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Progress on scanning beam interference lithography tool with high environmental robustness for patterning large size grating with nanometre accuracy 17

Progress on scanning beam interference lithography tool with...

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17th International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2017

作者： Wang, Leijie Zhang, Ming Zhu, Yu Lu, Sen Yang, Kaiming Lan, Bin State Key Laboratory of Tribology Beijing Key Lab. of Precision/Ultra-precision Manufacturing Equipments and Control Department of Mechanical Engineering Tsinghua University Beijing100084 China School of Mechatronics Engineering University of Electronic Science and Technology Chengdu611731 China

ISBN: (纸本)9780995775107

The novel tool mainly consists of a homodyne frequency-shifting interference pattern phase locking system and a substrate stage with a grating interferometer system for XY displacement measurement. The phase locking system employs a special self-made homodyne redundant phase measuring interferometer (HRPMI) as the sensor and two acousto-opto modulators (AOM) as the actuator. By this configure, the phase locking system is very simplified and the power in several tens of micro-Watt is enough. The grating interferometer system works by combining four interferometer arrays on the fixed metrology frame and four grating rulers on the moving substrate stage. Due to the short dead optical path, the system is very environmental robust even if in a large environmental enclosure without demanding stability. The errors of the tool caused by different kinds of sources and imperfections are very complicated and can be separated into several categories. Detail error evaluation for two categories has been done for the initial experimental setup and both errors are several nanometres (3a, A=251.1nm). controlling accuracy of the initial experimental setup achieves ±4.17nm (3a, A=251.1nm).

关键词： Interferometers

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Development and test verification of air temperature model for Chinese solar and Spainish Almeria-type greenhouses

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International Journal of Agricultural and Biological engineering 2017年第4期10卷 66-76页

作者： Jorge Antonio Sanchez-Molina Li Ming Francisco Rodriguez Jose Luis Guzman Wang Hui Yang Xinting The Automatic Control Robotics and Mechatronics Research GroupDepartment of InformaticsceiA3CIESOLUniversity of AlmeriaAlmeria 04120Spain Beijing Research Center for Information Technology in Agriculture/National Engineering Research Center for Information Technology in Agriculture/National Engineering Laboratory for Agri-product Quality Traceability/Key Laboratory for Information Technologies in Agriculture Ministry of AgricultureBeijing 100097China

Growth can be defined as an increment in biomass or an increment in weight or height of the organs of the plant influenced by physiological *** of these processes have their limits genetically determined,but climate and irrigation play an important *** of its importance,microclimate has been extensively studied in the modeling as a surrounding condition which is imposed by the exterior *** main objective of this work was to develop a temperature model based on the energy balance dynamics at two different greenhouse locations-South-eastern Spain and Northern China,and the traditional structures of Chinese solar greenhouse and Almería-type multi-span greenhouse were taken into *** final model was developed by combining the external conditions,the actuator influence and the crop growth,where the temperature is influenced by soil,crop,cover,actuators,back wall and greenhouse *** model took into account the energy lost by convective and conductive fluxes,as well as the energy supplied by solar radiation and heating *** soil and the back wall are the main media for energy *** temperature dynamic was determined by a physical model,which considered the energy balance from a holistic point of view-as a sub-model for a customizable interface among the external climate,the plant and the greenhouse *** influences of different subsystems included in the temperature model were analyzed and *** results showed a high R^(2)value of 0.94 for Beijing and 0.95 for Almeria,and the average error was low,of which the MAE and RMSE were 0.71 and 1.365 for Almeria and 0.62 and 1.102 for Beijing,***,the model can be considered as a powerful tool for control design purposes in microclimate systems.

