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2023 China Semiconductor technology International Conference, CSTIC 2023

作者： Yu, Yexiao Ma, Hong Liu, Zhongming Xiong, Shaoyou Wang, Dan Zhang, Yang Yang, Yi Changxin Memory Technology United Process Development Hefei China

ISBN: (纸本)9798350311006

In this paper, 3D TCAD (technology Computer Aided Design) process and device simulation methods are used to explore the relationship between CBL (parasitic capacitance of bit line) and structure. The results show that BL spacer thickness and material property are critical to CBL. We suggest that BL profile should be vertical, which can give more room to BL spacer, then CBL will be reduced. Through process simulation, when BL TB ratio (top CD: bottom CD) increase from 0.6 to 0.9, the thickness of BL spacer increases by 1nm, and CBL decreases by 2. 7aF/cell. © 2023 IEEE.

关键词： Capacitance

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Measurement and prediction of isothermal vapor–liquid equilibrium of a-pinene+camphene/longifolene+abietic acid+palustric acid+neoabietic acid systems

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Chinese Journal of Chemical Engineering 2023年第1期53卷 155-169页

作者： Youqi Li Xiaopeng Chen Linlin Wang Xiaojie Wei Weijian Nong Xuejuan Wei Jiezhen Liang Guangxi Key Laboratory of Petrochemical Resource Processing and Process Intensification Technology School of Chemistry and Chemical EngineeringGuangxi UniversityNanning 530004China China Academy of Science and Technology Development Guangxi Branch Nanning 530022China Guangxi Sci-Tech Development Forest-like Technology Co.Ltd Nanning 530022China

The vapor–liquid equilibrium(VLE)data of a-pinene+camphene+[abietic acid+palustric acid+neoabietic acid]and a-pinene+longifolene+[abietic acid+palustric acid+neoabietic acid]systems at 313.15 K,333.15 K and 358.15 K were measured by headspace gas chromatography(HSGC).These data was compared with the predictions value by conductor-like screening model for realistic solvation(COSMO-RS).Moreover,the calculated data of COSMO-RS and Non-Random Two-Liquids(NRTL)models showed good agreement with the experimental *** was found that the three resin acids inhibited the volatility of a-pinene,camphene and longifolene and resulted in the decrease of total ***,HE(HB)contributes the most to the excess enthalpy and the hydrogen bonding interaction is the dominant intermolecular force of a-pinene,camphene and longifolene with the three resin *** addition,the geometric structures optimization and binding energy were obtained by the DFT to further illustrate the hydrogen bonding interaction and the effects of the addition of the three resin acids on the isothermal VLE.

关键词： Isothermal vapor–liquid equilibrium Headspace gas chromatography COSMO-RS model DFT

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High concentration of Ti^(3+)in C-TiO_(x)nanosheets boosting efficient photodegradation

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Science China(Technological Sciences) 2025年第3期68卷 156-166页

作者： Chongbei WU Xuan LI Haibin WANG Jiaxin TANG Shuai WEI Yuanyuan WU Aobing WANG Jizhou JIANG Hebei Key Laboratory of Man-machine Environmental Thermal Control Technology and Equipment Hebei Vocational University of Technology and EngineeringXingtai054000China School of Materials Science and Engineering Key Laboratory of Green Chemical Engineering Process of Ministry of EducationEngineering Research Center of Phosphorus Resources Development and Utilization of Ministry of EducationWuhan Institute of TechnologyWuhan430205China

Semiconductor photocatalysis holds significant promise for addressing dye-pollution in ***,the efficiency of photocatalytic water purification is constrained by the weak light absorption capacity and low active site distribution of *** a bottom-up approach,carbon-doped TiO_(x)(C-TiO_(x))nanosheets with high concentrations of Ti^(3+)active sites were fabricated by etching the Al element in Ti_(3)Ai C_(2)with H_(2)O_(2).Experimental evidence demonstrates that the optimal C-TiO_(x)nanosheets exhibit high activity for the photocatalytic degradation of methylene blue,achieving a degradation rate of 100%within 50 *** introduction of carbon into the C-TiO_(x)nanosheets induces a red shift in the absorption edge,boosting the migration of photo-generated charge ***,there is a significant correlation between the concentration of Ti^(3+)active sites and the density of oxygen vacancies in the C-TiO_(x)nanosheets,which synergistically influence the photocatalytic degradation performance of MB dye wastewater.

