This study reports the good thermal stability of a sputtered Cu(MoN x ) seed layer on a barrierless Si substrate. A Cu film with a small amount of MoN x ...
This study reports the good thermal stability of a sputtered Cu(MoN
x
) seed layer on a barrierless Si substrate. A Cu film with a small amount of MoN
x
was deposited by reactive co-sputtering of Cu and Mo in an Ar/N2 gas mixture. After annealing at 560°C for 1 h, no copper silicide formation was observed at the interface of Cu and Si. Leakage current and resistivity evaluations reveal the good thermal reliability of Cu with a dilute amount of MoN
x
at temperatures up to 560°C, suggesting its potential application in advanced barrierless metallization. The thermal performance of Cu(MoN
x
) as a seed layer was evaluated when pure Cu is deposited on top. X-ray diffraction, focused ion beam microscopy, and transmission electron microscopy results confirm the presence of an ∼10-nm-thick reaction layer formed at the seed layer/Si interface after annealing at 630°C for 1 h. Although the exact composition and structure of this reaction layer could not be unambiguously identified due to trace amounts of Mo and N, this reaction layer protects Cu from a detrimental reaction with Si. The Cu(MoN
x
) seed layer is thus considered to act as a diffusion buffer with stability up to 630°C for the barrierless Si scheme. An electrical resistivity of 2.5 μΩ cm was obtained for the Cu/Cu(MoN
x
) scheme after annealing at 630°C.
Summary: The sol-gel synthesis of organic-inorganic hybrids based on triethoxysilane- terminated poly(ethylene oxide) and tetraethylorthosilicate was monitored in-situ using three spectroscopic methods (FTIR/ATR, Rama...
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Summary: The sol-gel synthesis of organic-inorganic hybrids based on triethoxysilane- terminated poly(ethylene oxide) and tetraethylorthosilicate was monitored in-situ using three spectroscopic methods (FTIR/ATR, Raman, NIR). These spectroscopic methods allow in-situ monitoring of the evolution of hybrid materials starting from the modification of the polymer and the early steps of hydrolysis up to the network formation. By application of 29 Si solid-state NMR spectroscopy the assignment and quantification of the Raman bands to different end groups and different cross-linking states was made. The sol-gel reaction was also followed by in-line NIR spectroscopy. A multivariate data analysis was accomplished to obtain a conversion-time curve. Furthermore, we investigated spin-coated films on wafers using FTIR transmission spectroscopy.
Protein membranes have been prepared by mixing gelatin (G) with Bombyx mori silk fibroin (SF) and using aqueous methanol (MeOH) to induce SF crystallization. Amorphous blends of these polymers appear quasi-homogeneous...
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Shapes and structures of star-polystyrenes bearing 6 to 57-arms were in detail investigated in good and theta solvents by small-angle X-ray scattering with synchrotron radiation sources.
ISBN:
(纸本)1420063766
Shapes and structures of star-polystyrenes bearing 6 to 57-arms were in detail investigated in good and theta solvents by small-angle X-ray scattering with synchrotron radiation sources.
Surface‐biofunctionalized synthetic polymer fibers composed of a fiber‐forming host polymer and an oligopeptide conjugate can be prepared from electrospinning, report Spontak and co‐workers on p. 87. The conjugate ...
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Surface‐biofunctionalized synthetic polymer fibers composed of a fiber‐forming host polymer and an oligopeptide conjugate can be prepared from electrospinning, report Spontak and co‐workers on p. 87. The conjugate consists of a polypeptide segment and a polymer block that is compatible with the host polymer. Because the more polarizable peptide segment migrates to the surface during electrospinning, peptide surface‐enrichment is achieved in a single step without further treatment.
DNA hybridization has been increasingly adopted in materials sciences due to its complementary nature of single stranded DNAs. This unique property could be potentially used in the realization of 2 dimensional (2D) ar...
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A disk-like triazine compound, denoted by TRI-C8 can self-assemble in octane or cyclohexane, and the solution becomes highly viscoelastic. Spectroscopy and microscopy revealed that TRI-C8 can stack with each other wit...
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A disk-like triazine compound, denoted by TRI-C8 can self-assemble in octane or cyclohexane, and the solution becomes highly viscoelastic. Spectroscopy and microscopy revealed that TRI-C8 can stack with each other with the π-π and hydrogen-bond interactions. In this report, we investigate the nano-structure of the TRI-C8 aggregate by use of scattering technique.
DNA linked 2D colloidal photonic crystals were micro-machined using a Nd:YAG pulsed laser. The 2D photonic crystals were self-assembled via 1.8 μm polystyrene (PS) microspheres on functionalized glass substrates. The...
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Controlled defects were created on DNA linked 2-D colloidal photonic crystals using a Nd:YAG pulsed laser. The 2-D photonic crystals were self-assembled using 1.8 μm polystyrene (PS) microspheres on functionalized gl...
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Controlled defects were created on DNA linked 2-D colloidal photonic crystals using a Nd:YAG pulsed laser. The 2-D photonic crystals were self-assembled using 1.8 μm polystyrene (PS) microspheres on functionalized glass substrates. To synthesize the hexagonal close packed crystalline samples, both substrate and particles attached single-strand DNA, sequence A on the substrate and sequence B on the particles. The DNA was hybridized using the DNA linker with complementary single-strand A’B’ that anchored the particles to the substrate during self-assembly. The 532 nm second harmonic wavelength beam of the pulsed Nd:YAG laser (1064 nm) with a pulse width of 10 ns was used for the removal of individual colloidal particles from the self assembled photonic crystals. In the present tests, the diameter of the laser beam was optically reduced from 7 mm to about 1.8 μm. Controlled line defects and geometrical shapes (e.g., hexagonal and triangle) were created in the 2D arrays in an aqueous medium.
In attempts to develop novel functional additives for thermoplastic and thermoset polymer coatings, various sizes of microcapsules containing a silicone fluid which could facilitate the release of the coating from a m...
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In attempts to develop novel functional additives for thermoplastic and thermoset polymer coatings, various sizes of microcapsules containing a silicone fluid which could facilitate the release of the coating from a metallic substrate were prepared by in-situ polymerization. Fill content, size of capsules, wall-thickness, and surface morphology were observed by TGA, TEM, SEM, EDX, optical and NMR microscopy. The capsules were dispersed in polymeric coatings and the release of their content through mechanical means was followed microscopically.
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