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作者： Lu, Yang-Ming Wong, Jing-Syun Hsu, Lien-Chung Master Program of Electro-Optical Engineering Department of Electrical Engineering National University of Tainan Tainan Taiwan Graduate Institute of Material Science and Engineering National Cheng Kung University Tainan Taiwan

Poly(3-hexylthiophene)/[6,6]-phenyl C61-butyric acid methyl ester bulk hetero-junction photovoltaic cells doped with indigo dye as a p-type solar collector were studied. Doping indigo increases the absorption of the visible light spectrum, as determined using ultraviolet-visible spectrophotometry analysis. The photocurrent was measured in air under a solar simulator with AM 1.5G illumination (100 mW/cm2). The best photovoltaic efficiency obtained was 2.55% after doping indigo into the cell. © 2012 Elsevier B.V.

关键词： Organic solar cells

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Rapid selection of hard-to-access targets by thumb on mobile touch-screens 13

Rapid selection of hard-to-access targets by thumb on mobile...

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15th International Conference on Human-Computer Interaction with Mobile Devices and Services, MobileHCI 2013

作者： Yu, Neng-Hao Huang, Da-Yuan Hsu, Jia-Jyun Hung, Yi-Ping Department of Computer Science Master Program of Digital Contents Technologies National Chengchi University Taipei Taiwan Department of Computer Science and Information Engineering National Taiwan University Taipei Taiwan

ISBN: (纸本)9781450322737

Current touch-based UIs commonly employ regions near the corners and/or edges of the display to accommodate essential functions. As the screen size of mobile phones is ever increasing, such regions become relatively distant from the thumb and hard to reach for single-handed use. In this paper, we present two techniques: CornerSpace and BezelSpace, designed to accommodate quick access to screen targets outside the thumb's normal interactive range. Our techniques automatically determine the thumb's physical comfort zone and only require minimal thumb movement to reach distant targets on the edge of the screen. A controlled experiment shows that BezelSpace is significantly faster and more accurate. Moreover, both techniques are application-independent, and instantly accommodate either hand, left or right. © 2013 ACM.

关键词： interaction techniques mobile devices one-handed interaction thumb-based interaction touch-screens

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Utilization of root cause failure analysis in the investigation of marine deck fitting failures

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NAVAL ENGINEERS JOURNAL 2001年第1期113卷 93-99页

作者： Huff, DS Lynaugh, KM David S. Huff graduated from the University of Maryland with a B.S.M.E. in 1972 and a M.S. in technology management in 1995. Prior to government service he worked for Newport News Shipbuilding as a fluid systems engineer and for Gibbs & Cox as a project engineer. Mr. Huff entered government service in 1977 with the Military Sealift Command Engineering Operations Division then as a construction representative and finally as deputy director ship design and construction. He then moved to NAVSEA in 1989 as assistant project manager on the conversion of AO-177 oilers to AO (JUMBO). From 1993 through 2000 he was assistant project manager for the construction of T-AKR-300 Class of Strategic Sealift RO/RO ships at Avondale. Currently Mr. Huff is manager of the Advanced Projects Group within the PEO EXW Auxiliary Boats and Crafts Program Office. Kevin M. Lynaugh obtained his naval architecture and marine engineering degree from University of California Berkeley in 1984. He obtained his Master's degree in science and engineering from The Johns Hopkins University in 1997 with a dual major in program management and operations management. He has been with NAVSEA Naval Surface Warfare Center Carderock Division for over 16 years. He spent four years with the Hydromechanics Division computerizing the Model Design Group two years with the Large Cavitation Channel Project as a project engineer six years with the Ship Building Technologies Department as a task area manager managing research programs the past 3 ½ years with the Strategic Sealift Program as the ship design manager for Avondale's new con-struction and as the deputy assistant program manager for post delivery and NASSCO's new construction. Currently Mr. Lynaugh is the on-site ship design manager for LHD-8 at Ingalls Shipyard in Pascagoula Mississippi.

Cracking was discovered in the openings of cargo deck tie down fittings on ships under construction. There was a distinct possibility that these cracks could propagate through the fittings and into the strength deck plating, affecting the ships hull integrity. With more than 14,000 fittings installed on each ship, the appearance of approximately 400 cracks at the mid-ship area of the main and lower decks raised production and operational concerns. This paper will discus the successful application of a Root Cause Failure Analysis (RCFA) methodology employed by a Corrective Action Team (CAT) establish to solve the problem. Through their efforts and the systematic application of RCFA, various failure hypotheses were validated or discounted and consensus was achieved on the appropriate corrective action.

