检索结果-内蒙古大学图书馆

Periodic electromagnetic signals as potential precursor for seismic activity

Journal of Central South University 2021年第8期28卷 2463-2471页

作者： YONG Shan-shan WANG Xin-an ZHANG Xing GUO Qin-meng WANG Jing YANG Chao JIANG Bing-hui Key Laboratory of Integrated Micro-Systems Science and Engineering Applications Peking University Shenzhen Graduate SchoolShenzhen 518055China School of Electronics Engineering and Computer Science Peking UniversityBeijing 100871China

Electromagnetic signals may be a promising precursor to seismic activity which has been observed in many case studies in past ***,the correlation and causation between the electromagnetic signals and the seismic activity are still unclear without intensive observation *** order to find seismoelectromagnetic phenomenon,we deployed AETA(acoustic and electromagnetic testing all-in-one system),a high-density multi-component seismic monitoring system in the China Earthquake science Experiment site(CESE,in Sichuan Province and Yunnan Province,China)and the capital circle(areas with a distance which is≤200 km from Beijing),to record electromagnetic and geo-acoustic data across 0.1 Hz−10 *** the course of data collection,we discovered an electromagnetic waveform that occurs on a daily *** the signal generally coincides with sunrise and sunset,we named this phenomenon the SRSS(Sunrise-Sunset)*** conducting three statistical tests based on seismicity and SRSS,we determined that the SRSS waveform is roughly correlated with the onset of seismic *** generally occurs at the regions where seismicity *** discovery might have significant implications with respect to the future of earthquake prediction.

关键词： seismic precursor periodic electromagnetic signal Sunrise-Sunset(SRSS)waveform

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Mitigating interfacial carrier crowding by an ultrathin LiF interlayer towards efficient and stable perovskite light-emitting diodes

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Moore and More 2024年第1期1卷 1-9页

作者： Zhang, Xiaofei Wang, Lin Kong, Lingmei Wang, Sheng Dai, Jun Jia, Guohua Yang, Xuyong Key Laboratory of Advanced Display and System Applications of Ministry of Education Shanghai University Shanghai China Department of Physics Jiangsu University of Science and Technology Zhenjiang China School of Molecular and Life Sciences Curtin University Perth Australia Shanghai Engineering Research Center for Integrated Circuits and Advanced Display Materials Shanghai University Shanghai China

Quasi-two-dimensional (quasi-2D) perovskite-based light-emitting diodes (PeLEDs) have attracted intensive attention due to their high quantum yields, tunable emission wavelengths, and solution-processing capability, showing great potential in next-generation display and lighting applications. However, further performance enhancement in PeLEDs is severely limited by the uncontrolled transfer of charge carriers under bias, leading to crowding of interfacial carriers and severe efficiency roll-off. Herein, we insert an ultra-thin dielectric buffer layer of lithium fluoride (LiF) into the electron transport layer (ETL) to regulate the transfer dynamics of electrons and passivate the interfacial defects simultaneously. The dielectric LiF interlayer can effectively reduce the efficiency roll-off in PeLEDs by improving the charge balance through preventing the overwhelming injection of electrons. Moreover, the fluoride anions from LiF can passivate the surface defects of the perovskite film, enhancing the radiative recombination. As a result, the LiF interlayer-assisted quasi-2D PeLED presents an outstanding external quantum efficiency (EQE) of 24.03% and a maximum brightness of 30 845 cd m−2. The operational stability of the device is also extended, with a half-lifetime (T50) of 71.28 min (at an initial luminance of 1 000 cd m−2), which is 7.4-fold longer than that for the control device.

