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Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

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microsystems & Nanoengineering 2023年第1期9卷 91-102页

作者： Mingzhi Yu Libo Zhao Shanshan Chen Xiangguang Han Chen Jia Yong Xia Xiaozhang Wang Yonglu Wang Ping Yang Dejiang Lu Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University710049Xi’anChina Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System Xi’an Jiaotong University710049Xi’anChina Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing 265503YantaiChina

With the increasing demand for multidirectional vibration measurements,traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity,high natural frequency,and low cross-sensitivity ***,for piezoresistive accelerometers,achieving pure axial deformation of the piezoresistive beam can greatly improve performance,but it requires the piezoresistive beam to be located in a specific position,which inevitably makes the design more complex and limits the performance ***,a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed,fabricated,and *** controlling synchronous displacements at both piezoresistive beam ends,the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious *** measurement unit for the z-axis acceleration was innovatively designed as an interlocking proof mass structure to ensure a full Wheatstone bridge for sensitivity *** pure axial stress state of the piezoresistive beams and low cross-sensitivity of all three units were verified by the finite element method(FEM).The triaxial accelerometer was fabricated and *** showing extremely high sensitivities(x axis:2.43 mV/g/5 V;y axis:2.44 mv/g/5 V;z axis:2.41 mV/g/5 V(without amplification by signal conditioning circuit))and high natural frequencies(x/y axes:11.4 kHz;z-axis:13.2 kHz)were *** approach of this paper makes it simple to design and obtain high-performance piezoresistive accelerometers.

关键词： axial proof independence

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GeoRVLF: A Robust Drone-Satellite Visual Geo-Localization Framework for Small UAV Platforms

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IEEE Robotics and Automation Letters 2025年第7期10卷 7380-7387页

作者： Zhang, Zhongyuan Chu, Jinkui Song, Tao Guo, Jikun Zhang, Ran Li, Jinshan Dalian University of Technology State Key Laboratory of High-Performance Precision Manufacturing Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian116024 China Ningbo Institute of Dalian University of Technology Ningbo315016 China

Drone-satellite geo-localization is a novel technology for autonomous UAV positioning in GNSS-denied environments, but it faces many complex challenges such as cross-scale heterogeneous scenes and real-time operational efficiency in practical applications. This letter proposes a robust visual geolocalization framework for small UAV platforms. First, we performed Cross-scale Place Recognition (CPR) module using a multi-level block retrieval algorithm, which could reduce the runtime and storage usage of feature-based VPR method. In the process we constructed a heterogeneous scene matching network HSM-Net, and designed an accurate Fine Pose Registration (FPR) geo-localization module for 4-DoF global pose estimations. Considering the computility limitation of small UAV platforms, we fused the FPR with VO module via pose graph optimization method, which improved the operating efficiency and stability of the framework. Through dataset evaluations and real-world flight experiments, we verified its geo-localization performance. The results show that GeoRVLF can could accurately and stably estimate the global pose of small UAVs in complex heterogeneous scenes, whose trajectory accuracy is close to low-accuracy GPS and operating frequency is near to classic VO methods. © 2016 IEEE.

关键词： Drones

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A nanonewton-scale biomimetic mechanosensor

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microsystems & Nanoengineering 2023年第4期9卷 45-56页

作者： Chi Zhang Mengxi Wu Ming Li Lixuan Che Zhiguang Tan Di Guo Zhan Kang Shuye Cao Siqi Zhang Yu Sui Jining Sun Liding Wang Junshan Liu State Key Laboratory of High-performance Precision Manufacturing Dalian University of Technology116024 DalianLiaoningChina Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology116024 DalianLiaoningChina State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology116024 DalianChina

Biomimetic mechanosensors have profound implications for various areas,including health care,prosthetics,human‒machine interfaces,and *** one of the most important parameters,the sensitivity of mechanosensors is intrinsically determined by the detection resolution to mechanical *** this manuscript,we expand the force detection resolution of current biomimetic mechanosensors from the micronewton to nanonewton *** develop a nanocrack-based electronic whisker-type mechanosensor that has a detection resolution of 72.2 *** achieve the perception of subtle mechanical stimuli,such as tiny objects and airflow,and the recognition of surface morphology down to a 30 nm height,which is the finest resolution ever reported in biomimetic *** importantly,we explore the use of this mechanosensor in wearable devices for sensing gravity field orientation with respect to the body,which has not been previously achieved by these types of *** develop a wearable smart system for sensing the body’s posture and movements,which can be used for remote monitoring of falls in elderly *** summary,the proposed device offers great advantages for not only improving sensing ability but also expanding functions and thus can be used in many fields not currently served by mechanosensors.

