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21st International Conference on Miniaturized systems for Chemistry and Life sciences, microTAS 2017

作者： Hun, Tingting Liu, Yaoping Guo, Yechang Liu, Xiaoyi Wang, Wei Sun, Yan Fan, Yubo School of Biological Science and Medical Engineering Beihang University Key Laboratory for Biomechanics and Mechanobiology of Ministry of Education Beijing100191 China Institute of Microelectronics Peking University Beijing100871 China National Key Laboratory of Science and Technology on Micro/Nano Fabrication Beijing100871 China Innovation Center for Micro-Nano-electronics and Integrated System Beijing100871 China State Key Laboratory of Transducer Technology Chinese Academy of Sciences Shanghai200050 China

ISBN: (纸本)9780692941836

Investigations on single-cell level are significant in cellular researches, and the captured of single cell have been reported by many researchers. However, there is still a lack of effective methods to realize high-throughput cell capture and arrangement simultaneously. In this paper, we compared three micropattern methods for high-throughput cell capture and arrangement, and we found a micropore-arrayed membrane based micropattern method could reach efficiency higher than 90%. © 17CBMS-0001.

关键词： Cytology

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First Demonstration of Wafer-level Arrayed β-Ga2O3 Thin Films and MOSFETs on Diamond by Transfer Printing technology

First Demonstration of Wafer-level Arrayed β-Ga2O3 Thin Fil...

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2024 IEEE International Electron devices Meeting, IEDM 2024

作者： Zhao, Tiancheng Yu, Xinxin Xu, Wenhui He, Yang Qu, Zhenyu Shen, Rui Wang, Ruize Guo, Huaixin Sun, Huarui Li, Zhonghui Zhou, Min You, Tiangui Ou, Xin State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai200050 China CETC Key Laboratory of Carbon-based Electronics Nanjing Electronic Devices Institute Nanjing210016 China National Key Laboratory of Solid-State Microwave Devices and Circuits Nanjing210016 China School of Science Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System Harbin Institute of Technology Shenzhen518055 China

ISBN: (纸本)9798350365429

We, for the first time, fabricated wafer-level arrayed βGa2O3 single crystal thin films on diamond substrate using transfer printing technology. The transfer-printed β-Ga2O3 thin film possesses a thickness of 260 nm, a XRD rocking curve FWHM of ~78 arcsec, and a surface roughness of 0.36 nm. The amorphous interface layer after post-annealing is less than 2 nm. The thermal boundary resistance is extracted to 21.7 m2·K/GW, which is the lowest value reported for single-crystal β-Ga2O3 integrated with diamond. Thanks to the high thermal conductivity of diamond and the high-quality hetero-interface, the performance of β-Ga2O3-on-diamond RF MOSFETs is significantly enhanced. The maximum on-state current is 810 mA/mm, and the fmax before de-embedding reaches 61 GHz, which is the highest recorded value to date. Infrared thermal imaging shows that integrating with diamond significantly reduces the junction temperature of β-Ga2O3 devices. The Rth of β-Ga2O3-ondiamond devices is merely 5.52 K·mm/W, setting a new record for βGa2O3-based devices. These results demonstrate that hetero-integration with diamond via wafer-level transfer printing technology provides an effective thermal management platform for β-Ga2O3, facilitating its advancement in high-power and RF devices. © 2024 IEEE.

关键词： Substrates

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Publisher Correction: Compact angle-resolved metasurface spectrometer

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Nature materials 2025年第4期24卷 650页

