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Grating pitch comparison measurement based on Cr atomic transition frequency and Si lattice constant

Chinese Physics B 2025年第2期34卷 82-88页

作者： Jingtong Feng Rao Xu Ziruo Wu Lihua Lei Yingfan Xiong Zhaohui Tang Guangxu Xiao Yuying Xie Dongbai Xue Xiao Deng Xinbin Cheng Tongbao Li National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry(Shanghai) Tongji UniversityShanghai 200092China Institute of Precision Optical Engineering Tongji UniversityShanghai 200092China MOE Key Laboratory of Advanced Micro-Structured Materials Tongji UniversityShanghai 200092China Shanghai Frontiers Science Center of Digital Optics Tongji UniversityShanghai 200092China Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications Tongji UniversityShanghai 200092China School of Physics Science and Engineering Tongji UniversityShanghai 200092China Shanghai Metric Optics Technology Co. Ltd.Shanghai 201108China Shanghai Institute of Measurement and Testing Technology Shanghai 201203China

Traceability is the fundamental premise of all metrological activities. The establishment of a traceability chain characterized by a shortened structure, while simultaneously enabling on-site traceability, represents a key trend in the advancement of metrology. This study explores the periodic accuracy and overall uniformity of self-traceable gratings, employing multilayer film gratings with a nominal period of 25.00 nm as the medium. We present a comparative analysis of measurement capabilities in a self-traceable grating calibration system characterized by a ‘top-down’ calibration approach and a Si lattice constant calibration system characterized by a ‘bottom-up’ calibration approach. The results indicate that the values obtained for the multilayer film grating periods, calibrated using the self-traceable grating system, are 24.40 nm with a standard deviation of 0.11 nm. By comparing with the values derived from the Si lattice constant, which yield 24.34 nm with a standard deviation of 0.14 nm, the validity and feasibility of the self-traceable calibration system are confirmed. This system extends and complements existing metrological frameworks, offering a precise pathway for traceability in precision engineering and nanotechnology research.

关键词： nanometrology self-traceable standard material Si lattice constant

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Enhanced Pyroelectric Response in Quenched BNT-Based Lead-Free Ferroelectrics for Uncooled Infrared Detection

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Advanced Functional Materials 2025年

作者： Shen, Meng Zhang, Xian Cen, Fangjie Zhang, Qingfeng Zhang, Haibo Zhang, Guangzu Jiang, Shenglin Chen, Yong Hu, Yongming Yao, Kui Hubei Key Laboratory of Micro-Nanoelectronic Materials and Devices Key Laboratory of Intelligent Sensing System and Security of Ministry of Education and School of Microelectronics Hubei University Wuhan430062 China School of Integrated Circuits Engineering Research Center for Functional Ceramics MOE and Wuhan National Laboratory for Optoelectronics Huazhong University of Science and Technology Wuhan430074 China Ministry of Education Key Laboratory of Green Preparation and Application for Functional Materials Hubei Key Laboratory of Micro-Nanoelectronic Materials and Devices Hubei Key Laboratory of Polymer Materials School of Materials Science & Engineering Hubei University Wuhan430062 China School of Materials Science and Engineering State Key Laboratory of Material Processing and Die & Mould Technology Huazhong University of Science and Technology Wuhan430074 China Singapore138634 Singapore

Excellent pyroelectric performance in environmentally friendly lead-free ferroelectrics is highly demanded for uncooled infrared detector. However, the trade-off between room temperature pyroelectric coefficient (proom) and depolarization temperature (Td) remains a major challenge of lead-free ferroelectrics for their device applications. Herein, a superior proom of 13.8 × 10−4 C m−2 K−1 with high Td of 155 °C is achieved in quenched BNT-Fe/Mn-NBT sample. Oxygen vacancy engineering is proposed to solve the constraint between proom and Td in BNT-based ceramics. The local A/B site displacement and oxygen vacancies are constructed in the BNT-Fe/Mn-NBT perovskite structure by quenching treatment, resulting in larger lattice distortion and superior proom. Meanwhile, defect-induced inhomogeneous random field compensates the ferroelectric depolarization field and down-shifts the free energy well, maintaining high Td. The resulting pyroelectric infrared detector made from the high-performance quenched BNT-Fe/Mn-NBT generates the voltage responsivity of 5906 V W−1 and specific detection rate of 1.8 × 108 cm Hz1/2 W−1, which is comparable to the commercial RD-624 type PZT-based pyroelectric infrared detector. © 2025 Wiley-VCH GmbH.

