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2nd International Conference on Manufacturing science and Engineering

作者： Liao, Haiyang Tian, Peng Du, Yu Wen, Zhiyu National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology China Microsystem Research Center Chongqing University Chong Qing 400044 China

ISBN: (纸本)9783037850312

Water quality monitoring plays an important role in contamination control and environment protection. This paper describes an on-line multiparametric water quality monitoring system based on visible spectrophotometry, which combines embedded technology with GPRS telecommunication technology. This system can realize online wireless monitoring to concentrations of chromium (Cr), plumbum (Pb), A surfactant (AS), chemical oxygen demand (COD), ammonia nitrogen (AN), total phosphorus (TP) and total phenol (TPh) in real time. The mechanical structure, hardware circuit and software design of the system are completed. The absorption spectrums of pure water and MB-SDS complex have been measured. Preliminary experiments using a model machine show that each mechanism of the system runs well. Moreover, the monitor possesses many advantages, such as high degree of automation, high reliability, high efficiency, compact structure, small size, and so on.

关键词： Water Quality Monitoring Visible Spectrophotometry Embedded technology GPRS

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Fabrication multi-layer polymer microstructures by x-ray lithography with alignment

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作者： Li, Yigui Sugiyama, Susumu National Key Laboratory of Micro/Nano Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University Shanghai 200240 China Department of Micro System Technology Rtsumeikan University 1-1-1 Noji-Higashi Kusatsu Shiga Japan

ISBN: (纸本)0878492119

Poly(methyl methacrylate)(PMMA) and Poly L-lactic acid (PLLA) are transparent and they are suitable for optical purposes. The multi-layer polymer microfabrication can be applied for a large displacement actuator and precision sensors. A new method is intruduced to generate the multi-layer polymers microstructures by X-ray lithography with alignment. The function of X-ray on polymer materials are breaking the polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. The method for polymer micromachining by using X-ray lithography with alignment for fabrication multi-layer micro polymer structures is confirmed experimentatively. © (2011) Trans Tech Publications.

关键词： microfabrication

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Evaluation of properties of lapped PZT ceramics and silicon cantilever based on eutectic bonding and dicing process

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作者： Li, Yigui Sun, Jian Liu, Jingquan Yang, Chunsheng He, Dannong Tanaka, Katsuhiko Sugiyama, Susumu National Key Laboratory of Micro/Nano Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University Shanghai 200240 China National Engineering Research Center for Nanotechnology Shanghai 200241 China Department of Micro System Technology Rtsumeikan University 1-1-1 Noji-Higashi Kusatsu Shiga Japan

ISBN: (纸本)0878492119

Piezoelectric sensor can produce voltage when deflected (function as an energy harvester) while piezoelectric actuator can deflect when a voltage is applied. Different device applications have different requirements on the thickness and in-plane geometry of the Lead Zirconate Titanate(PZT) piezoelectric layers and thus have their own processing difficulties. In this paper, PZT-Au-Si cantilever is fabricated by eutectic bonding and dicing *** properties of lapped PZT ceramics and silicon cantilever is also evaluated. The PZT-Au-Si cantilever applications for both piezoelectric actuators and energy harvesters have been confirmed. © (2011) Trans Tech Publications.

关键词： Lead zirconate titanate

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Analysis and Experiment of Encoding Errors for MOEMS micro Mirror Spectrometer

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Physics Procedia 2011年 19卷 285-290页

作者： MO Xiang-xia WEN Zhi-yu ZHANG Zhi-hai GUO Yuanjun National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044 China The Key Laboratory for Opto-eletronic Technology and System under Ministry of Education Chongqing University Chongqing 400044 China

micro mirror arrays used in the novel spectrometer to achieve the modulation of Hadamard transformation (HT) and spectrum detection by a single detector can also be considered as a blazed grating. During the modulation, spectrum can not be completely reflected by micro mirror array s on the “on” state. While on the “off” state, there will be still light incidence into detector, since the way of light modulation by mirror arrays is diffraction rather than reflection. This will then cause encoding errors. To diminish these encoding errors, a blazed grating model for mirror arrays is proposed. In this paper, both encoding error and compensation are analyzed for the algorithm of HT. Firstly, establish a theoretic model of micro mirror arrays modulation, and calculate the light field distribution based on the Fraunhofer diffraction theory. Then use MathCAD software and Matlab software to simulate and correct the HT encoding errors. Finally, some experimental tests have been done on the micro mirror sp ectrometer system. The “on” state errors caused by micro mirror can be eliminated by dividing the background or rectifying the HT mask encoding. However, the “off” state errors can only be eliminated by constructing a comp ensation HT matrix. Both the “on” and “off” state errors are coexisted in the real situation. Exp eriment not only can reduce the encoding errors, but also increase signal-to-noise ratio.

