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2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2022

作者： Huang, Haijin Han, Xu Balčytis, Armandas Dubey, Aditya Boes, Andreas Nguyen, Thach Ren, Guanghui Tan, Mengxi Tian, Yonghui Mitchell, Arnan Integrated Photonics and Applications Centre School of Engineering RMIT University MelbourneVIC3001 Australia Key Laboratory for Magnetism and Magnetic Materials of MOE School of Physical Science and Technology Lanzhou University Gansu Lanzhou730000 China

ISBN: (纸本)9798350350012

We describe an advanced integrated optical phase modulator design that harnesses a light recycling approach with up to 3 passes to increase the efficiency of its electro-optical response. The device was fabricated on a SiN loaded lithium niobate on insulator platform and exhibited an up to 8 times enhanced modulation response for an equivalent optical and electrical input power. © 2022 The Author(s), © IEEE 2022.

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Slow-light-enhanced on-chip 1D and 2D photonic crystal waveguide gas sensing in near-IR with an ultrahigh interaction factor

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Photonics Research 2023年第10期11卷 1647-1656页

作者： ZIHANG PENG YIJUN HUANG KAIYUAN ZHENG CHUANTAO ZHENG MINGQUAN PI HUAN ZHAO JIALIN JI YUTING MIN LEI LIANG FANG SONG YU ZHANG YIDING WANG FRANK K.TITTEL State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China Department of Electrical Engineering and Photonics Research Institute The Hong Kong Polytechnic UniversityHong Kong 518060China State Key Laboratory of Luminescence and Applications Changchun Institute of OpticsFine Mechanics and PhysicsChinese Academy of SciencesChangchun 130033China Department of Electrical and Computer Engineering Rice UniversityHoustonTexas 77005USA

Nanophotonic waveguides hold great promise to achieve chip-scale gas sensors. However, their performance is limited by a short light path and small light–analyte overlap. To address this challenge, silicon-based, slow-lightenhanced gas-sensing techniques offer a promising approach. In this study, we experimentally investigated the slow light characteristics and gas-sensing performance of 1D and 2D photonic crystal waveguides(PCWs) in the near-IR(NIR) region. The proposed 2D PCW exhibited a high group index of up to 114, albeit with a high propagation loss. The limit of detection(LoD) for acetylene(C_(2)H_(2)) was 277 parts per million(ppm) for a1 mm waveguide length and an averaging time of 0.4 s. The 1D PCW shows greater application potential compared to the 2D PCW waveguide, with an interaction factor reaching up to 288%, a comparably low propagation loss of 10 dB/cm, and an LoD of 706 ppm at 0.4 s. The measured group indices of the 2D and 1D waveguides are104 and 16, respectively, which agree well with the simulation results.

关键词： waveguide light interaction

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Investigation of Bragg Reflectors for Polarity-Inverted AlN BAW Resonators Operating at Super High Frequency

Investigation of Bragg Reflectors for Polarity-Inverted AlN ...

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IEEE International Symposium on applications of Ferroelectrics (ISAF)

作者： Ruidong Qin Chongyang Huo Xuanqi Huang Zhiqiang Mu Wenjie Yu State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

ISBN: (数字)9798350371901

ISBN: (纸本)9798350371918

Solidly mounted resonator (SMR) structures are promising candidates for bulk acoustic wave (BAW) devices operating in the super high frequency (SHF) range, owing to their superior mechanical stability and power handling capabilities. In this study, we designed and fabricated Bragg reflector (BR) layers using two high acoustic impedance materials, W and Mo. The Mo-based BR demonstrated superior performance in terms of wafer stress management and thickness control. Utilizing Mo-SiO 2 BRs, we successfully fabricated single-crystal polarity-inverted AlN resonators using novel two-step piezoelectric film deposition and cavity-embedded processes. These resonators exhibited resonance frequencies of 12.79 GHz (Q ~ 696) and 12.88 GHz (Q ~ 460), with a $k_{eff}^2$ value of 1.7%, which is nearly double that of the first-order mode. This work demonstrates the significant potential of SMR structures for acoustic filter applications in the SHF bands.

