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12th International Conference on Motion and Vibration control, MOVIC 2014

作者： Shiraishi, Hazime Hijioka, Junnya Shiobara, Kazuya Watanabe, Toru Seto, Kazuto Department of Mechanical Engineering Nihon University 1-8-14 Kanda Surugadai Chiyoda-ku Tokyo Japan SETO Vibration Control Lab. Japan

Ultra precision apparatus like semiconductor producing equipment needs the high accuracy at manufacturing. Therefore active isolation systems to avoid vibration transmitted from a vibration source to the precision apparatus are very important. This paper deals with the control system design for active isolation table[1][2][3]. It aims at controlling vibration of the installed object and isolation table simultaneously. An experimental isolation table with flexible loaded object is built. The experimental system is modeled according to the reduced order physical modeling method. The parameters of the table are experimentally identified. Using the obtained model, control simulations are carried out by using feed-back controller designed according to sub-optimal control theory, absolute velocity feed-back control theory and feed-forward controller. The sub-optimal feed-back controller achieved good vibration damping effect, while the feed-forward controller effectively suppressed vibration transmission from ground. In order to evaluate the control performance on experimental system, control experiments are carried out and compared with simulation results. They agreed well and the effectiveness of presented modeling and controller design procedure is confirmed. © 2014 The Japan Society of mechanical Engineers.

关键词： controllers

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Convergence of Kalman Filter with Quantized Innovations

Convergence of Kalman Filter with Quantized Innovations

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International Conference on control, Automation, Robotics and Vision

作者： Jian Xu Jianxun Li Jiayun Wu Department of Automation Shanghai Jiaotong University Shanghai 200240 China Mechatronics and Control Lab 1 Mechanical engineering NUS Singapore 117576

ISBN: (纸本)9781424478149

This work provides a convergence analysis for the estimate error covariance of Kalman filtering based on quantized measurement innovations (QIKF). By taking the quantization errors as random perturbations in observation system, an equivalent state-observation system is given. Accordingly, the quantitative Kalman filter for the original system is equivalent to a Kalman-like filtering for the equivalent state-observation system. In this performance analysis framework, the true covariance matrix of estimating error is strictly analyzed without Gaussian assumption on predicted distribution. A necessary and sufficient condition for the stability of the QIKF is obtained. Then, the relationship between the standard Kalman filtering and the QIKF for the original system is discussed. Finally, the validity of these results are demonstrated by numerical simulations.

关键词： Quantized Innovation Kalman Filtering Con-vergence Analysis

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Progress on scanning beam interference lithography tool with high environmental robustness for patterning large size grating with nanometre accuracy 17

Progress on scanning beam interference lithography tool with...

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17th International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2017

作者： Wang, Leijie Zhang, Ming Zhu, Yu Lu, Sen Yang, Kaiming Lan, Bin State Key Laboratory of Tribology Beijing Key Lab. of Precision/Ultra-precision Manufacturing Equipments and Control Department of Mechanical Engineering Tsinghua University Beijing100084 China School of Mechatronics Engineering University of Electronic Science and Technology Chengdu611731 China

ISBN: (纸本)9780995775107

The novel tool mainly consists of a homodyne frequency-shifting interference pattern phase locking system and a substrate stage with a grating interferometer system for XY displacement measurement. The phase locking system employs a special self-made homodyne redundant phase measuring interferometer (HRPMI) as the sensor and two acousto-opto modulators (AOM) as the actuator. By this configure, the phase locking system is very simplified and the power in several tens of micro-Watt is enough. The grating interferometer system works by combining four interferometer arrays on the fixed metrology frame and four grating rulers on the moving substrate stage. Due to the short dead optical path, the system is very environmental robust even if in a large environmental enclosure without demanding stability. The errors of the tool caused by different kinds of sources and imperfections are very complicated and can be separated into several categories. Detail error evaluation for two categories has been done for the initial experimental setup and both errors are several nanometres (3a, A=251.1nm). controlling accuracy of the initial experimental setup achieves ±4.17nm (3a, A=251.1nm).

