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A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling

IEEE Transactions on Semiconductor Manufacturing 2025年第2期38卷 232-239页

作者： Han, Xu Miller, Marcella Moyne, James Vogl, Gregory William Penkova, Anita Jia, Xiaodong University of Cincinnati Department of Mechanical and Materials Engineering CincinnatiOH45221 United States University of Michigan Robotics Department Ann ArborMI48109 United States National Institute of Standards and Technology Engineering Laboratory GaithersburgMD20899 United States University of Southern California Viterbi School of Engineering Aerospace and Mechanical Engineering Department Los AngelesCA90089 United States

Virtual metrology (VM) is an important technology in semiconductor manufacturing that enhances process control, reduces costs, and improves quality. However, as processes become more complicated and process variations increase due to high-mix manufacturing, VM still faces challenges such as sensor drift and shift, as well as limited availability of metrology data due to high costs. This paper proposes an online Gaussian process (OGP) model designed to operate effectively with minimal initial metrology data and adapt dynamically to new data. The OGP model incorporates uncertainty quantification to optimize the sampling process, thereby enabling an adaptive sampling strategy to conduct metrology based on the process control needs. The proposed method is validated using a public dataset from the chemical mechanical planarization (CMP) process, demonstrating its effectiveness in tracking data drift and shift while reducing the required metrology data to retain model performance in an online operation setting. © 1988-2012 IEEE.

关键词： Process control

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Improvement of Localization Algorithm for Indoor and Outdoor Navigation of Autonomous Robots

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Journal of Institute of Control, robotics and Systems 2025年第5期31卷 502-509页

作者： Cho, Joonhyuk Kim, Bongsang Moon, Heechang Industrial Convergence Interdepartmental Program Autonomous Vehicle Intelligent Robotics The Graduate School of Hongik University Korea Republic of Mechanical & System Design Engineering Hongik University Korea Republic of

Location estimation for waypoint-based autonomous driving robots primarily relies on SLAM (Simultaneous Localization and Mapping) and GNSS (Global Navigation Satellite System) technologies. GNSS performs well in open areas but struggles with signal issues, while SLAM offers high accuracy in feature-rich environments but faces challenges in open spaces. This study integrates SLAM and GNSS, enabling seamless switching between systems when one encounters difficulties. The combined system ensures consistency by aligning coordinate systems and directional data. Experiments in indoor, forest, and open environments demonstrate that the switching algorithm enables stable autonomous driving in diverse conditions, effectively leveraging the strengths of both systems. © ICROS 2025.

关键词： Global positioning system

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Texture development and surface reconstruction of BiVO_(4)photoanode via one-pot hydrothermal reaction for enhanced photoelectrochemical water splitting

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Journal of Advanced Ceramics 2025年第3期14卷 133-141页

作者： Sung Won Hwang Yoo Jae Jeong Runfa Tan Indhujasri Saravanan Hyun Soo Han Dong Hoe Kim In Sun Cho Department of Energy Systems Research Ajou UniversitySuwon 16499Republic of Korea Department of Material Science&Engineering Ajou UniversitySuwon 16499Republic of Korea Department of Mechanical Engineering Stanford UniversityStanford 94305USA Department of Material Science&Engineering Korea UniversitySeoul 02841Republic of Korea Materials Science and Engineering Program University of Colorado BoulderBoulder 80303USA

The simultaneous optimization of the bulk and surface characteristics of photoelectrodes is essential to maximize their photoelectrochemical(PEC)*** report a novel one-pot hydrothermal synthesis of textured and surface-reconstructed BiVO_(4)photoanodes(ts-BVO),achieving significant improvements in PEC water *** controlling precursor molarity and ethylene glycol(EG)addition,we developed a stepwise dual reaction(SDR)mechanism,which enables simultaneous bulk texture development and surface *** optimized CoBi/ts-BVO photoanode exhibited a photocurrent density of 4.3 mA∙cm^(−2)at 1.23 V *** hydrogen electrode(RHE)with a high Faradaic efficiency of 98%under one sun *** with nontextured BiVO_(4),the charge transport efficiency increased from 8%to 70%,whereas the surface charge transfer efficiency improved from 9%to 85%.These results underscore the critical role of both bulk and surface engineering in enhancing PEC *** findings offer a streamlined approach for improving the intrinsic properties of photoanodes in solar water splitting.

