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Preparation of graphene-MoS_2 hybrid aerogels as multifunctional sorbents for water remediation

science China Materials 2017年第11期60卷 1102-1108页

作者：陈博毕恒昌马青朗谭超良程洪飞陈也贺馨雁孙立涛林德岱黄岭张华 Nanyang Environment and Water Research Institute(NEWRI) Nanyang Technological UniversitySingapore 637141Singapore Interdisciplinary Graduate School(IGS) Nanyang Technological UniversitySingapore 639798Singapore Center for Programmable Materials School of Materials Science and EngineeringNanyang Technological UniversitySingapore 639798Singapore SEU-FEI Nano-Pico Center Key Laboratory of MEMS of Ministry of EducationCollaborative Innovation Center for Micro/Nano Fabrication Device and SystemSoutheast UniversityNanjing 210096China School of Civil and Environmental Engineering Nanyang Technological UniversitySingapore 639798Singapore Key Laboratory of Flexible Electronics(KLOFE)&Institute of Advanced Materials(IAM) Nationa1 Iiangsu Synergistic Innovation Center for Advanced Materials(SICAM)Nanjing Tech University(NanjingTech)Nanjing 211816China

The increasing demand of clean water and ef- fective way to recycle industrial wastewater has offered a new application for carbon-based three-dimensional （3D） porous networks as sorbents due to their superior sorption abilities. Through the surface modification and hybridization with functional materials, the physical and chemical properties of the 3D carbon-based materials can be engineered. In this work, graphene-MoS2 aerogels （GMAs） with bulky shape are synthesized via a one-pot hydrothermal method. The obtained GMAs show quick sorption rate and high sorption capacity towards a wide variety of contaminants. The sorption covers not only organic solvents or organic dyes, but also toxic heavy metals ions such as Hg2＋ and Pb2＋. More importantly, the sorption capacity towards metal ions can be optimized by simply changing the loading amount of MoS2.

关键词： Graphene MoS2 aerogels multifunctional sorbents water remediation

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Narrow photonic-plasmonic resonances in petal-like capped-nanopillar resonators for real-time, ultrasensitive colorimetric sensing 20

Narrow photonic-plasmonic resonances in petal-like capped-na...

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20th International Conference on Miniaturized systems for Chemistry and Life sciences, microTAS 2016

作者： Fan, Jiaorong Wu, Wengang Zhu, Jia Yun, Huang National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of Microelectronics Peking University Beijing100871 China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

ISBN: (纸本)9780979806490

A new type of colorimetric sensing device composed of metallic nanopetal-capped-nanopillar array metasurface is reported. The device exhibits narrowband and harmonic reflection feature, and thus has excellent ability to produce vivid and bright colors. This is due to the effect of surface-plasmon (SP) coupling in the array of three-dimensional plasmonic petal-capped-pillar nanoresonators. We employ the device as an ultrasensitive colorimetric plasmon-resonance sensor to detect different refractive-index solutions with much striking color differences. The metasurface-based sensor can visually detect the surrounding medium in real-time with refractive index resolution of 2x10-3 units.

关键词： Refractive index

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Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester

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key Engineering Materials 2015年 645卷 1133-1138页

作者： Shang, Zhengguo Li, Dongling Wang, Shengqiang National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing China Microsystem Research Center Chongqing University Chongqing China

Aluminum nitride(AlN) film as a piezoelectric material has been used widely, particularly in vibration energy harvester due to its unique and enhanced properties such as high temperature resistance and compatibility with CMOS processes. In this work, AlN film with (002) preferred orientation was prepared on silicon wafers by pulse DC reactive magnetron sputtering(RMS), and the properties such as peak intensity, full width at half maximum (FWHM) and surface morphology were investigated by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The preferred orientation was found to be sensitive to deposition conditions such as gas flow rate, power, bottom electrodes materials and substrates temperature. The results shows that the intensity was 1.1×105 counts, the FWHM was 1.9° when the temperature was 260°C. The film was used to fabricate the vibrated energy harvester successful and the power density reached about 3000uW/cm3 at the vibration frequency under 1g acceleration. © 2015 Trans Tech Publications, Switzerland.

关键词： Magnetron sputtering

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Design and simulation of corrugated diaphragm applied to the MEMS fiber optic pressure sensor

Design and simulation of corrugated diaphragm applied to the...