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Investigation of Optical Polarization Characteristics of Ultraviolet-C Algan Multiple Quantum Wells by Angle-Resolved Cathodoluminescence

SSRN

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SSRN 2024年

作者： Gong, Honglin Zhu, Lihong Cai, Yaqi Yang, Renlong Guo, Weijie Chen, Huanting Chen, Zhong Lu, Yijun National Innovation Platform for the Fusion of Industry and Education in Integrated Circuits Department of Electronic Science School of Electronic Science and Engineering Xiamen University Xiamen361005 China Key Laboratory of Light Field Manipulation and System Integration Applications in Fujian Province School of Physics and Information Engineering Minnan Normal University Zhangzhou363000 China

AlGaN-based ultraviolet-C (UV-C) light-emitting diodes (LEDs) face challenges related to their extremely low external quantum efficiency, which is predominantly attributed to the remarkably inadequate transverse magnetic (TM) light extraction efficiency (LEE). In this study, we employ angle-resolved cathodoluminescence (ARCL) spectroscopy to assess the optical polarization of (0001)-oriented AlGaN multiple quantum well (MQW) structures in UV-C LEDs, in conjunction with a focused ion beam and scanning electron microscopy (FIB/SEM) system to etch samples with various inclination angles (θ) of sidewall. This technique effectively distinguishes the spatial distribution of TM- and transverse electric (TE)-polarized photons contributing to the luminescence of the MQW structure. CL spectroscopy confirms that UV-C LEDs with a θ of 35° exhibit the highest CL signal compared to samples with other θ. Furthermore, we establish a model using Finite Difference Time Domain (FDTD) simulation to validate the mechanism of the outcomes. The complementary contribution of TM and TE photons at different specific angles are distinguished by ARCL and confirmed by simulation. At angles near the sidewall, the CL is dominated by the TM photons, which mainly contribute to the increased LEE and the decreased degree of polarization (DOP) to make the spatial distribution of CL more uniform. Additionally, this method allows us to analyze the polarization of light without the need for polarizers, enabling the differentiation of TE and TM modes. This distinction provides flexibility for selecting different emission mode based on various application requirements. The presented approach not only opens up new opportunities for enhanced UV-C light extraction but also provides valuable insights for future endeavors in device fabrication and epitaxial film growth. © 2024, The Authors. All rights reserved.

关键词： Light emitting diodes

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Tunable narrow-band single-channel add-drop integrated optical filter with ultrawide FSR

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PhotoniX 2022年第1期3卷 312-323页

作者： Chunlei Sun Yuexin Yin Zequn Chen Yuting Ye Ye Luo Hui Ma Lichun Wang Maoliang Wei Jialing Jian Renjie Tang Hao Dai Jianghong Wu Junying Li Daming Zhang Hongtao Lin Lan Li Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin University2699 Qianjin StreetChangchun 130012China Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic EngineeringZhejiang UniversityHangzhou 310027China School of Microelectronics Zhejiang UniversityHangzhou 310027China.

Free-spectral-range(FSR)-free optical filters have always been a critical challenge for photonic integrated circuits.A high-performance FSR-free filter is highly desired for communication,spectroscopy,and sensing *** significant progress in integrated optical filters,the FSR-free filter with a tunable narrow-band,high out-of-band rejection,and large fabrication tolerance has rarely been *** this paper,we propose an exact and robust design method for add-drop filters(ADFs)with an FSR-free operation capability,a sub-nanometer optical bandwidth,and a high out-of-band rejection(OBR)*** achieved filter has a 3-dB bandwidth of<0.5 nm and an OBR ratio of 21.5 dB within a large waveband of 220 nm,which to the best of our knowledge,is the largest-FSR ADF demonstrated on a silicon photonic *** filter exhibits large tunability of 12.3 nm with a heating efficiency of 97 pm/mW and maintains the FSR-free feature in the whole tuning *** addition,we fabri-cated a series of ADFs with different periods,which all showed reliable and excellent performances.