关键词： mec expanding profound

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An integrated micromachined flexible ultrasonicinductive sensor for pipe contaminant multiparameter detection

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microsystems & Nanoengineering 2024年第4期10卷 271-283页

作者： Zheng Yuan Xiaoyu Wu Zhikang Li Jiawei Yuan Yihe Zhao Zixuan Li Shaohui Qin Qi Ma Xuan Shi Zilong Zhao Jiazhu Li Shiwang Zhang Weixuan Jing Xiaozhang Wang Libo Zhao State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

Pipe contaminant detection holds considerable importance within various industries,such as the aviation,maritime,medicine,and other pertinent *** capability is beneficial for forecasting equipment potential failures,ascertaining operational situations,timely maintenance,and lifespan ***,the majority of existing methods operate offline,and the detectable parameters online are relatively *** constraint hampers real-time on-site detection and comprehensive assessments of equipment *** address these challenges,this paper proposes a sensing method that integrates an ultrasonic unit and an electromagnetic inductive unit for the real-time detection of diverse contaminants and flow rates within a *** ultrasonic unit comprises a flexible transducer patch fabricated through micromachining technology,which can not only make installation easier but also focus the sound ***,the sensing unit incorporates three symmetrical solenoid *** a comprehensive analysis of ultrasonic and induction signals,the proposed method can be used to effectively discriminate magnetic metal particles(e.g.,iron),nonmagnetic metal particles(e.g.,copper),nonmetallic particles(e.g.,ceramics),and *** inclusive categorization encompasses nearly all types of contaminants that may be present in a ***,the fluid velocity can be determined through the ultrasonic Doppler frequency *** efficacy of the proposed detection principle has been validated by mathematical models and finite element *** contaminants with diverse velocities were systematically tested within a 14mm diameter *** experimental results demonstrate that the proposed sensor can effectively detect contaminants within the 0.5−3mm range,accurately distinguish contaminant types,and measure flow velocity.

关键词： inductive holds ultrasonic

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Improvement of multi-functional properties by fabricating micro-pillar arrays structures on zirconium alloy surface

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Science China(Technological Sciences) 2022年第6期65卷 1243-1252页

作者： WANG XiaoLiang WANG HaoYu LIU YongDa QI Min REN QuanYao XU Jie SHAN DeBin GUO Bin Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education Harbin Institute of TechnologyHarbin 150080China School of Materials Science and Engineering Harbin Institute of TechnologyHarbin 150001China Science and Technology on Reactor System Design Technology Laboratory Chengdu 610041China

Although using the microstructure of a surface to enhance specific functions has immense applicability in numerous fields,few studies have been conducted on the multi-functional properties of nuclear fuel elements in harsh *** this study,surfaces with zirconium alloy micro-pillar arrays were prepared using micro-milling and ultraviolet nanosecond laser technology,and their functional properties such as the wettability,structural stability,and corrosion resistance were *** was found that the geometric dimension of the micro-pillar arrays prepared using these two methods could meet the design requirements,but the micro-milling process had the best dimensional ***-nano multi-scale structures were obtained by laser ***,these multi-scale structures exhibited weak structural stability,and the nanostructures were easily *** contrast,the micro-pillar arrays manufactured using micro-milling were confirmed to have better structural stability and corrosion *** one hand,the area mass loss of the micro-milled structure was lower than that of a flat surface after experiencing high-pressure fluid scouring at 8 and 38 m/*** the other hand,the oxidation weight gain of the surface with the micro-milled structure was lower than that of a flat surface,and the oxide film was 22.5% thinner after 100 days of deionized water corrosion at 360℃ and 18.7 MPa.

关键词： zirconium alloy micro-pillar arrays wettability structural stability corrosion

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Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures

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microsystems & Nanoengineering 2023年第5期9卷 345-356页

作者： Le Li Bian Tian Zhongkai Zhang Meng Shi Jiangjiang Liu Zhaojun Liu Jiaming Lei Shuimin Li Qijing Lin Libo Zhao Zhuangde Jiang School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

With the growing demand for thermal management of electronic devices,cooling of high-precision instruments,and biological cryopreservation,heat flux measurement of complex surfaces and at ultralow temperatures has become highly ***,current heat flux sensors(HFSs)are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions,such as low sensitivity and *** this study,we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures,ranging from−196°C to 273°*** sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm,which are efficiently manufactured by the screen-printing method,reach 11.21μV/(W/m2)and 13.43μV/(W/m2),*** experimental results show that there is a less than 3%resistance change from bending to ***,the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/***,we demonstrate the application of the HFS to the measurement of minuscule heat flux,such as heat dissipation of human skin and cold *** technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces,which has great importance in the superconductor and cryobiology field.

