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Characterization and Modeling of Pad Asperity Response in CMP

MRS Online Proceedings Library 2010年第1期1249卷 1-8页

作者： Duane Boning Wei Fan Microsystems Technology Laboratories Electrical Engineering and Computer Science Massachusetts Institute of Technology Cambridge U.S.A.

A model is proposed to understand the interactions between CMP pad asperities and the wafer. Pad asperity reduced modulus and height distribution are included in the model. Physical measurements of asperity properties are performed: asperity reduced modulus is measured by nanoindentation, and pad asperity height distribution is scanned by profilometry. The measured results are used in the model to predict the contact area percentage between the pad and wafer in the CMP process.

关键词： CMP microelectronics nano-indentation

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Supervisory control of software execution for failure avoidance: Experience from the Gadara project

Supervisory control of software execution for failure avoida...

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作者： Wang, Yin Cho, Hyoun Kyu Liao, Hongwei Nazeem, Ahmed Kelly, Terence P. Lafortune, Stéphane Mahlke, Scott Reveliotis, Spyros A. Hewlett-Packard Laboratories United States Department of Electrical Engineering and Computer Science University of Michigan United States School of Industrial and Systems Engineering Georgia Institute of Technology United States

ISBN: (纸本)9783902661791

We discuss our experience in the Gadara project, whose objective is to control the execution of software to avoid potential failures using discrete-event control techniques. We summarize our accomplishments so far and discuss future challenges. After initial work on safety of workflow scripts via supervisory control techniques, we have focused our efforts on deadlock avoidance in multithreaded C programs that use locking primitives to control access to shared data. We describe how we automatically construct automata models of workflows and Petri net models of concurrent programs. In the case of multithreaded C programs, the resulting models characterize a new class of resource-allocation Petri nets called Gadara nets. These nets enjoy structural properties that facilitate the synthesis of liveness-enforcing control policies that are maximally-permissive. We describe our strategy for run-time implementation of these control policies, especially by a technique known as code instrumentation. It is hoped that the lessons learned so far in the Gadara project will be useful in other application areas and will suggest avenues for future theoretical investigations.

关键词： Petri nets

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A novel vital-sign sensor based on a self-injection-locked oscillator

A novel vital-sign sensor based on a self-injection-locked o...

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作者： Wang, Fu-Kang Li, Chien-Jung Hsiao, Chieh-Hsun Horng, Tzyy-Sheng Lin, Jenshan Peng, Kang-Chun Jau, Je-Kuan Li, Jian-Yu Chen, Cheng-Chung Department of Electrical Engineering National Sun Yat-Sen University Kaohsiung 804 Taiwan Department of Electrical and Computer Engineering University of Florida Gainesville FL 32611 United States Department of Computer and Communication Engineering National Kaohsiung First University of Science and Technology Kaohsiung 811 Taiwan Information and Communication Research Laboratories ITRI Hsinchu 310 Taiwan

A novel vital-sign sensor with a self-injection-locked oscillator and a frequency demodulator to reduce system complexity and improve sensitivity is proposed. The theory provides a delta-sigma model to account for the excellent signal-to-noise spectral density ratio in a parametric study of the sensitivity performance. Then, the experiments verify the sensing principle and the predicted performance. Accordingly, a prototype sensor with high sensitivity is realized for noncontact cardiopulmonary monitoring, achieving a long sensing distance without the need for a low-noise amplifier. The sensing distance can grow four times longer by doubling the operating frequency. Furthermore, the sensor using a swept frequency can eliminate the null detection points and the external radio interference. As an experimental result, the sensor, which is placed 4 m away from the subject, can reliably detect the heartbeat signal an the operating frequency of 3.6 GHz and an output power level of 0 dBm. © 2006 IEEE.

关键词： Radio interference

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Supervisory Control of Software Execution for Failure Avoidance: Experience from the Gadara Project

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IFAC Proceedings Volumes 2010年第12期43卷 259-266页

作者： Yin Wang Hyoun Kyu Cho Hongwei Liao Ahmed Nazeem Terence P. Kelly Stéphane Lafortune Scott Mahlke Spyros A. Reveliotis Hewlett-Packard Laboratories Department of Electrical engineering and Computer Science University of Michigan School of Industrial & Systems Engineering Georgia Institute of Technology

关键词： Discrete Event Systems Supervisory Control Petri Nets Software Failures Deadlock

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A Park transform-based method for condition monitoring of three-phase electromechanical systems

A Park transform-based method for condition monitoring of th...

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5th IET International Conference on Power Electronics, Machines and Drives, PEMD 2010

作者： Laughman, Christopher Leeb, Steven B. Norford, Leslie K. Shaw, Steven R. Armstrong, Peter R. Mitsubishi Electric Research Laboratories 201 Broadway Cambridge MA 02139 United States Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology Cambridge MA 02139 United States Department of Architecture Massachusetts Institute of Technology Cambridge MA 02139 United States Department of Electrical and Computer Engineering Montana State University Bozeman MT 59717 United States Masdar Institute of Science and Technology Abu Dhabi United Arab Emirates

ISBN: (纸本)9781849192316

This paper presents a Park transform-based method for preprocessing stator current data from a motor and transforming it into a form that is useful for fault detection and diagnostics. The proposed method generates power signatures that are invariant to the initial electrical angle of the voltage when the motor is connected to the utility, and can also adapt to variations in the electrical angle of the supply voltage over time. A modified nonlinear least squares algorithm identifies and tracks the parameters of the supply voltage over time, ensuring that the supply voltage and the argument of the Park transformation remain synchronized. Experimental results are presented that illustrate the method's effectiveness for identifying changes in the mechanical load on a 3/4 HP refrigeration compressor.