关键词： integrated devices Silicon photonics Optical filters FSR-free filters Tunable filters

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Field-free current-induced magnetization switching of a room temperature van der Waals magnet for neuromorphic computing

arXiv

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arXiv 2024年

作者： Zhou, Chenxi Guo, Zhe Li, Qifeng Zhang, Gaojie Wu, Hao Chen, Jinsen Li, Rongxin Zhang, Shuai Cao, Cuimei Xiong, Rui Chang, Haixin You, Long School of Integrated Circuits Wuhan National Laboratory for Optoelectronics Key Laboratory of Information Storage System Ministry of Education of China Huazhong University of Science and Technology Wuhan430074 China Shenzhen Huazhong University of Science and Technology Research Institute Shenzhen518000 China School of Microelectronics Hubei University Wuhan430062 China School of Integrated Circuits Wuhan430074 China Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education School of Physics and Technology Wuhan University Wuhan430072 China Center for Joining and Electronic Packaging State Key Laboratory of Material Processing and Die & Mold Technology School of Materials Science and Engineering Huazhong University of Science and Technology Wuhan430074 China

Spin orbit torque (SOT) has become a promising approach to efficiently manipulate the magnetization switching in spintronic devices. As a main factor to impact the device performance, the high quality interface is essentially desired, which can be readily acquired by using the two-dimensional (2D) van der Waals (vdW) materials. Recently, a 2D ferromagnetic material Fe3GaTe2 has been discovered to possess the above-room-temperature Curie temperature and strong perpendicular magnetic anisotropy (PMA), providing an excellent candidate to build spintronic devices. On the other hand, an external magnetic field is necessary for the SOT-driven deterministic switching of perpendicular magnetization, which has become a block for the real applications. Here, we realize the field-free SOT switching of Fe3GaTe2 at room temperature based on the Fe3GaTe2/MnPt heterostructure. In addition, inspired by the superiority of 2D materials in 3D heterogeneous integration, we explore the potential of our device in the computing in memory (CIM). With the application of the current pulses, the gradual switching of our device at zero field imitates the function of artificial synapse in the convolutional neural network (CNN), achieving a high accuracy (~ 92.8%) pattern recognition. Our work proposes a feasible solution for field-free SOT switching in 2D vdW spintronic devices, which paves the way for applications in magnetic memory and neuromorphic computing. Copyright © 2024, The Authors. All rights reserved.

关键词： Van der Waals forces

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Insulating materials for realising carbon neutrality:Opportunities,remaining issues and challenges

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High Voltage 2022年第4期7卷 610-632页

作者： Chuanyang Li Yang Yang Guoqiang Xu Yao Zhou Mengshuo Jia Shaolong Zhong Yu Gao Chanyeop Park Qiang Liu Yalin Wang Shakeel Akram Xiaoliang Zeng Yi Li Fangwei Liang Bin Cui Junpeng Fang Lingling Tang Yulin Zeng Xingtao Hu Jiachen Gao Giovanni Mazzanti Jinliang He Jianxiao Wang Davide Fabiani Gilbert Teyssedre Yang Cao Feipeng Wang Yunlong Zi The State Key Laboratory of Power System Department of Electrical EngineeringTsinghua UniversityBeijingChina Department of Mechanical and Automation Engineering The Chinese University of Hong KongHong KongChina Simpson Querrey Institute Northwestern UniversityEvanstonIllinoisUSA Department of Materials Science and Engineering The Pennsylvania State UniversityUniversity ParkPennsylvaniaUSA Department of Information Technology and Electrical Engineering ETH ZürichZürichSwitzerland School of Electrical and Information Engineering Tianjin UniversityTianjinChina Department of Electrical and Computer Engineering Mississippi State UniversityMississippi StateMississippiUSA Electrical and Electronic Engineering The University of ManchesterManchesterUK Department of Electrical Engineering School of Electronic Information and Electrical EngineeringShanghai Jiao Tong UniversityShanghaiChina Key Laboratory of Control of Power Transmission and Conversion(SJTU) Ministry of EducationShanghaiChina College of Electrical Engineering Sichuan UniversityChengduChina Shenzhen Institute of Advanced Technology Chinese Academy of Sciences ShenzhenShenzhenChina School of Electrical Engineering Wuhan UniversityWuhanChina School of Integrated Circuits Tsinghua UniversityBeijingChina Jiangsu Jinxin Electric Appliance Co.Ltd. YangzhouChina Tai'an Tiancheng Safety Evaluation Co. Ltd.Tai'anChina Department Electrical Electronic and Information EngineeringUniversity of BolognaBolognaItaly National Engineering Laboratory for Big Data Analysis and Applications Peking UniversityBeijingChina Laplace Paul Sabatier Universityand CNRSToulouseFrance Electrical and Computer Engineering University of ConnecticutStorrsConnecticutUSA State Key Laboratory of Power Transmission Equipment&System Security and New Technology School of Electrical EngineeringChongqing UniversityChongqingChina Thrust of Sustainable Energy and Environment The Hong Kong University of Science and Technology(Guangzhou)GuangzhouChina De

