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Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk

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microsystems & nanoengineering 2024年第6期10卷 133-149页

作者： Renjie Tan Yong Xia Xiangguang Han Linya Huang Wendi Gao Chen Jia Ping Yang Qijing Lin Shujiang Ding Chenying Wang Libo Zhao State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong University710049 Xi’anChina School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Electronic Materials Research Laboratory Key Laboratory of the Ministry of EducationSchool of Electronic Science and EngineeringXi’an Jiaotong University710049 Xi’anChina Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China Engineering Research Center of Energy Storage Materials and Devices of Ministry of Education National Innovation Platform(Center)for Industry-Education Integration of Energy Storage TechnologySchool of ChemistryXi’an Jiaotong UniversityXi’an 710049China

Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing,minimally invasive surgery,and other narrow operating spaces,where currently available commercial sensors cannot meet the requirements because of their large *** this study,a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3×9.3×0.98 mm was designed,fabricated,and tested.A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams,comb capacitors,and parallel capacitors was employed.A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial *** proposed S-shaped beams achieved a large measurement range through stress *** results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical *** test results show that the proposed sensing chip can detect six-axis force/torque separately,with all crosstalk errors less than 2.59%*** force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm,*** sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm)for force and torque detection,respectively.

关键词： crosstalk shaped torque

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Unraveling Passivation Mechanism of Imidazolium-Based Ionic Liquids on Inorganic Perovskite to Achieve Near-Record-Efficiency CsPbI_(2)Br Solar Cells

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nano-micro Letters 2022年第1期14卷 152-166页

作者： Jie Xu Jian Cui Shaomin Yang Yu Han Xi Guo Yuhang Che Dongfang Xu Chenyang Duan Wenjing Zhao Kunpeng Guo Wanli Ma Baomin Xu Jianxi Yao Zhike Liu Shengzhong Liu Key Laboratory of Applied Surface and Colloid Chemistry Ministry of EducationShaanxi Key Laboratory for Advanced Energy Devices/Shaanxi Engineering Lab for Advanced Energy TechnologySchool of Materials Science and EngineeringShaanxi Normal UniversityXi’an 710119People’s Republic of China Dalian Institute of Chemical Physics iChEMUniversity of Chinese Academy of SciencesDalian National Laboratory for Clean EnergyChinese Academy of SciencesDalian 116023People’s Republic of China Ministry of Education Key Laboratory of Interface Science and Engineering in Advanced Materials Research Center of Advanced Materials Science and TechnologyTaiyuan University of TechnologyTaiyuan 030024People’s Republic of China Institute of Functional Nano&Soft Materials Jiangsu Key Laboratory for Carbon-Based Functional Materials&DevicesJoint International Research Laboratory of Carbon-Based Functional Materials and DevicesSoochow UniversitySuzhou 215123People’s Republic of China Department of Materials Science and Engineering and Shenzhen Engineering Research and Development Center for Flexible Solar Cells Southern University of Science and TechnologyShenzhen 518055People’s Republic of China State Key Laboratory of Alternate Electrical Power System With Renewable Energy Sources North China Electric Power UniversityBeijing 102206People’s Republic of China

The application of ionic liquids in perovskite has attracted wide-spread attention for its astounding performance improvement of perovskite solar cells(PSCs).However,the detailed mechanisms behind the improvement remain ***,a series of imidazolium-based ionic liquids(IILs)with different cations and anions is systematically investigated to elucidate the passivation mechanism of IILs on inorganic *** is found that IILs display the following advantages:(1)They form ionic bonds with Cs^(+)and Pb^(2+)cations on the surface and at the grain boundaries of perovskite films,which could effectively heal/reduce the Cs^(+)/I−vacancies and Pb-related defects;(2)They serve as a bridge between the perovskite and the hole-transport-layer for effective charge extraction and transfer;and(3)They increase the hydrophobicity of the perovskite surface to further improve the stability of the CsPbI_(2)Br *** combination of the above effects results in suppressed non-radiative recombination loss in CsPbI_(2)Br PSCs and an impressive power conversion efficiency of 17.02%.Additionally,the CsPbI_(2)Br PSCs with IILs surface modification exhibited improved ambient and light illumination *** results provide guidance for an indepth understanding of the passivation mechanism of IILs in inorganic perovskites.