关键词： Marine engineering

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Uniform National Discharge Standards - Overview and implications for future naval engineering

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NAVAL ENGINEERS JOURNAL 1999年第3期111卷 219-235页

作者： Kopack, D Smith, G Kim, D Erne, DL David F. Kopack:is a Program Manager in the Naval Sea Systems Command Office of Environmenta1 Protection Occupational Safety and Health SEA 00T. Mr. Kopack received his bachelor and master of science degrees in the physical sciences and management from the University of Maryland. Mr. Kopack has 20 years of experience in ship design and engineering industrial facility operations and program management. Gordon D. Smith:is a Chemical Engineer with the Carderock Division Naval Surface Warfare Center in Bethesda Maryland and is working in the Naval Sea Systems Command Environmental and Auxiliary Systems Group. SEA 03L. Mr. Smith received his bachelor of science degree in chemical engineering from The Ohio State University. He has over 13 years of ronmental issues. In addition to supporting the development of Uniform National Discharge Standards he has been involved in research design testing and development of pollution abatement technologies suitable for use aboard Navy Ships. Don K. Kim:is a Senior Mechanical Engineer with the naval architecture and marine engineering firm of M. Rosenblatt & Son Inc. in Arlington Virginia. Mr. Kim received his bachelor of science and master of engineering degrees in mechanical engineering from the University of Virginia. He is a registered Professional Engineer in the Commonwealth of Virgina. Mr. Kim has ten years of experience in the design installation maintenance and repair of shipboard mechanical systems equipment and components with specific expertise in compressor pump and fan design and operation. He is a member of the American Society of Naval Engineers and the American Society of Mechanical Engineer. David L. Erne:is an Associate with Booz Allen and Hamilton Inc. in Arlington Virginia. Mr. Erne received his bachelor of science degree in chemical engineering from the University of Idaho. He has over twelve years of experience in environmental program management and consulting. In addition to his support for the Uniform National Discharge Standards prog

In the Fiscal Year 1996 National Defense Authorization Act, Congress amended the Clean Water Act to provide the Department of Defense and the Environmental Protection Agency authority to jointly establish standards for incidental discharges from Armed Forces' vessels. The uniform national standards would apply to discharges from vessels of the Navy, Military Sealift Command, Army, Marine Corps, Air Force, and Coast Guard to the navigable waters and contiguous zone of the U.S. and its territories. Uniform National Discharge Standards (UNDS) will require control of discharges, by either a technology or management practice. UNDS will facilitate the Armed Forces' ability to better design and build future vessels to be environmentally sound and to maintain the operational flexibility of Armed Forces' vessels both domestically and internationally. The development of standards for Armed Forces' vessel discharges may have greater impact on naval engineering requirements for future vessels than any other single environmental issue, These standards are expected to stimulate the development of innovative vessel pollution control technologies, which on be used for both Armed Forces' vessels and commercial shipping vessels. This paper provides an overview of UNDS development, summarizes the results of UNDS Phase I, provides a summary overview of the preliminary approach for accomplishing UNDS Phase Il, and discusses implications for future naval engineering efforts.

关键词： Replenishment at sea homeland defense shipbuilding Military Personnel Uniform home range Treated water Naval engineering Uniforms Implication Clean Water Act Coastguards

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engineering the environmentally sound warship for the twenty-first century

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NAVAL ENGINEERS JOURNAL 1999年第3期111卷 189-217页

