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Investigation of MgO Seed Layer Crystallinity and Morphology-Dependent Characteristics of NO2 Gas Sensors Using In2O3 Nanorods Grown by Hydrothermal Synthesis Method

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IEEE Sensors Journal 2025年第11期25卷 18777-18784页

作者： Liu, Bo-Yi Wu, Mu-Ju Chang, Ting-Chun Lee, Ching-Ting Lee, Hsin-Ying National Cheng Kung University Department of Photonics Tainan701 Taiwan National Cheng Kung University Program on Key Materials Academy of Innovative Semiconductor and Sustainable Manufacturing Tainan701 Taiwan National Cheng Kung University Department of Photonics and the Institute of Microelectronics Department of Electrical Engineering Tainan701 Taiwan Yuan Ze University Department of Electrical Engineering Taoyuan320 Taiwan National Cheng Kung University Department of Photonics and the Program on Key Materials Academy of Innovative Semiconductor and Sustainable Manufacturing Tainan701 Taiwan

This study investigated the effects and influences of MgO seed layer and morphology on the characteristics of NO2 gas sensors fabricated using the In2O3 nanorod sensing membranes grown by the hydrothermal synthesis method. The morphologies of In(OH)3 nanorods were modified using different MgO seed layers and different precursor solutions of indium chloric tetrahydrate and urea. The In(OH)3 nanorods were converted into In2O3 nanorods in a hydrogen ambience at 300 oC for 10 min. Using the hydrothermal synthesis method with indium chloric tetrahydrate of 65 mM and urea of 1.42 M, the optimal response of the NO2 gas sensors was 219.1 by using the In(OH)3 nanorods grown on 100-nm-thick MgO seed layers sputtered with RF power of 100 W and annealed in oxygen ambience at 500 oC for 2 hours. The response time and recovery time of the resulting NO2 gas sensors were 42 sec and 82 sec, respectively. © 2001-2012 IEEE.

关键词： Nanorods

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Improved optical enhancement using double-width plasmonic gratings with nanogaps

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photonics Research 2016年第5期4卷 173-180页

作者： Ahmad A.Darweesh Stephen J.Bauman Joseph B.Herzog Microelectronics-Photonics Graduate Program University of Arkansas Department of Physics University of Arkansas

Plasmonic grating structures have been shown effective at increasing near-field optical enhancement. A doublewidth plasmonic grating design is introduced, where each period has two alternating metal widths separated by a nanogap. With this new design, analysis has shown that plasmonic resonances couple between each metal section,resulting in even greater optical enhancement compared with single-width gratings. The geometry that gives the greatest optical enhancement has been determined with a computational model. This work demonstrates that the increased enhancement is due to hybridized modes that couple between the two grating segments.

关键词： Improved optical enhancement using double-width plasmonic gratings with nanogaps nm

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Attribution of Fano resonant features to plasmonic particle size, lattice constant, and dielectric wavenumber in square nanoparticle lattices

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photonics Research 2014年第1期2卷 15-23页

作者： Drew DeJarnette Justin Norman D.Keith Roper Microelectronics and Photonics Graduate Program University of ArkansasFayettevilleArkansas 72701USA Department of Chemical Engineering University of ArkansasFayettevilleArkansas 72701USA

Fano resonances between plasmons and diffracted light offer tunable energies and locales,but attribution of Fano resonance features to geometry and physicochemistry of metal nanostructures and adjacent dielectrics has been confounded by complexity and computational *** work shows predictable modal shifts of Fano resonance in square lattices of plasmonic nanostructures can be attributed directly to changes in medium wavenumber,particle size,and lattice constant that alter plasmon polarizability and diffractive *** 45 to 80 nm radius particles,a window of lattice constants that support Fano resonances is identified in a range from 500 to 900 *** constants that support high intensity resonances are determined by individual particle polarizability and medium *** resonance wavelengths redshift from diffracted photon energies as local refractive index(RI)changes due to coupling with particle polarizability in the *** sensitivities for quadrupole,dipole,and Fano resonances are 150,348,and 541 nm,respectively,per RI *** resonance intensity may be enhanced more than tenfold by selecting nanoparticle sizes and lattice *** quantitative effects of such parametric changes are rapidly and intuitively distinguished using a semi-analytic approach,consisting of an exact expression for particle polarizability,a trigonometric description of diffraction,and a semianalytical coupled dipole approximation.

关键词： lattice particle wave

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Two-dimensional epitaxial growth of strained InGaAs on GaAs (001)

Two-dimensional epitaxial growth of strained InGaAs on GaAs ...

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Quantum Confined Semiconductor Nanostructures

作者： Wen, Hong Wang, Zhiming Salamo, G.J. MRSEC Microelectronics-Photonics Program University of Arkansas Fayetteville AR 72701 United States

Molecular beam epitaxy growth of lattice mismatched In0.53Ga0.47As/GaAs(100) system is studied by in situ scanning tunneling microscope (STM) and reflection high energy electron diffraction. InGaAs layers with a thickness ranging up to 250 nm do not exhibit a smooth surface when grown under In-rich conditions. RHEED and STM confirm the well-ordered (4×2) reconstruction and mono-layer steps associated with this unique planar growth mode. Large STM scans reveal a characteristic morphology of rectangular shaped islands distributed on large flat terraces which are typically more than 300 nm width but only monolayer steps.

