Resource information service, as a key component of grid, is the basis of the resource allocation, resource performance evaluation and prediction. The validity of the resource information service directly influences t...
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Resource information service, as a key component of grid, is the basis of the resource allocation, resource performance evaluation and prediction. The validity of the resource information service directly influences the availability of the whole system. One of key points to make information service work well is the precise of the information collected, how to get the valid system information with low system cost has became a difficult problem in current information service. In this paper, we propose hybrid resource information service architecture based on grid monitoring architecture to promote the validity of the resource information service in grid. HRIC is an improved information service architecture that utilizes resource changing self-monitoring mechanism to offset the blind spot of the periodical information collection and combine the advantages of two traditional information collection methods - periodic collection and stochastic reporting, thereby improving the accuracy of resource information service. Compared with the existing resource information systems, HRIC's performance has been validated by several applications
Plane mirror interferometers are usually utilized to nano-position large-range scanning stage in microelectronic mask measurement systems. To avoid Abbe-error the centerline of measurement light beams of X Y Z should ...
Plane mirror interferometers are usually utilized to nano-position large-range scanning stage in microelectronic mask measurement systems. To avoid Abbe-error the centerline of measurement light beams of X Y Z should be intersected at the upper surface of the mask. But the different thickness of masks can also lead to Abbé errors. In this paper a novel plane mirror interferometer is designed, in which the measurement centerline can be accurately adjusted in coincidence with the upper surface of the mask according to their different thickness. The Abbé arm of this interferometer can be decreased to zero and the Abbe-error is avoided completely. The range of different thickness that can be adapted in this interferometer is ±3 mm. In this paper a quadrant photoelectric cell adapter is used to measure the centerline of the measurement light beams and the uncertainty of this method is better than 0.02 mm, which can meet the needs of nano-positioning of microelectronic mask measurement.
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