作者： Markle, SP Gill, SE McGraw, PS Udr. Stephen P. Markle USN is a career Engineering Duty officer assigned to Naval Sea Systems Command Arlington Virginia where he is Deputy Directs Environmental Programs Division (SEA 03L1 B). He is responsible fm program management activities associated with all ahat environmental protection equipment design and selection of environmental protection equipment and systems fm future surface ship designs (DD 21 CVN 7Z CW LPD 17) and serves on several teams designed to promote Nay wide awarmss of environmental protection requirements and Nay programs to meet these challenges. He is a 1993 graduate of the Naval Construction and Engineering Program at the Massachusetts Institute of Technology where he received a naval engineers degree and master of science in mechanical engineering. His interest in environmental issues predates his undergraduate studies at Syracuse Universityl State University of New Ymk College of Environmental Science and Fmestry where he received a bachelm of science degree in fmest engineering from the School of Environmental and Resource Engineering. LCdx Markle has qualified as a Surface Warfare Officer and in submarines through the Engineering Duty Dolphin Program he is a member of the Acquisition Professional Community and a graduate of the Defense Systems Management College Advanced Program Managers Course. He is a professional engineer registered in the State of New York and is a member ofthe American Society of Naval Engineers National Society of Professional Engineers American Society for Testing and Materials Society of Naval Architects and Marine Engineers and Society of Automotive Engineers. Peter 5. McGraw is current the Acting Branch Head ofthe Solid Waste Management Branch (Code 634) of the Environmental Quality Dwrtment of the Naval Surfice Warfare Centel: Carderock Division. As such he is responsible for among other things: the Shipboard Advanced Incinerator RDT&E Program the Submarine Plastic Waste RDT&E Program Solid Waste Processing Equipment Design Acquisitio

The past twenty-five years has been marked by the introduction ed marine environmental regulations that have had a profound effect on how ships are designed, built and operated. Ships being designed and built today must accommodate not only current regulations but anticipate those enacted over their thirty to fifty year life cycles. U.S. Chief of Naval Operations, Office of Environmental, Safety and Health (CNO N45) has articulated a vision for the Environmentally Sound Warship of the Twenty-first Century. This vision incorporates the "Sense of Congress" for a naval ship designed to operate in full compliance with environmental regulations worldwide. The task of the Navy engineering team is to translate this vision into reality;a ship capable of prevailing in time of war and able to conduct operations in all areas of the globe, unencumbered by special procedures for environmental compliance. The keys to this warship design are the early integration of environmentally sound principles, materials, and processes into the ship acquisition process;minimization of both hazardous materials and generation of post shipboard consumer waste during operation;adaptation of integrated systems to reduce the volume of wastes and enhance processing efficiency;reduced manpower requirements;and crew indoctrination in environmental protection.

关键词： Ships Environmental regulations engineering ARTICULATED Navy environmental security

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Applying fuzzy functions and sequential coordination to optimization of machinery arrangement and pipe routing

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NAVAL ENGINEERS JOURNAL 1998年第6期110卷 43-54页

作者： Wu, BC Young, GS Schmidt, W Choppella, K Dr. Bi-Chu Wu:received a PhD in Mechanical Engineering from the University of Maryland College Park in 1991. She has worked on projects involving naval architecture design optimization solid mechanics and database development. Presently a senwr engineer with Angle Incorporated Dr Wu's research interests are in design optimization and fuzzy logic applications. Dr. Gin-Shu Young: a senior engineer with Angle Incorporated holds a PhD in Mechanical Engineering from the University of Maryland College Park. As a guest researcher with National Institute of Standards and Technologies from 1990 to 1993 he worked on vision-based navigation for autonomous vehicles. His experience also includes applications of optimization fuzzy logic neural network and genetic algorithm methods to engineering system design Mr. William Schmidt:co-founded Angle Incorporated in 1990 and has served as Vice PresidentlChiefScientist during this tame. He holds a B.Sc. in Applied Science from the Naval Acadt?my and an M.Sc. in Physics from the Naval Post Graduate School. He has cner 20 years experience in technical leadership material and personnel management. He has led the application of computer aided design (CAD) and Product Model Information Exchange to the shipbuilding industry. His experience also includes leading the amlication of model based operational analysis to support the Live Fire Test Program for DDG 51 Class Destroyers. Mr. Krishna M. Choppella:is a Sofware Engineer at Eidea Laboratories Incotporated where he works on componentbased distributed enterpvise frameworks. He has been involved in creating data analysis tools for the US Nay by integrating CAD modeis databases and graphical front ends. His work in the Masters degree program in Mechanical Engineering at the University of Texas at Austin was in di0ddase.r spectroscopy of combustion products in porous-matri burners. He received his Bachelors degree in Electrical Engineering in India. He was a Research Associate at the Centre for Laser Technology and Project Engi