关键词： Semiconducting indium gallium arsenide

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Two-dimensional Epitaxial Growth of Strained InGaAs on GaAs (001)

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MRS Online Proceedings Library 2021年第1期737卷 403-408页

作者： Hong Wen Zhiming Wang G.J. Salamo MRSEC and Microelectronics-Photonics Program University of Arkansas Fayetteville USA

Molecular beam epitaxy growth of lattice mismatched In0.53Ga0.47As / GaAs(100) system is studied by in situ scanning tunneling microscope (STM) and reflection high energy electron diffraction. InGaAs layers with a thickness ranging up to 250 nm do not exhibit a smooth surface when grown under In-rich conditions. RHEED and STM confirm the well-ordered (4×2) reconstruction and mono-layer steps associated with this unique planar growth mode. Large STM scans reveal a characteristic morphology of rectangular shaped islands distributed on large flat terraces which are typically more than 300 nm width but only mono-layer steps.

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Computational model of breast cancer tumor growth

Computational model of breast cancer tumor growth

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2007 IEEE Region 5 Technical Conference, TPS

作者： Shumate, Seth D. El-Shenawee, Magda Microelectronics-Photonics Program University of Arkansas Fayetteville United States Department of Electrical Engineering University of Arkansas Fayetteville United States

Computational methods have been utilized to simulate the growth behavior of a tumor originating near the mandible. Extension of the model to three-dimensions (3D) and adaptation to the case of breast cancer, specifica... 详细信息

ISBN: (纸本)1424412803

关键词： Tumors

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Application of aligned carbon nanotubes in micro shear stress sensing

Application of aligned carbon nanotubes in micro shear stres...

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2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004

作者： Clendenin, Jason Rokadia, Husein Tung, Steve Ogburia, Konye Microelectronics-Photonics Program University of Arkansas Department of Mechanical Engineering University of Arkansas Department of Electrical Engineering Alabama A and M University

This paper reports the development of a MEMS based aligned carbon nanotube, thermal surface shear stress sensor for micro shear stress sensing applications. This paper is focused on the theory of alignment of CNTs during sensing element fabrication as well as experimental and calibration results from sensor testing. It is found that CNTs can be routinely aligned between surface micromachined gold electrodes using AC dielectrophoresis to form shear stress sensing elements. In order to fabricate the sensing element, a 25 V p-p electric field at 3 MHz was used to form a ∼150 μm wide line of aligned CNTs. The measured resistance of the sensing element was 580 Ω. The fabricated CNT shear stress sensor has been tested by bonding a Plexiglas channel to the electrode chip in order to create a 2D internal flow. The CNT shear stress sensor was found to have an average TCR of -0.0112 %/ °C or -0.0691Ω/°C and a current to voltage ratio of 0.07 mA/V. Copyright © 2004 by ASME.

关键词： Carbon nanotubes

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A reduced-cost built-in self test for an FM receiver

A reduced-cost built-in self test for an FM receiver

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作者： Mannath, D. Montano-Martinez, V. Syllaios, I. Bhatara, S. Attaluri, M. Parkar, Z. Ang, S.S. Texas Instruments DallasTX United States Microelectronics-Photonics Program University of Arkansas Fayetteville AR 72701 United States

ISBN: (纸本)9781424495344

This paper describes the methodology used to replace a conventional FM SNR test on a 65nm Texas Instruments radio with a similar test implemented as a Built-in Self Test (BiST). A traditional R square approach was used for the correlation. Data from various changes that affected/improved the correlation is presented. This approach resulted in test cost savings of around 40%. © 2010 IEEE.

关键词： CMOS integrated circuits

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Control of sidewall slope in silicon vias using SF2 O 2plasma etching in a conventional reactive ion etching tool

Control of sidewall slope in silicon vias using SF2 O 2plasm...

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作者： Figueroa, R.F. Spiesshoefer, S. Burkett, S.L. Schaper, L. Microelectronics-Photonics Program University of Arkansas Fayetteville AR 72701 Department of Electrical Engineering University of Arkansas Fayetteville AR 72701

The etching of anisotropic blind vias in silicon with diameters of 5-10 μm and an aspect ratio ∼2-4 with controlled sidewall inclination is reported. The motivation for this work is the creation of a vertical, or three dimensional interconnect. Via formation by reactive ion etch (RIE) processing is the focus of this project. Arrays of vias have been etched in 125 mm diam silicon (100) wafers using a photoresist mask. A parallel plate RIE system with a SF6 O2 gas mixture is used. The effects of O2 (SF6 + O2) gas flow ratio, electrode bias, and chamber pressure on etch rate and feature profile have been studied. Visualization of the via profiles using scanning electron microscopy is used to identify the key parameters that control the sidewall slope. This slope is important for the subsequent deposition of via lining materials before filling with Cu. Our results indicate that the O2 (SF6 + O2) ratio is a key parameter in determining the sidewall slope, however the electrode bias and chamber pressure are critical in determining the physical and chemical process balance that determine the anisotropy of the etch process. © 2005 American Vacuum Society.

关键词： Anisotropy

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Rotational control of tethered bacterial flagellar motor

Rotational control of tethered bacterial flagellar motor

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2008 8th IEEE Conference on Nanotechnology, IEEE-NANO

作者： Tung, Steve Kim, Jin-Woo Pooran, Ryan Department of Mechanical Engineering Department of Biological and Agricultural Engineering Microelectronics-Photonics Program University of Arkansas Fayetteville AR United States

ISBN: (纸本)9781424421046

Bacterial flagellar motors can be integrated with microfluidic systems to provide mechanical power at the micro- and nanoscale level. This paper describes a non-contact method based on hydrodynamic loading for controlling the rotational behavior of tethered flagellar motors in a microfluidic system. Experimental results indicate that with a small micro channel flow, tethered motors can be slowed down and ultimately stopped completely when the flow-induced torque on the cell body cancels out the torque capability of the motor. By using this technique, it is possible to synchronize the phase angles of multiple motors, which is critical in maximizing the performance of the hybrid flagellar motor-microfluidic system. © 2008 IEEE.

关键词： Microfluidics

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