关键词： air temperature model Chinese solar greenhouse Spanish Almería-type greenhouse energy balance dynamics microclimate

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Design and Development of a Hybrid Machine Combining Rapid Prototyping and CNC Milling Operation

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Procedia engineering 2017年 184卷 163-170页

作者： A.N.M. Amanullah Murshiduzzaman Tanveer Saleh Raisuddin Khan Smart Structures System and Control Research Laboratoty Department of Mechatronics Engineering International Islamic University Malaysia Kuala Lumpur 50728 Malaysia

Nowadays, two most important processes, namely rapid prototyping (RP) and CNC machining are being used to produce prototypes. CNC machining (subtractive method) is relatively more precise and accurate, but it is tough to create stuffs with complex features. RP (additive method), by contrast, is able to form parts with sophisticated features, that consents materials to be utilized more efficiently. But its entire automation emanates with conciliations in the qualities of material and geometry. Combining both subtractive and additive process on a single platform has significant advantages. However, this has several challenges such as control system integration and maintaining accuracy of alignment during the change over process. This research attempts to assimilate both of these processes and propose a new design of hybrid machine with the purpose of overcoming the drawbacks related with different control panel and misalignment issues. Fused deposition modeling (FDM) is considered as the RP process in this study. A CNC cutting spindle and an FDM heat extruder has been designed to be placed respectively in front of a rotary stage which will be used to overcome the misalignment with the help of IR sensors. The proposed design allows CNC milling and FDM process in a single setup thus attaining the benefit of decreasing expenses for additional actuators.

关键词： Hybrid machine CNC Rapid Prototyping FDM Rotary Stage IR sensors

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Diagnosing interdental decays in mouth radiography images using Kernel Fuzzy C means segmentation and cascade object detector

Diagnosing interdental decays in mouth radiography images us...

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International Conference on Electrical and Electronics engineering, ELECO

作者： Navid Khalili Dizaji Tufan Kumbasar Department of Mechatronics Engineering Istanbul Technical University Istanbul Turkey Department of Control and Automation Engineering Istanbul Technical University Istanbul Turkey

Mouth radiography is one of the common ways of diagnosing tooth decays. Especially for interdental decays which are hard to be examined by naked eyes. In this paper, we present a method for diagnosing internal decay in real word mouth radiography images, which have been gathered in Tabirz Sina dental clinic. Firstly, we will use Kernel Fuzzy C-Means (KFCM) algorithm, which is modifying the objective function in the fuzzy C-means algorithm using a kernel-induced distance metric, as an image segmentation method. Then, the processed images are labelled with decay and are then employed to a cascade object detector for diagnosing purposes. In order to show the efficiency of the employed method the performance is tested on testing mouth radiography image data set. The results indicate that this method composed of KFCM and cascade object detector structures is successful in detecting interdental decays.

关键词： Detectors Kernel Image segmentation Diagnostic radiography Teeth Training

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IoT based solid waste management system for smart city

IoT based solid waste management system for smart city

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International Conference on ent Computing and control Systems (ICICCS)

作者： Krishna Nirde Prashant S. Mulay Uttam M. Chaskar Department of Mechatronics College Of Engineering Pune Shivajinagar Pune INDIA Department of Instrumentation & Control College Of Engineering Pune Shivajinagar Pune India

ISBN: (纸本)9781538639016

Today, waste management from its inception to its disposal is one of the important challenges for the municipal corporations in all over the world. Dust bins placed across cities set at open places are flooding because of increment in the waste each day and making unhygienic condition for the citizens, to maintain a strategic distance from such a circumstance we have proposed wireless solid waste management system for smart cities which allows municipal corporations to monitor status of dustbins remotely over web server and keep cities clean very efficiently by optimizing cost and time required for it. As soon as dustbin has reached its maximum level, waste management department gets alert via SMS via gsm module placed at dustbin so department can send waste collector vehicle to respective location to collect garbage. The objective of the project is to enhance practicality of IoT based solid waste collection and management system for smart city.

关键词： Solids Waste management Monitoring Acoustics Sensors Filling Web pages

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Hybrid integrator design for enhanced tracking in motion control

Hybrid integrator design for enhanced tracking in motion con...