关键词： BiVO_(4) hydrothermal texture surface reconstruction ethylene glycol(EG) photoelectrochemical water splitting

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Preferred Jacobian Differentiation and Direct Collocation Methods for an Efficient and Accurate Walker Gait Optimization

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International Journal of Control, Automation and Systems 2025年第5期23卷 1551-1562页

作者： Knisley, Veronica Cho, Kwonseung Lee, Kang-Woo Hur, Pilwon Southwest Research Institute San AntonioTX78238 United States Department of Mechanical and Robotics Engineering Gwangju Institute of Science and Technology Gwangju61005 Korea Republic of

Devices based on walker robotics research sometimes require a reference trajectory for the control systems of the devices to track. One valuable class of methods used to find an optimal reference trajectory is direct collocation, but even after selecting a method like direct collocation, several optimization design decisions remain. In order to determine the most desirable optimization settings, 600 optimizations were performed for the trajectory of a two degree-of-freedom (DOF) compass gait walker, and 200 optimizations were performed for a five-DOF link walker. These runs evaluated various combinations of optimization settings, including: numerical vs. symbolic vs. automatic differentiation;trapezoidal vs. Hermite Simpson collocation;numerical vs. symbolic calculation of joint accelerations;and inclusion or exclusion of joint accelerations in the decision variables. The different generated gaits were then compared in terms of computational efficiency and accuracy. The results showed that including joint accelerations as decision variables eliminated alternative gaits but increased computational complexity and variability. Symbolic acceleration evaluation was preferable when automatic differentiation was excluded. Automatic differentiation was shown to be significantly faster than the other two differentiation methods for both walking models. In addition, Hermite-Simpson collocation, although slower than trapezoidal, was the more accurate of the two approaches. These results can be applied to the derivation of optimal reference joint trajectories in future robotics applications. © ICROS, KIEE and Springer 2025.

关键词： NP-hard

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Analysis of Automation in Foundries for Transforming Production Efficiency, Quality Control, and Operational Resilience 2

Analysis of Automation in Foundries for Transforming Product...

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2nd International Conference on Machine Learning and Autonomous Systems, ICMLAS 2025

作者： Bhagyanathan, C. Sarvesh, J. Vishal, G. Rithvik, R. Sri Ramakrishna Engineering College Department of Mechanical Engineering Coimbatore India Sri Ramakrishna Engineering College Department of Robotics and Automation Coimbatore India

ISBN: (数字)9798331505745

ISBN: (纸本)9798331505745

The foundry industry, a cornerstone of manufacturing, has undergone significant transformations due to the integration of automation technologies. This survey paper examines the evolution of automation in foundries, exploring its historical development, key adoption drivers, and the ongoing challenges faced by traditional operations. Technological advancements driving this change include the Industrial Internet of Things (IIoT), robotics, artificial intelligence (AI), machine learning (ML), and cyber-physical systems (CPS), such as digital twins. Through case studies, the paper illustrates practical implementations of these technologies, such as IoT-enabled monitoring, robotics in core making and molding, AI-driven defect detection, and CPS integration in smart foundries. The advantages of automation are emphasized, including increased productivity, improved quality control, energy efficiency, sustainability, and enhanced workplace safety. Despite these benefits, the adoption of automation faces significant hurdles, such as high initial investment costs, integration with legacy systems, skill gaps, and cybersecurity concerns. The paper also identifies future trends, including the rise of collaborative robotics (cobots), edge computing, 5G technologies, and the vision for fully autonomous foundries. This comprehensive survey offers valuable insights into the current state of foundry automation, its transformative potential, and future directions for researchers and industry stakeholders seeking to leverage these advancements for operational excellence. © 2025 IEEE.