关键词： Interferometers

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Modeling of laser power attenuation by powder particles for laser solid forming

Modeling of laser power attenuation by powder particles for ...

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20th CIRP Conference on Electro Physical and Chemical Machining, ISEM 2020

作者： Wang, Junhua Zhang, Zhen Han, Fuzhu Chen, Shu-Fan Ying, Weisheng Department of Mechanical Engineering Tsinghua University Beijing100084 China School of Mechatronics Engineering Henan University of Science and Technology Luoyang471023 China Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control Tsinghua University Beijing100084 China

Laser solid forming (LSF) is a typical laser additive manufacturing technology integrating rapid prototyping manufacturing and laser cladding. Laser power attenuation greatly influences the amount and distribution of laser energy. It is important to establish a theoretical model of laser power attenuation to effectively control the laser energy transmission and to ensure the stability of the molten pool. Considering the effects of overlap phenomenon among powder particles, a theoretical model of laser power attenuation is proposed by introducing the concept of the effective number of powder particles. The proposed model enables the accurate calculation of the laser power attenuation in arbitrary volume fraction of powder particles. The results indicate that the laser power attenuation is proportional to the powder feeding rate, and the increase rate of laser power attenuation is inverse proportional to the powder feeding rate. In addition, a simple method for measuring the laser power attenuation is also proposed to experimentally validate the proposed theoretical model. The experimental results validate the proposed method. © 2020 The Authors. Published by Elsevier B.V.

关键词： Inverse problems

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Printability and properties of PSNZT piezoelectric ceramics fabricated by DLP additive manufacturing

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Ceramics International 2025年

作者： Yu, Mengyuan Fan, Guifen Li, Yingkang Ling, Xile Gong, Feng Liu, Gang Bai, Jiaming Li, Mantian Zhou, Peng Zhang, Dongyang Sun, Lining Hubei Key Laboratory of Plasma Chemistry and Advanced Materials School of Materials Science and Engineering Wuhan Institute of Technology Wuhan 430205 China Institute of Intelligent Manufacturing Technology Shenzhen Polytechnic University Shenzhen 518055 China School of Optical and Electronic Information Key Lab of Functional Materials for Electronic Information (B) MOE Huazhong University of Science and Technology Wuhan 430074 China Department of Mechanical and Electronic Engineering College of Mechatronics and Control Engineering Shenzhen University Shenzhen 518055 China Shenzhen Blueswin Industrial Co. Ltd Shenzhen 518117 China Department of Mechanical and Energy Engineering Southern University of Science and Technology Shenzhen 518055 China Institute of Critical Materials for Integrated Circuits Shenzhen Polytechnic University Shenzhen 518055 China Robotics and Microsystems Center School of Mechanical and Electric Engineering Soochow University Suzhou 215021 China

Achieving the synergy of low viscosity, high printing precision and enhanced curing ability for lead zirconate titanate (PZT) components is a critical issue in the field of digital light processing (DLP). Herein, the effect of calcination temperature on the morphology and grain size of PSNZT [(Pb₀.₉₂Sr₀.₀₈)(Zr₀.₅₃₃Ti₀.₄₄₃Nb_0.024)O₃]ceramic powder has been investigated, and a lowest viscosity, higher printing precision and enhanced curing ability of PSNZT ceramic slurry has been achieved, resulting in a high piezoelectric constant (d₃₃ = 379pC/N) and a high dielectric constant (εr = 1308@100 KHz) via DLP process combined with following sintering densification (1220 °C/3 h). © 2025 Elsevier Ltd and Techna Group S.r.l.

关键词： Calcination temperature Digital light processing Piezoelectric constant PZT-based piezoceramics

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Design of a new composite observer for vehicle velocity and attitude estimation

Design of a new composite observer for vehicle velocity and ...

