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Refractive Index Sensing Mechanism of Waveguide Coupled Gratings Nano-Heterostructure Containing Porous Silicon Layers

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Zhongguo Jiguang/Chinese Journal of Lasers 2017年第10期44卷 1010003_1页

作者： Chen, Ying Zhao, Zhiyong Tian, Yaning Liu, Xiaofei Zhu, Qiguang Zhai, Yingjian Li, Shaohua Hebei Province Key Laboratory of Test/Measurement Technology and Instrument School of Electrical Engineering Yanshan University QinhuangdaoHebei066004 China Key Laboratory for Special Fiber and Fiber Sensor of Hebei Province School of Information Science and Engineering Yanshan University QinhuangdaoHebei066004 China Hebei Sailhero Environmental Protection High-tech Co. Ltd. ShijiazhuangHebei050035 China

Based on the resonance principle of waveguide coupled gratings and optical sensing properties of porous silicon, a refractive index sensing model of waveguide coupled gratings nano-heterostructure is proposed. According to the theory of Goos-Hänchen displacement and phase matching conditions of waveguide coupled gratings resonance, the relationship model between the resonant wavelength and the refractive index of the detected sample is established, and the refractive index sensing properties of the refractive index sensing structure are analyzed. Taking the porous silicon as bearing units of detected samples according to its effective bearing mechanism, we analyze the sensitivity and the quality factor Q of the refractive index sensing structure by detecting solutions of ethylene glycol with different concentrations. The results show that the sensitivity of the refractive index sensing structure to the solution of ethylene glycol is 2.2 nm/1%, and the Q value is 226, which proves the validity of this sensing structure. The sensing structure can detect the samples with low concentration. © 2017, Chinese Lasers Press. All right reserved.

关键词： Refractive index

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Fiber optic graphene sensors for dynamic pressure measurements

Fiber optic graphene sensors for dynamic pressure measuremen...

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Optical sensors, sensors 2015

作者： Liu, Haijun Olson, Douglas A. Douglass, Kevin O. Yu, Miao Sensor Science Division Physical Measurement Laboratory National Institute of Standards and Technology GaithersburgMD20899 United States Department of Mechanical Engineering University of Maryland College ParkMD20742 United States

ISBN: (纸本)9781557520005

关键词： Graphene

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Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering

Research of periodic amorphous carbon composite films for ME...

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IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

作者： Anjie Ming Weibing Liu Lingling Li Xilong Sun Xuan Zheng Weibing Wang Qiulin Tan Jijun Xiong Dapeng Chen Chinese Academy of Sciences Institute of Microelectronics Beijing People's Republic of China National Key Laboratory for Electronic Measurement Technology North University of China Taiyuan People's Republic of China ZhongAo Huicheng Technology Co. Ltd Beijing People's Republic of China Smart Sensor Engineering Center Jiangsu R&D Center for Internet of Things Wuxi People's Republic of China

ISBN: (纸本)9781509019489

In this work, we present a newly titanium-contained periodic amorphous carbon(a-C) composite films by magnetron sputtering process on silicon (100) substrate which has lower intrinsic compressive stress that can be used in electrical modulation pulsed MEMS infrared(IR) source for NDIR gas sensors. The fabrication process, results, performance and results analysis are then carried out.

关键词： Films Micromechanical devices Carbon dioxide Pollution measurement Silicon Gas detectors Magnetic field measurement

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Formation and sensing mechanism of photonic crystal surface wave based on Bloch theory

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Zhongguo Jiguang/Chinese Journal of Lasers 2016年第1期43卷 0116002-1-0116002-1-0116002-6页

作者： Chen, Ying Fan, Huiqing Lu, Bo Cao, Huiying Zhu, Qiguang Chen, Weidong Hebei Province Key Laboratory of Test/Measurement Technology and Instrument School of Electrical Engineering Yanshan University QinhuangdaoHebei066004 China Hebei Province Key Laboratory of Special Fiber and Optical Fiber Sensor School of Information Science and Engineering Yanshan University QinhuangdaoHebei066004 China

Combining the Bloch theory and Maxwell equations, the Bloch surface wave forming on the surface defect of one-dimensional photonic crystal is analyzed theoretically. The local characteristics of Bloch surface wave and the influences of incident angles and incident wavelengths on the Bloch surface are discussed. On this basis, the sensing performance of the surface defect photonic crystal structure is studied. When the incident TE polarization component travels through the photonic crystal at a certain angle, the surface wave resonance occurs in the defect layer forming by the detected solution, and the electromagnetic field is located and enhanced. The Bloch surface wave has a high sensitivity with the change of the refractive index of the solutions. The simulation results show that the Q value can up to about 2620.29, and the sensitivity S is about 62°RIU-1. Therefore, the Bloch surface wave has good sensing performance in the one-dimensional photonic crystal structure. It can provide certain theoretical references for the design and application of refractive index sensors. © 2016, Chinese Laser Press. All right reserved.

