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Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction

Journal of Semiconductors 2012年第4期33卷 51-56页

作者：张祖伟温志渝胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China National Center for International Research of Micro/Nano-System and New Material Technology Chongqing UniversityChongqing 400030China Microsystem Research Center of Chongqing University Chongqing 400030China

The design and simulation of a novel microoptoelectromechanical system （MOEMS） accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fun- damental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.

关键词： accelerometer MOEMS Raman-Nath diffraction FPW delay line oscillator

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Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction

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Journal of Semiconductors 2012年第9期33卷 82-88页

作者：张祖伟温志渝尚正国李东玲胡晶 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing UniversityChongqing 400030China National Center for International Research of Micro/Nano-System and New Material Technology Chongqing University Chongqing 400030China Microsystem Research Center of Chongqing University Chongqing 400030China

A novel micro-opto-electro-mechanical system （MOEMS） accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental theories and principles of the device are introduced briefly. A flexural plate-wave delay-line oscillator is designed to work as an acousto-optic （AO） shifter, which has a Klein-Cook parameter of 0.38. Single-mode optical strip waveguides of 2 μm in width and thicknesses of 0.6 μm are designed by using the effective index method for light transmission. The E^y00 mode waveguide polarizers are designed to ensure the consistency of the light polarization in the waveguides. The fabrication process, based on （100） oriented, 450-#m-thick silicon wafers is proposed in detail, and some difficulties in the process are discussed carefully. At last, a series of process tests are undertaken to solve the proposed problems. The results indicate that the proposed design and fabrication process of the device is dependable and realizable.

关键词： accelerometer MOEMS Raman-Nath diffraction design process test

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An intelligent electronic capsule system for automated detection of gastrointestinal bleeding

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Journal of Zhejiang University-science B(Biomedicine & Biotechnology) 2010年第12期11卷 937-943页

作者： Hong-ying LIU Gang WANG Kang WEI Xi-tian PI Lan ZHU Xiao-lin ZHENG Zhi-yu WEN Key Laboratory of Biorheological Science and Technology of Ministry of Education College of Bioengineering Chongqing University Chongqing 400030 China Key Laboratories for National Defense Science and Technology of Innovative Micro-Nano Devices and System Technology Chongqing University Chongqing 400030 China

In clinical practice,examination of the hemorrhagic spot (HS) remains *** this paper,we describe a remote controlled capsule (RCC) micro-system with an automated,color-based sensor to identify and localize the HS of the gastrointestinal (GI) *** vitro testing of the detecting sensor demonstrated that it was capable of discriminating mimetic intestinal fluid (MIF) with and without the hemoglobin (Hb) when the concentration of Hb in MIF was above 0.05 g/***,this RCC system is able to detect the relatively accurate location of the HS in the GI tract.

关键词： Smart capsule Intestinal bleeding Color sensor Biomedical micro-electromechanical system （BioMEMS）

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micrograting Displacement Sensor with Integrated Electrostatic Actuation

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Chinese Physics Letters 2014年第7期31卷 214-217页

作者：姚保寅冯丽爽王潇刘惟芳刘美华 Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) Beihang University Beijing 100191 Fundamental of Science on Novel Inertial Instrument & Navigation System Technology Laboratory Beihang University Beijing 100191

A high-resolution micro-grating displacement sensor with diffraction-based and integrated electrostatic actuation is proposed and experimentally demonstrated. The Ai reflecting membrane is fabricated at the bottom of a silicon moving part and the Au micro-gratings are patterned on a transparent substrate. This structure forms a phase sensitive diffraction grating, providing the displacement sensitivity of the micro-grating interferometer. It shows sensitivity adjustment and self-calibration capabilities with electrostatic actuation. Additional system components include a coherent light source, photodiodes, and required electronics. Experimental results show that the displacement sensor has a sensitivity of about 1.8 m V /nm and a resolution of less than 1 nm in the linear region. This displacement sensor is very promising in the fields requiring high sensitivity, broad dynamic range, and immunity to electromagnetic interference.