关键词： high stretching superconductor

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Small-size temperature/high-pressure integrated sensor via flip-chip method

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microsystems & Nanoengineering 2024年第4期10卷 153-162页

作者： Mimi Huang Xiaoyu Wu Libo Zhao Xiangguang Han Yong Xia Yi Gao Zeyu Cui Cheng Zhang Xiaokai Yang Zhixia Qiao Zhikang Li Feng Han Ping Yang Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong UniversityXi’an 710049China Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina School of Instrument Science and Technology Xi’an Jiaotong University710049 Xi’anChina Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Sensing Chongqing Academician WorkstationChongqing 2011 Collaborative Innovation Center of Micro/Nano Sensing and Intelligent Ecological Internet of ThingsChongqing Technology and Business UniversityNan’an DistrictChongqing 400067China Xi’an Aerospace Yuanzheng Fluid Control Co.Ltd. Xi’an 710049China

Hydraulic technology with smaller sizes and higher reliability trends,including fault prediction and intelligent control,requires high-performance temperature and pressure-integrated *** designs rely on planar wafer-or chip-level integration,which is limited by pressure range,chip size,and low *** propose a small-size temperature/high-pressure integrated sensor via the flip-chip *** pressure and temperature units are arranged vertically,and the sensing signals of the two units are integrated into one plane through silicon vias and gold–gold bonding,reducing the lateral size and improving the efficiency of signal *** flip-chip technique ensures a reliable electrical connection.A square diaphragm with rounded corners is designed and optimised with simulation to sense high pressure based on the piezoresistive *** temperature sensing unit with a thin-film platinum resistor measures temperature and provides back-end high-precision compensation,which will improve the precision of the pressure *** integrated chip is fabricated by MEMS technology and packaged to fabricate the extremely small integrated *** integrated sensor is characterised,and the pressure sensor exhibits a sensitivity and sensitivity drift of 7.97mV/MPa and−0.19%FS in the range of 0–20 MPa and−40 to 120℃.The linearity,hysteresis,repeatability,accuracy,basic error,and zero-time drift are 0.16%FS,0.04%FS,0.06%FS,0.18%FS,±0.23%FS and 0.04%FS,*** measurement error of the temperature sensor and temperature coefficient of resistance is less than±1°C and 3142.997 ppm/℃,*** integrated sensor has broad applicability in fault diagnosis and safety monitoring of high-end equipment such as automobile detection,industrial equipment,and oil drilling platforms.

关键词： size corners sizes

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Design and manufacturing of micro/nanorobots

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International Journal of Extreme manufacturing 2024年第6期6卷 169-202页

作者： Junmin Liu Rencheng Zhuang Dekai Zhou Xiaocong Chang Longqiu Li State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbinPeople's Republic of China Key Laboratory of Micro-systems and Micro-structures Manufacturing HarbinPeople's Republic of China Zhengzhou Research Institute of Harbin Institute of Technology ZhengzhouPeople's Republic of China

micro/nanorobots(MNRs)capable of performing tasks at the micro-and nanoscale hold great promise for applications in cutting-edge fields such as biomedical engineering,environmental engineering,and *** cope with the intricate and dynamic environments encountered in practical applications,the development of high performance MNRs is *** have evolved from single-material,single-function,and simple structure to multi-material,multi-function,and complex ***,the design and manufacturing of high performance MNRs with complex multi-material three-dimensional structures at the micro-and nanoscale pose significant challenges that cannot be addressed by conventional serial design strategies and single-process manufacturing *** material-interface-structure-function/performance coupled design methods and the additive/formative/subtractive composite manufacturing methods offer the opportunity to design and manufacture MNRs with multimaterials and complex structures under multi-factor coupling,thus paving the way for the development of high performance *** this paper,we take the three core capabilities of MNRs—mobility,controllability,and load capability—as the focal point,emphasizing the coupled design methods oriented towards their function/performance and the composite manufacturing methods for their functional *** limitations of current investigation are also discussed,and our envisioned future directions for design and manufacture of MNRs are *** hope that this review will provide a framework template for the design and manufacture of high performance MNRs,serving as a roadmap for researchers interested in this area.