关键词： Piezoelectric films Fabrication Tensile stress Resonator filters High frequency III-V semiconductor materials Piezoelectric polarization Aluminum nitride Thickness control Acoustic waves

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Functional GaN Heterogeneous integrated Substrate Based on Wafer Bonding and Smart-cut Technology

Functional GaN Heterogeneous Integrated Substrate Based on W...

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IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

作者： Jiaxin Ding Tiangui You Xin Ou National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai China The Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

ISBN: (数字)9798331519919

ISBN: (纸本)9798331519926

This work focuses on the significant demand for breakthroughs and improvements in chip performance through the monolithic heterogeneous integration of GaN-based materials and devices with foreign substrates in the post-Moore era. It systematically conducts the fabrication of wafer-scale single-crystal GaN film and its heterogeneous integration by ion-cutting technology.

关键词： Wafer bonding Performance evaluation Fabrication Conferences Multichip modules Bonding Substrates Three-dimensional integrated circuits

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Transformation of Heat Conductivities for Accurate Thermal Modelling of SAW Resonators

Transformation of Heat Conductivities for Accurate Thermal M...

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IEEE International Symposium on applications of Ferroelectrics (ISAF)

作者： Hulin Yao Shibin Zhang Pengcheng Zheng Xiaoli Fang Dongchen Sui Mijing Sun Xin Ou State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

ISBN: (数字)9798350371901

ISBN: (纸本)9798350371918

Self-Heating in the surface acoustic resonators (SAW) is critical to the power handling, miniaturization, and prevention of frequency drift due to the temperature (T) increasement. This effect origins from the coupling of thermal, elastic and electric fields. FEM simulation is a promising way to understand the intrinsic characteristics of this effect. In thermal simulations, if the thickness of the bottom substrate in real and simulation are not equal, the thermal simulation sets need extra treatment to make sure the simulation is correct, which means the results should be uniform no matter how thick the substrate in simulation is. Based on the coordinate stretching principles, this work proposed a transformation of heat conductivity of substrate during thermal simulations to guarantee that the simulation results meets requirements above. The validation of transformation are tested by astringency of simulations results.

关键词： Accuracy Simulation Surface acoustic waves Conductivity Mathematical models Acoustics Thermal analysis Resonators Substrates Heat transfer

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Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes

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microsystems & Nanoengineering 2023年第6期9卷 195-204页

作者： Qiuling Qian Yutong Wei Yi Xu Mengmeng Zheng Chenguang Wang Shulin Zhang Xiaoming Xie Chaofeng Ye Xianqiang Mi National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and information TechnologyChinese Academy of Sciences865 Changning RoadShanghai 200050China Shanghai Advanced Research Institute Chinese Academy of SciencesShanghai 201210China University of Chinese Academy of Sciences Bejing 100049China school of Information Science and Technology Shanghai Tech UniversityShanghai 201210China School of Life Sciences Shanghai UniversityShanghai 20044China School of Physics and Optoelectronic Engineering Hangzhou Institute for Advanced Study University of Chinese Academy of SciencesChinese Academy of SciencesHangzhou 310024China

Tumor-derived circulating exosomes(TDEs)are being pursued as informative and noninvasive ***,quantitatively detecting TDEs is still ***,we constructed a DNA tetrahedral-structured probe(TSP)-mediated microfluidic magnetic detection system(μFMS)to provide a rapid and sensitive platform for analyzing ***63 aptamer-modified Fe_(3)O_(4)magnetic nanoparticles(MNPs)were constructed to form magnetic nano-report probes(MNRs).The microfluidic chips were fabricated from glass functionalized with DNA TSP-modified aldehyde groups and a PDMS layer designed with serpentine *** induction coil-based magnetic detector was used to measure the magnetic *** linear dynamic range of theμFMS system for TDE assays was 1.98×10^(3)-1.98×10^(7)particles/mL with a limit of detection of 1.98×10^(3)particles/mL in *** was no significant difference in TDE detection between the simulated serum and PBS,which indicated the feasibility of the constructedμFMS system for TDE analysis in complex biological *** terms of cost,reaction time and operation procedure,thisμFMS has the potential to be developed as a clinical point-of-care testing tool for cancer diagnosis and therapeutics.