作者： Guiyi Cai Yanhao Li Yao Zhang Xiong Jiang Yimu Chen Geyang Qu Xudong Zhang Shumin Xiao Jiecai Han Shaohua Yu Yuri Kivshar Qinghai Song Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems Harbin Institute of Technology Shenzhen People's Republic of China. Pengcheng Laboratory Shenzhen People's Republic of China. Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems Harbin Institute of Technology Shenzhen People's Republic of China. shumin.xiao@***. Pengcheng Laboratory Shenzhen People's Republic of China. shumin.xiao@***. National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of Technology Harbin People's Republic of China. shumin.xiao@***. National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of Technology Harbin People's Republic of China. Pengcheng Laboratory Shenzhen People's Republic of China. yush@***. Nonlinear Physics Center Research School of Physics Australian National University Canberra Australian Capital Territory Australia. yuri.kivshar@anu.edu.au. Qingdao Innovation and Development Center Harbin Engineering University Qingdao People's Republic of China. yuri.kivshar@anu.edu.au. Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems Harbin Institute of Technology Shenzhen People's Republic of China. qinghai.song@***. Pengcheng Laboratory Shenzhen People's Republic of China. qinghai.song@***. Collaborative Innovation Center of Extreme Optics Shanxi University Taiyuan People's Republic of China. qinghai.song@***.

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A Novel MOEMS NIR Spectrometer

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Physics Procedia 2011年 19卷 110-114页

作者： Zhang Zhihai Mo Xiangxia Guo Yuanjun Wang Wei The Key Laboratory for Opto-eletronic Technology and System under Ministry of Education Chongqing University Chongqing 400044China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044China

In order to detect luminous intensity of light signal in NIR (Near-infrared) wavelength range, a novel MOEMS(micro-Opto-Electro-Mechanical systems) NIR spectrometer is proposed in the paper. It uses DMD (Digital micro-mirror Device) to band filter the input spectrum. The merits of DMD are small size, low price and high scan speed. Especially, when DMD acts as a Hadamard Transform encoding mask, the SNR (signal-to-noise-ratio) can be improved by multiplexing the light intensities. The structure and the theory of this spectrometer are analyzed. The Hadamard-S matrix and mask of 63-order and 127-order are designed. The output spectrum of the new spectrometer coincides with experimental result of Shimadzu spectrometer. The resolution of the new spectrometer is 19 nm over the spectral range between 900∼1700 nm while single scan time is only 2.4S. The SNR is 44.67:1. The size of optical path is 70mm × 130 mm, and it has a weight less than 1Kg. It can meet the requirement of real time measurement and portable application.

关键词： MOEMS NIR spectrometer Digital micro-mirror Device Hadamard transform portable application

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Stoichiometric effect on electrical and near-infrared photodetection properties of full-composition-range GaAs1−xSbx nanowires

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nano Research 2021年第11期14卷 3961-3968页

作者： Jiamin Sun Mingming Han Meng Peng Lei Zhang Dong Liu Chengcheng Miao Jiafu Ye Zhiyong Pang Longbing He Hailu Wang Qing Li Peng Wang Lin Wang Xiaoshuang Chen Chongxin Shan Litao Sun Weida Hu Zai-xing Yang School of Physics and School of Microelectronics Shandong UniversityJinan250100China State Key Laboratory of Infrared Physics Shanghai Institute of Technical PhysicsChinese Academy of SciencesShanghai200083China Wuhan National Laboratory for Optoelectronics Huazhong University of Science and TechnologyWuhan430074China SEU-FEI Nano-Pico Center Key Lab of MEMS of Ministry of EducationCollaborative Innovation Center for Micro/Nano FabricationDevice and SystemSoutheast UniversityNanjing210096China School of Physics and Photoelectric Engineering Hangzhou Institute for Advanced StudyUniversity of Chinese Academy of SciencesHangzhou310024China Henan Key Laboratory of Diamond Optoelectronic Materials and Devices School of Physics and EngineeringZhengzhou UniversityZhengzhou450001China

