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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Shang, Zhengguo Li, Dongling Wang, Shengqiang National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing China Microsystem Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

Aluminum nitride(AlN) film as a piezoelectric material has been used widely, particularly in vibration energy harvester due to its unique and enhanced properties such as high temperature resistance and compatibility with CMOS processes. In this work, AlN film with (002) preferred orientation was prepared on silicon wafers by pulse DC reactive magnetron sputtering(RMS), and the properties such as peak intensity, full width at half maximum (FWHM) and surface morphology were investigated by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The preferred orientation was found to be sensitive to deposition conditions such as gas flow rate, power, bottom electrodes materials and substrates temperature. The results shows that the intensity was 1.1×105 counts, the FWHM was 1.9°when the temperature was 260°C. The film was used to fabricate the vibrated energy harvester successful and the power density reached about 3000uW/cm3 at the vibration frequency under 1g acceleration. © (2015) Trans Tech Publications, Switzerland.

关键词： Magnetron sputtering

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Enrichment efficiency optimization of dielectrophoresis cell chip based on interdigitated microelectrodes array

Enrichment efficiency optimization of dielectrophoresis cell...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-nano technology, CSMNT 2014

作者： Gu, Wenwen Huang, Jie Department of Electronic and Control Engineering College of Engineering and Technology Southwest University Chongqing400715 China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

At present, the majority dielectrophoresis chip designs optimize their performance by electric simulation and fluid field simulation. The lack of further cells force analysis and movement prediction results in a limited cell dielectrophoresis enrichment efficiency. The HepG2 hepatoma carcinoma cell movement under the action of dielectrophoresis force, fluid force and gravity was analyzed respectively by Comsol Multiphysics software. The preliminary optimization conditions for the cell enrichment were obtained. According to the simulation results, the experiments were carried out to investigate the enrichment effect of the HepG2 hepatoma carcinoma cells. The experiment result demonstrated the enrichment efficiency of HepG2 hepatoma carcinoma cells was reached to 88.89% under the 5 V amplitude and 4 MHz frequency sinusoidal signal excitation. © (2015) Trans Tech Publications, Switzerland.

关键词： Efficiency

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Parameter extraction for sensing optimization of nanoparticle basednano fluidics sensor 19

Parameter extraction for sensing optimization of nanoparticl...

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19th International Conference on Miniaturized systems for Chemistry and Life sciences, microTAS 2015

作者： Li, Siwei Huang, Jie Wang, Wei Institute of Microelectronics Peking University China National Key Laboratory of Science and Technology on Micro/Nano Fabrication Innovation Center for Micro-Nano-Electronics and Integrated System Beijing100871 China

ISBN: (纸本)9780979806483

nanofluidic sensor had a funnel nanochannel with few nanoparticles stuck at the tip has been demonstrated as a simple, fast and inexpensive way to prepare biosensor with high sensitivity. However, the parameter of this kind of sensor was difficult to obtain so that theoretical analyzation of the experimental results was necessary. Herein, we discussed further on how to extract the device parameter and optimize the sensitivity of the sensing device. © 15CBMS-0001.

关键词： Parameter extraction

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LED induced fluorescence detector integrated in microfluidic cell chip

LED induced fluorescence detector integrated in microfluidic...

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作者： Gu, Wenwen Huang, Jie Tan, Weimin College of Engineering and Technology Southwest University No. 2 Tiansheng Road BeiBei District Chongqing400715 China National Key Laboratory of Fundamental Science of Micro Nano-Device and System Technology Chongqing University No. 174 Shazheng Shapingba Chongqing400044 China

A light-emitting diode (LED) induced fluorescence detector for the microfluidic cell chip has been proposed in this contribution. Compared with the other competitor, the optical path does not require re-calibration after the microfluidic chip has been reloaded and relocated. Last but not the least, the system has a compact size and is more energy efficient. The model selection of the excitation light module, filter sets, aperture and photoelectric detector were analysed. The angle between the exciting light path and fluorescence optical path was optimised to be 135 degrees by experiment. The optimal value of photomultiplier (PMT) working voltage and LED working current were experimentally optimised to be 3.5 V and 200 mA. HepG2 hepatoma carcinoma cells were used to validate the cell counting function of the fluorescence detector. The experimental results showed that the output was peak signals that can be obviously distinguished from background noise;there were eight peak signals with an average value of 0.7 V within 250 s, which agreed with that of fluorescence microscope imaging results. It provides a new technological approach for novel micro total cell analysis system. Copyright © 2015 Inderscience Enterprises Ltd.

