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The 6th International Conference on nanoscience & technology, China 2015

作者： Danqun Huo Liang Dong Hailong Jiang Huixiang Wu Huanbao Fa Mei Yang Yi Ma Shiying Zou Changjun Hou Key Laboratory of Biorheology Science and Technology Ministry of EducationCollege of BioengineeringChongqing University National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University College of Chemistry and Chemical Engineering Chongqing University Sichuan University of Science & Engineering

Pesticides were widely used to boost food production which poses a huge threat to human health and the environment. In the past several decades, numerous detection system, such as liquid chromatography, gas chromatography, capillary electrophoresis had been developed for the pesticides analyses. Although these methods offer high accuracy, better repeatability and high efficiency, they are costly, time-consuming and need professionals. Therefore, simple and convenient methods for detection of pesticides are still of significant need. The Au NPs and GSH-Au NPs were synthesized in this paper aiming to develop a new strategy for rapid determination ofpesticides. Herein, we designed a gold nanoparticles(Au NPs) and glutathione-gold nanoparticles(GSH-Au NPs) sensor array for the determination of 6 pesticides based on cross-response between sensor dots and analytes. Au NPs and GSH-Au NPs yield a different response to 6 pesticides with similar structures under different p H conditions. Based on this, a new liquid arrays with 8 sensors was constructed for identification of 6 pesticides. Color of sensor dots were recorded by scanner before and after the addition of pesticides and differential spectra were obtained subsequently and analyzed by principal component analysis(PCA), hierarchical clustering analysis(HCA) and linear discriminant analysis(LDA). The experimental results exhibit good recognition performance for 6 pesticides with 100% accuracy. Then the array is optimized, the results show that A and E still were the main contributors for identification of 6 pesticides. Liquid array was used in actual samples of the jialing river water and tap water and similar results were obtained. The result shows that the array has certain feasibility in the practical application.

关键词： gold nanoparticles,sensor array,pesticides detection

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High temperature pressure sensor using a thermostable electrode

High temperature pressure sensor using a thermostable electr...

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IEEE International Conference on nano/micro Engineered and Molecular systems (NEMS)

作者： G.D. Liu W.P. Cui H. Hu F.S. Zhang Y.X Zhang C.C. Gao Y.L. Hao National Key Laboratory of Science and Technology on Micro/Nano Fabrication Peking University Beijing China State Key Laboratory of Transducer Technology Chinese Academy of Sciences Shanghai China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

High temperature pressure sensors have been widely applied in modern industry. However, the performance of the pressure sensor is largely dependent on the thermal stability of ohmic contact electrode. This paper presents a TiSi 2 /Ti/TiN/Pt/Au multilayer electrode. Linear transmission line method (TLM) and voltmeter-ammeter method have been used to measure the electronic properties of the electrode at high temperature. The test results show that the multilayer electrode can be used in fabricating high temperature pressure sensor. Moreover, a high temperature piezoresistive pressure sensor is designed using this multilayer electrode. ANSYS software and finite element method (FEM) have been used to analyze the stress distribution, sensitivity and nonlinearity. To verify this design, the pressure sensor is fabricated based on silicon on insulator (SOI) wafer. The pressure sensor is measured across the range of 30-150kPa and the temperature range is 25-500°C. The test results show that the ohmic contact electrode and the pressure sensor are able to work at high temperature.

关键词： Temperature measurement Temperature sensors Electrodes Transmission line measurements Silicides Gold Finite element analysis

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micrograting Displacement Sensor with Integrated Electrostatic Actuation

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Chinese Physics Letters 2014年第7期31卷 214-217页

作者：姚保寅冯丽爽王潇刘惟芳刘美华 Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) Beihang University Beijing 100191 Fundamental of Science on Novel Inertial Instrument & Navigation System Technology Laboratory Beihang University Beijing 100191

A high-resolution micro-grating displacement sensor with diffraction-based and integrated electrostatic actuation is proposed and experimentally demonstrated. The Ai reflecting membrane is fabricated at the bottom of a silicon moving part and the Au micro-gratings are patterned on a transparent substrate. This structure forms a phase sensitive diffraction grating, providing the displacement sensitivity of the micro-grating interferometer. It shows sensitivity adjustment and self-calibration capabilities with electrostatic actuation. Additional system components include a coherent light source, photodiodes, and required electronics. Experimental results show that the displacement sensor has a sensitivity of about 1.8 m V /nm and a resolution of less than 1 nm in the linear region. This displacement sensor is very promising in the fields requiring high sensitivity, broad dynamic range, and immunity to electromagnetic interference.

