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Beyond Performance of Learning control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

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IEEE/CAA Journal of Automatica Sinica 2025年第1期12卷 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology the State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Guangdong University of Technology the Center of Ultraprecision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of UltraPrecision Intelligent Instrumentation Ministry of Industry and Information Technology the Department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

关键词： Extended state observer learning control model uncertainties motion control stochastic noise

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A Tutorial on Quantized Feedback control

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IEEE/CAA Journal of Automatica Sinica 2024年第1期11卷 5-17页

作者： Minyue Fu IEEE the School of System Design and Intelligent Manufacturing Shenzhen Key Laboratory of Control Theory and Intelligent Systems and Centre for Control Science and TechnologySouthern University of Science and TechnologyShenzhen 518055China

In this tutorial paper, we explore the field of quantized feedback control, which has gained significant attention due to the growing prevalence of networked control systems. These systems require the transmission of feedback information, such as measurements and control signals, over digital networks, presenting novel challenges in estimation and control design. Our examination encompasses various topics, including the minimal information needed for effective feedback control, the design of quantizers, strategies for quantized control design and estimation,achieving consensus control with quantized data, and the pursuit of high-precision tracking using quantized measurements.

关键词： Consensus control high-precision control networked control quantized estimation quantized feedback control robust control

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Thickness Measurement of Single-Mode Fiber Coating Layer Based on Forward Brillouin Scattering

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IEEE Sensors Journal 2025年第11期25卷 19332-19340页

作者： Zhang, Yongqi Wang, Tao Liu, Yijia Liu, Li Zhang, Mingjiang Taiyuan University of Technology Key Laboratory of Advanced Transducers and Intelligent Control System Ministry of Education College of Physics and Optoelectronic Engineering Taiyuan030024 China Taiyuan University of Technology Shanxi Key Laboratory of Precision Measurement Physics College of Physics and Optoelectronic Engineering Taiyuan030024 China

The coating layer is essential for protecting and applying optical fibers. Nowadays, the thickness measurement of the coating layer relies on point measurement schemes such as the side-looking light distribution method and mechanical method. However, there are some problems with the above methods, such as the trade-off between resolution and field of view, the cutting of the measurement position and the long measurement time. To overcome these problems, we propose a new method based on forward Brillouin scattering, which measures the coating layer thickness of single-mode fibers. The physical properties of the transverse acoustic field involved in forward Brillouin scattering make it possible to measure the thickness of the fiber coating. The corresponding relationship between the transverse acoustic mode frequency and the diameter of the coating layer can be calculated. The coating layer thickness can be measured with high precision by measuring the frequency spectrum of forward Brillouin scattering corresponding to multiple transverse acoustic modes at a given temperature. In the verification experiment, three types of single-mode fibers coated with polyimide are used as the sensing fiber to measure the thickness of the coating layer at multiple temperatures. The experimental results show that the error in the coating layer thickness obtained is less than 0.05 μm. To the best of our knowledge, this is the first demonstration of non-destructive, high-precision monitoring of fiber coating thickness. © 2001-2012 IEEE.

关键词： Acoustic field measurement

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Broad-Learning-System-Based Model-Free Adaptive Predictive control for Nonlinear MASs Under DoS Attacks

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IEEE/CAA Journal of Automatica Sinica 2025年第2期12卷 381-393页

作者： Hongxing Xiong Guangdeng Chen Hongru Ren Hongyi Li the School of Automation Guangdong-Hong Kong Joint Laboratory for Intelligent Decision and Cooperative Control Guangdong University of Technology Guangdong Provincial Key Laboratory for Intelligent Decision and Cooperative Control Guangdong University of Technology the College of Electronic and Information Engineering Southwest University IEEE

In this paper, the containment control problem in nonlinear multi-agent systems(NMASs) under denial-of-service(DoS) attacks is addressed. Firstly, a prediction model is obtained using the broad learning technique to train historical data generated by the system offline without DoS attacks. Secondly, the dynamic linearization method is used to obtain the equivalent linearization model of NMASs. Then, a novel model-free adaptive predictive control(MFAPC) framework based on historical and online data generated by the system is proposed, which combines the trained prediction model with the model-free adaptive control method. The development of the MFAPC method motivates a much simpler robust predictive control solution that is convenient to use in the case of DoS attacks. Meanwhile, the MFAPC algorithm provides a unified predictive framework for solving consensus tracking and containment control problems. The boundedness of the containment error can be proven by using the contraction mapping principle and the mathematical induction method. Finally, the proposed MFAPC is assessed through comparative experiments.