关键词： fluid diagnosis magnetic

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Band structure engineering through van der Waals heterostructing superlattices of two-dimensional transition metal dichalcogenides

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InfoMat 2021年第2期3卷 201-211页

作者： Xin-Gang Zhao Zhiming Shi Xinjiang Wang Hongshuai Zou Yuhao Fu Lijun Zhang State Key Laboratory of Integrated Optoelectronics Key Laboratory of Automobile Materials of MOECollege of Materials Science and EngineeringJilin UniversityChangchunJilinChina State Key Laboratory of Luminescence and Applications Changchun Institute of OpticsFine Mechanics and PhysicsChinese Academy of SciencesChangchunJilinChina College of Physics Jilin UniversityChangchunJilinChina

The indirect-to-direct band-gap transition in transition metal dichalcogenides(TMDCs)from bulk to monolayer,accompanying with other unique properties of two-dimensional materials,has endowed them great potential in optoelectronic *** easy transferability and feasible epitaxial growth pave a promising way to further tune the optical properties by constructing van der Waals ***,we performed a systematic high-throughput first-principles study of electronic structure and optical properties of the layerby-layer stacking TMDCs heterostructing superlattices,with the configuration space of[(MX2)n(M0X02)10−n](M/M0=Cr,Mo,W;X/X0=S,Se,Te;n=0-10).Our calculations involving long-range dispersive interaction show that the indirect-to-direct band-gap transition or even semiconductor-to-metal transition can be realized by changing component compositions of *** analysis indicates that the indirect-to-direct band-gap transition can be ascribed to the in-plane strain induced by lattice *** semiconductor-to-metal transition may be attributed to the band offset among different components that is modified by the in-plane *** superlattices with direct band-gap show quite weak band-gap optical transition because of the spacial separation of the electronic states *** general,the layers stacking-order of superlattices results in a small up to 0.2 eV band gap fluctuation because of the built-in *** results provide useful guidance for engineering band structure and optical properties in TMDCs heterostructing superlattices.

关键词： heterostructures indirect-to-direct band-gap transition superlattices transition metal dichalcogenides two-dimensional materials

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Impact of helium ion irradiation on the thermal properties of superconducting nanowire single-photon detectors

arXiv

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arXiv 2025年

作者： Hong, Yi-Yu Wang, Yu-Ze Zhang, Wei-Jun Hu, Jia-Hao Xiong, Jia-Min Chu, Dong-Wei Ou, Xin Wu, Wen-Tao Zhang, Xiao-Fu Yu, Hui-Qin Yuan, Pu-Sheng Li, Hao Wu, Ling Wang, Zhen You, Li-Xing Shanghai Key Laboratory of Superconductor Integrated Circuit Technologies 865 Changning Road Shanghai200050 China National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences 865 Changning Road Shanghai200050 China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing100049 China

Superconducting nanowire single-photon detectors (SNSPDs) are indispensable for applications ranging from quantum information processing to deep-space optical communications, owing to their high detection efficiency, low dark counts, and excellent timing resolution. However, further improving the intrinsic detection efficiency (IDE) remains crucial for optimizing SNSPD performance. Ion irradiation has recently emerged as a powerful post-fabrication method to enhance SNSPD characteristics. Here, we studied the effects of helium ion irradiation on the thermal properties of NbN SNSPDs. We systematically examine the evolution of thermal boundary conductance as a function of ion fluence (0–1.1 × 1017 ions/cm2), observing a 57% decrease from 127 W/m2K4 to 54 W/m2K4 with increasing fluence, followed by saturation at approximately 9 × 1016 ions/cm2. At this fluence, the minimum hotspot relaxation time measurements indicate a 41% increase, rising from 17 ps to 24 ps, while the electron-phonon interaction time extends by 14%, from 11.2 ps to 12.8 ps at 10 K. Transmission electron microscopy (TEM) reveals defect formation at the NbN/SiO2 interface (6–8 nm) and He-bubble formation within the SiO2 layer (30–260 nm), contributing to the extended thermal relaxation time. These irradiation-induced modifications play a key role in enhancing the IDE of the treated devices. We further demonstrate a post-irradiation SNSPD showing a saturated IDE plateau at 2000 nm from 2.7 K to 28 mK, enabled by thermal modifications and a weakly wavelength-dependent avalanche-assisted mechanism. Our findings highlight ion irradiation as a valuable tool for thermal tailoring in SNSPDs and advance the understanding of detection physics and defect engineering in superconducting optoelectronics. Copyright © 2025, The Authors. All rights reserved.

