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Optical Metrology and Inspection for Industrial Applications XI 2024

作者： Hu, Zhibo Zhao, Weirui Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology School of Optics and Photonics Beijing Institute of Technology Beijing100081 China

ISBN: (纸本)9781510682108

Interference measurement is a high-precision detection method for evaluating optical components and beam quality. Interferometry is commonly used for an optical element surface accurate test. But it is susceptible to interference from environmental and phase ambiguity issues. So a polarization-based method for extracting phase from dual-frame interferograms is proposed. We put forward a polarization-based method for extracting phase from dual-frame interferograms. This method only requires two interferograms with a phase difference of pi/2, which are processed using the extremum method and directly subjected to tangent and arctangent phase extraction to recover the surface shape. It enables simple and efficient extraction of the phase distribution of the tested optical element surface to be realized in a sub-millimeter scale dynamic range with a nanometer accuracy. The present invention does not require high-precision components such as phase shifters and spectrometers, and does not require preprocessing operations such as normalization and denoising of interferograms. It has the advantages of simple optical path, large measurement range, high accuracy, and high efficiency. © 2024 SPIE.

关键词： Spectrometers

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Hydrogel and Machine Learning for Soft Robots’ Sensing and Signal Processing: A Review

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Journal of Bionic Engineering 2023年第3期20卷 845-857页

作者： Shuyu Wang Zhaojia Sun Department of Control Engineering Northeastern UniversityQinhuangdao066001China Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology Qinhuangdao066004China

The soft robotics field is on the rise. The highly adaptive robots provide the opportunity to bridge the gap between machines and people. However, their elastomeric nature poses significant challenges to the perception, control, and signal processing. Hydrogels and machine learning provide promising solutions to the problems above. This review aims to summarize this recent trend by first assessing the current hydrogel-based sensing and actuation methods applied to soft robots. We outlined the mechanisms of perception in response to various external stimuli. Next, recent achievements of machine learning for soft robots’ sensing data processing and optimization are evaluated. Here we list the strategies for implementing machine learning models from the perspective of applications. Last, we discuss the challenges and future opportunities in perception data processing and soft robots’ high level tasks.

关键词： Soft robots Bionic robots Machine learning Hydrogel sensors Deep learning

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Six DoF Large-scale Dimensional Metrology Using Multilateral Dual-comb Ranging

Six DoF Large-scale Dimensional Metrology Using Multilateral...

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2024 Conference on Lasers and Electro-Optics, CLEO 2024

作者： Jiang, Ruilin Wu, Guanhao State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision Instrument Tsinghua University Beijing100084 China

ISBN: (纸本)9781957171395

We developed a multilateral metrology system employing dual-comb absolute distance metrology. Using self-calibration method facilitated by the mutual-collimating method, within a 10ms averaging, it achieved micron-level precision for position and ten microradians-level precision for orientation. © Optica Publishing Group 2024 © 2024 The Author(s)

关键词： Optical waveguides

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Six DoF Large-scale Dimensional Metrology Using Multilateral Dual-comb Ranging

Six DoF Large-scale Dimensional Metrology Using Multilateral...

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CLEO: Science and Innovations in CLEO 2024, CLEO: S and I 2024 - Part of Conference on Lasers and Electro-Optics

作者： Jiang, Ruilin Wu, Guanhao State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision Instrument Tsinghua University Beijing100084 China

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STUDY ON THE SENSITIVITY MECHANISM OF LOW-COUPLED HEAT FLOW BIAXIAL MEMS ACCELEROMETERS 10

STUDY ON THE SENSITIVITY MECHANISM OF LOW-COUPLED HEAT FLOW ...

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10th International Symposium on Test Automation and instrumentation, ISTAI 2024

作者： Liu, Junyu Piao, Linhua Beijing Key Laboratory of Sensors China Modern Measurement and Control Technology Ministry of Education China

ISBN: (纸本)9781837242672

A new sensitive structure of a low-coupling heat flow biaxial MEMS accelerometer is proposed and its sensitivity mechanism is investigated. A three-dimensional model of the sensitive structure was created by COMSOL, and the temperature field of the sensitive structure was calculated using the finite element method. The results show that the accelerometer has a temperature sensitivity of 1.71 K·g-1 in the X-axis, 1.69 K·g-1 in the Y-axis, 0.7% cross-coupling, and the sensitivity of both X-axis and Y-axes was 1.5 mV·g-1 with a heater power of 5mW and an acceleration of [-1~1] g. The accelerometer is characterized by a high sensitivity and a low cross-coupling, which lays a theoretical basis for the optimization of the structure in the following years. © The Institution of Engineering & technology 2024.