关键词： Ionic liquids Inorganic perovskite Imidazolium Passivation High efficiency

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Self-powered solar-blind photodiodes based on EFG-grown(100)-dominant β-Ga_(2)O_(3) substrate

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Chinese Physics B 2021年第1期30卷 483-486页

作者： Xu-Long Chu Zeng Liu Yu-Song Zhi Yuan-Yuan Liu Shao-Hui Zhang Chao Wu Ang Gao Pei-Gang Li Dao-You Guo Zhen-Ping Wu Wei-Hua Tang Laboratory of Information Functional Materials and Devices School of Science&State Key Laboratory of Information Photonics and Optical CommunicationsBeijing University of Posts and TelecommunicationsBeijing 100876China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China The Engineering Research Center for Semiconductor Integrated Technology Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China China Aerospace System Simulation Technology Co. Ltd.(Beijing)Beijing 100195China Division of Interdisciplinary and Comprehensive Research&Platform for Characterization and Test Suzhou Institute of Nano-Tech and Nano-BionicsChinese Academy of SciencesSuzhou 215123China Center for Optoelectronics Materials and Devices&Key Laboratory of Optical Field Manipulation of Zhejiang Province Department of PhysicsZhejiang Sci-Tech UniversityHangzhou 310018China School of Nano-Tech and Nano-Bionics University of Science and Technology of ChinaHefei 230026China College of Electronic and Optical Engineering&College of Microelectronics Nanjing University of Posts and TelecommunicationsNanjing 210046China National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies Nanjing University of Posts and TelecommunicationsNanjing 210046China

We report the edge-defined-film-fed(EFG)-grown β-Ga_(2)O_(3)-based Schottky *** device has a reverse leakage current of ~nA and a rectified ratio of ~10^(4) at ±5 *** addition,the photodiode detector shows a dark current of 0.3 pA,a photo-responsivity(R) of 2.875 mA/W,a special detectivity(D*) of 10^(10) Jones,and an external quantum efficiency(EQE) of 1.4% at zero bias,illustrating a self-powered *** work may advance the development of the Ga_(2)O_(3)-based Schottky diode solar-blind photodetectors.

关键词： β-Ga_(2)O_(3)substrate Schottky photodiode solar-blind detection

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Enrichment efficiency optimization of dielectrophoresis cell chip based on interdigitated microelectrodes array

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key Engineering Materials 2015年 645卷 1255-1260页

作者： Gu, Wenwen Huang, Jie Department of Electronic and Control Engineering College of Engineering and Technology Southwest University Chongqing400715 China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing400030 China

At present, the majority dielectrophoresis chip designs optimize their performance by electric simulation and fluid field simulation. The lack of further cells force analysis and movement prediction results in a limited cell dielectrophoresis enrichment efficiency. The HepG2 hepatoma carcinoma cell movement under the action of dielectrophoresis force, fluid force and gravity was analyzed respectively by Comsol Multiphysics software. The preliminary optimization conditions for the cell enrichment were obtained. According to the simulation results, the experiments were carried out to investigate the enrichment effect of the HepG2 hepatoma carcinoma cells. The experiment result demonstrated the enrichment efficiency of HepG2 hepatoma carcinoma cells was reached to 88.89% under the 5 V amplitude and 4 MHz frequency sinusoidal signal excitation. © 2015 Trans Tech Publications, Switzerland.

关键词： Efficiency

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Graphene-based dual-function acoustic transducers for machine learning-assisted human-robot interfaces

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InfoMat 2023年第2期5卷 66-79页

作者： Hao Sun Xin Gao Liang-Yan Guo Lu-Qi Tao Zi Hao Guo Yangshi Shao Tianrui Cui Yi Yang Xiong Pu Tian-Ling Ren Institute of Microelectronics and Beijing National Research Center for Information Science and Technology(BNRist) Tsinghua UniversityBeijingPeople's Republic of China CAS Center for Excellence in Nanoscience Beijing Key Laboratory of Micro-nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijingPeople's Republic of China State Key Laboratory of Power Transmission Equipment and System Security and New Technology School of Electrical EngineeringChongqing UniversityChongqingPeople's Republic of China School of Computer Science&Technology Beijing Institute of TechnologyBeijingPeople's Republic of China School of Automation and Electrical Engineering University of Science and Technology BeijingBeijingPeople's Republic of China