关键词： ELECTROSTATIC actuators DISPLACEMENT (Mechanics) DIFFRACTION gratings SENSITIVITY analysis SILICON

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Silicon-silicon anodic bonding process with embedded glass

Silicon-silicon anodic bonding process with embedded glass

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IEEE International Conference on nano/micro Engineered and Molecular systems (NEMS)

作者： W. P Cui G. D. Liu F. S. Zhang H. Hu C. C. Gao Y. L. Hao National Key Laboratory of Science and Technology on Micro/Nano Fabrication Peking University Beijing China Chinese Academy of Sciences State Key Laboratory of Transducer Technology Shanghai China Innovation Center for MicroNanoelectronics and Integrated System Beijing China

This paper reports a silicon-silicon anodic bonding process based on embedded glass. We successfully embedded glass into patterned silicon groove by fusion treatment and bonded it with another silicon wafer by anodic bonding process. This process realizes the precise control of bonding pattern and the depth of the bonding gap without electrical connection between two silicon wafers. Tension test result shows that the bonding strength is over 7MPa-which is in accordance with normal anodic bonding process, so that the process can be used in a wide range of MEMS devices design.

关键词： Silicon Bonding Glass Stress Surface treatment Substrates

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An on-line water quality monitoring system for the reservoirs based on android

An on-line water quality monitoring system for the reservoir...

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作者： Dai, Zi Wen Liao, Hai Yang National Key Laboratory of Fundamental Science of Micro/Nano-Device and system Technology Chongqing University Chongqing 400044 China

ISBN: (纸本)9783038351221

According to the demand of water quality automatic monitoring in many large or medium reservoirs, we proposed an on-line water quality monitoring system. It is composed of wireless sensor networks and an embedded monitoring platform. We built a novel early-warning model to well adapt to the regular pattern of water quality change in the reservoirs. As a result, an Android application with outstanding control experience is achieved for real-time monitoring, water pollution early warning and water quality comprehensive assessment. Experimental results show that the system can work stably for a long time and provide accurate monitoring information continuously. It can also detect the abnormal signals of water quality in time and alarm. The system efficiently satisfies the requirement of water quality on-line automatic monitoring. © (2014) Trans Tech Publications, Switzerland.

关键词： Water quality

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Sensitivity analysis of light force accelerometer based on optical trapping Mie microsphere

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Optoelectronics Letters 2014年第1期10卷 77-80页

作者：冯丽爽焦洪臣姚保寅 Key Laboratory of Micro-nano Measurement-Manipulation and Physics Ministry of EducationFundamental Science on Novel Inertial Instrument & Navigation System Technology LaboratoryBeijing University of Aeronautics and Astronautics

For achieving the greatest sensitivity,numerical simulation is proposed to optimize the parameters of light force accelerometer(LFA).Firstly,the basic principle of the LFA is analyzed,and the mathematical model is established to describe the axial and radial optical trapping forces on microspheres in the fundamental mode Gaussian laser ***,the axial and radial optical trapping forces applied on Mie spheres are simulated to obtain the optimal parameters of open-loop *** show that the sensitivity can reach 103μm/***,the LFA system is proposed based on the closed-loop scheme with dual *** can provide reference for the design and fabrication of LFA in future.

关键词：敏感度分析加速度计捕获光学数值模拟高斯激光束数学模型最优参数

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A new hybrid piezoelectric-electromagnetic micro vibration energy harvester

A new hybrid piezoelectric-electromagnetic micro vibration e...