Ship design is often multidisciplinary involving several design elements with various types of objectives and constraints (O/C) some easily described as mathematical formulas, others better modeled as descriptive assertions. This paper describes a method based on fuzzy functions and an integrated performance index to model O/C using descriptive assertions to be used with mathematical formulas in optimization. Another issue addressed in this paper concerns the coordination of design elements when sequentially coupled, that is, when one leads the other and the performance of the follower depends greatly on the design of the leader. Based on neuro-fuzzy techniques, the method described here coordinates and optimizes sequentially coupled elements. The two methods are applied to machinery arrangement (MA) and pipe routing (PR). Preliminary models for optimization of MA and PR are described considering convenience, producibility: engine room size, interference and location as factors in the O/C set. Some test results from MA/PR applications are presented and discussed. The methods are generic and can be extended to other elements in ship design. They are mutually independent and may be used separately Two advantages of their use are an improvement in overall performance and a reduction in the need for redesign of elements.

关键词： Optimization

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Architecting a missile system for navy theater ballistic missile defense

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NAVAL ENGINEERS JOURNAL 1997年第3期109卷 373-380页

作者： Patel, A Kjos, K Sasso, F Robinson, S Anant Patel:is senior project engineer for the Standard Missile LEAP Progrma (desgnated SM-X) in the Standard Missile/Vertical Launch System Program Office (PMS 422) of the Navy's Program Executive office for Theater Air Defense (PEO TAD). He is responsbile for the integration and test of the SM-X missile including the third stage rocket motor (TSRM) and the kinetic warhead (KW) assemblies. He received his bachelor of science in electrical engineering from the University of Pittsburgh in 1985 Prior to joining PMS 422 he was the project engineer for the shipboard targeting system used during the Terrier LEAP technology demonstration program. he was also tht project manager for the installation and integration of the new threat upgrade (NTU) and cooperative engagement capabilities (CEC) aboard USS Kidd (DDG 993) the first ship to receive CEC during its development test phase. Mr. Patel's other assignments as NTU development lead engineer uncluded providing development and technical direction for modifications to the NTU engagement system for Standard Missile II and III/IIIA compability. kathrin Kjos:is the program development team leader for Hughes Missile Systems Company. She worked on the initial flight demonstraction phase of the program integrating the kill vehicle and advanced solid axial stage into the SM2 Block III ER missile and served as co-chair of the System Safety Working Group. She has thirteen years of experience in system engineering. Previous experience includes missile systems engineering for the Advanced Air-to-Air Missile (AAAM) as well as for laser and radar surveillance systems. She has a bachelor of science degree in chemical engineering from the Illinois Institute of Technology a master of science degree in system engineering from the University of Southern California and is currently a doctoral candidate in systems architecting at the University of Southern California. Felix Sasso is a member of technical staff 11 at Hughes Missile System Company. He has three years of experience in op

While most of the theater ballistic missiles (TBM) in threat countries' inventories are of the shorter range SCUD varieties, mid- to long-range versions are currently in development in a number of third world countries. Threat potential exists in the following three battle spaces: endo-atmosphere (0-30 km), high endo-atmosphere (30-70 km) and exo-atmosphere (greater than 70 km). The inherent short range and low speed of endo-atmospheric threats match well with capabilities of SM-2 Block IVA, which equips the Navy with an area defense capability The exo-atmospheric TBMs are longer range and can threaten more targets which may be widely dispersed. Their higher velocities reduce response times dramatically Therefore, exo-atmospheric TBMs create the need for Standard Missile-3 (SM-3), which provides the Navy with theater wide defense capability. Defining its area and theater wide systems as clearly endo-atmospheric and exo-atmospheric systems allows the Navy to use derivatives of the Standard Missile Block IV to take full advantage of the conditions associated with each of these operating zones. Use of an existing missile and ship system baseline also allows use of the existing interface structure to minimize cost. To counter the endo-atmospheric TBMs, the SM-2 BLK TVA upgrades include an advanced imaging infrared (IIR) seeker, an improved fast-reaction auto pilot and a forward looking RE all in the same volume as the existing missile. The highly responsive SM-2 Block IVA missile, complemented with Aegis weapons systems modifications, provides capability against enemy aircraft and cruise missiles, as well as TBMs. Standard Missile-3 (SM-3) replaces the SM-2 Block TV warhead, radar and guidance section with a boosted third stage and an advanced kinetic warhead (KW). Operation in the exo-atmospheric region permits a KW design with autonomous guidance control and divert thrusters for high maneuverability and has the capability of achieving very high interceptor velocities.

