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检索条件"机构=Process Diagnostics and Control"
18 条 记 录,以下是1-10 订阅
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Critical Defect Detection at 3nm Technology Node: Enhanced Detection Using DUV Optical Inspection Technology With AI-Based Algorithm
Critical Defect Detection at 3nm Technology Node: Enhanced D...
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IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing
作者: Shao-Chien Chiu Mark Peng Yuan-Chung Wei Kai-Yuan Cheng To-Yu Chen Heng-Yu Chou Meng-Che Wu Kuan Hua Su Nofar Shushan Assaf Mizrahi Sidharth Maurya Guy Danieli Gilad Reut Yield Excellemce Department Intelligent Manufacturing Center Taiwan Semiconductor Manufacturing Company Baoshan Taiwan Semiconductor Products Group Applied Materials Taiwan Hsinchu Taiwan Process Diagnostics and Control Applied Materials Israel Rehovot Israel
In this paper, we present the results of a study conducted using cutting-edge deep-ultraviolet (DUV) brightfield wafer inspection technology, enhanced by a new artificial intelligence (AI) based image enhancer algorit... 详细信息
来源: 评论
A System for Elemental Analysis of Aluminum Chips, based on Neutron Activation Analysis
A System for Elemental Analysis of Aluminum Chips, based on ...
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IEEE Symposium on Nuclear Science (NSS/MIC)
作者: T. Szczesniak M. Grodzicka-Kobylka K. Brylew L. Adamowski K. Grodzicki L. Janiak A. Dziedzic M. Sitek A. Syntfeld-Kazuch H. Zastawny A. Gajderowicz F. Peregrin T. Baldi M. da Silva Lopez M. J. Neuer B. Kleimt Radiation Detectors and Plasma Diagnostics Division (TJ3) National Centre for Nuclear Research (NCBJ) Otwock Poland Industrial Process Control Systems SYSKON Wroclaw Poland Nuclear Technology Centre in Wroclaw POLON Wroclaw Poland GRUPAL ART. S.L. Aluminum Refinery Barcelona Spain The Technology Centre of Catalonia EURECAT Barcelona Spain innoRIID GmbH Grevenbroich Germany VDEh-Betriebsforschungsinstitut (BFI) Dusseldorf Germany
The performance of the demonstrator of the system for elemental analysis of aluminum chips is presented. The system is based on neutron activation analysis and isotopic neutron source of PuBe emitting 2x10^6 n/s. The ...
来源: 评论
Principles of functioning of the autonomous device for weed control for precision agriculture
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IOP Conference Series: Materials Science and Engineering 2020年 第1期747卷
作者: A I Dyshekov I G Smirnov M A Mirzaev M A Shereuzhev Laboratory of intelligent digital systems of monitoring diagnostics and process control in agricultural production Federal Scientific Agroengineering Center VIM Moscow 367032 Russia Department of intellectualization automatization and robotic of rural production Federal Scientific Agroengineering Center VIM Moscow 109428 Russia Laboratory of innovative structural polymer composite and biocomposite parts of agricultural machinery Federal Scientific Agroengineering Center VIM Moscow 109428 Russia Special mechanical engineering Bauman Moscow State Technical University Moscow 105005 Russia
The article shows the results of creation of a system aimed at reducing the negative impact on the ecological situation and biological systems while eliminating weeds in beetroot production. Methods of controlling wee...
来源: 评论
Design of the solar panel frame of the spacecraft by 3D printing with composite materials
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IOP Conference Series: Materials Science and Engineering 2020年 第1期747卷
作者: M A Mirzaev I G Smirnov A I Dyshekov V E Slavkina M A Shereuzhev S A Aliev Laboratory of innovative structural polymer composite and biocomposite parts of agricultural machinery Federal Scientific Agroengineering Center VIM Moscow 109428 Russia Department of intellectualization automatization and robotic of rural production Federal Scientific Agroengineering Center VIM Moscow 109428 Russia Laboratory of intelligent digital systems of monitoring diagnostics and process control in agricultural production Federal Scientific Agroengineering Center VIM Moscow 109428 Russia Special mechanical engineering Bauman Moscow State Technical University Moscow 105005 Russia Department of road transport Dzhambulatov Dagestan State Agrarian University Moscow 367032 Russia
The optimal design of the skeleton panel of the solar panels of the spacecraft was designed taking into account the increased physical and mechanical characteristics through the use of composite materials and the meth...