As one of the most important narrow bandgap ternary semiconductors, GaAs1−xSbx nanowires (NWs) have attracted extensive attention recently, due to the superior hole mobility and the tunable bandgap, which covers the whole near-infrared (NIR) region, for technological applications in next-generation high-performance electronics and NIR photodetection. However, it is still a challenge to the synthesis of high-quality GaAs1−xSbx NWs across the entire range of composition, resulting in the lack of correlation investigation among stoichiometry, microstructure, electronics, and NIR photodetection. Here, we demonstrate the success growth of high-quality GaAs1−xSbx NWs with full composition range by adopting a simple and low-cost surfactant-assisted solid source chemical vapor deposition method. All of the as-prepared NWs are uniform, smooth, and straight, without any phase segregation in all stoichiometric compositions. The lattice constants of each NW composition have been well correlated with the chemical stoichiometry and confirmed by high-resolution transmission electron microscopy, X-ray diffraction, and Raman spectrum. Moreover, with the increase of Sb concentration, the hole mobility of the as-fabricated field-effect-transistors and the responsivity and detectivity of the as-fabricated NIR photodetectors increase accordingly. All the results suggest a careful stoichiometric design is required for achieving optimal NW device performances.

关键词： GaAs1−xSbx nanowire stoichiometry effect full-composition-range field-effect hole mobility near-infrared photodetection

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Dispersion engineering and measurement in crystalline microresonators using a fiber ring etalon

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Photonics Research 2021年第11期9卷 2222-2229页

作者： XIAOBAO ZHANG GUOPING LIN TANG SUN QINGHAI SONG GUANGZONG XIAO HUI LUO Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System School of ScienceHarbin Institute of TechnologyShenzhen 518055China College of Advanced Interdisciplinary Studies National University of Defense TechnologyChangsha 410073China

Dispersion engineering and measurement are significant for nonlinear photonic applications using whispering gallery mode ***,the Kerr microresonator frequency comb as an important example has attracted a great amount of interest in research fields due to the potential capability of full integration on a chip.A simple and cost-efficient way for dispersion measurements is thereby in high demand for designing such a microcomb ***,we report a dispersion measurement approach using a fiber ring etalon *** free spectral range of the etalon is first measured through sideband modulation,and the dispersion of the etalon is inferred by binary function fitting during the dispersion *** method is demonstrated on two MgF_(2) disk *** results show good agreement with numerical simulations using the finite element *** engineering on such resonators is also numerically investigated.

关键词： fiber resonator Dispersion

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Direct observation of chaotic resonances in optical microcavities

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Light(science & Applications) 2021年第8期10卷 1455-1461页

作者： Shuai Wang Shuai Liu Yilin Liu Shumin Xiao Zi Wang Yubin Fan Jiecai Han Li Ge Qinghai Song Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Harbin Institute of Technology(Shenzhen)Shenzhen 518055China National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of TechnologyHarbin 150080China. Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuan 030006China. Department of Physics and Astronomy College of Staten IslandCUNYStaten IslandNY 10314USA. The Graduate Center CUNYNew YorkNY 10016USA

Optical microcavities play a significant role in the study of classical and quantum *** date,most experimental explorations of their internal wave dynamics have focused on the properties of their inputs and outputs,without directly interrogating the dynamics and the associated mode patterns *** a result,this key information is rarely retrieved with certainty,which significantly restricts the verification and understanding of the actual chaotic *** we demonstrate a simple and robust approach to directly and rapidly map the internal mode patterns in chaotic *** introducing a local index perturbation through a pump laser,we report a spectral response of optical microcavities that is proportional to the internal field *** this technique,chaotic modes with staggered mode spacings can be ***,a complete chaos assisted tunneling(CAT)and its time-reversed process are experimentally verified in the optical domain with unprecedented certainty.