关键词： bottom-up strategies C-TiO_(x)nanosheets high-concentrations Ti^(3+) photocatalytic degradation

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Synthesis of Organic-Inorganic Hybrid Aluminum Hypophosphite Microspheres Flame Retardant and Its Flame Retardant Research on Thermoplastic Polyurethane

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Journal of Wuhan University of technology(Materials Science) 2024年第1期39卷 221-233页

作者：刘生鹏 XU Zhi ZHANG Xinyuan WEI Huan XIONG Yun DING Yigang HUANG Wenbo 许莉莉 Engineering Research Center of Phosphorus Resources Development and Utilization of Ministry of Education Key Laboratory for Green Chemical Process of Ministry of EducationSchool of Chemical Engineering and PharmacyWuhan Institute of TechnologyWuhan 430205China Hubei Three Gorges Laboratory Yichang 443007China School of Technology Materials Science and Engineering Wuhan Institute of TechnologyWuhan 430205China

Aluminum hypophosphite microspheres(AHP) were synthesized by hydrothermal method using NaH2PO2·H2O and AlCl3·6H2O as raw materials, and then the AHP microspheres were polymerized by surface polymerization of micro-nanospheres with cyclic cross-linked poly(cyclotriphosphazene-co-4,4'-sulfonyldiphenol)(PZS). A new organic-inorganic poly(phosphonitrile)-modified aluminum hypophosphite microspheres(PZS-AHP) were synthesized by encapsulation and applied to flame retardant thermoplastic polyurethane(TPU). The microstructure and chemical composition of the PZS-AHP microsphere were characterized by scanning electron microscopy, transmission electron microscopy, Fourier transform infrared spectroscopy and X-ray spectroscopy. The thermal stability of PZS-AHP microsphere was explored with thermogravimetric analysis. Thermogravimetric data indicate that the PZS-AHP microspheres have excellent thermal stability. The thermal and flame-retarding properties of the TPU composites were evaluated by thermogravimetric(TG), limited oxygen index tests(LOI), and cone calorimeter test(CCT). The TPU composite achieved vertical burning(UL-94) V-0 grade and LOI value reached 29.2% when 10 wt% PZS-AHP was incorporated. Compared with those of pure TPU, the peak heat release rate(pHRR) and total heat release(THR) of TPU/10%PZS-AHP decreased by 82.2% and 42.5%, respectively. The results of CCT indicated that PZS-AHP microsphere could improve the flame retardancy of TPU composites.

关键词： polyphosphazene thermoplastic polyurethane flame retardancy aluminum hypophosphite surface polymerization

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Interfacial B-O bonding modulated S-scheme B-doped N-deficient C_(3)N_(4)/O-doped-C_(3)N_(5) for efficient photocatalytic overall water splitting

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Chinese Chemical Letters 2025年第1期36卷 355-361页

作者： Entian Cui Yulian Lu Zhaoxia Li Zhilei Chen Chengyan Ge Jizhou Jiang Key Laboratory for Advanced Technology in Environmental Protection of Jiangsu Province Yancheng Institute of TechnologyYancheng 224051China School of Environmental Ecology and Biological Engineering Key Laboratory of Green Chemical Engineering Process of Ministry of EducationEngineering Research Center of Phosphorus Resources Development and Utilization of Ministry of EducationWuhan Institute of TechnologyWuhan 430205China