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Detection sensitivity improvement on STI module in 28nm process foundry logic node
Detection sensitivity improvement on STI module in 28nm proc...
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IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing
作者: Dan Koronel Govinda Soni Vijeet Gupta Mirko Beyer Tobias Günther Torsten Billasch Christophe Soonekindt Robert van Oostrum Remo Kirsch Applied Materials- SSG PDC Rehovot Israel Process Diagnostics and Control Business Group Rehovot Central IL GLOBALFOUNDRIES Dresden Germany GlobalFoundries Dresden Sachsen DE
In this paper we demonstrate a sensitivity improvement on a Nitride Strip layer at the Shallow Trench Isolation (STI) process module and how this sensitivity was later used to improve yield monitoring. The improvement... 详细信息
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Detection of multiple faults with intelligent condition indices
Detection of multiple faults with intelligent condition indi...
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10th International Conference on Condition Monitoring, CM 2013 and Machinery Failure Prevention Technologies 2013, MFPT 2013
作者: Juuso, Esko Lahdelma, Sulo Department of Process and Environmental Engineering Control Engineering Laboratory P.O.Box 4300 FI-90014-University-of-Oulu Finland Department of Mechanical Engineering Mechatronics and Machine Diagnostics Laboratory P.O.Box 4200 FI-90014-University-of-Oulu Finland
Automatic fault detection with condition indices enables reliable condition monitoring to be combined with process control. Useful information on different faults can be obtained by selecting suitable features from ge... 详细信息
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Advanced condition monitoring of epicyclic gearboxes
Advanced condition monitoring of epicyclic gearboxes
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10th International Conference on Condition Monitoring, CM 2013 and Machinery Failure Prevention Technologies 2013, MFPT 2013
作者: Lahdelma, Sulo Juuso, Esko Immonen, Jussi Department of Mechanical Engineering Mechatronics and Machine Diagnostics Laboratory P.O.Box 4200 FI-90014-University-of-Oulu Finland Department of Process and Environmental Engineering Control Engineering Laboratory P.O.Box 4300 FI-90014-University-of-Oulu Finland
Epicyclic gearing or planetary gearing is a gear system that consists of one or more outer gears, or planet gears, revolving around a central, or sun gear. Typically, the planet gears are mounted on a movable arm or c... 详细信息
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Real order derivatives and generalised norms in condition monitoring with noisy data
Real order derivatives and generalised norms in condition mo...
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9th International Conference on Condition Monitoring and Machinery Failure Prevention Technologies 2012, CM 2012 and MFPT 2012
作者: Lahdelma, Sulo Juuso, Esko Laurila, Jouni Department of Mechanical Engineering Mechatronics and Machine Diagnostics Laboratory P.O.Box 4200 FI-90014-University-of-Oulu Finland Department of Process and Environmental Engineering Control Engineering Laboratory P.O.Box 4300 FI-90014-University-of-Oulu Finland
Rapid changes in acceleration become emphasised upon the derivation of the acceleration signal x(2) . Higher order derivatives work very well in the whole range from slowly to very fast rotating rolling bearings. Real... 详细信息
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Intelligent stress indices in fatigue detection
Intelligent stress indices in fatigue detection
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9th International Conference on Condition Monitoring and Machinery Failure Prevention Technologies 2012, CM 2012 and MFPT 2012
作者: Juuso, Esko Lahdelma, Sulo Department of Process and Environmental Engineering Control Engineering Laboratory P.O.Box 4300 FI-90014-University-of-Oulu Finland Department of Mechanical Engineering Mechatronics and Machine Diagnostics Laboratory P.O.Box 4200 FI-90014-University-of-Oulu Finland
Fatigue is caused by repeated loading and unloading. The mechanism proceeds through cracks formed when the load exceeded certain thresholds. Structures fracture suddenly when a crack reaches a critical size. Intellige... 详细信息
来源: 评论
Advanced Elemental Analysis Methods for sub 30nm Defects in a Defect Review SEM
Advanced Elemental Analysis Methods for sub 30nm Defects in ...
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22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
作者: Shemesh, Dror Boehm, Adi Greenberg, Ofir Dotan, Kfir Process Diagnostics and Control Applied Materials Rehovot Israel
as development phases became shorter, fast defect characterization is highly important. In addition, new chemicals involved in sub 28nm semiconductor processes introduce new types of defects. The variety of defect typ... 详细信息
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