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13th IASTED International Conference on control and Applications, CA 2011

作者： Oh, Jiwon Choi, Seibum B. Dept. of Mechanical Engineering Automotive Control Lab. Korea Advanced Institute of Science and Technology 373-1 Guseong-dong Yuseong-gu Korea Republic of

ISBN: (纸本)9780889868724

The main concern of this paper focuses on the accurate estimation of the vehicle states, including the longitudinal, lateral, and vertical velocities (hence, sideslip angle), as well as the roll and pitch angles. With the input data from the 6D IMU which measures both acceleration and angular velocities of the three axes, the novel merging schemes based on the internally defined concepts of transient state factor, reference selector, and selective integral, that combine the kinematic and model-based observer outputs guarantee robust performance in estimating the vehicle states. Stability of each component of the proposed observer is investigated, and confirmatory assessment of the entire system is arranged via simulation under various conditions, with the aid of Carsim and Matlab/Simulink.

关键词： Kinematics

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Interaction-Aware Cut-In Trajectory Prediction and Risk Assessment in Mixed Traffic

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IEEE/CAA Journal of Automatica Sinica 2022年第10期9卷 1752-1762页

作者： Xianglei Zhu Wen Hu Zejian Deng Jinwei Zhang Fengqing Hu Rui Zhou Keqiu Li Fei-Yue Wang the College of Intelligence and Computing Tianjin UniversityTianjin 300350 the China Automotive Technology and Research Center Co.Ltd. Tianjin 300300China the State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle EngineeringHunan UniversityChangsha 410082China the Department of Mechanical and Mechatronics Engineering University of WaterlooWaterlooON N2L3G1Canada the School of Mechanical Engineering Beijing Institute of TechnologyBeijing 100081China the Macao University of Science and Technology MacaoChina the Waytous Inc. Qingdao 266000China IEEE the State Key Laboratory of Management and Control for Complex Systems Institute of AutomationChinese Academy of SciencesBeijing 100190China

Accurately predicting the trajectories of surrounding vehicles and assessing the collision risks are essential to avoid side and rear-end collisions caused by *** improve the safety of autonomous vehicles in the mixed traffic,this study proposes a cut-in prediction and risk assessment method with considering the interactions of multiple traffic *** integration of the support vector machine and Gaussian mixture model(SVM-GMM)is developed to simultaneously predict cut-in behavior and *** dimension of the input features is reduced through Chebyshev fitting to improve the training efficiency as well as the online inference *** on the predicted trajectory of the cut-in vehicle and the responsive actions of the autonomous vehicles,two risk measurements are introduced to formulate the comprehensive interaction risk through the combination of Sigmoid function and Softmax ***,the comparative analysis is performed to validate the proposed method using the naturalistic driving *** results show that the proposed method can predict the trajectory with higher precision and effectively evaluate the risk level of a cut-in maneuver compared to the methods without considering interaction.

关键词： Cut-in behavior interaction-aware mixed traffic risk assessment trajectory prediction

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An adaptive multimodality (ECT, ERT and electrodynamic) sensor for multiphase flow measurement 6

An adaptive multimodality (ECT, ERT and electrodynamic) ...

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6th World Congress in Industrial Process Tomography

作者： Deng, Xiang Chen, Dixiang Yang, Wuqiang School of Mechanical Electronic and Control Engineering Beijing Jiaotong University Beijing100044 China School of Mechatronics Engineering and Automation National University of Defence Technology Changsha410073 China School of Electrical and Electronic Engineering The University of Manchester ManchesterM60 1QD United Kingdom