The 2050 carbon-neutral vision spawns a novel energy structure revolution,and the construction of the future energy structure is based on equipment *** material,as the core of electrical power equipment and electrified transportation asset,faces unprecedented challenges and *** goal of carbon neutral and the urgent need for innovation in electric power equipment and electrification assets are first *** engineering challenges constrained by the insulation system in future electric power equipment/devices and electrified transportation assets are *** materials,including intelligent insulating material,high thermal conductivity insulating material,high energy storage density insulating material,extreme environment resistant insulating material,and environmental-friendly insulating material,are cat-egorised with their scientific issues,opportunities and challenges under the goal of carbon neutrality being *** the context of carbon neutrality,not only improves the understanding of the insulation problems from a macro level,that is,electrical power equipment and electrified transportation asset,but also offers opportunities,remaining issues and challenges from the insulating material *** is hoped that this paper en-visions the challenges regarding design and reliability of insulations in electrical equipment and electric vehicles in the context of policies towards carbon neutrality *** authors also hope that this paper can be helpful in future development and research of novel insulating materials,which promote the realisation of the carbon-neutral vision.

关键词： neutral insulation extreme

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applications of MXenes in human-like sensors and actuators

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Nano Research 2023年第4期16卷 5767-5795页

作者： Jinbo Pang Songang Peng Chongyang Hou Xiao Wang Ting Wang Yu Cao Weijia Zhou Ding Sun Kai Wang Mark H.Rümmeli Gianaurelio Cuniberti Hong Liu Institute for Advanced Interdisciplinary Research(iAIR) Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of ShandongUniversity of JinanJinan 250022China Institute for Materials Science and Max Bergmann Center of Biomaterials Technische Universität DresdenDresden 01069Germany Center for Advancing Electronics Dresden Technische Universität DresdenDresden 01069Germany Dresden Center for Computational Materials Science Technische Universität DresdenDresden 01062Germany Dresden Center for Intelligent Materials(GCL DCIM) Technische Universität DresdenDresden 01062Germany High-Frequency High-Voltage Device and Integrated Circuits R&D Center Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China Key Laboratory of Microelectronic Devices&Integrated Technology Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China Shenzhen Key Laboratory of Nanobiomechanics Shenzhen Institute of Advanced TechnologyChinese Academy of SciencesShenzhen 518055China State Key Laboratory of Biobased Material and Green Papermaking Qilu University of TechnologyShandong Academy of SciencesJinan 250353China School of Bioengineering Qilu University of TechnologyShandong Academy of ScienceJinan 250353China Key Laboratory of Modern Power System Simulation and Control&Renewable Energy Technology(Ministry of Education) Northeast Electric Power UniversityJilin 132012China School of Electrical Engineering Northeast Electric Power UniversityJilin 132012China School of Electrical Engineering Weihai Innovation Research InstituteQingdao UniversityQingdao 266000China School of Electrical and Computer Engineering Jilin Jianzhu UniversityChangchun 130118China Institute for Complex Materials Leibniz Institute for Solid State and Materials Research Dresden(IFW Dresden)20 Helmholtz StrasseDresden 01069Germany College of Energy Soochow Institute for Energy and Materials Innovations Soochow UniversitySuzhou 215006China Key L