关键词： Surface waves

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CMOS MEMS infrared source based on black silicon

CMOS MEMS infrared source based on black silicon

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IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

作者： Weibing Liu Anjie Ming Yaohui Ren Qiulin Tan Wen Ou Xilong Sun Weibing Wang Dapeng Chen Jijun Xiong National Key Laboratory for Electronic Measurement Technology North University of China Taiyuan People's Republic of China Institute of Microelectronics Chinese Academy of Sciences Beijing CN Smart Sensing R&D Center Chinese Academy of Sciences Beijing People's Republic of China Smart Sensor Engineering Center Jiangsu R&D Center for Internet of Things Wuxi People's Republic of China

ISBN: (纸本)9781509019489

In this work, a MEMS infrared source applied to compact Non-Dispersive Infrared (NDIR) gas sensor is reported. Compared to other related things, the source coats integrated nanostructure black silicon compatible with CMOS technique on the poly-silicon. Hence the emissivity is as high as 98% at 3~5μm wave range; relatively the radiation efficiency is increased by 40% through calculation. Suspension structure and DRIE release process of the back side are used in the design to reduce the heat conduction losses, and the source is only sized 3×3mm 2 suitable for mass production. After being packed, the source can rapidly heat in 20 ms, besides the modulation depth can reach 30% below 50Hz, which all meet the requirements of the NDIR gas sensor.

关键词： Silicon Heating Temperature distribution Temperature measurement Micromechanical devices Frequency modulation

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Fabrication of patternable nanopillars for microfluidic SERS devices based on gap-induced uneven etching

Fabrication of patternable nanopillars for microfluidic SERS...

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IEEE International Conference on Micro Electro Mechanical Systems

作者： Y. Wang L. C. Tang H. Y. Mao C. Lei W. Ou J. J. Xiong Y. Ou A. J. Ming D. Li D. P. Chen Smart Sensor Engineering Center Jiangsu R&D Center for Internet of Things Wuxi P. R. China Key Laboratory of Microelectronics Devices & Integrated Technology Chinese Academy of Sciences Beijing P. R. China National Key Laboratory for Electronic Measurement Technology North University of China Taiyuan P. R. China Department of Electrical Engineering Stanford University California United States

In this work, a lithography-free approach for fabricating patternable nanopillars is reported. The key technique of the approach is to introduce a gap over the substrate by covering it with a cap, which contains through holes and the material on its lower surface has similar etching rate with the substrate. By this means, uneven etching of the substrate is induced under the through holes, consequently, nanopillars are fabricated into patterns corresponding to the holes. By sputtering a thin layer of Ag on the nanopillar patterns, obvious Raman enhancement can be observed. Since the large areas around the patterns are protected from anisotropic etching and metal sputtering, they are flat enough to be bonded with PDMS caps thus to form microfluidic Surface-enhanced Raman Scattering devices, and the whole fabrication process for the devices is simplified.

关键词： Substrates Etching Microfluidics Fabrication Silicon Nanoscale devices

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Study on double defect mode sensing mechanism of air gate photonic crystal based on tight-binding method

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Zhongguo Jiguang/Chinese Journal of Lasers 2015年第5期42卷 514001-01-0514001-01-0514001-06页

作者： Chen, Ying Shi, Jia Lu, Bo Liu, Teng Dong, Jing Zhu, Qiguang Chen, Weidong Measurement Technology and Instrument Key Laboratory of Hebei Province College of Electrical Engineering Yanshan University QinhuangdaoHebei066004 China The Key Laboratory for Special Fiber and Fiber Sensor of Hebei Province College of Information Science and Engineering Yanshan University QinhuangdaoHebei066004 China

In order to reduce the interference of ambient temperature changes to the single defect photonic crystal sensing, a double defect mode sensing model of air gate photonic crystal is proposed. The mechanism of the double defect mode is analyzed by tight-binding method, and the optical transmission property of the photonic crystal structure is analyzed by the transmission matrix method. For the cross-sensitive issue of temperature and refractive index, a method to eliminate the temperature interference is proposed, and the relation model between the two defect mode wavelengths and the structure parameters of the photonic crystal are established. Using the air gate photonic crystal structure, the dynamic monitoring of the detected gas sample parameters can be achieved from the shift of the resonant transmission peak. The numerical simulation shows that the relation between double defect sensor has the features of double defect mode wavelengths and the gas refractive index is linear. The sensor has the advantages of simple structure and high precision. ©, 2015, Science Press. All right reserved.