关键词： Missiles

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Developing a prototype concurrent design tool for composite topside structures

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NAVAL ENGINEERS JOURNAL 1997年第3期109卷 279-290页

作者： Dirlik, S Hambric, S Azarm, S Marquardt, M Hellman, A Bartlett, S Castelli, V Steve Dirlik:began his career at the Naval Surface Warfare Center Carderock Division in 1981 as an aerospace engineer co-op student. He completed his bachelor of science degree in aeropace and ocean engineering from Virginia Polytechnic Institute and State University in 1985 and his master of science degree in aerospace engineering from the University of Maryland in 1990. Mr. Dirlik recently completed a master of science program in applied physics at The Johns Hopins University and currently works in the Radar Cross Section and Target Physics Branch of the Signatures Directorate at the Naval Surface Warfare Center Corderoke Division. He has worked on Navy low observable programs since 1990. Stephen Hambric:is a research associate at the Applied Research Laboratory at The Pennsylvania State University. He received his B. S. and M.S. degree in mechanical engineering from Virginia Polytechnic Institute and State University and his D. Sc. in mechnical engineering from the George Washington University. He has worked on several computer aided multidiscikplinary design and optimization projects over the years including an automated propeller design system and a structural acoustic optimization capability. Dr. Shpour Azarm:is currently working as an associate professor with the Design and Manufacturing Group of the Department of Mechanical Engineering at the University of maryland at College Park. Dr Azarm's expertise is in the areas of optimization-based designed and concurrent design and optimization of multidisciplinary systems. He was a consultant at Black & Decker Corporation (summer 1996) and worked as a Navy senior summer faculty fellow (summer 1995) and a NASA summer faculty fellow (summer 1994). He was a visiting scientist at NASA Langley Research Center for Multidisciplinary Analysis and Applied Structural Optimzatiom at the University of Siegen in Germany (spring 1992) and the Design Institute of the Technical University of Denmark (summer 1990). Dr Azarm was an associate technical editor of the ASME Jour

A prototype concurrent engineering tool has been developed for the preliminary design of composite topside structures for modern navy warships. This tool, named GELS for the Concurrent engineering of Layered Structures, provides designers with an immediate assessment of the impacts of their decisions on several disciplines which are important to the performance of a modern naval topside structure, including electromagnetic interference effects (EMI), radar cross section (RCS), structural integrity, cost, and weight. Preliminary analysis modules in each of these disciplines are integrated to operate from a common set of design variables and a common materials database. Performance in each discipline and an overall fitness function for the concept are then evaluated. A graphical user interface (GUI) is used to define requirements and to display the results from the technical analysis modules. Optimization techniques, including feasible sequential quadratic programming (FSQP) and exhaustive search are used to modify the design variables to satisfy all requirements simultaneously. The development of this tool, the technical modules, and their integration are discussed noting the decisions and compromises required to develop and integrate the modules into a prototype conceptual design tool.

关键词： Warships

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Operational systems, logistics engineering and technology insertion

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NAVAL ENGINEERS JOURNAL 1997年第3期109卷 205-220页

作者： Grubb, MJ Skolnick, A Michael J. Grubb:has perfomzed naval engineering at the Crane Division Naval Surface Warfare Center (NSWC) for more than twenty-five years. He currently the program manager for the Sustainable Hardware and Affordable Readiness Practice Program (SHARP). is a Navy-wide logistics research and development prgram aimed at the successful transiton of proved technologies inot the fleet. SHARP focuses on reducing acquisition performance capability reliability maintainability and readiness of these systems. Mr. Grubb has served as a department director for the past eleven years. His most recent assignment was as director of the Tactical Computer Resources and Test Equipment Department. This organization provided acquisition and in-service engineering support of the Navy's tectical embedded computers priphirals displays and mass memory storage devices. The organization also provided a complete range of product engineering and metrology engineerig services for SSP NevSeaSysCom and the Trident Program. Prior to this appointment Mr. Grubb was deptuy director psysical security programs department and site responsible for program management and system integration of ashore integrated security systems. Mr. Grubb holds a B.S. degree in industrial engineering from Iowa State Universtiy an M.S. degree in industrial engineering from Purdue University and has copleted the course work (Dec.'96 for a master's degree in public and environment affairs at Indiana University-Purdue Univeristy Indianapolis. Dr. Alfred Skolnick operates System Science Consultants (SSC) specilizing in strategic planning technical program definiton technology assessment and engineering analyses on selected matters of national interest. He has taught physics mathematics and management sciences at University of Virginia and Marymount University and is currently adjunct professor of mathematics at Northern Virginia Community College. Form 1985 to 1989 he was president of the American Society of Noval Engineers. Dr. Skolnick served at Applied Physic