关键词： Coremaking

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Deterministic Learning-Based Tracking Control for Parabolic PDE Systems With Infinite-Dimensional Nonlinear Uncertain Dynamics

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IEEE Transactions on Automatic Control 2025年第5期70卷 3272-3287页

作者： Zhang, Jingting Yuan, Chengzhi Wu, Fen Wang, Cong Cheng, Hong University of Electronic Science and Technology of China Center for Robotics School of Automation Engineering Chengdu611731 China University of Rhode Island Mechanical Industrial and Systems Engineering Department KingstonRI02881 United States North Carolina State University Mechanical and Aerospace Engineering Department RaleighNC27695 United States Shandong University School of Control Science and Engineering Jinan250061 China

In this article, we investigate the joint problem of dynamics learning and tracking control for a class of parabolic partial differential equation (PDE) systems with infinite-dimensional uncertain nonlinear dynamics. A new learning control scheme is proposed based on the deterministic learning (DL) theory. One key feature of the proposed scheme is its capability of accurately learning the system's nonlinear uncertain dynamics during real-time tracking control with provable stability and convergence of the overall PDE closed-loop system. Specifically, the Galerkin method is first employed to deal with the infinite dimensionality of the PDE system;a novel DL-based adaptive learning control scheme is then proposed using dual radial basis function neural networks (RBF NNs), in which a pair of RBF NNs are employed to address, respectively, the matched and unmatched components of uncertain nonlinear system dynamics. This control scheme is finally examined on the original PDE system, and it is rigorously proved that: first the PDE system's state tracks the prescribed reference trajectory with guaranteed closed-loop stability and tracking accuracy;and second locally accurate identification of the PDE system's dominant nonlinear uncertain dynamics can be achieved with provable convergence of associated NN weights to their optimal values, thereby the learned knowledge can be ultimately stored and represented by the convergent constant RBF NN models. Based on this, an experience-based control scheme is further proposed, which is capable of recalling the associated learned knowledge in real-time to further improve control performance and reduce computational complexity with maintained provable stabilization. It is worth stressing that although this work is focused particularly on parabolic PDE systems, it is groundbreaking with important technical breakthroughs that would facilitate a more complete extension of the DL theory from traditional ordinary differential equation syste

关键词： Galerkin methods

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Development of Video Stabilization Technology in Extreme Environments Using Lidar-inertial Odometry

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Journal of Institute of Control, robotics and Systems 2025年第1期31卷 61-67页

作者： Yoon, Yeong-In Suh, Hyeong-Seok Shin, Gwan-Jun Lim, Jong-Woo Department of Mechanical Engineering Seoul National University Korea Republic of Interdisciplinary Program in Artificial Intelligence Seoul National University Korea Republic of

This study proposes designing and applying a video stabilization algorithm using LIDAR-inertial odometry (LIO). The performance of the video stabilization function was validated in narrow, low-light environments using a small robot. A unique camera pose estimation method based on LIO has been introduced and integrated with the camera system in this work to not only overcome the limitations of image feature-based camera pose estimation but also address the issues arising from camera sensors. Thus, this strategy allows the practical implementation of a robust camera stabilization algorithm even in extreme environments. The proposed approach is resilient to the differing scan rates of the LIDAR system and the camera, and it enhances usability by filtering noise from the LIO. Furthermore, it requires less computational resources compared to traditional image feature extraction-based methods. This technology can substantially improve the operational convenience for robot operators, especially in scenarios where robots equipped with various sensors are deployed in extreme environments. © ICROS 2025.

关键词： image perspective transformation lidar-inertial odometry video stabilization

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Development of an Intuitive Autonomous Ground Robot for Indoor Delivery Applications 5th

Development of an Intuitive Autonomous Ground Robot for Indo...