ISBN: (纸本)9780853163220

Accurate measurement of multiphase flows, including gas/solids, gas/liquid and liquid/liquid flows, is still challenging. In principle, electrical capacitance tomography (ECT) can be used to measure the concentration of solids in a gas/solids flow and the liquid (e.g. oil) fraction in a gas/liquid flow if the liquid is nonconductive. Electrical resistance tomography (ERT) can be used to measure a gas/liquid flow if the liquid is conductive. It has been attempted to use a dualmodality ECT/ERT system to measure both the concentration profile and the velocity profile by pixelbased cross correlation. However, this approach is not realistic because of the dynamic characteristics and the complexity of multiphase flows and the difficulties in determining the velocities by cross correlation. In this paper, the issues with dual modality ECT/ERT and the difficulties with pixelbased cross correlation will be discussed. A new adaptive multimodality (ECT, ERT and electrodynamic) sensor, which can be used to measure a gas/solids or gas/liquid flow, will be described. Some details of the electrostatic charge amplifier and signal processing will be discussed. Initial experimental results will be given. © International Society for Industrial Process Tomography, 2010. All rights reserved.

关键词： Liquids

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Comparison of three electrical capacitance tomography systems

Comparison of three electrical capacitance tomography system...

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IEEE International Conference on Imaging Systems and Techniques

作者： Deng, Xiang Chen, Dixiang Yang, Wuqiang School of Mechatronics Engineering and Automation National University of Defense Technology Changsha 410073 China School of Mechanical Electronic and Control Engineering Beijing Jiaotong University Beijing 100044 China School of Electrical and Electronic Engineering University of Manchester Manchester M60 1QD United Kingdom

ISBN: (纸本)9781424464944

Electrical capacitance tomography (ECT) has been developed for two decades to visualize the internal behavior of industrial processes containing dielectric components. Three different ECT systems have been developed: (1) based on a charge/discharge capacitance measuring circuit, (2) based on an AC circuit and (3) based on an impedance analyzer. In this paper the operation principles, calibration methods and some performance of the three systems are compared. The experimental results prove that the AC-based ECT system is superior to the charge/discharge ECT system. Although the impedance analyzer based ECT system can provide the highest accuracy and the best image quality, it is bulky and expensive. © 2010 IEEE.

关键词： Calibration

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Analysis of actuation characteristics of CuAlNiMn/Polyimide thin film shape memory alloy

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Materials Today: Proceedings 2021年 46卷 9580-9585页

作者： M. Geetha K. Dhanalakshmi S. Jayachandran I.A. Palani V. Sathish Kumar Department of Instrumentation and Control Engineering National Institute of Technology Tiruchirappalli 620021 India Mechatronics and Instrumentation Lab Discipline of Mechanical Engineering Indian Institute of Technology Indore 453331 India Mechanical Engineering Kongunadu College of Engineering and Technology Tiruchirappalli 621215 India

The article presents the study of the deformation of an SMA bimorph actuator during static heating. The thermomechanical behavior of thin film CuAlNiMn shape memory alloy (SMA) on polyimide substrate is analyzed using finite element method. The analysis is carried out for three different geometries to obtain the displacement when temperature is varied. The actuation characteristics of the SMA bimorph are studied through direct heating and joule heating techniques. The surface morphology and composition of the bimorph sample are obtained using the Scanning Electron Microscope (SEM). The numerical analysis of the thermomechanical behavior of a thin film CuAlNiMn SMA bimorph is carried out using the finite element method. The procedure is applied for a double-legged cantilever configuration of the bimorph to obtain the actuation in terms of displacement; by varying the temperature. The same is repeated for semi-circular and pentagon shapes of the bimorph to obtain the influence of area on the displacement. It is observed that SMA bimorph displaces with the rise in temperature and the magnitude of displacement increases with the increase in surface area of different geometries. The physical actuation characteristic of CuAlNiMn-polyamide bimorph is studied by thermal heating and electrical heating of the sample, which confirm the shape memory effect of the SMA and provide the displacement characteristics of the bimorph when applying an electrical current.

关键词： CuAlNiMn shape memory alloy Bimorph Static Plate heating Joule heating

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