关键词： Broad learning technique denial-of-service (DoS) model-free adaptive predictive control (MFAPC) nonlinear multi-agent systems (NMASs)

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Whittle’s Index Based Sensor Scheduling for Multiprocess Systems Under DoS Attacks

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Journal of Systems Science & Complexity 2024年第1期37卷 329-350页

作者： CAI Zai DING Kemi Shenzhen Key Laboratory of Control Theory and Intelligent Systems Southern University of Science and TechnologyShenzhen 518055China.

In this paper,the authors consider how to design defensive countermeasures against DoS attacks for remote state estimation of multiprocess *** each system,a sensor will measure its state and transmits the data packets through an unreliable channel which is vulnerable to be jammed by an *** limited communication bandwidth,only a subset of sensors are allowed for data transmission,and how to select the optimal one to maximize the accuracy of remote state estimation is the focus of the proposed *** authors first formulate this problem as a Markov decision process and investigate the existence of optimal ***,the authors demonstrate the piecewise monotonicity structure of optimal *** the difficulty of obtaining an optimal policy of large-scale problems,the authors develop a suboptimal heuristic policy based on the aforementioned policy structure and Whittle’s ***,a closed form of the indices is derived in order to reduce implementation complexity of proposed scheduling policy and numerical examples are provided to illustrate the proposed developed results.

关键词： DoS attacks Kalman filter remote state estimation Whittle’s index.

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BGS Distribution Deformation in BOTDR Induced by Self-Phase Modulation

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Photonic Sensors 2025年第1期15卷 11-25页

作者： Haoting WU Wencun GUO Zixuan ZHONG Guolu YIN Tao LIU Tao ZHU State Key Laboratory of Coal Mine Disaster Dynamics and Control Chongqing UniversityChongqing 400044China The Key Laboratory of Optoelectronic Technology&Systems(Ministry of Education) Chongqing UniversityChongqing 400044China

We report the numerical and experimental studies of the two-dimensional Brillouin gain spectrum(BGS)distribution deformation induced by the self-phase modulation in the Brillouin optical time domain reflectometry(BOTDR)with a 20.6 km sensing *** BGS distribution deformation is investigated by analyzing the evolution of the point spread function along the fiber in the two-dimensional model of the *** the simulation and experimental results,the specific deformation degree of the BGS distribution induced by the self-phase modulation is related to the pump pulse profile,pump pulse peak power,BGS demodulation method,and detected scattered light *** comprehensively analyzing the evolution of the point spread function induced by the self-phase modulation and using the image deconvolution,a typical BOTDR sensor with a 25 ns pump pulse reaches the 20 cm spatial resolution over the 20.6 km sensing fiber.

关键词： Optical time domain reflectometry Brillouin scattering self-phase modulation deconvolution

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Hierarchical controller Synthesis Under Linear Temporal Logic Specifications Using Dynamic Quantization

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IEEE/CAA Journal of Automatica Sinica 2024年第10期11卷 2082-2098页

作者： Wei Ren Zhuo-Rui Pan Weiguo Xia Xi-Ming Sun the Key Laboratory of Intelligent Control and Optimization for Industrial Equipment of Ministry of Education Dalian University of Technology the School of Control Science and Engineering Dalian University of TechnologyDalian 116024China

Linear temporal logic(LTL)is an intuitive and expressive language to specify complex control tasks,and how to design an efficient control strategy for LTL specification is still a *** this paper,we implement the dynamic quantization technique to propose a novel hierarchical control strategy for nonlinear control systems under LTL *** on the regions of interest involved in the LTL formula,an accepting path is derived first to provide a high-level solution for the controller synthesis ***,we develop a dynamic quantization based approach to verify the realization of the accepting *** realization verification results in the necessity of the controller design and a sequence of quantization regions for the controller ***,the techniques of dynamic quantization and abstraction-based control are combined together to establish the local-to-global control *** abstraction construction and controller design are local and dynamic,thereby resulting in the potential reduction of the computational *** each quantization region can be considered locally and individually,the proposed hierarchical mechanism is more efficient and can solve much larger problems than many existing ***,the proposed control strategy is illustrated via two examples from the path planning and tracking problems of mobile robots.