关键词： Perovskite

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One-Step Laser-Induced Dissolvable PVA Mask for 3D Soft Carbon Electrode Array 38

One-Step Laser-Induced Dissolvable PVA Mask for 3D Soft Carb...

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38th IEEE International Conference on micro Electro Mechanical systems, MEMS 2025

作者： Wang, Xuanqi Xue, Kai Bai, Ruiyu Huang, Ye Zhang, Zimo You, Xiaoli Wang, Minghao Chang, Honglong Ji, Bowen Northwestern Polytechnical University Unmanned System Research Institute China Northwestern Polytechnical University National Key Laboratory of Unmanned Aerial Vehicle Technology Integrated Research and Development Platform of Unmanned Aerial Vehicle Technology China Northwestern Polytechnical University Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace School of Mechanical Engineering China Northwestern Polytechnical University Sanhang Institute for Brain Science and Technology China Northwestern Polytechnical University Institute of Medical Research China Hangzhou Dianzi University Moe Engineering Research Center of Smart Microsensors and Microsystems College of Electronics and Information China

ISBN: (纸本)9798331508890

This paper introduces a 3D soft carbon electrode array, fabricated through a one-step laser-induced process integrating a water-dissolvable polyvinyl alcohol (PVA) mask. This approach achieves precise conical microstructures and robust conductive channels using hybrid MWCNT@PDMS conductive paste. The soft carbon electrode sites with a 3D conical microstructure are designed to enhance proximity to neural tissue, thereby enhancing electrocorticogram (ECoG) signal quality and enabling effective neural stimulation. The electrode array demonstrates remarkable stretchability (25% over 1,000 cycles without failure) and stability (equivalent to 66 days in vivo). Compared to conventional materials, our electrodes exhibit superior electrochemical properties, including lower impedance (9.7 kΩ at 1 kHz) and higher signal-to-noise ratio (SNR, 61.7 dB). Thus, this one-step process is a cost-effective, scalable solution for recording and modulating central or peripheral neural tissues. © 2025 IEEE.

关键词： Carbon electrodes

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A novel intelligent verification platform based on a structured analysis model

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science China(Information sciences) 2013年第6期56卷 167-180页

作者： XIE Zheng WANG XinAn LIAN ZhiBin LUO YongGui HU ZiYi Key Laboratory of Integrated Micro-system Science and Engineering Applications Peking University Shenzhen Graduate School EDA Center of Chinese Academy of Sciences

An intelligent verification platform based on a structured analysis model is *** an abstract model mechanism with specific signal interfaces for user callback,the unified structured analysis data,shared by the electronic system level design,functional verification,and performance evaluation,enables efficient management review,auto-generation of code,and modeling in the transaction *** introduce the class tree,flow parameter diagram,structured flow chart,and event-driven finite state machine as structured analysis *** a sand table to carry maps from different perspectives and levels via an engine,this highly reusable platform provides the mapping topology to search for unintended consequences and the graph theory for comprehensive coverage and smart test *** results show that the engine generates efficient test sequences,with a sharp increase in coverage for the same vector count compared with a random test.

关键词： intelligent verification platform verification automation structured analysis model mapping topology graph theory algorithm

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CS/Gel/MWCNTs Conductive Scaffolds Assisted by Electrical Stimulus for Skin Tissue engineering

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Biotechnology and Bioengineering 2025年 2025 May 15页

作者： Liu, Zixian Ma, Zijun Li, Nini Zhang, Jinyao Li, Meng Han, Lu Cheng, Rong Shen, Zhizhong Han, Dan Sang, Shengbo Shanxi Key Laboratory of Artificial Intelligence & Micro Nano Sensors College of Integrated Circuits Taiyuan University of Technology Shanxi Province Taiyuan China Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education Taiyuan University of Technology Shanxi Province Taiyuan China College of chemistry and chemical Engineering North University of china Shanxi Province Taiyuan China Shanxi Research Institute of 6D Artificial Intelligence Biomedical Science Shanxi Province Taiyuan China

Hydrogel scaffolds show high potential in tissue engineering due to excellent mechanical properties and biocompatibility. However, an inherent lack of conductivity limits its application in areas requiring electrical stimulation. To address this issue, chitosan (CS)/gelatin (Gel) scaffolds were prepared with various concentrations of multi-walled carbon nanotubes (MWCNTs). Results indicated that MWCNT incorporation significantly improved both the electrical conductivity and mechanical strength of the scaffolds, with the CS/Gel/0.3% MWCNTs scaffold demonstrating superior biocompatibility compared to other formulations. Additionally, fibroblasts seeded onto the scaffolds responded positively to electrical stimulation, showing increased proliferation and elevated expression of type I and type III collagen. These findings highlight the potential of CS/Gel/MWCNTs scaffolds to enhance wound healing in skin tissue engineering. © 2025 Wiley Periodicals LLC.