In an era of fiscal austerity, downsizing and unforgiving pressure upon human and economic capital, it is an Augean task to identify resources for fresh and creative work. The realities of the day and the practical demands of more immediate fleet needs can often dictate higher priorities. Yet, the Navy must avoid eating its seed corn. Exercising both technical insight and management foresight, the fleet, the R&D community, the Office of the Chief of Naval Operations (OpNav) and the product engineering expertise of the Naval Surface Warfare Center (NSWC) are joined and underway with integrated efforts to marry new, fully demonstrated technologies and operational urgencies. Defense funding today cannot sponsor all work that can be mission-justified over the long term because budgets are insufficient to support product maturation within the classical development cycle. However, by rigorous technical filtering and astute engineering of both marketplace capabilities and currently available components, it is possible in a few select cases to compress and, in effect, integrate advanced development (6.3), engineering development (6.4), weapon procurement (WPN), ship construction (SCN), operation and maintenance (O&M,N) budgetary categories when fleet criticalities and technology opportunities can happily meet. In short, 6.3 funds can be applied directly to ''ripe gateways'' so modern technology is inserted into existing troubled or aging systems, sidestepping the lengthy, traditional development cycle and accelerating practical payoffs to recurrent fleet problems. To produce such constructive results has required a remarkable convergence of sponsor prescience and engineering workforce excellence. The paper describes, extensively, the philosophy of approach, transition strategy, polling of fleet needs, technology assessment, and management team requirements. The process for culling and selecting specific candidate tasks for SHARP sponsorship (matching operational need with t

关键词： Naval vessels

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Fabrication of SiN films at low temperature by RF biased coaxial-line microwave plasma CVD

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第11期79卷 58-65页

作者： Morita, Y Kato, I Nakajima, T School of Science and Engineering Waseda University Tokyo Japan Received a B.S. in 1992 from the Department of Electronics and Communication Waseda University. He is now enrolled in the Ph.D. program at the same university. He has been involved in research on microwave plasma CVD. He is a member of the Japanese Society of Applied Physics. Received the B.S. and Ph.D. degrees from the Department of Electronics and Communication Waseda University in 1967 and 1973 respectively. In 1973 he joined the faculty of Waseda University becoming an associate professor in 1978. He was Visiting Professor at Manitoba University Canada in 1979–1981. He has supervised research and participated in joint research with die Canadian National Research Council. He became a professor at Waseda University in 1993. He has been involved in research on microwave plasma CVD photonics lasers electronic materials evaluation technologies photonic materials opto-quantum electronics and semiconductor dun films. He is a member of die IEE of Japan die Japan Society of Applied Physics die TV Society die Japanese Vacuum Society and IEEE. Received die B.S. from die Department of Electronics and Communication Waseda University in 1994. He is now enrolled in die master's program at die same university. He has been involved in research on microwave plasma CVD. He is a member of die Japan Society of Applied Physics.

This paper discusses the influence of ion bombardment on the characteristics of SiN films. In this study, the double-tube coaxial-line microwave plasma CVD system, which is suitable for the investigation of ion bombardment, is used to deposit SiN films. The ion bombardment energy is varied by varying the RF bias at constant ion density, As the RF bias is increased, the film density increases and the hydrogen concentration decreases, but the dangling bond density increases. The increase in the film density and decrease of hydrogen concentration are caused by the increase in film surface temperature, while the increase of the dangling bond density is caused by bond breakage due to the N+ ion implantation. When the substrate temperature is 200 degrees C and the RF bias is -175 V, the film density is 3 g/cm(3) and the hydrogen concentration is 9 at.% because of the film surface heating effect of ion bombardment acid also due to substrate heating. Substrate heating at 200 degrees C suppresses the increase in the dangling bond density. It is also demonstrated that the film surface temperature is about 200 degrees C when RF bias is -70 similar to-80 V and the substrate is unheated by any heater.

关键词： microwave plasma CVD SiN film RF bias ion bombardment effect film surface hearing effect

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