

We synthesized undoped and Mn-doped ZnO films on glass substrates using the sol-gel technique. The micro-structure, morphology and optical properties of ZnO films were studied by using X-ray diffraction, Atomic Force microscope and UV-visible transmission spectra. After annealed at a temperature lower than 550 °C by Rapid Thermal Processing (RTP), all the ZnO films are polycrystalline with a hexagonal wurtzite structure. For Mn-doped ZnO films, although no peak corresponding to manganese oxide is observed in XRD spectrums, the lattice constants of the films become larger and the optical band-gaps increase with the increase of annealing temperature, which is different from the result of un-doped ZnO films. These measurements indicate that Mn2+ has substituted for Zn2+ in the films even annealed at a temperature as low as 300 °C. ©2010 IEEE.

关键词： Optical properties

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A new hybrid piezoelectric-electromagnetic micro vibration energy harvester

A new hybrid piezoelectric-electromagnetic micro vibration e...

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IEEE Conference on Electron devices and Solid-State Circuits

作者： Hua Yu Jielin Zhou Wei Wang College of Optoelectronic Engineering Chongqing China Key Laboratory for Optoelectronic Technology & Systems Ministry of Education of China Chongqing China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing China

ISBN: (纸本)9781479923366

The paper presents a new hybrid micro piezoelectric-electromagnetic generator for vibration energy harvesting, which generates energy from low frequency and small amplitude vibration environment, using piezoelectric and electromagnetic conversion mechanisms. The paper outlines factors needed when designing the hybrid energy harvester, including the coupling mathematical model, the finite element analysis, optimization procedure and trade-offs. The proposed hybrid energy harvester is also fabricated and experimental results show that the device can generate an open-circuit voltage of 4.32V and produce a power of 13.47μW with an optimal resistive load of 403KΩ at 0.1 m/s 2 acceleration and 105.2 Hz frequency.

关键词： Materials Electromagnetics Arrays Resistance Coils

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Stoichiometric effect on electrical and near-infrared photodetection properties of full-composition-range GaAs1−xSbx nanowires

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nano Research 2021年第11期14卷 3961-3968页

作者： Jiamin Sun Mingming Han Meng Peng Lei Zhang Dong Liu Chengcheng Miao Jiafu Ye Zhiyong Pang Longbing He Hailu Wang Qing Li Peng Wang Lin Wang Xiaoshuang Chen Chongxin Shan Litao Sun Weida Hu Zai-xing Yang School of Physics and School of Microelectronics Shandong UniversityJinan250100China State Key Laboratory of Infrared Physics Shanghai Institute of Technical PhysicsChinese Academy of SciencesShanghai200083China Wuhan National Laboratory for Optoelectronics Huazhong University of Science and TechnologyWuhan430074China SEU-FEI Nano-Pico Center Key Lab of MEMS of Ministry of EducationCollaborative Innovation Center for Micro/Nano FabricationDevice and SystemSoutheast UniversityNanjing210096China School of Physics and Photoelectric Engineering Hangzhou Institute for Advanced StudyUniversity of Chinese Academy of SciencesHangzhou310024China Henan Key Laboratory of Diamond Optoelectronic Materials and Devices School of Physics and EngineeringZhengzhou UniversityZhengzhou450001China

As one of the most important narrow bandgap ternary semiconductors, GaAs1−xSbx nanowires (NWs) have attracted extensive attention recently, due to the superior hole mobility and the tunable bandgap, which covers the whole near-infrared (NIR) region, for technological applications in next-generation high-performance electronics and NIR photodetection. However, it is still a challenge to the synthesis of high-quality GaAs1−xSbx NWs across the entire range of composition, resulting in the lack of correlation investigation among stoichiometry, microstructure, electronics, and NIR photodetection. Here, we demonstrate the success growth of high-quality GaAs1−xSbx NWs with full composition range by adopting a simple and low-cost surfactant-assisted solid source chemical vapor deposition method. All of the as-prepared NWs are uniform, smooth, and straight, without any phase segregation in all stoichiometric compositions. The lattice constants of each NW composition have been well correlated with the chemical stoichiometry and confirmed by high-resolution transmission electron microscopy, X-ray diffraction, and Raman spectrum. Moreover, with the increase of Sb concentration, the hole mobility of the as-fabricated field-effect-transistors and the responsivity and detectivity of the as-fabricated NIR photodetectors increase accordingly. All the results suggest a careful stoichiometric design is required for achieving optimal NW device performances.

关键词： GaAs1−xSbx nanowire stoichiometry effect full-composition-range field-effect hole mobility near-infrared photodetection

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LONGITUDINAL WAVE RESONANT FREQUENCY CALCULATION AND VERIFICATION OF THE BULK ACOUSTIC RESONATOR

LONGITUDINAL WAVE RESONANT FREQUENCY CALCULATION AND VERIFIC...

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2013 5th IEEE International Conference on Broadband Network & Multimedia technology

作者： Yi HE Yang GAO Bin ZHOU Junru LI School of Information Engineering Southwest University of Science and Technology Institute of Electronic Engineering China Academy of Engineering Physics National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University

ISBN: (纸本)9781479900961

Thickness and material of electrode, piezoelectric and supporting layer film of the Film Bulk Acoustic Resonator (FBAR) are main influence factors of resonant frequency, desired resonance frequency can be achieved by confirming thickness and material. A formula about thickness, material, frequency parameter and angular frequency has been achieved by deriving stress-equation of motion in longitudinal wave of film bulk acoustic resonator;frequency parameter has been get from Newton iteration of determinant of stress and displacement boundary conditions, continuity equations simulated by MATLAB. The resonant frequency of a certain FBAR whose thickness, material and frequency parameter are determined has been calculated by the formula, and the calculation value is 1.441 GHz. Equivalent circuit of longitudinal vibration Mason model which has the same thickness, material with formula calculation has been simulated by ADS, and resonant frequency of simulation model is 1.473GHz. Verification simulation of equivalent circuit of longitudinal vibration Mason model shows: resonant frequency calculation value by formula and the simulation value of model are very close, and we can use the formula to calculate longitudinal wave resonance frequency of FBAR.

关键词： FBAR resonant frequency Newton iteration Mason model ADS simulation

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