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IEEE International Conference on nano/micro Engineered and Molecular systems (NEMS)

作者： Yiming Gui Yangxi Zhang Guandong Liu Yilong Hao Chengchen Gao Institute of Microelectronics Peking University China National Key Laboratory of Science and Technology on Micro/Nano Fabrication China Innovation Center for Micro-Nano-electronics and Integrated System China Device and System Collaborative Innovation Center for Micro/Nano Fabrication Beijing China

ISBN: (纸本)9781509019489

In this paper, we propose a corrugated diaphragm applied to the fiber optic pressure sensor which needs a wide sensing range and a large deflection. The corrugated diaphragm can effectively improve the sensitivity of the sensor has been proved by ANSYS simulation. The stress concentration is weakened after the silicon is chamfered into corrugated diaphragm by isotropic etching process. The sensitivity of the corrugated diaphragm can reach to 0.44μ m/MPa which is two times larger than that of the same size planar diaphragm. The maximum sensing stress is up to 14MPa.

关键词： Stress Pressure sensors Sensitivity Optical fibers micromechanical devices Silicon

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Temperature-dependent optical response of phase-only nematic liquid crystal on silicon devices

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Chinese Optics Letters 2016年第11期14卷 85-89页

作者：张紫辰 Huan Xu 杨海宁尤政初大平 Institute of Microelectronics Chinese Academy of Sciences Electrical Engineering Division Department of EngineeringUniversity of Cambridge State Key Laboratory of Precision Measurement Technology and Instruments Collaborative Innovation Center for Micro/Nano FabricationDevice and System Department of Precision Instrument Tsinghua University

Wavelength-dependent birefringence and dielectric *** major optical properties of the nematie liquid crystal materials used in phase-only liquid crystal on silicon（LCOS） devices,are measured as a function of operating *** dynamic phase modulation depth and threshold voltage of these phase-only LCOS devices are also measured in the corresponding temperature range and compared with theoretical *** results show that the dynamic response time can he reduced significantly by an appropriate increase ol device operative temperature,while the necessary device elements,such as phase modulation depth and threshold voltage,can be maintained at the same time.

关键词： Birefringence Dielectric materials Display devices Liquid crystals Liquids Modulation Optical properties Phase modulation Threshold voltage

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Four-step FBAR Filters Design Method and SOI BOX Buffered Via-hole Etching Scheme

Four-step FBAR Filters Design Method and SOI BOX Buffered Vi...

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2016 13th IEEE International Conference on Solid-State and Integrated Circuit technology (ICSICT)

作者： GAO Yang CAI Xun HE Xuefeng Institute of Electronic Engineering China Academy of Engineering Physics State Key Laboratory of Particle Detection and Electronics Institute of High Energy PhysicsCAS School of Information Engineering Southwest University of Science and Technology National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University

In this paper, we present an easy to use 4-step design method for film bulk acoustic resonator(FBAR) filters, and demonstrated by a FDD-LTE band 7 FBAR Rx filter design case. According to the center frequency and bandwidth of FBAR filter, we determine thickness of each film in the FBAR film stack at the step 1. The step 2 gets the filter's circuit architecture. In the step 3, we obtain the active area of each FBAR unit. To get this, we made the resonance area value of series FBAR units and the ratio of resonance area value of parallel FBAR units and series FBAR units into two types of optimization parameters reasonably. Taking the given insertion loss and out-of-band rejection of filter as the optimization objective, we obtained the optimized values by the algorithm based on gradient in ADS software. The last step 4 aiming at minimizing filter passband ripple. In the design case, this aim is fulfilled by a novel FBARs' electrode layer thickness adjusting method, and intentionally slightly mismatches the series resonant frequency of the series FBAR units with the parallel resonant frequency of the parallel FBAR units. As in the design case results, a only 300 nm thick SiO 2 support layer need to survive the backside via-hole etching micro-fabrication process, so we proposed a buried oxide layer(BOX) buffered 2-step via-hole etching scheme, which taking advantage of the etching self-stop characteristic of BOX. Design case results show that insertion loss of the Rx filter is 0.6 d B, rejection in Tx frequency band is 40.4 d B and passband ripple is 0.4 d B. Thus we validate the feasibility of the design method.

关键词： Four-step FBAR Filters Design Method and SOI BOX Buffered Via-hole Etching Scheme filter SOI

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Safety Analysis on a Novel Solid State Thermal Mechanical Discriminator

Safety Analysis on a Novel Solid State Thermal Mechanical Di...