关键词： microfluidic chips

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Graphene water transfer printing for 3D surface

Graphene water transfer printing for 3D surface

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IEEE International Conference on micro Electro Mechanical systems

作者： Yangxi Zhang Yiming Gui Fanrui Meng Linyu Li Chencheng Gao Hongwei Zhu Yilong Hao Institute of Microelectronics Peking University Beijing China National Key Laboratory of Nano/Micro Fabrication Technology Beijing China School of Materials Science & Engineering Tsinghua University Beijing China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

ISBN: (纸本)9781509006090

In this paper, we report a novel water transfer printing method, which can transfer chemical vapor deposition (CVD) graphene from copper foil to 3D surface. By the aid of surface tension and Van der Waals force, multilayer graphene film can be transferred to various substrates with smooth surface including glass sheet, colophony filament, silicon oxide micro structure, polyimide (PI) film, polymethyl methacrylate (PMMA) tube and optical fibers. As the graphene film can be selectively transferred to assigned position in 3D surface, this simple room temperature transfer method has promising application potential in flexible MEMS and device on curved surface.

关键词： Graphene Films Surface treatment Copper Printing Three-dimensional displays Substrates

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Numerical optimization approach of the gap between the magnet and coil for electromagnetic vibration energy harvesters design

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key Engineering Materials 2015年 645卷 1214-1222页

作者： Lei, Yiming Wen, Zhiyu Key Laboratory of Fundamental Science on Micro/Nano Device and System Technology Chongqing University China National Center for International Research of Micro/Nano System and New Material Technology Chongqing University China Micro system Research Center of Chongqing University Chongqing China

In the design of the micro electromagnetic vibration harvester, an important goal is maximization of the magnetic flux linkage gradient, which directly determines the induced voltage and output power of the electromagnetic vibration harvester. This paper established a numerical model based on structure of the electromagnetic vibration energy harvester. An analytic expression for the magnetic field of rectangular permanent magnets is used to build up an electromagnetic coupling model. The magnetic field distribution of the rectangular permanent magnet was analyzed. The effects of the gap between the magnet and the coil on the load voltage of the electromagnetic vibration energy harvester were investigated. According to the formula, the magnetic flux linkage and flux gradient were calculated to optimize the geometrical parameter of the magnet and coil. The method and boundary conditions of optimizing the gap between the magnet and coil were presented. The maximum output voltage can be obtained by optimizing the gap between the magnet and the coil. A simple prototype was fabricated and measured to validate the theoretical deducing and the feasibility of method. © 2015 Trans Tech Publications, Switzerland.

关键词： Energy harvesting

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Design and Comparison of micro electromagnetic vibration energy harvesters

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key Engineering Materials 2015年 645卷 1223-1232页

作者： Lei, Yiming Wen, Zhiyu Chen, Li Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University China Microsystem Research Center Chongqing University Chongqing400030 China

This paper presents two electromagnetic vibration energy harvesters based on micro-electro-mechanical (MEMS) technology. Two prototypes with different vibration structures were designed and fabricated. The energy harvester includes a permanent magnet attached on vibration structure (resonator) made by Si and a fixed wire-wound coil, with the total volume of 0.9 cm3. Two energy harvesters with different resonator are tested and compared. Experiments show that: in the same acceleration and a load resistance, the resonant frequency of prototype B is approximately 95% of prototype A;The peak-peak voltage and the maximum power of prototype B is 1.6 times and 2.7 times of prototype A respectively. The test results was analyzed simply and it indicated that the electromagnetic energy harvesting with the spring B has better performance;also proved that the potential ability of the non-linear spring could extend the frequency bandwidth and improve output voltage. © 2015 Trans Tech Publications, Switzerland.

关键词： Electromagnetic induction

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Enrichment efficiency optimization of dielectrophoresis cell chip based on interdigitated microelectrodes array

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key Engineering Materials 2015年 645卷 1255-1260页

关键词： Efficiency

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Development of Raman acousto-optic frequency shifter based on SAW

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Journal of Semiconductors 2014年第8期35卷 104-109页

作者：王春梅温志渝张祖伟张颖异 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center of Chongqing University

A Raman acousto-optic frequency shifter （AOFS） based on surface acoustic wave （SAW） is presented. It consists of a double-ended SAW resonator and optical waveguide system. The structure parameters of the SAW resonator are optimized using COM software and the optical waveguide system is designed using an effective index method. The AOFS prototype fabricated using MEMS technology is detected. The optical beat signals su- perimposed by ± 1st-order and ±2nd-order diffracted beams are detected. The frequency shift of 78.2201 MHz related to the 1 st-order diffracted beams and 156.2306 MHz related to the 2nd-order diffracted beams are obtained respectively.

关键词： SAW Raman AOFS frequency shift

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Self-assembled MnO2 nanostructures for electrochemical capacitive energy storage

Self-assembled MnO2 nanostructures for electrochemical capac...

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第七届中国储能与动力电池及其关键材料学术研讨与技术交流会

作者： Yuxin Zhang Ming Huang Fei Li Min Kuang Shi Jin Zhu College of Materials Science and Engineering Chongqing University National Key Laboratory of Fundamental Science of Micro/Nano-Devices and System Technology Chongqing University

We would like to introduce the self-assembly of MnO nanostructures with controllable morphology for electrochemical supercapacitor,including mesoporous MnO nanotubes and their arrays,carbon-MnO coaxial nanotubes,CuO/M... 详细信息

关键词： MnO Self-assembled MnO2 nanostructures for electrochemical capacitive energy storage

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