关键词： micro mirror spectrometer encoding mirror Hadamard blazed grat ing

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A Novel MOEMS NIR Spectrometer

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Physics Procedia 2011年 19卷 110-114页

作者： Zhang Zhihai Mo Xiangxia Guo Yuanjun Wang Wei The Key Laboratory for Opto-eletronic Technology and System under Ministry of Education Chongqing University Chongqing 400044China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044China

In order to detect luminous intensity of light signal in NIR (Near-infrared) wavelength range, a novel MOEMS(micro-Opto-Electro-Mechanical systems) NIR spectrometer is proposed in the paper. It uses DMD (Digital micro-mirror Device) to band filter the input spectrum. The merits of DMD are small size, low price and high scan speed. Especially, when DMD acts as a Hadamard Transform encoding mask, the SNR (signal-to-noise-ratio) can be improved by multiplexing the light intensities. The structure and the theory of this spectrometer are analyzed. The Hadamard-S matrix and mask of 63-order and 127-order are designed. The output spectrum of the new spectrometer coincides with experimental result of Shimadzu spectrometer. The resolution of the new spectrometer is 19 nm over the spectral range between 900∼1700 nm while single scan time is only 2.4S. The SNR is 44.67:1. The size of optical path is 70mm × 130 mm, and it has a weight less than 1Kg. It can meet the requirement of real time measurement and portable application.

关键词： MOEMS NIR spectrometer Digital micro-mirror Device Hadamard transform portable application

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Bulk PZT thick film preparation on silicon wafer and its application for MEMS power generator

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作者： Tang, Gang Liu, Jing-Quan Li, Yi-Gui Liu, He-Sheng Yang, Chun-Sheng He, Dan-Nong Dao, Viet Dzung Tanaka, Katsuhiko Sugiyama, Susumu National Key Laboratory of Nano/Micro Fabrication Technology Institute of Micro and Nano Science and Technology Shanghai Jiaotong University Shanghai 200240 China Dept. of Mechanical and Engineering Nanchang Institute of Technology Nanchang 330099 China College of Mechanical and Electronic Engineering Nanchang University Nanchang 330031 China National Engineering Research Center for Nanotechnology Shanghai 200241 China Department of Micro System Technology Rtsumeikan University 1-1-1 Noji-Higashi Kusatsu Shiga Japan

ISBN: (纸本)0878492119

The paper reports on the PZT thick films preparation method by bonding bulk PZT on Si and then lapping PZT to suitable thicknesses. Epoxy resins with preferable thermostability were used as the intermediate adhesive layer in bonding process. A tight bonding of more than 10MPa was attained at suitable gradient bonding temperatures in an oven which were from 30 °C up to 105 °C according to 15 °C per thirty minutes and holding for more than 3h at 105 °C, and a pressure of more than 0.05MPa. Some properties of the prepared PZT thick films were tested. Finally, a piezoelectric MEMS power generator was fabricated by using the described techniques of PZT thick films preparation on silicon. The maximum output voltage under the resonant operation was measured. © (2011) Trans Tech Publications.

关键词： Thick films

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The effect of generating body and Reynolds Numbers on improving fluid vibrating force in micro size

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Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics 2011年第12期32卷 2056-2059页

作者： Ran, Jing-Yu Yang, Yuan National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing 400044 China Key Laboratory of Low-Grade Energy Utilization Technologies and Systems Chongqing University Chongqing 400044 China

The research on the effect of low Reynolds number and generating body on flow characteristics and fluid vibrating force is of high value to develop and utilize weak breeze energy. In this paper, flow conditions with different generating bodies (circular cylinder, triangle cylinder, square cylinder) and different Reynolds Numbers (20, 40, 60, 100, 200, 400, 500, 1000) are simulated using finite volume method. The flow characteristics and fluid force in different conditions are compared and analyzed. The results show that the maximum value and average value of fluid force, f¯t and ft,max, increase with Re increasing. At the same time, f¯t (triangle) > f¯t (square) > f¯t (circular);ft,max (triangle) > ft,max (square) > ft,max (circular). When Re=1000, ft (triangle)=0.112 N, ft (square)=0.0914 N, f¯t (circular)=0.077 N.