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2016 13th IEEE International Conference on Solid-State and Integrated Circuit technology (ICSICT)

作者： JIA Le GAO Yang WANG Yu-hang LV Jun-guang School of Information Engineering Southwest University of Science and Technology Institute of Electronic Engineering China Academy of Engineering Physics National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University State Key Laboratory of Particle Detection and Electronics Institute of High Energy Physics CAS

In order to strengthen safety in abnormal environment, we analyze safety on the Solid State Thermal Mechanical Discriminator(SSTMD). Firstly, we calculate the number of Thermo-Mechanical Switches(TMSs) by means of a method with probability theory when the probability of unintentional unlock on the SSTMD is less than 10-6. Then the probability of safety failure on the SSTMD is estimated by analyzing the relationship between probability of a TMS from OFF state to ON state and temperature in abnormal high temperature environment. We put forward two design criteria for the layout of the SSTMD by analyzing working principle of the Trap TMSs played a role as intrinsic thermal weaklink to reduce the probability of safety failure on SSTMD in abnormal high temperature environment. There are two design rules to enhance the thermal weaklink effect. Firstly, TMSs can be classed as two groups: the Route TMSs and the Trap TMSs, and those two class TMSs should be evenly layout as far as possible, to obtain equal probability of contacting hotspot for the Trap TMSs to work in abnormal high-temperature environment. Secondly, we choose lower melting point of materials on the Trap TMSs to make them preemptively switch to the ON state before the Route TMSs. Additionally, we find the intrinsic shock weaklink effect in the Route TMSs, and enhanced this beneficial effect by etching an annular groove on the back of insulating film membrane of the Route TMSs, to ensure the safety of the SSTMD in abnormal shock/vibration environments. By revealing and taking advantage of those two weaklink effects, we get a novel SSTMD architecture with integrated thermal and shock weaklink functions, which would be quite suitable for the high consequence system applications.

关键词： TMS Safety Analysis on a Novel Solid State Thermal Mechanical Discriminator

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Design of a graphene capacitive pressure sensor for ultra-low pressure detection

Design of a graphene capacitive pressure sensor for ultra-lo...

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IEEE International Conference on nano/micro Engineered and Molecular systems (NEMS)

作者： Yangxi Zhang Yiming Gui Fanrui Meng Chengchen Gao Yilong Hao Institute of Microelectronics Peking University Beijing China National Key Laboratory of Science and Technology on Micro/Nano Fabrication Beijing China Device and system Collaborative Innovation Center for Micro/Nano Fabrication Beijing China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

ISBN: (纸本)9781509019489

This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range. As the size of single suspend graphene diaphragm is limited by fabrication process, a parallel connected sensor array is designed to achieve detectable capacitance change and redundancy. In calculation, a sensor array with 40,000 5μm radius suspend graphene diaphragm cells in 4mm×4mm size can provide 288fF/Pa sensitivity to pressure load.

关键词： Graphene Capacitance Pressure sensors Sensor arrays Films Electrodes Sensitivity

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Numerical optimization approach of the gap between the magnet and coil for electromagnetic vibration energy harvesters design

Numerical optimization approach of the gap between the magne...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Key Laboratory of Fundamental Science on Micro/Nano Device and System Technology Chongqing University China National Center for International Research of Micro/Nano System and New Material Technology Chongqing University China Micro System Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

In the design of the micro electromagnetic vibration harvester, an important goal is maximization of the magnetic flux linkage gradient, which directly determines the induced voltage and output power of the electromagnetic vibration harvester. This paper established a numerical model based on structure of the electromagnetic vibration energy harvester. An analytic expression for the magnetic field of rectangular permanent magnets is used to build up an electromagnetic coupling model. The magnetic field distribution of the rectangular permanent magnet was analyzed. The effects of the gap between the magnet and the coil on the load voltage of the electromagnetic vibration energy harvester were investigated. According to the formula, the magnetic flux linkage and flux gradient were calculated to optimize the geometrical parameter of the magnet and coil. The method and boundary conditions of optimizing the gap between the magnet and coil were presented. The maximum output voltage can be obtained by optimizing the gap between the magnet and the coil. A simple prototype was fabricated and measured to validate the theoretical deducing and the feasibility of method. © (2015) Trans Tech Publications, Switzerland.

关键词： Energy harvesting

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Design and Comparison of micro electromagnetic vibration energy harvesters

Design and Comparison of micro electromagnetic vibration ene...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Chen, Li Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University China Microsystem Research Center of Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

This paper presents two electromagnetic vibration energy harvesters based on micro-electro-mechanical (MEMS) technology. Two prototypes with different vibration structures were designed and fabricated. The energy harvester includes a permanent magnet attached on vibration structure (resonator) made by Si and a fixed wire-wound coil, with the total volume of 0.9 cm3. Two energy harvesters with different resonator are tested and compared. Experiments show that: in the same acceleration and a load resistance, the resonant frequency of prototype B is approximately 95% of prototype A;The peak-peak voltage and the maximum power of prototype B is 1.6 times and 2.7 times of prototype A respectively. The test results was analyzed simply and it indicated that the electromagnetic energy harvesting with the spring B has better performance;also proved that the potential ability of the non-linear spring could extend the frequency bandwidth and improve output voltage. © (2015) Trans Tech Publications, Switzerland.

关键词： Electromagnetic induction

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