Human–robot interface(HRI)electronics are critical for realizing robotic ***,we report graphene-based dual-function acoustic transducers for machine learning-assisted human–robot interfaces(GHRI).The GHRI functions both an artificial ear through the triboelectric acoustic sensing mechanism and an artificial mouth through the thermoacoustic sound emission *** success of the integrated device is also attributed to the multifunctional laser-induced graphene,as either triboelectric materials,electrodes,or thermoacoustic *** systematically optimizing the structure parameters,the GHRI achieves high sensitivity(4500 mV Pa^(–1))and operating durability(1000000 cycles and 60 days),capable of recognizing speech identities,emotions,content,and other information in the human *** the assistance of machine learning,30 speech categories are trained by a convolutional neural network,and the accuracy reaches 99.66%and 96.63%in training datasets and test ***,GHRI is used for artificial intelligence communication based on recognized speech *** work shows broad prospects for the development of robotic intelligence.

关键词： human-robot interface laser-induced graphene machine learning thermoacoustic triboelectric nanogenerator

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A new hybrid piezoelectric-electromagnetic micro vibration energy harvester

A new hybrid piezoelectric-electromagnetic micro vibration e...

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IEEE Conference on Electron devices and Solid-State Circuits

作者： Hua Yu Jielin Zhou Wei Wang College of Optoelectronic Engineering Chongqing China Key Laboratory for Optoelectronic Technology & Systems Ministry of Education of China Chongqing China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing China

ISBN: (纸本)9781479923366

The paper presents a new hybrid micro piezoelectric-electromagnetic generator for vibration energy harvesting, which generates energy from low frequency and small amplitude vibration environment, using piezoelectric and electromagnetic conversion mechanisms. The paper outlines factors needed when designing the hybrid energy harvester, including the coupling mathematical model, the finite element analysis, optimization procedure and trade-offs. The proposed hybrid energy harvester is also fabricated and experimental results show that the device can generate an open-circuit voltage of 4.32V and produce a power of 13.47μW with an optimal resistive load of 403KΩ at 0.1 m/s 2 acceleration and 105.2 Hz frequency.

关键词： Materials Electromagnetics Arrays Resistance Coils

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Ultra-Soft Neural Probe with a Temporary High-Strength U-Section Coating by Picosecond Laser micromachining 22

Ultra-Soft Neural Probe with a Temporary High-Strength U-Sec...

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22nd International Conference on Solid-State Sensors, Actuators and microsystems, Transducers 2023

作者： Sun, Fanqi You, Xiaoli Zhou, Yuhao Wang, Minghao Xu, Mengfei Yuan, Xichen Chang, Honglong Liu, Jingquan Ji, Bowen Collaborative Innovation Center Of Northwestern Polytechnical University Shanghai201108 China Northwestern Polytechnical University Unmanned System Research Institute Xi'an710072 China Northwestern Polytechnical University Ministry Of Education Key Laboratory Of Micro/Nano Systems For Aerospace School Of Mechanical Engineering Xi'an710072 China Hangzhou Dianzi University College Of Electronics And Information Hangzhou310018 China Shanghai Jiao Tong University National Key Laboratory Of Science And Technology On Micro/Nano Fabrication Department Of Micro/Nano Electronics Shanghai200240 China

ISBN: (纸本)9784886864352

This paper reports an ultra-soft neural probe with a temporary high-strength U-section coating of polyethylene glycol (PEG) for the first time. Its fabrication is compatible with MEMS processes, and an ultrathin U-section coating over the probe's back and sidewall is precisely formed by spinning and cold laser cutting. With this novel coating, the probe has both minimized cross-sectional area and sufficient mechanical strength for low-invasive penetration into brain. Besides, the remained ultra-soft deformable probe after PEG dissolution is expected to be the next generation of neural implant for chronic recording. © 2023 IEEJ.