Photocatalytic overall pure water splitting is a promising method for generating green hydrogen energy under mild ***,this process is often hindered by sluggish electron-hole separation and *** address this,a step-scheme(S-scheme)B-doped N-deficient C_(3)N_(4)/O-doped C_(3)N_(5)(BN-C_(3)N_(4)/O-C_(3)N_(5))heterojunction with interfacial B-O bonds has been *** Pt and Co(OH)_(2) as co-catalysts,BN-C_(3)N_(4)/O-C_(3)N_(5) S-scheme heterojunction demonstrates significantly enhanced photocatalytic activity for overall pure water splitting under visible light,achieving H_(2) and O_(2) evolution rates of 40.12 and 19.62μmol/h,*** characterizations and experiments revealed the performance-enhancing effects of the enhanced built-in electric field and the interfacial B-O ***,the strengthened built-in electric field provides sufficient force for rapid interfacial electron ***,by reducing the transport energy barrier and transfer distance,the interfacial B-O bonds facilitate rapid recombination of electrons and holes with relatively low redox potential via the S-scheme charge-transfer route,leaving the high-potential electrons and holes available for H^(+)reduction and OH^(-)oxidation ***,the photocatalytic efficiency of BN-C_(3)N_(4)/O-C_(3)N_(5) S-scheme heterojunction was significantly improved,making it a promising approach for green hydrogen production through overall pure water splitting.

关键词： Interfacial B-O bonds BN-C_(3)N_(4) O-C_(3)N_(5) S-scheme heterojunction Water splitting

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Ni-Co doped TiO2 catalyst for efficient photocatalytic degradation of Malachite Green under UV and direct sunlight

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Environmental Science and Pollution Research 2025年 1-16页

作者： Mhalshekar, Krushika Pawar, Vivek Gaydhane, Mrunalini Sontakke, Sharad Materials and Process Development Laboratory Department of Chemical Engineering Birla Institute of Technology and Science K. K. Birla Goa Campus Goa Pilani403726 India Department of Chemical Engineering Thapar Institute of Engineering and Technology Punjab Patiala147004 India

In the present study, combustion-synthesized TiO2 nanoparticles were wet impregnated with Ni, Co, and Ni-Co, respectively. The photocatalytic performance of synthesized catalysts was evaluated against Malachite Green dye. The synthesized materials were characterized for crystallite size, surface morphology, elemental composition, and band gap using X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy, and ultra-violet diffused reflectance spectroscopy, respectively. The optimum parameters for maximum degradation were found by examining the effects of catalyst loading, initial dye concentration, and light intensity. A comparative analysis of Ni-doped, Co-doped, and Ni-Co-doped TiO2 photocatalysts was conducted. The results indicate superior photocatalytic activity of Ni-Co doped TiO2 among the catalysts investigated under UV light. The degradation kinetics was studied, and the underlying degradation mechanism was proposed with the help of LC–MS analysis. Furthermore, a comparative study on the degradation under solar radiation using Ni-Co/TiO2 was conducted. © The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature 2025.

关键词： Energy dispersive spectroscopy

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Manufacturing processes and Powder Property of Metal Powders for Additive Manufacturing

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Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy 2024年第12期71卷 610-618页

作者： Yamada, Shinnosuke Process Technology Research Sect. Corporate Research & Development Center Daido Steel Co. Ltd. 30 Daido-cho 2-chome Minami-ku Nagoya457-8545 Japan

Recently, Additive Manufacturing (AM) has been attracting attention as the breakthrough manufacturing technology and is being aggressively researched and developed around the world. Metal AM enables the integration of parts with complex 3D internal structures, such as topology optimization and lattice structures, which are difficult to achieve with conventional casting or machining processes and reduces costs by reducing the number of parts and weight. Therefore, it is applied in various industrial fields such as aircraft, medical, automotive, and die & mold. There are various processes for metal AM, of which powder bed fusion (PBF) and direct energy deposition (DED), which use metal powders, are technologically mature and industrially widespread. In metal AM using metal powder, the quality of the AM product is influenced by the interaction of complex factors such as AM build recipe, powder properties and powder feeding process. In case the raw powder with inappropriate powder properties is selected for the AM machine, defects may occur in the AM product and quality, such as mechanical property, may be deteriorated. This review is introduced on typical types of AM processes using metal powder, factors affecting powder properties of AM products, metal powder manufacturing methods, and evaluation methods. ©2024 Japan Society of Powder and Powder Metallurgy.

关键词： Shape optimization

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Ongoing Evolution of DRAM Scaling via Third Dimension -Vertically Stacked DRAM

Ongoing Evolution of DRAM Scaling via Third Dimension -Verti...