关键词： Accelerometers

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RESEARCH ON THE MECHANISM OF A HIGH ROBUSTNESS PRESSURE SENSOR BASED ON HEAT CONDUCTION 10

RESEARCH ON THE MECHANISM OF A HIGH ROBUSTNESS PRESSURE SENS...

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10th International Symposium on Test Automation and instrumentation, ISTAI 2024

作者： Zhang, Yonghao Piao, Linhua Sun, Jiahao Beijing Key Laboratory of Sensors China Modern Measurement and Control Technology Ministry of Education China

ISBN: (纸本)9781837242672

In this paper, a structure of high robustness pressure sensor based on heat conduction is proposed and its mechanism is studied. The temperature field in the structure of a high robustness pressure transducer based on heat conduction is calculated by COMSOL, and the temperature difference under the corresponding pressure is calculated. The calculation results based on the three-dimensional physical model of the sensor show that the temperature difference of the highly robust pressure sensor based on heat conduction decreases with the increase of pressure, and the pressure of the sensor is inversely proportional to the temperature difference, The temperature sensitivity of the high robustness pressure sensor based on heat conduction in the range of 0 ~ 49N is -0.021 K/N and the nonlinearity is 11.02%. The temperature sensitivity of the high robustness pressure sensor based on heat conduction in the range of 50 ~ 60N is -1.184 K/N and the nonlinearity is 7.85%. Through the establishment of the three-dimensional physical model structure of the high-robustness pressure sensor based on heat conduction and the calculation results of the sensor, the mechanism of the high-robustness pressure sensor based on heat conduction is revealed, which lays a theoretical foundation for the subsequent optimization of the parameters and structure of this kind of sensor. © The Institution of Engineering & technology 2024.

关键词： Pressure transducers

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STUDY ON RESPONSE TIME OF Z-AXIS THERMAL EXPANSION FLOW GYROSCOPE 10

STUDY ON RESPONSE TIME OF Z-AXIS THERMAL EXPANSION FLOW GYRO...

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10th International Symposium on Test Automation and instrumentation, ISTAI 2024

作者： Piao, Linhua Tong, Jiacheng Beijing Key Laboratory of Sensors China Modern Measurement and Control Technology Ministry of Education China

ISBN: (纸本)9781837242672

This paper presents a method to derive the gyro response time of thermal expansion flow in Z-axis micro-electro-mechanical systems (MEMS). First, the structure of the thermal expansion gyro is given and its working principle is explained in detail. Secondly, according to the sensitive mechanism of the thermal expansion gyro and its heat transfer mode, the theoretical model of the response time of the thermal expansion gyro is derived, and the calculation formula of the response time of the thermal expansion gyro is given. Finally, in order to verify the response time calculation formula derived in this paper, the finite element method is used. Based on the three-dimensional physical model of the thermal expansion gyro, the theoretical response time of the gyro is calculated and verified. The results of calculation and finite element verification show that: (1) the theoretical model and formula of response time of thermal expansion gyro are in agreement with the verification data;(2) With the increase of the thermal conductivity of the gas, the area of the thermal wire, and the decrease of the specific heat capacity and density of the gas, the response time gradually decreases. (3) The gyro response time calculated for Z-axis thermal expansion flow is 669.88 ms. The formula for calculating the response time of thermal expansion gyro presented in this paper lays a theoretical foundation for optimizing the response time of thermal expansion gyro. © The Institution of Engineering & technology 2024.

关键词： Density of gases

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Double-kill contribution of high-roughness high-density porous carbon electrodes to mechanically self-sensing supercapacitors

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Nano Research 2024年第7期17卷 6157-6167页

作者： Jue Huang Pengyu Liu Yiqun Wang Keren Dai Qingyun Dou Yajiang Yin Xiaofeng Wang Zheng You Department of Precision Instrument Tsinghua UniversityBeijing 100084China State Key Laboratory of Precision Measurement Technology and Instruments Beijing 100084China Department of Materials Science and Engineering Sun Yat-Sen UniversityGuangzhou 510275China ZNDY of Ministerial Key Laboratory School of Mechanical EngineeringNanjing University of Science and TechnologyNanjing 210094China Qiyuan Laboratory Beijing 100095China