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IEEE Conference on Electron devices and Solid-State Circuits

作者： Hua Yu Jielin Zhou Wei Wang College of Optoelectronic Engineering Chongqing China Key Laboratory for Optoelectronic Technology & Systems Ministry of Education of China Chongqing China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing China

ISBN: (纸本)9781479923366

The paper presents a new hybrid micro piezoelectric-electromagnetic generator for vibration energy harvesting, which generates energy from low frequency and small amplitude vibration environment, using piezoelectric and electromagnetic conversion mechanisms. The paper outlines factors needed when designing the hybrid energy harvester, including the coupling mathematical model, the finite element analysis, optimization procedure and trade-offs. The proposed hybrid energy harvester is also fabricated and experimental results show that the device can generate an open-circuit voltage of 4.32V and produce a power of 13.47μW with an optimal resistive load of 403KΩ at 0.1 m/s 2 acceleration and 105.2 Hz frequency.

关键词： Materials Electromagnetics Arrays Resistance Coils

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Design of power management chip for piezoelectric energy harvesting

Design of power management chip for piezoelectric energy har...

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IEEE Conference on Electron devices and Solid-State Circuits

作者： Hua Yu Shibo Yang Wei Wang College of Optoelectronic Engineering Chongqing University Chongqing China Ministry of Education of China The Key Laboratory for Optoelectronic Technology & Systems Chongqing China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing China

ISBN: (纸本)9781479923366

The paper proposes a complete energy harvesting solution integrated with a low-loss AC/DC rectifier and a high efficiency low dropout regulator (LDO) optimized for micro piezoelectric energy harvester. The AC/DC module converts AC into DC and then supplies power for the following LDO circuit module, through which the whole chip can obtain a stable 3.3V output voltage. A dynamic compensation mechanism is presented to improve the loop stability of LDO, which is easier to achieve high phase margin than traditional compensation strategy. The simulation results of LDO indicate that the typical dropout is 0.4mV with 1mA load current and 61mV with 150mA load current respectively, and the typical voltage line regulation error is 0.025%/V. In addition, the typical load regulation error was 0.00018%. The results demonstrate that the proposed chip meets the requirements of power supply for wireless sensor node (WSN).

关键词： Photonic band gap

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Calculation of surface acoustic waves in a multilayered piezoelectric structure

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Journal of Semiconductors 2013年第1期34卷 6-11页

作者：张祖伟温志渝胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center Chongqing University

The propagation properties of the surface acoustic waves（SAWs） in a ZnO-SiO2-Si multilayered piezoelectric structure are calculated by using the recursive asymptotic *** phase velocities and the electromechanical coupling coefficients for the Rayleigh wave and the Love wave in the different ZnO-SiO2-Si structures are calculated and *** Love mode wave is found to be predominantly generated since the c-axis of the ZnO film is generally perpendicular to the *** order to prove the calculated results,a Love mode SAW device based on the ZnO-SiO2-Si multilayered structure is fabricated by micromachining,and its frequency responses are *** experimental results are found to be mainly consistent with the calculated ones,except for the slightly larger velocities induced by the residual stresses produced in the fabrication process of the *** deviation of the experimental results from the calculated ones is reduced by thermal annealing.

关键词： SAW RAM multilayered structure

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The fabrication of vibration energy harvester arrays based on AlN piezoelectric film

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Journal of Semiconductors 2013年第11期34卷 79-82页

作者：尚正国李东玲温志渝赵兴强 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Microsystem Research Center of Chongqing University

： The fabrication and measurement results of the vibration energy harvester arrays based on the piezoelectric aluminum nitride （AlN） film are presented. The structure design and fabrication process of the device are introduced. The key material, the AIN film with crystal orientation （002）, was deposited by pulsed-DC magnetron sputtering and characterized by X-ray diffraction （XRD）. The resonant frequency, power out, and the open circuit voltage of the device are detected. The optimized load of 80 kΩ and a remarkable maximum power out of 30.4 μW are obtained when the acceleration of 0.9g （g is standard gravity acceleration） is applied. key words： A1N; crystal orientation; harvester arrays; vibration energy

关键词： AlN crystal orientation harvester arrays vibration energy

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