Human beings perceive the world through the senses of sight,hearing,smell,taste,touch,space,and *** first five senses are prerequisites for people to *** sensing organs upload information to the nervous systems,including the brain,for interpreting the surrounding ***,the brain sends commands to muscles reflexively to react to stimuli,including light,gas,chemicals,sound,and ***,as an emerging two-dimensional material,has been intensively adopted in the applications of various sensors and *** this review,we update the sensors to mimic five primary senses and actuators for stimulating muscles,which employ MXene-based film,membrane,and composite with other functional ***,a brief introduction is delivered for the structure,properties,and synthesis methods of ***,we feed the readers the recent reports on the MXene-derived image sensors as artificial retinas,gas sensors,chemical biosensors,acoustic devices,and tactile sensors for electronic ***,the actuators of MXene-based composite are ***,future opportunities are given to MXene research based on the requirements of artificial intelligence and humanoid robot,which may induce prospects in accompanying healthcare and biomedical engineering applications.

关键词： MXenes sensors actuators gas sensors biosensors tactile sensors sound sensors artificial retina

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Technology Roadmap for Flexible Sensors

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ACS NANO 2023年第6期17卷 5211-5295页

作者： Luo, Yifei Abidian, Mohammad Reza Ahn, Jong-Hyun Akinwande, Deji Andrews, Anne M. Antonietti, Markus Bao, Zhenan Berggren, Magnus Berkey, Christopher A. Bettinger, Christopher John Chen, Jun Chen, Peng Cheng, Wenlong Cheng, Xu Choi, Seon-Jin Chortos, Alex Dagdeviren, Canan Dauskardt, Reinhold H. Di, Chong-an Dickey, Michael D. Duan, Xiangfeng Facchetti, Antonio Fan, Zhiyong Fang, Yin Feng, Jianyou Feng, Xue Gao, Huajian Gao, Wei Gong, Xiwen Guo, Chuan Fei Guo, Xiaojun Hartel, Martin C. He, Zihan Ho, John S. Hu, Youfan Huang, Qiyao Huang, Yu Huo, Fengwei Hussain, Muhammad M. Javey, Ali Jeong, Unyong Jiang, Chen Jiang, Xingyu Kang, Jiheong Karnaushenko, Daniil Khademhosseini, Ali Kim, Dae-Hyeong Kim, Il-Doo Kireev, Dmitry Kong, Lingxuan Lee, Chengkuo Lee, Nae-Eung Lee, Pooi See Lee, Tae-Woo Li, Fengyu Li, Jinxing Liang, Cuiyuan Lim, Chwee Teck Lin, Yuanjing Lipomi, Darren J. Liu, Jia Liu, Kai Liu, Nan Liu, Ren Liu, Yuxin Liu, Yuxuan Liu, Zhiyuan Liu, Zhuangjian Loh, Xian Jun Lu, Nanshu Lv, Zhisheng Magdassi, Shlomo Malliaras, George G. Matsuhisa, Naoji Nathan, Arokia Niu, Simiao Pan, Jieming Pang, Changhyun Pei, Qibing Peng, Huisheng Qi, Dianpeng Ren, Huaying Rogers, John A. Rowe, Aaron Schmidt, Oliver G. Sekitani, Tsuyoshi Seo, Dae-Gyo Shen, Guozhen Sheng, Xing Shi, Qiongfeng Someya, Takao Song, Yanlin Stavrinidou, Eleni Su, Meng Sun, Xuemei Takei, Kuniharu Tao, Xiao-Ming Tee, Benjamin C. K. Thean, Aaron Voon-Yew Trung, Tran Quang Wan, Changjin Wang, Huiliang Wang, Joseph Wang, Ming Wang, Sihong Wang, Ting Wang, Zhong Lin Weiss, Paul S. Wen, Hanqi Xu, Sheng Xu, Tailin Yan, Hongping Yan, Xuzhou Yang, Hui Yang, Le Yang, Shuaijian Yin, Lan Yu, Cunjiang Yu, Guihua Yu, Jing Yu, Shu-Hong Yu, Xinge Zamburg, Evgeny Zhang, Haixia Zhang, Xiangyu Zhang, Xiaosheng Zhang, Xueji Zhang, Yihui Zhang, Yu Zhao, Siyuan Zhao, Xuanhe Zheng, Yuanjin Zheng, Yu-Qing Zheng, Zijian Zhou, Tao Zhu, Bowen Zhu, Ming Zhu, Rong Zhu, Yangzhi Zhu, Yong Zou, Guijin Chen, Xiaodong 08-03 Innovis Singapore 138634 Republic of Singapore Innovative