关键词： Reynolds number

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Electronic band transformation from indirect gap to direct gap in Si-H compound

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Chinese Physics B 2010年第7期19卷 491-496页

作者：丁建宁王君雄袁宁一坎标陈效双 Center for Low-Dimensional Materials Micro-Nano Devices and SystemJiangsu Polytechnic University Center for Micro/Nano Science and Technology Jiangsu University Key Laboratory of New Energy Source National Laboratory of Infrared Physics Shanghai Institute for Technical PhysicsChinese Academy of Sciences

The electronic band structures of periodic models for S^H compounds are investigated by the density functional theory. Our results show that the Si H compound changes from indirect-gap semiconductor to direct-gap semiconductor with the increase of H content. The density of states, the partial density of states and the atomic charge population are examined in detail to explore the origin of this phenomenon. It is found that the Si-Si bonds are affected by H atoms, which results in the electronic band transformation from indirect gap to direct gap. This is confirmed by the nearest neighbour semi-empirical tight-binding （TB） theory.

关键词： Si-H compounds band structure density functional theory tight-binding calculation

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An intelligent electronic capsule system for automated detection of gastrointestinal bleeding

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Journal of Zhejiang University-science B(Biomedicine & Biotechnology) 2010年第12期11卷 937-943页

作者： Hong-ying LIU Gang WANG Kang WEI Xi-tian PI Lan ZHU Xiao-lin ZHENG Zhi-yu WEN Key Laboratory of Biorheological Science and Technology of Ministry of Education College of Bioengineering Chongqing University Chongqing 400030 China Key Laboratories for National Defense Science and Technology of Innovative Micro-Nano Devices and System Technology Chongqing University Chongqing 400030 China

In clinical practice,examination of the hemorrhagic spot (HS) remains *** this paper,we describe a remote controlled capsule (RCC) micro-system with an automated,color-based sensor to identify and localize the HS of the gastrointestinal (GI) *** vitro testing of the detecting sensor demonstrated that it was capable of discriminating mimetic intestinal fluid (MIF) with and without the hemoglobin (Hb) when the concentration of Hb in MIF was above 0.05 g/***,this RCC system is able to detect the relatively accurate location of the HS in the GI tract.

关键词： Smart capsule Intestinal bleeding Color sensor Biomedical micro-electromechanical system （BioMEMS）

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A Preliminary Study of the Noninvasive Remote Control system for Rat Bio-Robot

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Journal of Bionic Engineering 2010年第4期7卷 375-381页

作者： Xitian Pi~(1,2),Shuangshuang Li~1,Lin Xu~1,Hongying Liu~1,Shenshan Zhou~1,Kang Wei~1,Zhenyu Wang~1,Ziru Jia,Xiaolin Zheng~(1,2),Zhiyu Wen~2 1.Bioengineering College,Chongqing University,Chongqing 400030,P.R.China 2.key Laboratories for national Defense science and technology of Innovative micro-nano devices and system technology,Chongqing University,Chongqing 400030,P.R.China [a] Bioengineering College Chongqing University Chongqing 400030 P. R. China [b] Key Laboratories for National Defense Science Technology of Innovative Micro-Nano Devices System Technology Chongqing University Chongqing 400030 P. R. China

A system is described here that can noninvasively control the navigation of freely behaving rat via ultrasonic,epidermaland LED photic stimulators on the *** system receives commands from a remote host computer to deliver specifiedelectrical stimulations to the hearing,pain and visual senses of the rat *** results demonstrate that the three stimuliwork in groups for the rat *** can control the rat to proceed and make right and left turns with great *** verified that the rat was able to reach a setting destination in the way of cable with the help of a person through theappropriate coordination of the three *** telemetry video camera mounted on the head of the rat also achieveddistant image acquisition and helped to adjust its navigation path over a distance of 300 *** a word,the non-invasive motioncontrol navigation system is a good,stable and reliable bio-robot.

关键词： rat navigation bio-robot ultrasonic stimulator epidermal stimulator LED photic stimulator

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