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American control Conference

作者： D. A. Deenen M. F. Heertjes W. P. M. H. Heemels H. Nijmeijer Eindhoven University of Technology Department of Mechanical Engineering Dynamics & Control group ASML Mechatronics Development Eindhoven University of Technology Department of Mechanical Engineering Control Systems Technology group

ISBN: (纸本)9781509045839

This paper discusses a novel hybrid integrator design that (a) gives improved low-frequency disturbance rejection properties under double-integrator control, but (b) avoids the unwanted occurrence of overshoot and settling effects otherwise resulting from adding an extra linear integrator. The main principle behind this new design is that the resulting hybrid element generates a continuous control output signal based on integrator action when possible, while overall satisfying a sector condition that restricts the input-output behavior to a [0,k_h]-sector, where k_h is a positive gain derived from a closed-loop stability argument. In fact, closed-loop stability can be guaranteed on the basis of a circle-criterion-like argument and checked through (measured) frequency response data, thereby avoiding the need for parametric models. The strengths of this new hybrid integrator will be demonstrated experimentally on a wafer stage system of an industrial wafer scanner.

关键词： integrators overshooting Disputes updated design INPUT-OUTPUT

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Nonlinear Dynamic Characteristics of the Railway Vehicle

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Nonlinear engineering 2017年第2期6卷 123-137页

作者： Uyulan, Çaǧlar Gokasan, Metin Istanbul Technical University Graduate School of Science Engineering and Technology Department of Mechatronics Engineering Istanbul Turkey Istanbul Technical University Faculty of Electrical and Electronic Engineering Control Engineering Department Istanbul Turkey

The nonlinear dynamic characteristics of a railway vehicle are checked into thoroughly by applying two different wheel-rail contact model: a heuristic nonlinear friction creepage model derived by using Kalker 's theory and Polach model including dead-zone clearance. This two models are matched with the quasi-static form of the LuGre model to obtain more realistic wheel-rail contact model. LuGre model parameters are determined using nonlinear optimization method, which it's objective is to minimize the error between the output of the Polach and Kalker model and quasi-static LuGre model for specific operating conditions. The symmetric/asymmetric bifurcation attitude and stable/unstable motion of the railway vehicle in the presence of nonlinearities which are yaw damping forces in the longitudinal suspension system are analyzed in great detail by changing the vehicle speed. Phase portraits of the lateral displacement of the leading wheelset of the railway vehicle are drawn below and on the critical speeds, where sub-critical Hopf bifurcation take place, for two wheel-rail contact model. Asymmetric periodic motions have been observed during the simulation in the lateral displacement of the wheelset under different vehicle speed range. The coexistence of multiple steady states cause bounces in the amplitude of vibrations, resulting instability problems of the railway vehicle. By using Lyapunov's indirect method, the critical hunting speeds are calculated with respect to the radius of the curved track parameter changes. Hunting, which is defined as the oscillation of the lateral displacement of wheelset with a large domain, is described by a limit cycle-type oscillation nature. The evaluated accuracy of the LuGre model adopted from Kalker's model results for prediction of critical speed is higher than the results of the LuGre model adopted from Polach's model. From the results of the analysis, the critical hunting speed must be resolved by investigating the track tests un

关键词： Vibrations (mechanical)

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On designing an automated tool for capacitors removal from waste printed circuits boards

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IOP Conference Series: Materials Science and engineering 2019年第1期591卷

作者： C Stamate I Doroftei D Chirita A Burlacu 'Gheorghe Asachi' Technical University of Iasi Department of Mechanical Engineering Mechatronics and Robotics Blvd. Mangeron No. 43 700050 Iasi Romania 'Gheorghe Asachi' Technical University of Iasi Department of Automatic Control and Applied Informatics Blvd. Mangeron No. 27 700050 Iasi Romania