Centre for Flexible Devices (iFLEX) School of Materials Science and Engineering Nanyang Technological University Singapore 639798 Singapore Department of Biomedical Engineering University of Houston Houston Texas 77024 United States School of Electrical and Electronic Engineering Yonsei University Seoul 03722 Republic of Korea Department of Electrical and Computer Engineering The University of Texas at Austin Austin Texas 78712 United States Microelectronics Research Center The University of Texas at Austin Austin Texas 78758 United States Department of Chemistry and Biochemistry California NanoSystems Institute and Department of Psychiatry and Biobehavioral Sciences Semel Institute for Neuroscience and Human Behavior and Hatos Center for Neuropharmacology University of California Los Angeles Los Angeles California 90095 United States Colloid Chemistry Department Max Planck Institute of Colloids and Interfaces 14476 Potsdam Germany Department of Chemical Engineering Stanford University Stanford California 94305 United States Laboratory of Organic Electronics Department of Science and Technology Campus Norrköping Linköping University 83 Linköping Sweden Wallenberg Initiative Materials Science for Sustainability (WISE) and Wallenberg Wood Science Center (WWSC) SE-100 44 Stockholm Sweden Department of Materials Science and Engineering Stanford University Stanford California 94301 United States Department of Biomedical Engineering and Department of Materials Science and Engineering Carnegie Mellon University Pittsburgh Pennsylvania 15213 United States Department of Bioengineering University of California Los Angeles Los Angeles California 90095 United States School of Chemistry Chemical Engineering and Biotechnology Nanyang Technological University Singapore 637457 Singapore Nanobionics Group Department of Chemical and Biological Engineering Monash University Clayton Australia 3800 Monash

Humans rely increasingly on sensors to address grand challenges and to improve quality of life in the era of digitalization and big data. For ubiquitous sensing, flexible sensors are developed to overcome the limitations of conventional rigid counterparts. Despite rapid advancement in bench-side research over the last decade, the market adoption of flexible sensors remains limited. To ease and to expedite their deployment, here, we identify bottlenecks hindering the maturation of flexible sensors and propose promising solutions. We first analyze continued...challenges in achieving satisfactory sensing performance for real-world applications and then summarize issues in compatible sensor-biology interfaces, followed by brief discussions on powering and connecting sensor networks. Issues en route to commercialization and for sustainable growth of the sector are also analyzed, highlighting environmental concerns and emphasizing nontechnical issues such as business, regulatory, and ethical considerations. Additionally, we look at future intelligent flexible sensors. In proposing a comprehensive roadmap, we hope to steer research efforts towards common goals and to guide coordinated development strategies from disparate communities. Through such collaborative

关键词： soft materials mechanics engineering flexible electronics conformable sensors bioelectronics human-machine interfaces body area sensor networks technology translation sustainable electronics

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Surface,Size and Thermal Effects in Alkali Metal with Core-Electron Binding-Energy Shifts