关键词： Condition monitoring

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Mortality Dependence of Cu Dual Damascene Interconnects on Adjacent Segment

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MRS Online Proceedings Library (OPL) 2011年第1期812卷 F7.2-F7.2页

作者： C.W. Chang C.L. Gan C.V. Thompson K.L. Pey W.K. Choi N. Hwang Advanced Materials for Micro- and Nano-Systems Singapore-MIT Alliance 4 Engineering Drive 3 Singapore 117576 School of Materials Engineering Nanyang Technological University Nanyang Avenue Singapore 639798 Department of Materials Science and Engineering Massachusetts Institute of Technology Cambridge Massachusetts 02139 School of Electrical & Electronics Engineering Nanyang Technological University Nanyang Avenue Singapore 639798 Department of Electrical and Computer Engineering National University of Singapore 4 Engineering Drive 3 Singapore 117576 Microsystems Modules & Components Laboratory Institute of Microelectronics Singapore 11 Science Park Road Singapore Science Park II Singapore 117685

Three terminal ‘dotted-I’ interconnect structures, with vias at both ends and an additional via in the middle, were tested under a variety of test conditions. Failures (mortalities) were observed even when segments were tested under conditions that would not have led to failure in two-terminal structures. Mortalities were found in right segments with jL values as low as 1250 A/cm, which is lower when compared to the immortality condition (jL)cr of 3700 A/cm reported for similar via-terminated structures. Moreover, we found that the mortality of a dotted-I segment is dependent on the direction and magnitude of the current in the adjacent segment. These results suggest that there is not a definite value of the jL product that defines true immortality in individual segments that are part of an interconnect tree. More importantly, the critical jL value for a single segment of Cu interconnects may be reduced or increased by an adjacent segment. Therefore independently determined (jL)cr values cannot be directly applied to interconnects with branched segments, but rather the magnitude as well as the direction of the current flow in the adjoining segments must be taken into consideration in evaluating the immortality of interconnect segments in an interconnect network.

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Phase-locked arrays of surface-emitting terahertz quantum-cascade lasers

Phase-locked arrays of surface-emitting terahertz quantum-ca...

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Conference on Lasers and Electro-Optics

作者： Kao, Tsung-Yu Hu, Qing Reno, John L. Department of Electrical Engineering and Computer Science Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge MA 02139 United States Sandia National Laboratories Center of Integrated Nanotechnologies MS 1303 Albuquerque NM 87185-1303 United States

ISBN: (纸本)9781557528902

We report single-mode operation of phase-locked arrays of surface-emitting distributedfeedback terahertz quantum-cascade lasers. Carefully-designed phase-sector locks lasers in-phase, creating tighter beam-patterns along the phased-array direction (FWHM ≈ 10°). This method allows beam-steering applications at terahertz frequencies. © 2009 Optical Society of America.

关键词： Locks (fasteners)

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Operation of a 1.8-THz quantum-cascade laser above 160 K

Operation of a 1.8-THz quantum-cascade laser above 160 K

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Conference on Lasers and Electro-Optics

作者： Kumar, Sushil Chan, Chun W. I. Hu, Qing Reno, John L. Department of Electrical Engineering and Computer Science Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge MA 02139 United States Sandia National Laboratories Center of Integrated Nanotechnologies MS 1303 Albuquerque NM 87185-1303 United States

ISBN: (纸本)9781557528902

The maximum operating temperature of previously reported terahertz quantum-cascade lasers (QCLs) has empirically been limited to a value of ∼ ℏω/kB. Here, we report a new design scheme for terahertz QCLs and achieve 163-K operation for a 1.8-THz QCL, which is a factor of 1.9 larger than ℏω/kB. © 2010 Optical Society of America.

关键词： Quantum cascade lasers

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Mission-oriented design: A fully autonomous mobile urban robot

Mission-oriented design: A fully autonomous mobile urban rob...

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IEEE International Conference on Multisensor Fusion and Integration for Intelligent Systems

作者： Zhang, Qun Tao, Pey Yuen Abraham, Aswin Thomas Rebsamen, Brice Yang, Chenguang Ge, Shuzhi Sam National University of Singapore Singapore 117456 Singapore A Star Agency for Science Technology and Research Singapore 638075 Singapore Department of Electrical and Computer Engineering Singapore Temasek Laboratories National University of Singapore Singapore 117411 Singapore Department of Bioengineering Imperial College London London SW7 2AZ United Kingdom Department of Electrical and Computer Engineering National University of Singapore Singapore 117576 Singapore

ISBN: (纸本)9781424454266

This paper describes a fully autonomous mobile urban robot-X1, which can perform multiple tasks autonomously in an unknown urban environment without human guidance, including mobile reconnaissance, target searching, and object manipulation. The mission-oriented design, which allows reliability and extensibility of the robotic system, includes a high degree of modularity for both hardware and software architecture, and coordination between tasks. Our strategy specifically addresses fundamental issues such as autonomous navigation in unknown urban environments and vision-based object manipulation. All the functionalities have been proved effective in the real urban environments. The robot platform is being built to provide valuable experiences on autonomous robotics research. © 2010 IEEE.

关键词： Robots

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Development of tunable terahertz wire lasers

Development of tunable terahertz wire lasers

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作者： Qin, Qi Williams, Benjamin S. Kumar, Sushil Hu, Qing Reno, John L. Department of Electrical Engineering and Computer Science Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge MA 02139 United States Department of Electrical Engineering University of California Los Angeles CA 90095 United States Sandia National Laboratories Center of Integrated Nanotechnologies MS 1303 Albuquerque NM 87185-1303 United States

We report a novel tuning mechanism based on a "wire-laser" with subwavelength transverse dimensions(w

ISBN: (纸本)9781557528902

We report a novel tuning mechanism based on a "wire-laser" with subwavelength transverse dimensions(w

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