关键词： motion chaotic reversed

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High-throughput prediction of the carrier relaxation time via data-driven descriptor

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npj Computational Materials 2020年第1期6卷 435-440页

作者： Zizhen Zhou Guohua Cao Jianghui Liu Huijun Liu Key Laboratory of Artificial Micro-and Nano-Structures of Ministry of Education and School of Physics and Technology Wuhan UniversityWuhan 430072China Center for Quantum Materials and Devices College of PhysicsChongqing UniversityChongqing 401331China International Center for Quantum Design of Functional Materials(ICQD) Hefei National Laboratory for Physical Sciences at the Microscaleand Synergetic Innovation Center of Quantum Information and Quantum PhysicsUniversity of Science and Technology of ChinaHefeiAnhui 230026China

It has been demonstrated that many promising thermoelectric materials,such as tetradymite compounds are also threedimensional topological *** both cases,a fundamental question is the evaluation of carrier relaxation time,which is usually a rough task due to the complicated scattering *** works using the simple deformation potential theory or considering complete electron-phonon coupling are,however,restricted to small *** adopting a data-driven method named SISSO(Sure Independence Screening and Sparsifying Operator)with the training data obtained via deformation potential theory,we propose an efficient and physically interpretable descriptor to evaluate the relaxation time,using tetradymites as prototypical *** any input from first-principles calculations,the descriptor contains only several elemental properties of the constituent atoms,and could be utilized to quickly and reliably predict the carrier relaxation time of a substantial number of tetradymites with arbitrary stoichiometry.

关键词： relaxation arbitrary utilized

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Bulk PZT thick film preparation on silicon wafer and its application for MEMS power generator

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作者： Tang, Gang Liu, Jing-Quan Li, Yi-Gui Liu, He-Sheng Yang, Chun-Sheng He, Dan-Nong Dao, Viet Dzung Tanaka, Katsuhiko Sugiyama, Susumu National Key Laboratory of Nano/Micro Fabrication Technology Institute of Micro and Nano Science and Technology Shanghai Jiaotong University Shanghai 200240 China Dept. of Mechanical and Engineering Nanchang Institute of Technology Nanchang 330099 China College of Mechanical and Electronic Engineering Nanchang University Nanchang 330031 China National Engineering Research Center for Nanotechnology Shanghai 200241 China Department of Micro System Technology Rtsumeikan University 1-1-1 Noji-Higashi Kusatsu Shiga Japan

ISBN: (纸本)0878492119

The paper reports on the PZT thick films preparation method by bonding bulk PZT on Si and then lapping PZT to suitable thicknesses. Epoxy resins with preferable thermostability were used as the intermediate adhesive layer in bonding process. A tight bonding of more than 10MPa was attained at suitable gradient bonding temperatures in an oven which were from 30 °C up to 105 °C according to 15 °C per thirty minutes and holding for more than 3h at 105 °C, and a pressure of more than 0.05MPa. Some properties of the prepared PZT thick films were tested. Finally, a piezoelectric MEMS power generator was fabricated by using the described techniques of PZT thick films preparation on silicon. The maximum output voltage under the resonant operation was measured. © (2011) Trans Tech Publications.

关键词： Thick films

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Highly precise and efficient cell separation with parylene c micropore arrayed filtration membrane 19

Highly precise and efficient cell separation with parylene c...

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19th International Conference on Miniaturized systems for Chemistry and Life sciences, microTAS 2015

作者： Liu, Y. Wang, W. Wu, W. Li, H. Sun, Y. Institute of Microelectronics Peking University Beijing100871 China National Key Laboratory of Science and Technology on Micro/Nano Fabrication 100871 China Innovation Center for Micro-Nano-Electronics and Integrated System Beijing100871 China No. 1 Hospital of Peking University Beijing100871 China School of Biological Science and Medical Engineering Beihang University Beijing100191 China

ISBN: (纸本)9780979806483

Very large scale micropore array has been recognized as a promising tool for separation and enrichment of rare targeted cells from a large sample volume. A high cell separation performance is strongly dependent on a small interspace between the separation pores (smaller than radius of the cell to avoid non-specific adhesion). Parylene C is a widely-used polymer in the MEMS for flexible thin film device preparation and some Parylene C based filtration devices have been applied for cell separation. This paper demonstrated a highly precise and efficient cell separation at a very high throughput driven only by the gravity with a very large scale (640000 micropores in 11 mm × 11 mm area) Parylene C micropore arrayed filtration membrane of ultra-high porosity. © 15CBMS-0001.

关键词： Cells

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