关键词： ELECTROSTATIC actuators DISPLACEMENT (Mechanics) DIFFRACTION gratings SENSITIVITY analysis SILICON

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An on-line water quality monitoring system for the reservoirs based on android

An on-line water quality monitoring system for the reservoir...

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作者： Dai, Zi Wen Liao, Hai Yang National Key Laboratory of Fundamental Science of Micro/Nano-Device and system Technology Chongqing University Chongqing 400044 China

ISBN: (纸本)9783038351221

According to the demand of water quality automatic monitoring in many large or medium reservoirs, we proposed an on-line water quality monitoring system. It is composed of wireless sensor networks and an embedded monitoring platform. We built a novel early-warning model to well adapt to the regular pattern of water quality change in the reservoirs. As a result, an Android application with outstanding control experience is achieved for real-time monitoring, water pollution early warning and water quality comprehensive assessment. Experimental results show that the system can work stably for a long time and provide accurate monitoring information continuously. It can also detect the abnormal signals of water quality in time and alarm. The system efficiently satisfies the requirement of water quality on-line automatic monitoring. © (2014) Trans Tech Publications, Switzerland.

关键词： Water quality

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Structural Design of a Compact in-Plane nano-Grating Accelerometer

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Chinese Physics Letters 2012年第11期29卷 219-223页

作者： YAO Bao-Yin ZHOU Zhen FENG Li-Shuang WANG Wen-Pu WANG Xiao Key Laboratory of Micro-nano Measurement-manipulation and Physics(Ministry of Education) Beihang UniversityBeijing 100191 Fundamental of Science on Novel Inertial Instrument&Navigation System Technology Laboratory Beihang UniversityBeijing 100191

A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is ***,the numbers of diffraction orders are ***,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration ***,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam *** on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/*** nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent *** results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.

关键词： accelerometer beam integrating

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Improvement of Electrical Properties of the Ge2Sb2Te5 Film by Doping Si for Phase-Change Random Access Memory

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Chinese Physics Letters 2006年第1期23卷 172-174页

作者：乔保卫冯洁赖云锋凌云林殷茵汤庭鳌蔡炳初陈邦明 National Key Laboratory of Nano/Micro Fabrication Technology Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education Institute of Micro and Nano Science and Technology Shanghai Jiaotong University Shanghai 200030 State Key Laboratory of ASIC & System Fudan University Shanghai 200433 Silicon Storage Technology Inc. 1171 Sonora Court Sunnyvale CA94086 USA

Si-doped Ge2Sb2Te5 films have been prepared by dc magnetron co-sputtering with Ge2Sb2Te5 and Si targets. The addition of Si in the Ge2Sb2Te5 film results in the increase of both crystallization temperature and phasetransition temperature from face-centred-cubic （fcc） phase to hexagonal （hex） phase. The resistivity of the Ge2Sb2Te5 film shows a significant increase with the Si doping. When doping 11.8 at.% of Si in the film, the resistivity after 460℃ annealing increases from 1 to 11 mΩ.cm and dynamic resistance increase from 64 to 99Ω compared to the undoped Ge2Sb2Te5 film. This is very helpful to writing current reduction of phase-change random access memory.

关键词： NONVOLATILE MEMORY THIN-FILMS RESISTANCE ALLOYS

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Sensitivity analysis of light force accelerometer based on optical trapping Mie microsphere

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Optoelectronics Letters 2014年第1期10卷 77-80页

作者：冯丽爽焦洪臣姚保寅 Key Laboratory of Micro-nano Measurement-Manipulation and Physics Ministry of EducationFundamental Science on Novel Inertial Instrument & Navigation System Technology LaboratoryBeijing University of Aeronautics and Astronautics

For achieving the greatest sensitivity,numerical simulation is proposed to optimize the parameters of light force accelerometer(LFA).Firstly,the basic principle of the LFA is analyzed,and the mathematical model is established to describe the axial and radial optical trapping forces on microspheres in the fundamental mode Gaussian laser ***,the axial and radial optical trapping forces applied on Mie spheres are simulated to obtain the optimal parameters of open-loop *** show that the sensitivity can reach 103μm/***,the LFA system is proposed based on the closed-loop scheme with dual *** can provide reference for the design and fabrication of LFA in future.