关键词： Picosecond Laser Cutting U-section Coating Ultra-soft Neural Probe

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Morphology and Crystallinity-controlled Synthesis of Manganese Cobalt Oxide/Manganese Dioxides Hierarchical nanostructures for High-Performance Supercapacitors

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功能材料信息 2015年第4期12卷 17-32页

作者： Fei Li Gang Li Hao Chen Jia Qi Jia Fan Dong Yao Bo Hu Zheng Guo Shang 张育新 College of Materials Science and Engineering Chongqing University State Key Laboratory of Porous Metal Materials Northwest Institute for Nonferrous Metal Research Chongqing Key Laboratory of Catalysis and Functional Organic Molecules College of Environmental and Biological Engineering Chongqing Technology and Business University National Key Laboratory of Fundamental Science of Micro Nano-Devices and System TechnologyChongqing University 重庆大学材料学院

We demonstrate a novel preparative strategy for the well-controlled MnCo_2O_(4.5)@MnO_2 hierarchical ***δ-MnO_2 nanosheets andα-MnO_2 nanorods can uniformly decorate the surface of MnCo_2O_(4.5)nanowires to form core-shell *** electrochemical characterization reveals that MnCo_2O_(4.5)@δ-MnO_2 pattern exhibits not only high specific capacitance of 357.5 F g^(-1)at a scan rate of 0.5 A g^(-1),but also good cycle stability(97%capacitance retention after 1000 cycles at a scan rate of 5 A g^(-1)),which make it have a promising application as a supercapacitor electrode material.

关键词： MnO2 Manganese cobalt oxide Chemical synthesis Core-shell nanostructures Supercapacitor

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LONGITUDINAL WAVE RESONANT FREQUENCY CALCULATION AND VERIFICATION OF THE BULK ACOUSTIC RESONATOR

LONGITUDINAL WAVE RESONANT FREQUENCY CALCULATION AND VERIFIC...

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2013 5th IEEE International Conference on Broadband Network & Multimedia technology

作者： Yi HE Yang GAO Bin ZHOU Junru LI School of Information Engineering Southwest University of Science and Technology Institute of Electronic Engineering China Academy of Engineering Physics National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University

ISBN: (纸本)9781479900961

Thickness and material of electrode, piezoelectric and supporting layer film of the Film Bulk Acoustic Resonator (FBAR) are main influence factors of resonant frequency, desired resonance frequency can be achieved by confirming thickness and material. A formula about thickness, material, frequency parameter and angular frequency has been achieved by deriving stress-equation of motion in longitudinal wave of film bulk acoustic resonator;frequency parameter has been get from Newton iteration of determinant of stress and displacement boundary conditions, continuity equations simulated by MATLAB. The resonant frequency of a certain FBAR whose thickness, material and frequency parameter are determined has been calculated by the formula, and the calculation value is 1.441 GHz. Equivalent circuit of longitudinal vibration Mason model which has the same thickness, material with formula calculation has been simulated by ADS, and resonant frequency of simulation model is 1.473GHz. Verification simulation of equivalent circuit of longitudinal vibration Mason model shows: resonant frequency calculation value by formula and the simulation value of model are very close, and we can use the formula to calculate longitudinal wave resonance frequency of FBAR.

关键词： FBAR resonant frequency Newton iteration Mason model ADS simulation

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Efficient terahertz generation from van der Waalsα-In_(2)Se_(3)

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Chinese Optics Letters 2024年第1期22卷 141-146页

作者：段诗婕杨鸣周溯媛张隆辉韩锦森孙旭王广刘昌勤康冬冬王小伟陈家浩戴佳钰 Department of Physics College of ScienceNational University of Defense TechnologyChangsha 410073China Hunan Key Laboratory of Extreme Matter and Applications(XMAL) Changsha 410073China Hunan Key Laboratory for Micro-Nano Energy Materials and Devices School of Physics and OptoelectronicsXiangtan UniversityXiangtan 411105China Guangxi Key Laboratory of Automatic Detecting Technology and Instrument Guilin University of Electronic TechnologyGuilin 541004China

Two-dimensional(2D)van der Waals materials have attracted tremendous attention due to their versatile physical properties and flexible manipulation *** the various types of van der Waals materials,α-In_(2)Se_(3)is remarkable for its intrinsic 2D ferroelectricity and high-performance opto-electronic ***,the study of theα-In_(2)Se_(3)system in terahertz(THz)radiation is scarce,although it is promising for electrically controlled THz field *** investigate theα-In_(2)Se_(3)in different thicknesses and report that the THz generation efficiency induced by femtosecond laser pulses can be largely improved by reducing the thickness from the ***,we reveal the surge current in thin film coupled with THz emission exhibits a different Auger recombination mode,which is helpful in understanding the mechanism and provides insights into the design of 2D highly efficient THz devices.

关键词： van der Waals terahertz carrier dynamics

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