关键词： Fiber bonding

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Observation of higher-order deterministic optical vortices from random vortex beams

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APL Photonics 2025年第4期10卷

作者： Liu, Yonglei Xu, Siyu Peng, Peipei Zhang, Yongtao Dai, Siting Chen, Yahong Cai, Yangjian Wang, Fei School of Physical Science and Technology Collaborative Innovation Center of Suzhou Nano Science and Technology Soochow University Suzhou215006 China School of Intelligent Manufacturing and Smart Transportation Suzhou City University Suzhou215104 China Key Laboratory of Light Field Manipulation and System Integration Applications in Fujian Province School of Physics and Information Engineering Minnan Normal University Zhangzhou363000 China Shandong Provincial Engineering and Technical Center of Light Manipulation Shandong Provincial Key Laboratory of Optics and Photonic Devices School of Physics and Electronics Shandong Normal University Jinan250014 China Joint Research Center of Light Manipulation Science and Photonic Integrated Chip of East China Normal University Shandong Normal University East China Normal University Shanghai200241 China Suzhou Key Laboratory of Intelligent Photoelectric Perception Soochow University Suzhou215006 China

Optical vortices in coherent beams have been identified as spiral phases with intensity nulls at singularities, while in random beams, they appear as coherence vortices in correlation functions, often not matching intensity nulls. Observing deterministic optical vortices in random beams is challenging due to their randomness. In this work, we propose a scheme relying on spatial coherence engineering and fractional Fourier transform to design a partially coherent light source capable of generating deterministic optical vortices at specific propagation distances in free space. At other propagation distances (including the source plane), the beam may exhibit coherence vortices characterized by spatially coupled two-point correlations, while deterministic vortices emerge only at designated distances. We show that both the topological charge and the axial position of the deterministic vortex are determined by the coherence parameters of the light source. Using a random-mode superposition approach, we experimentally synthesize such partially coherent light sources and characterize both coherence vortices and deterministic phase vortex through measurements of the four-dimensional correlation function at different propagation distances. In addition, we study the coherence phase orbital angular momentum (OAM) spectrum of the random beam both theoretically and experimentally. Our results reveal that the phase OAM spectrum is pure when the random beam carries a deterministic vortex, whereas for coherence vortices, the phase OAM spectrum is non-pure. This study provides a pathway for understanding and controlling the transition between deterministic phase vortices and coherence vortices, with potential applications in optical communication and metrology. © 2025 Author(s).

关键词： Optical design

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The design and implementation of a reconfigurable convolution operator based on APU

The design and implementation of a reconfigurable convolutio...

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2017 China Semiconductor Technology International Conference, CSTIC 2017

作者： Huang, Yuqian Huang, Jipan Wang, Xin'an Yang, Zhiqiang Lu, Haifang Tian, Miren Key Laboratory of Integrated Micro-System Science and Engineering Applications Peking University Shenzhen Graduate School China

ISBN: (纸本)9781509066940

In order to achieve fast IC design, reduce development cycle and cost, key Lab. of integrated microsystems in Peking University proposed Array Processing for Unification Architecture(APU) which consists of four kinds of operators: computation, data path, control and MEM operators to replace the configurable logic block in current FPGA fabric. In this paper, a reconfigurable convolution operator based on APU, is presented which is used to convolutional neural network computing. The reconfigurable convolution operator is with more coarse-grain and function changeable than APU. And the process of operator synthesis is verified by simulation-based verification and formal verification separately. With the verification method proposed in this paper, certainty and completeness have been achieved. The results show that compared with the hardware design at the cost of resources based APU, this methodology can obtain hardware of suitable performance with regular structure with the cost of 34.08% less area and 25.26% lower power. © 2017 IEEE.

关键词： Neural networks

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One-Step Laser-Induced Dissolvable PVA Mask for 3D Soft Carbon Electrode Array

One-Step Laser-Induced Dissolvable PVA Mask for 3D Soft Carb...