The mass electronics sector is one of the most important sources of waste, both in terms of volume and materials content with dangerous effects on the environment. Printed Circuit Boards (PCBs) are the most valuable component embedded into Electrical and Electronic Equipment (EEEs). The current amount of electronic systems is impressive while manual dismantling is a very common and non-efficient solution. On average, waste PCB accounts almost from 3% to 5% of the overall weight of waste electrical and electronic equipment. At this time, in Romania, the implemented solutions for waste PCB reduction are in a research phase, with no existing technological procedures that can be replicated. In the context of the TRADE-IT project we aim to design replicable architectures for waste printed boards reduction. Starting from the largest base plate and continuing to the smallest size, Extended ATX, ATX, Micro ATX, Mini ITX are some of the most used boards in a computer. When choosing a base plate from the ATX and/or microATX range, the shape factor must fit on a universal support bracket. The shape factor identifies the size of the circuit board, the location of the slots, and the location of the display board that comes out on the back of the computer. The shape factor also identifies the location of the holes that are used to mount the base plate in the universal clamp holder. Taking into account that capacitors represent approximately 8.6% of the PCB mass, we aim at designing an automated driven tool for their removal. The design is based on a robotic arm for motion manoeuvring, a programmable screwdriver and a custom-made end tool. In the current phase the proposed design was evaluated on controlled individual tests. The initial results highlight the feasibility of the proposed design while uncovering potential challenges for real-time implementation.

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PID2018 benchmark challenge: Model-based feedforward compensator with a conditional integrator ??

arXiv

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arXiv 2018年

作者： Yuan, Jie Ates, Abdullah Dehghan, Sina Zhao, Yang Fei, Shumin Chen, YangQuan School of Automation Southeast University Nanjing210096 China Engineering Faculty Computer Engineering Department Inonu University Malatya44280 Turkey Mechatronics Embedded Systems and Automation Lab University of California MercedCA95340 United States School of Science and Engineering Shandong University Jinan250061 China Key Laboratory of Measurement and Control of CSE Ministry of Education School of Automation Southeast University Nanjing210096 China

Since proportional-integral-derivative (PID) controllers absolutely dominate the control engineering, numbers of different control structures and theories have been developed to enhance the effciency of PID controllers. Thus, it is essential and inspiring to operate different PID control strategies to the PID2018 Benchmark Challenge. In this paper, a novel control strategy is designed for this refrigeration system, where a feedforward compensator and a conditional integrator are utilized to compensate the disturbances and remove the steady-state error in the benchmark problem, respectively. The simulation results given in the benchmark problem show the straightforward effectiveness of the proposed control structure compared with the existing control methods. Copyright © 2018, The Authors. All rights reserved.

关键词： Disturbance rejection

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A Decentralized Power Allocation Strategy for the EV Charging Network

A Decentralized Power Allocation Strategy for the EV Chargin...

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IEEE Innovative Smart Grid Technologies - Asia

作者： Guibin Wang Hairong Li Huaizhi Wang Xian Zhang Feng Zhang College of Mechatronics and Control Engineering Shenzhen University Shenzhen 518060 China Department of Electrical Engineering The Hong Kong Polytechnic University Hong Kong 999077 China Department of Electrical Engineering Shandong University Jinan 250100 China

ISBN: (纸本)9781538642924

nowadays, developing electric vehicles (EVs) is an important measure to reduce the greenhouse effect of the traditional transportation system. While the number of EVs growing rapidly, how to charge EVs efficiently attracts researchers' attention. Different from the traditional centralized charging power allocation, which is operated by a centralized control computer collecting all information and sending the commands to EVs, in this paper the decentralized power allocation strategy for EV charging network is proposed. Moreover, the centralized algorithm requires a high quality communication network, which cannot handle disturbances in communication like delays or packet losses. Therefore, the consensus algorithm is applied here to realize the efficiency and robust power allocation of the EV charging network in a decentralized fashion. The effectiveness of the proposed strategy has been fully investigated in three different cases.

关键词： Electric vehicles Consensus algorithm Charging network

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