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5th International Conference on Innovative Product Design and Intelligent Manufacturing Systems, ICIPDIMS 2023

作者： Peter, Jerin Thomas, Mervin Joe Gokulkrishna, S. Cholappally, Kiran Mohan, Santhakumar IIT Palakkad Technology IHub Foundation Palakkad India Robotics Laboratory Department of Mechanical Engineering NIT Karnataka Surathkal India Rajagiri School of Engineering and Technology Kakkanad India Department of Mechanical Engineering IIT Palakkad Palakkad India

ISBN: (纸本)9789819767311

Efficient and reliable parcel delivery services are always desired in different sectors such as hospitals, offices, industries and households. One promising solution to meet, this need is the application of Autonomous Mobile Robots (AMRs) capable of navigating complex indoor environments to deliver packages and goods. Generally, AMRs are used for the last-mile delivery of parcels. The end users of such robots have different skill sets, and the robot must have a simple user interface to ensure easy usability. This paper presents an AMR with an intuitive Graphic User Interface (GUI) and aesthetic design. It is enough for the end user to define the goal locations on the resulting map shown on the robot screen. The AMR will autonomously navigate to the given goal location. Besides, the effectiveness of sensor fusion and a comparative study of various combinations of sensor fusion are also described in this paper. In addition, the application of LiDAR odometry and its performance is also analyzed in this paper. The primary objective of this study is to identify an approach that improves the AMR’s tracking accuracy and makes it suitable for dynamic work environments. This paper describes the development of an AMR for last-mile delivery purposes, and its proof of concept is evaluated on the fabricated prototype. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025.

关键词： Motion planning

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Towards Local Minima-free Robotic Navigation: Model Predictive Path Integral Control via Repulsive Potential Augmentation

Towards Local Minima-free Robotic Navigation: Model Predicti...

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2025 IEEE/SICE International Symposium on System Integration, SII 2025

作者： Fuke, Takahiro Endo, Masafumi Honda, Kohei Ishigami, Genya Keio University Space Robotics Group Department of Mechanical Engineering Yokohama223-8522 Japan Nagoya University Mobility System Group Department of Mechanical Systems Engineering Nagoya464-8603 Japan

ISBN: (纸本)9798331531614

Model-based control is a crucial component of robotic navigation. However, it often struggles with entrapment in local minima due to its inherent nature as a finite, myopic optimization procedure. Previous studies have addressed this issue but sacrificed either solution quality due to their reactive nature or computational efficiency in generating explicit paths for proactive guidance. To this end, we propose a motion planning method that proactively avoids local minima without any guidance from global paths. The key idea is repulsive potential augmentation, integrating high-level directional information into the Model Predictive Path Integral control as a single repulsive term through an artificial potential field. We evaluate our method through theoretical analysis and simulations in environments with obstacles that induce local minima. Results show that our method guarantees the avoidance of local minima and outperforms existing methods in terms of global optimality without decreasing computational efficiency. © 2025 IEEE.

关键词： Motion planning

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Assessment of the GHG performance of a gas plant through an interactive business intelligence dashboard

Assessment of the GHG performance of a gas plant through an ...

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International Conference on Innovation and Technological Advances for Sustainability, ITAS 2023

作者： Al-Mohannadi, A.A. Masoud, M.A. Al-Naemi, B.N. Kucukvar, M. Engineering Management Program Qatar University Doha Qatar Department of Mechanical and Industrial Engineering Qatar University Doha Qatar

ISBN: (纸本)9781032803722

This study investigated the greenhouse gas performance of an operating plant from a business intelligence perspective. 2017-2021 GHG data was collected from the plant, transformed, and loaded into Microsoft Power BI, which was used to build the data model. A dynamic visual dashboard was created for data analysis. The analysis was categorized into areas based on the requirements of the functional dashboard. These categories were GHG emissions per time period, top emitting process units, distribution of GHG emissions by pre-defined categories, and energy intensity. The dashboard showed stable emissions and energy intensity from 2018-2021. Dashboard analysis also demonstrated major emissions contributions from gas turbine generators and fired heaters, mainly from fuel I, highlighting key focus areas for future GHG reduction initiatives. GHG abatement strategies were proposed to provide direction for improvement. Although the dashboard was intended to aid strategic decision making, it can be adapted for greater insights and for operational and tactical decision making by using more data in the model and closer cooperation with data and process owners and operators. © 2025 The Author(s).

关键词： Greenhouse gas emissions

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