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2023 IEEE Symposium on VLSI technology and Circuits, VLSI technology and Circuits 2023

作者： Han, J.W. Park, S.H. Jeong, M.Y. Lee, K.S. Kim, K.N. Kim, H.J. Shin, J.C. Park, S.M. Shin, S.H. Park, S.W. Lee, K.S. Lee, J.H. Kim, S.H. Kim, B.C. Jung, M.H. Yoon, I.Y. Kim, H. Jang, S.U. Park, K.J. Kim, Y.K. Kim, I.G. Oh, J.H. Han, S.Y. Kim, B.S. Kuh, B.J. Park, J.M. Dram Technology Development Hwaseong Korea Republic of Next Generation Process Development Samsung R&d Center Hwaseong Korea Republic of

ISBN: (纸本)9784863488069

For the past decades, the density of DRAM has been remarkably increased by making access transistors and capacitors smaller in size per unit area. However, shrinking devices far beyond the 10 nm process node increasingly poses process and reliability challenges. As Flash technology made a pivotal and successful innovation via 3D NAND, DRAM technology may also adopt vertical stacking memory cells. Vertically stacked DRAM (VS-DRAM) continues to increase bit density on a die by increasing the number of layers along with reducing the size of the transistor. In this paper, the opportunities and challenges of VS-DRAM are discussed. © 2023 JSAP.

关键词： Dynamic random access storage

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Fabrication of Dual Damascene structure with Nanoimprint lithography and Dry-etching

Fabrication of Dual Damascene structure with Nanoimprint lit...

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Novel Patterning Technologies 2023

作者： Takeuchi, Norikazu Hasegawa, Genna Komukai, Toshiaki Iwasaki, Takahiro Hatano, Masayuki Komori, Motofumi Kono, Takuya Process Technology Research & Development Center Institute of Memory Technology Research & Development Kioxia Corporation 800 Yamanoissiki-cho Yokkaichi-shi Mie-ken512-8500 Japan

ISBN: (纸本)9781510661011

Nanoimprint lithography (NIL) has received attention as alternative lithographic technology, which can fabricate fine patterns of semiconductor devices at low cost. Application of NIL may lead to the reduction of number of process steps and cost of manufacturing of dual-damascene structure, by simultaneous fabrication of holes and trenches. Therefore, in this study, we investigated fabrication of dual-damascene structure using NIL and dry-etching. However, the difficulty in dry-etching process is high as the holes and trenches are etched together using single resist mask. Suppression of defects during the NIL process and the suppression of resist consumption and CD shift during the etching process, is critical. To address these issues, we used a high etching resistance resist, optimized the NIL process to reduce defects, and optimized the template structure and etching process to suppress resist consumption and CD shift. As a result, a dual-damascene structure with L/S = 4X/4X nm was obtained. © 2023 SPIE.

关键词： Nanoimprint lithography

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Fabrication of SiC particle dispersed AZ91D magnesium alloy composite by injection molding method and their properties

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Keikinzoku/Journal of Japan Institute of Light Metals 2024年第3期74卷 141-146页

作者： Hideshima, Yasutoshi Maeda, Fumiya Fukuta, Tadao Ozaki, Koichi Graduate School of Computer Science and Systems Engineering Okayama Prefectural University 111 Kuboki Okayama Soja-shi719-1197 Japan Process Technology Development Department Technology Development Division Seiko Epson Co. Suwa-shi Nagano Japan Faculty of Computer Science and Systems Engineering Okayama Prefectural University Okayama Soja-shi Japan

AZ91D magnesium alloy chips were coated with SiC powder using a binder, and injection molding was attempted using SiC powder coated magnesium chips as raw material. The metallurgical structure of the injection molded products showed uniform dispersion of SiC particles in the matrix, and there were no significant defects such as voids at the SiC particle-matrix interface. The hardness and 0.2% proof stress of the injection molded products tended to improve with increasing SiC content, while the elongation decreased with increasing SiC content. The Young's modulus of the injection molded products improved with increasing SiC content. It was confirmed that the specific bending rigidity of the injection molded products also improves due to the significant increase in the Young's modulus, although the addition of SiC leads to an increase in density. © 2024 The Japan Institute of Light Metals.

关键词： Silicon carbide

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