关键词： Refractive index

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Study on property of one-dimensional multiple mirror photonic crystal based on the tight-binding theory

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Guangzi Xuebao/Acta Photonica Sinica 2015年第11期44卷 1123001-1-1123001-5页

作者： Chen, Ying Shi, Jia Wang, Ning Chen, Wei-Dong Hebei Province Key Laboratory of Test/Measurement Technology and Instrument School of Electrical Engineering Yanshan University QinhuangdaoHebei066004 China Key Laboratory of Special Fiber and Fiber Sensor of Hebei Province School of Information Science and Engineering Yanshan University QinhuangdaoHebei066004 China

Based on the tight-binding theory, the generation and split mechanism of one-dimensional multiple mirror photonic crystal defect modes were analyzed theoretically, and the relationship between defect mode frequencies and the relative location of defect layers was established. The transfer matrix method is used to analyze the optical transmission properties of the dual mirror photonic crystal, at the same time, the influences on defect mode properties by periodical layer number, incident angle, dielectric layer thickness and relative refractive index difference of photonic crystal are discussed. The simulation results show that adjusting parameters and defect layer relative locations of photonic crystal can control defect mode properties effectively, which can provide certain theoretical references for the design and application of photonic crystal multi-channel filters. © 2015, Chinese Optical Society. All right reserved.

关键词： Photonic band gap

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Study on refractive index sensing property of air gate photonic crystal f-p cavity based on evanescent wave resonance

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Guangxue Xuebao/Acta Optica Sinica 2015年第11期35卷 1123001-1-1123001-1-1123001-6页

作者： Chen, Ying Shi, Jia Cao, Huiying Han, Yangyang Zhu, Qiguang Bi, Weihong Key Laboratory of Test/Measurement Technology and Instrument of Hebei Province School of Electrical Engineering Yanshan University QinhuangdaoHebei066004 China Key Laboratory of Special Fiber and Fiber Sensor of Hebei Province School of Information Science and Engineering Yanshan University QinhuangdaoHebei066004 China

Based on the theory of evanescent wave and optical resonance, the existence form of evanescent wave in photonic crystal and the refractive index sensing mechanism of air gate photonic crystal F-P cavity are studied, and the relationship model between the resonant wavelength and the detected gas refractive index is established. When the incident light travels through the photonic crystal at a certain angle, which is larger than the critical angle of total reflection, as a result of the action of evanescent wave, an F-P cavity is formed in the center of dielectric layer and produces resonance. The electromagnetic field is local enhanced, and contacts with detected gas sufficiently, which causes the refractive index sensing structure has a high sensitivity with the detected gas refractive index. The transfer matrix theory is used to numerical simulation, the results show that the Q value can attain 3447.0 and the sensitivity can attain 1260.0 nm/RIU. So the proposed photonic crystal F-P cavity refractive index sensing structure has good sensing properties, and provides certain theoretical references for the design and application of high precision gas refractive index sensors. © 2015, Chinese Laser Press. All right reserved.

关键词： Photonic crystals

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Finite element analysis of combined magnetoelectric- electrodynamic vibration energy converter

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Journal of Physics: Conference Series 2015年第1期660卷

作者： Sonia Bradai Slim Naifar Olfa Kanoun Chair for Measurement and Sensor Technology Technische Universität Chemnitz Reichenhainer Straβe 70 09126 Chemnitz Germany Laboratory of Electromechanical Systems National Engineering School of Sfax University of Sfax Route de Soukra km 4 3038 Sfax Tunisia

In this paper we report on the design and optimization of a novel combined vibration energy harvester based on the use of electrodynamic and magnetoelectric (ME) principles to increase the energy outcome of an electrodynamic harvester without significantly increasing its size. Thereby the most important aspect is the dependence of magnetic flux variation on design parameters, as is it is the decisive effect for energy conversion. Magnetic circuit form and magnetization are optimized for maximizing energy outcome. We conclude that better magnetic flux variation is reached for a magnetic circuit formed with two magnets stacked one within the other using the same magnetization. Results illustrate that the use of combined converter enables to enhance the performance of simple electrodynamic or ME converter.

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