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IEEE International Conference on micro Electro Mechanical systems

作者： Xuanqi Wang Kai Xue Ruiyu Bai Ye Huang Zimo Zhang Xiaoli You Minghao Wang Honglong Chang Bowen Ji Unmanned System Research Institute Northwestern Polytechnical University China National Key Laboratory of Unmanned Aerial Vehicle Technology Integrated Research and Development Platform of Unmanned Aerial Vehicle Technology Northwestern Polytechnical University China Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace School of Mechanical Engineering Northwestern Polytechnical University China Sanhang Institute for Brain Science and Technology Northwestern Polytechnical University China Institute of Medical Research Northwestern Polytechnical University China MOE Engineering Research Center of Smart Microsensors and Microsystems College of Electronics and Information Hangzhou Dianzi University China

ISBN: (数字)9798331508890

ISBN: (纸本)9798331508906

关键词： Electrodes micromechanical devices Three-dimensional displays Array signal processing Laser stability Recording microstructure Carbon Laser beam cutting Signal to noise ratio

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The implementation of CRC-16 based on a novel FPGA: a collection of reconfiguration operations（ReOps） 13

The implementation of CRC-16 based on a novel FPGA: a collec...

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2016 13th IEEE International Conference on Solid-State and integrated Circuit Technology (ICSICT)

作者： Zhiqiang Yang Jipan Huang Xin’an Wang Yuqian Huang Haifang Lu Mohan Ji The key laboratory of Integrated Micro-system Science and Engineering Application Peking University Shenzhen Graduated School

ISBN: (纸本)9781467397209

This paper presents the implementation of CRC-16 on a novel FPGA, a collection of reconfigurable operators（Re Ops）, which has smaller configuration bits-stream and better performance than traditional FPGA. A Re Op is a basic block which can process multiple bits data with a specific function set. Considering the complete function set of Re Ops, we divide Re Ops into eight groups: Arithmetic Re Ops, Multiplier Re Ops, Bit-wise logic ReO ps, Shift ReO ps, Multiplexer Re Ops, Memory Re Ops, Register Re Ops, Multiplexer Re Ops, Control Re Ops. The function collection of Re Ops is soundness for the arbitrary ASIC（Application Special integrated Circuit）. We implement the CRC-16 on this novel FPGA, the experimental results show that compared with the traditional FPGA, this novel FPGA has advantages in delay and configuration bits-stream.

关键词： Estimation Field programmable gate arrays OFDM Modulation Filtration Clocks Signal processing algorithms

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Robust laser self-mixing displacement demodulation viacontinuous wavelet–Hilbert transform for high-precision accelerometercalibration

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Applied Optics 2025年第16期64卷 4559-4567页

作者： Zhikun Chang Song Song Dongbai Xue Chunling He Zhoumiao Shi Jing Yu Ming Kong Yuying Xie Xiao Deng Tongbao Li Xinbin Cheng Institute of Precision Optical Engineering Tongji University Shanghai 200092 China National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai) Tongji University Shanghai 200092 China MOE Key Laboratory of Advanced Micro-Structured Materials Tongji University Shanghai 200092 China Shanghai Frontiers Science Center of Digital Optics Tongji University Shanghai 200092 China Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications Tongji University Shanghai 200092 China School of Physics Science and Engineering Tongji University Shanghai 200092 China School of Computer Science and Technology Zhejiang University of Water Resources and Electric Power Hangzhou 310018 China Shenzhen Institute of Technology Innovation NIM Shenzhen 518107 China College of Metrology and Testing Engineering China Jiliang University Hangzhou 310018 China

The laser self-mixing grating interferometer based on Cr atomlithography gratings hasbeen applied to the primarycalibration of accelerometers due to its compact structure, low cost,high accuracy, and directon-site traceability. However, the high line density of Cr gratings(4700 l/mm) introduces dense outliers in interferometricsignals, complicating displacement demodulation via conventionalderivative-based methods and causing frequent phase jumps. To addressthis challenge, we propose a hybrid algorithm integrating thecontinuous wavelet transform and the Hilbert transform, which enablesrobust displacement demodulation under high-noise *** validation on a commercial MEMS accelerometerdemonstrated exceptional accuracy: 100 consecutive data segments weresuccessfully demodulated with a displacement fitting goodness of $R^2 = 0.9964$ ( $\sigma_{R_2} =0.0027$ ), and the derived sensitivitydeviated by only 0.1% from the nominal value. This algorithmestablishes a paradigm for the high-accuracy dynamic calibration ofinertial sensors in field applications.

关键词： Laser interferometry Lithography Phase shift Refractive index systems design Wavelet transforms

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