关键词：敏感度分析加速度计捕获光学数值模拟高斯激光束数学模型最优参数

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Investigation of the synthesis and thermal insulation properties of K2Ti6O13 whisker-reinforced SiO2 micro powder composite coating fabrics

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Energy 2025年 328卷

作者： Man, Yi Ge, Chang Wang, Yao He, Yongqing Yang, Wei Qi, Yumin Wang, Bohong Varbanov, Petar Sabev Wang, Jin Nanjing Vocational University of Industry Technology Jiangsu Nanjing210023 China School of Materials Science and Engineering Hebei University of Technology Tianjin300401 China Hebei Key Laboratory of New Functional Materials School of Material Science and Engineering Hebei University of Technology Tianjin300401 China School of Energy and Environmental Engineering Hebei University of Technology Tianjin300401 China Chongqing Key Laboratory of Micro-Nano System and Intelligent Transduction National Research Base of Intelligent Manufacturing Service Chongqing Technology and Business University Chongqing400067 China National & Local Joint Engineering Research Center of Harbor Oil & Gas Storage and Transportation Technology/Zhejiang Key Laboratory of Petrochemical Environmental Pollution Control Zhejiang Ocean University No.1 Haida South Road Zhoushan316022 China Széchenyi István University Egyetem tér 1 Győr9026 Hungary

Developing functional textiles with thermal insulation and hydrophobic properties is of significant interest. This study successfully synthesizes K2Ti6O13 (potassium titanate, KTO) whiskers via the hydrothermal method and prepares KTO composite silica polyester fabric (KSP) through impregnation technology, exhibiting excellent thermal insulation and hydrophobic qualities. X-ray diffraction (XRD) analysis verifies the high purity and excellent crystallinity of KTO whiskers and SiO2 micro-powder. Scanning electron microscopy (SEM) images reveal that the KTO whiskers retain their original morphology and exhibit uniform size distribution, with an average length of around 1 μm and an aspect ratio of 40. Transmission electron microscopy (TEM) images further validate the planar growth properties of the whiskers. Raman spectroscopy research elucidates the vibrational modes of various chemical bonds in the KTO whiskers. The ultraviolet–visible–near-infrared spectrophotometer test results demonstrate that the KSP fabric reflects 43.5 % more light than standard polyester fabric and substantially lowers the temperature in the covered chamber under simulated sunlight exposure, achieving a maximum reduction of 7.4 °C. The KSP fabric has exceptional hydrophobic properties, completing a contact angle of 153.2° and maintaining reflectance stability, with a mere 5.92 % reduction after 20 days of outside exposure. This work offers substantial reference value for the advancement of practical textiles. © 2025

关键词： Bond strength (chemical)

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Electrocaloric Effect of P(VDF-TrFE)/SrTiO_3 Bilayer Thin Films

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Communications in Theoretical Physics 2013年第1期59卷 117-120页

作者：邱建华丁建宁袁宁一王秀琴 Center for Low-Dimensional Materials Micro-Nano Devices and SystemChangzhou University School of Material Science and Engineering Jiangsu University Jiangsu Key Laboratory for Solar Cell Materials and Technology

A phenomenological thermodynamic theory is applied to investigate the effect of misfit strgin and electric field on the electrocaloric effect of P（VDF-TrFN）/SrTiO3 bilayer thin films. Theoretical results indicate that the low electric field results in the decrease of the average polarization with the increase of the relative thickness of SrTi03 layer, and the high electric field has an opposite effect on it. Moreover, the electroealoric effect strongly depends on the electric field. The low electric field and the small field change can lead to a maximum of the electrocaloric effect, meanwhile the high electric field or the large field change results in the opposite trend.

关键词： bilayer thin film polymer electrocaloric effect

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