The defect detection of semiconductor wafer patterns is essential in the process of chip manufacturing. With the improvement of the IC process and design level, the types of wafer surface defects become more complex. ...
The defect detection of semiconductor wafer patterns is essential in the process of chip manufacturing. With the improvement of the IC process and design level, the types of wafer surface defects become more complex. In addition, the sample size of wafer map defect data is usually small, and the class is unbalanced, which poses higher challenges to the existing methods. To effectively identify mixed-type defects, a mixed-type defect detection framework with Vision Transformer (ViT) combined with meta-learning and transfer learning (MetaViT-Trans) is proposed. The results show that the MetaViT-Trans framework has a good defect feature extraction ability for imbalanced small-scale wafer map defect data, and has a good multi-scale information learning ability, which can effectively identify a variety of mixed-type defects.
As integrated circuit (IC) technology continues to advance, lithography hotspot detection is of importance in physical verification flow and can affect the turn-around time and the yield of IC manufacturing. In this p...
As integrated circuit (IC) technology continues to advance, lithography hotspot detection is of importance in physical verification flow and can affect the turn-around time and the yield of IC manufacturing. In this paper, a deep learning-based lithography hotspot detection method is proposed to overcome the problem of unbalanced positive and negative samples in detection. The proposed method uses the High-Resolution Network (HR-Net18) and pre-trained model from ImageNet to improve transferability. ICCAD 2012 benchmark suits is used for model train and test. The experimental results show that the proposed method performs well in terms of the values of AUC and precision.
Evolutionary transfer optimization(ETO) serves as "a new frontier in evolutionary computation research", which will avoid zero reuse of experience and knowledge from solved problems in traditional evolutiona...
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In this paper,the event-triggered finite-time H∞bumpless transfer control problem of switched systems is *** event-triggered bumpless transfer control method with local constraints is proposed to reduce the bump gene...
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In this paper,the event-triggered finite-time H∞bumpless transfer control problem of switched systems is *** event-triggered bumpless transfer control method with local constraints is proposed to reduce the bump generated by switching event-triggered controller.A sufficient condition is given to ensure the solvability of the switched systems with eventtriggered finite-time H bumpless transfer *** positive lower bound of event-triggered integral is obtained,which implies that Zeno behavior is *** using the multiple Lyapunov functions method,a state-dependent switching law,an eventtriggered mechanism and a bumpless transfer controller are ***,a simulation example is given to verify the effectiveness of the proposed method.
In this paper,we discuss the output bumpless transfer control for a class of switched linear systems with statedependent ***,the concept of output bumpless transfer performance is given,which ensures the stability of ...
In this paper,we discuss the output bumpless transfer control for a class of switched linear systems with statedependent ***,the concept of output bumpless transfer performance is given,which ensures the stability of the closed-loop system as well as the output bumpless transfer at the switching *** using multiple Lyapunov function method and imposing the proposed output bumps limitation,a state-dependent switching,and the controller are ***,an example is given to verify the effectiveness of the proposed method.
This paper studies the output regulation bumpless transfer control for event-triggered discrete-time switched systems under denial-of-service(DoS) *** switched systems subject to DoS,both the sensor signal and switchi...
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This paper studies the output regulation bumpless transfer control for event-triggered discrete-time switched systems under denial-of-service(DoS) *** switched systems subject to DoS,both the sensor signal and switching signal may be *** satisfy the bumpless transfer(BT) performance,we cannot use the common input zeroing *** problem that the triggering error being attacked may not follow the triggering condition ***,the controller mode may be asynchronous with the plant *** with the above two problems,we design an event-triggered dynamic error feedback controller and a switching law to guarantee that the output regulation problem for switched systems is solvable,and the BT performance can be ***,corresponding sufficient conditions are proposed in the form of linear matrix inequalities(LMIs).Finally,a numerical example is given to illustrate the validity of our results.
Primordial black holes (PBHs) are a major candidate for dark matter and they have been extensively constrained across most mass ranges. However, PBHs in the mass range of 1017 – 1021 g remain a viable explanation for...
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The paper studies the leader-following consensus of the switched uncertain time-delay MASs under fixed directed communication *** the switching distributed controller and the minimum dwell time,the sufficient conditio...
The paper studies the leader-following consensus of the switched uncertain time-delay MASs under fixed directed communication *** the switching distributed controller and the minimum dwell time,the sufficient conditions in terms of matrix inequalities are obtained by L-K functional dependent on switching law to guarantee the leader-following consensus ***,an example is given to validate the effectiveness of the results.
Precise cosmological measurements are essential for understanding the evolution of the universe and the nature of dark energy. The Five-hundred-meter Aperture Spherical Telescope (FAST), the most sensitive single-dish...
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In recent years, the interest in underwater exploration with Autonomous Underwater Vehicles (AUVs) equipped with side-scan sonars (SSS) has grown considerably. However, state-of-the-art SSS Simultaneous Localization a...
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ISBN:
(数字)9798350377705
ISBN:
(纸本)9798350377712
In recent years, the interest in underwater exploration with Autonomous Underwater Vehicles (AUVs) equipped with side-scan sonars (SSS) has grown considerably. However, state-of-the-art SSS Simultaneous Localization and Mapping (SLAM) systems encounter challenges in data association across large viewpoint changes. Additionally, these systems assume that the seabed is a flat surface, leading to significant mapping error in uneven underwater terrains. To address these challenges, we propose a framework that leverages the side-scan sonar geometry to facilitate data association and improve mapping accuracy. The framework begins with a preprocessing module that extracts feature points and provides initial estimates of the elevation angles of the landmarks. Then, a non-consecutive data association module applies epipolar line search to establish correspondences between the current and historical frames. Finally, the mapping module uses side-scan sonar bundle adjustment to recover the positions of the landmarks. The proposed method is evaluated using an underwater terraced fields dataset. Our method achieves over 90% matching rate and reduces the average mapping error from 3.799 to 0.134.
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