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Chinese Journal of Chemical Physics 2021年第5期34卷 628-638,I0003,I0004页

作者： Wen-huan Zhu Zhong-kai Huang Mao-lin Bo Jin Huang Cheng Peng Hai Liu National Key Laboratory of Science and Technology on Micro/Nano Fabrication Shanghai Jiao Tong UniversityShanghai 200240China Key Laboratory of Inorganic Special Functional Materials of Chongqing Yangtze Nromal UniversityChongqing 408100China Key Laboratory of Extraordinary Bond Engineering and Advanced Materials Technology of Chongqing Yangtze Normal UniversityChongqing 408100China School of Chemistry and Chemical Engineering Southwest UniversityChongqing 400715China Key Laboratory of Advanced Display and System Applications of Ministry of Education Shanghai UniversityShanghai 200072China

Consistency between density functional theory calculations and X-ray photoelectron spectroscopy measurements confirms our predications on the undercoordination-induced local bond relaxation and core level shift of alkali metal,which determine the surface,size and thermal properties of ***-resolved photoelectron spectroscopyanalysis method and bond order-length-strength theory can be utilized to quantify the physical parameters regarding bonding identities and electronic property of metal surfaces,which allows for the study of the core-electron binding-energy shifts in alkali *** employing these methods and first principle calculation in this work,we can obtain the information of bond and atomic cohesive energy of under-coordinated atoms at the alkali metal *** addition,the effect of size and temperature towards the binding-energy in the surface region can be seen from the view point of Hamiltonian perturbation by atomic relaxation with atomic bonding.

关键词： Alkali metal First principle calculation Metal surface Binding-energy Size effect Thermal effect

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"Zero change" platform for monolithic back-end-of-line integration of phase change materials in silicon photonics

arXiv

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arXiv 2023年

作者： Wei, Maoliang Xu, Kai Tang, Bo Li, Junying Yun, Yiting Zhang, Peng Wu, Yingchun Bao, Kangjian Lei, Kunhao Chen, Zequn Ma, Hui Sun, Chunlei Liu, Ruonan Li, Ming Li, Lan Lin, Hongtao State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Zhejiang University Hangzhou310027 China Institute of Microelectronics the Chinese Academy of Sciences Beijing100029 China Hangzhou Institute for Advanced Study University of Chinese Academy of Sciences Hangzhou310024 China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Zhejiang Hangzhou310030 China Institute of Advanced Technology Westlake Institute for Advanced Study Zhejiang Hangzhou310024 China State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing100083 China

Monolithic integration of novel materials for unprecedented device functions without modifying the existing photonic component library is the key to advancing heterogeneous silicon photonic integrated circuits. To achieve this, the introduction of a silicon nitride etching stop layer at selective area, coupled with low-loss oxide trench to waveguide surface, enables the incorporation of various functional materials without disrupting the reliability of foundry-verified devices. As an illustration, two distinct chalcogenide phase change materials (PCM) with remarkable nonvolatile modulation capabilities, namely Sb2Se3 and Ge2Sb2Se4Te1, were monolithic back-end-of-line integrated into silicon photonics. The PCM enables compact phase and intensity tuning units with zero-static power consumption. Taking advantage of these building blocks, the phase error of a push-pull Mach-Zehnder interferometer optical switch could be trimmed by a nonvolatile phase shifter with a 48% peak power consumption reduction. Mirco-ring filters with a rejection ratio >25dB could be applied for >5-bit wavelength selective intensity modulation, and waveguide-based >7-bit intensity-modulation photonic attenuators could achieve >39dB broadband attenuation. The advanced "Zero change" back-end-of-line integration platform could not only facilitate the integration of PCMs for integrated reconfigurable photonics but also open up the possibilities for integrating other excellent optoelectronic materials in the future silicon photonic process design kits. © 2023, CC BY.

关键词： Selenium compounds

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