关键词： Particle beams

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单晶二维材料生长中的层数调控机制

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science Bulletin 2023年第23期68卷 2936-2944,M0005页

作者：张磊宁孔潇董际臣丁峰 Beijing Key Laboratory of Construction Tailorable Advanced Functional Materials and Green Applications MOE Key Laboratory of Cluster ScienceSchool of Chemistry and Chemical EngineeringBeijing Institute of TechnologyBeijing 100081China State Key Laboratory of Information Functional Materials 2020 X-LabShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China Beijing National Laboratory for Molecular Sciences Key Laboratory of Organic SolidsInstitute of ChemistryChinese Academy of SciencesBeijing 100190China School of Chemical Sciences University of Chinese Academy of SciencesBeijing 100049China Faculty of Materials Science and Engineering/Institute of Technology for Carbon Neutrality Shenzhen Institute of Advanced TechnologyChinese Academy of SciencesShenzhen 518055China

最近,通过将外延生长的多层二维晶畴进行无缝拼接,研究人员成功实现了晶圆级单晶二维多层材料的合成.不同于以往观察到的类似婚礼蛋糕或倒置婚礼蛋糕结构,这些多层二维晶畴中所有层都具有完全相同的尺寸和形状,即多层同步生长.基于此,... 详细信息

最近,通过将外延生长的多层二维晶畴进行无缝拼接,研究人员成功实现了晶圆级单晶二维多层材料的合成.不同于以往观察到的类似婚礼蛋糕或倒置婚礼蛋糕结构,这些多层二维晶畴中所有层都具有完全相同的尺寸和形状,即多层同步生长.基于此,本文通过理论计算探索了多层二维材料的不同生长模式,提出了多层同步生长的物理模型,揭示了基底上液体异质表面层的形成是保证同步生长的关键性因素.作者指出在生长过程中,多层二维材料嵌入在衬底的异质表面层中,同时底层与固态基底直接接触.异质层能有效钝化二维材料的边缘,从而防止这些活性边缘的融合,而异质层与基底之间的高界面则迫使不同层的二维材料边缘保持同步生长.通过对多层同步生长机理的深入了解,本文揭示了发生多层同步生长的条件,为合成层数可控的晶圆级单晶二维材料提供了新的思路.

关键词： 2D materials Epitaxial growth Thickness control Synchronic growth

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6.5 GHz Longitudinal Leaky SAW Filter Using LiNbO3-on-SiC Structure for Wi-Fi 7

6.5 GHz Longitudinal Leaky SAW Filter Using LiNbO3-on-SiC St...

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Microwave, MTT-S International Symposium

作者： Mijing Sun Shibin Zhang Pengcheng Zheng Xiaoli Fang Xin Ou School of Microelectronics University of Science and Technology of China China National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences China

ISBN: (数字)9798350375046

ISBN: (纸本)9798350375053

This work focused on solving the filtering scheme for challenging Wi- Fi 7 bands and successfully implemented the surface acoustic wave (SAW) filters exploiting longitudinal leaky (LL) modes based on thin film X-cut LiNb03-on-SiC (LNOSiC). Here, we initially investigated the relationship between the normalized LiNb03 thickness $(\mathbf{h}_{\text{LN}}/\lambda)$ and the resonator response theoretically and experimentally. The lithium niobate film with a thickness of 270 nm was chosen to balance loss and high-frequency side spurious modes. LL-SA W resonators with wavelengths $(\lambda)$ ranging from 0.92 to 1.08 $\mu\mathrm{m}$ were fabricated, showing scalable resonant frequencies from 5.8 to 6.6 GHz and large K2 of about 19%. An LL-SA W filter with a passband range of 6.297-6.824 GHz, a large 3-dB bandwidth of 527 MHz, and a low insertion loss (IL) of 1.29 dB was successfully realized. The filter meets the requirements of frequency (6 GHz) and channel bandwidth (320 MHz) of Wi-Fi 7, potentially providing a front-end filtering solution for Wi-Fi 7 commercial applications.

关键词： Filtering Silicon carbide Resonator filters Surface acoustic waves Resonant frequency Bandwidth SAW filters

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