关键词： micro/nanorobots functional structure design manufacturing

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High-performance flexible organic field effect transistors with print-based nanowires

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microsystems & Nanoengineering 2023年第3期9卷 83-93页

作者： Liangkun Lu Dazhi Wang Changchang Pu Yanyan Cao Yikang Li Pengfei Xu Xiangji Chen Chang Liu Shiwen Liang Liujia Suo Yan Cui Zhiyuan Zhao Yunlong Guo Junsheng Liang Yunqi Liu Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of TechnologyDalian 116024China State Key Laboratory of High-Performance Precision Manufacturing Dalian University of TechnologyDalianChina Ningbo Institute of Dalian University of Technology Ningbo 315000China Beijing National Laboratory for Molecular Sciences Key Laboratory of Organic SolidsInstitute of ChemistryChinese Academy of SciencesBeijing 100190China

Polymer nanowire(NW)organic field-effect transistors(OFETs)integrated on highly aligned large-area flexible substrates are candidate structures for the development of high-performance flexible *** work presents a universal technique,coaxial focused electrohydrodynamic jet(CFEJ)printing technology,to fabricate highly aligned 90-nm-diameter polymer *** method allows for the preparation of uniformly shaped and precisely positioned nanowires directly on flexible substrates without transfer,thus ensuring their electrical *** indacenodithiophene-co-benzothiadiazole(IDT-BT)and poly(9,9-dioctylfluorene-co-benzothiadiazole)(F8-BT)as example materials,5 cm^(2) arrays were prepared with only minute size variations,which is extremely difficult to do using previously reported *** to 2D-GIXRD analysis,the molecules inside the nanowires mainly adopted face-onπ-stacking crystallite *** is quite different from the mixed arrangement of thin ***-based OFETs exhibited a high average hole mobility of 1.1 cm^(2) V^(−1) s^(−1) and good device uniformity,indicating the applicability of CFEJ printing as a potential batch manufacturing and integration process for high-performance,scalable polymer nanowire-based OFET *** technique can be used to fabricate various polymer arrays,enabling the use of organic polymer semiconductors in large-area,high-performance electronic devices and providing a new path for the fabrication of flexible displays and wearable electronics in the future.

关键词： performance nanowires arrangement

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Facile assembly of flexible,stretchable and attachable symmetric microsupercapacitors with wide working voltage windows and favorable durability

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microsystems & Nanoengineering 2024年第4期10卷 297-304页

作者： Xiangguang Han Xiaoyu Wu Libo Zhao Min Li Chen Jia Zhikang Li Jiaqi Xie Guoxi Luo Ping Yang Rabah Boukherroub Yurdanur Türker Mert UmutÖzkaynak Koray Bahadır Dönmez State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai Yantai 264000China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’anShaanxi 710049China Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Sensing Chongqing Academician WorkstationChongqing 2011 Collaborative Innovation Center of Micro/Nano Sensing and Intelligent Ecological Internet of ThingsChongqing Technology and Business UniversityNan’an DistrictChongqing 400067China Univ.Lille CNRSUniv.Polytechnique Hauts-de-FranceUMR 8520-IEMNF-59000 LilleFrance Sabanci University Nanotechnology Research and Application Center(SUNUM) IstanbulTurkey Department of Materials Science and Engineering Istanbul Technical UniversityIstanbulTurkey

With the increasing development of intelligent robots and wearable electronics,the demand for high-performance flexible energy storage devices is drastically *** this study,flexible symmetric microsupercapacitors(MSCs)that could operate in a wide working voltage window were developed by combining laser-direct-writing graphene(LG)electrodes with a phosphoric acid-nonionic surfactant liquid crystal(PA-NI LC)gel *** increase the flexibility and enhance the conformal ability of the MSC devices to anisotropic surfaces,after the interdigitated LG formed on the polyimide(PI)film surface,the devices were further transferred onto a flexible,stretchable and transparent polydimethylsiloxane(PDMS)substrate;this substrate displayed favorable flexibility and mechanical characteristics in the bending ***,the electrochemical performances of the symmetric MSCs with various electrode widths(300,400,500 and 600μm)were *** findings revealed that symmetric MSC devices could operate in a large voltage range(0–1.5 V);additionally,the device with a 300μm electrode width(MSC-300)exhibited the largest areal capacitance of 2.3 mF cm^(−2)at 0.07 mA cm^(−2)and an areal(volumetric)energy density of 0.72μWh cm−2(0.36 mWh cm^(−3))at 55.07μWcm−2(27.54mWcm−3),along with favorable mechanical and cycling *** charging for~20 s,two MSC-300 devices connected in series could supply energy to a calculator to operate for~130 s,showing its practical application potential as an energy storage ***,the device displayed favorable reversibility,stability and *** 12 months of aging in air at room temperature,its electrochemical performance was not altered,and after charging-discharging measurements for 5000 cycles at 0.07 mA cm^(−2),~93.6%of the areal capacitance was still retained;these results demonstrated its practical long-term application potential as an energy storage device.

关键词： cycling durability electrode

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