Impact detecting and counting are fundamental functions of fuses used in hard target penetration ***,detection failure caused by battery breakdown in high-g acceleration environments poses a vulnerability for such *** paper introduces a novel supercapacitor that combines energy storage and high-g impact detection,called self-sensing *** deliberately inducing a transient soft short-circuit during shock in the supercapacitor,it is possible to detect external impact by its transient voltage *** realize this concept,firstly,by introducing the contact theory and force-induced percolation model,the electrode strength and roughness are found to have key impacts on the formation of soft ***,to meet the needs for sensitivity and capacity,a high-density porous carbon(HDPC)that combines high mechanical strength and porosity,is selected as a suitable candidate based on the analysis ***,a two-step curing method is proposed to prepare the high-roughness HDPC(HRHDPC)electrode and to assemble the self-sensing *** to the rich specific surface of the electrodes and the high surface strength and roughness conducive to the formation of transient soft short circuits,the self-sensing supercapacitor not only possesses an excellent specific capacitance(171 F/g at 0.5 A/g)but also generates significant voltage response signals when subjected to high-g impacts ranging from 8000g to 31,***,the self-sensing supercapacitor is applied to compose a successive high-g impact counting system and compared to traditional solutions(sensors and tantalum capacitors)in the military *** results show that the self-sensing supercapacitor-based system exhibits advantages in terms of size,power consumption,and counting accuracy.

关键词： supercapacitor self-sensing soft short-circuit impact sensing

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Bismuth-free Mg_(3)Sb_(2) with enhanced room-temperature thermoelectric and mechanical properties

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Journal of Materiomics 2024年第5期10卷 1101-1108页

作者： Jie Song Peng Luo Hailong Sun Hezhang Li Chao Wang Yi Niu Jing Jiang Clean Energy Materials and Engineering Center State Key Laboratory of Electronic Thin Films and Integrated DevicesSchool of Electronic Science and EngineeringUniversity of Electronic Science and Technology of ChinaChengdu611731China The State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua UniversityBeijing100084China

Thermoelectric materials are competitive candidates for special cooling ***_(3)Sb_(2)-based materials consisting of inexpensive ingredients have profound thermoelectric *** present,alloying with Mg_(3)Bi_(2) is the most effective approach to optimize the thermoelectric properties of Mg_(3)Sb_(2)-based ***,the extremely low abundance of bismuth in the crust contradicts its economic *** this work,the ZrO_(2) micro-particles were separated into the Mg_(3.2)Sb_(1.99)Te_(0.01).The doping effect of Zr atoms at Mg sites increased the electrical conductivity,and the combined secondary phase lowered the lattice thermal *** acceptable degradation in the Seebeck coefficient,the sample combined with 5%(in mass)ZrO_(2) exhibited a dimensionless figure of merit(zT)of 0.49 and a power factor of 2.7 mW·m^(−1)·K^(−2) near room *** average zT in the range from 300 K to 500 K reached 0.8,on par with the Mg_(3)Sb_(2) single bond Mg_(3)Bi_(2) ***,the compressive and bending strengths reach 669 MPa and 269 MPa,respectively,far superior to the common room-temperature *** secondary phase showed a surprising and uncostly promotion of the Mg_(3)Sb_(2)-based thermoelectric materials,impelling the realization of its commercial application.

关键词： Mg_(3)Sb_(2)-Mg_(3)Bi_(2)alloy Secondary phase Room-temperature thermoelectric properties Mechanical properties Inexpensive ingredients

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RESEARCH ON GAIT RECOGNITION BY USING 1DCNN BASED ON LOWER LIMB KINEMATIC POSTURE DATA 10

RESEARCH ON GAIT RECOGNITION BY USING 1DCNN BASED ON LOWER L...

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10th International Symposium on Test Automation and instrumentation, ISTAI 2024

作者： Li, Mu Ma, Chao Wang, Shaohong Key Laboratory of Modern Measurement and Control Technology Ministry of Edu. Beijing Information Science and Technology University Beijing China Beijing Key Laboratory of Measurement and Control of Mechanical and Electrical System Beijing Information Science and Technology University Beijing China

ISBN: (纸本)9781837242672

Gait recognition refers to the process of realizing the detection of human identity or health status and other information according to the characteristics of human plantar pressure, video images or human dynamics indicators. With the advantages of non-contact, non-aggression, no need for cooperation and easy to collect, gait recognition technology has been widely used in recent years in the field of public security criminal investigation, medical care, intelligent transportation and other fields. In this study, to meet the needs of gait recognition, IMU sensors are used to acquire human lower limb motion posture data and wavelet transform is used to decompose several components. Then the components were determined and the optimized 1DCNN model is used to carry out gait recognition research. The results showed that the optimized 1DCNN model for gait recognition task exhibits excellent performance with up to 95% accuracy, 96% recall and Fl value, as well as good computational efficiency, which is valuable for clinical automatic gait recognition analysis, rehabilitation engineering and criminal investigation work. Although there are some errors in some gait classifications, our study provides directions for further optimization of the algorithm to improve the accuracy and robustness of gait recognition. © The Institution of Engineering & technology 2024.

关键词： Crime

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