关键词： Abstraction-based control design dynamic quantization formal methods linear temporal logic(LTL)

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Synthesis of thiophene-isoindigo receptor small molecules and its application in photodetectors 3

Synthesis of thiophene-isoindigo receptor small molecules an...

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2024 3rd International Conference on Applied Mechanics and Advanced Materials, ICAMAM 2024

作者： Guan, Sheng Guo, Pengzhi Lanzhou Jiaotong University Key Laboratory of Optoelectronic Technology and Intelligent Control Ministry of Education Lanzhou730070 China

Organic photodetectors (OPDs) have attracted wide attention from researchers on account of their characteristics such as easy to manufacture, low cost, lightweight, and flexible detectors. Many efforts have been made to improve the performance of OPDs. Scientists have made many efforts to improve the performance of organic photodetectors. Among them, narrow-band-gap organic photoelectric functional materials with wide spectral response exhibit application prospects in photoelectric detection. In this paper, a series of narrow-band-gap thienoisoindigo receptor small molecules were synthesized by using thienoisoindigo, and electron deficient terminal octyl cyanoacetate, 3-ethylrhodanine, and 2-(3-ethyl-4-oxothiazolidine-2-ylidene) malonitrile as receptor units, and 3-dodecylthiophene as donor unit, The photodetector with wide spectral response and high detection rate is fabricated using a Bulk Heterojunction (BHJ) structure. © Published under licence by IOP Publishing Ltd.

关键词： Photodetectors

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Impulsive thrust strategy for orbital pursuit-evasion games based on impulse-like constraint

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Chinese Journal of Aeronautics 2025年第1期38卷 520-536页

作者： Hongbo WANG Yao ZHANG Hao LIU Kunpeng ZHANG School of Aerospace Engineering Beijing Institute of TechnologyBeijing 100081China National Key Laboratory of Space Intelligent Control Beijing Institute of Control EngineeringBeijing 100094China

This paper proposes a novel impulsive thrust strategy guided by optimal continuous thrust strategy to address two-player orbital pursuit-evasion game under impulsive thrust *** strategy seeks to enhance the interpretability of impulsive thrust strategy by integrating it within the framework of differential game in traditional continuous ***,this paper introduces an impulse-like constraint,with periodical changes in thrust amplitude,to characterize the impulsive thrust ***,the game with the impulse-like constraint is converted into the two-point boundary value problem,which is solved by the combined shooting and deep learning method proposed in this *** learning and numerical optimization are employed to obtain the guesses for unknown terminal adjoint variables and the game terminal ***,the accurate values are solved by the shooting method to yield the optimal continuous thrust strategy with the impulse-like ***,the shooting method is iteratively employed at each impulse decision moment to derive the impulsive thrust strategy guided by the optimal continuous thrust *** examples demonstrate the convergence of the combined shooting and deep learning method,even if the strongly nonlinear impulse-like constraint is *** effect of the impulsive thrust strategy guided by the optimal continuous thrust strategy is also discussed.

关键词： Orbital pursuit-evasion game Differential game Impulsive thrust Deep learning Shooting method

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High-Order Fully Actuated System Models for Strict-Feedback Systems With Increasing Dimensions

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IEEE/CAA Journal of Automatica Sinica 2024年第12期11卷 2451-2462页

作者： Xiang Xu Guang-Ren Duan Shenzhen Key Laboratory of Control Theory and Intelligent Systems Southern University of Science and TechnologyShenzhen 518055 the School of System Design and Intelligent Manufacturing Southern University of Science and TechnologyShenzhen 518055China

This paper mainly addresses control problems of strict-feedback systems(SFSs)with increasing *** with the commonly-considered SFSs where the subsystems have the same dimension,we aim to handle more complex cases,i.e.,the subsystems in the considered SFSs are assumed to have increasing *** transforming the systems into highorder fully-actuated system(HOFAS)models,the stabilizing controllers can be directly *** first-order SFSs,secondorder and high-order SFSs are also considered.

关键词： Increasing dimensions high-order fully-actuated system nonlinear systems strict-feedback systems

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