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International Conference on Information Networking

作者： H. Tsuji H. Koizumi J. Sawamoto Information Technology R&D Center Mitsubishi Electric Corporation Limited Kamakura Kanagawa Japan Corporate Engineering Manufacturing & Information Systems Mitsubishi Electric Corporation Limited Kamakura Kanagawa Japan

In this paper, we propose a practical method for solving the delivery scheduling problem and discuss its implementation. The method is based on the distributed cooperative problem solving. In the delivery scheduling method, the covered region is partitioned into multiple subregions and each subregion is assigned a subproblem solving agent. Integrating those subproblem solving agents, an integration-and-evaluation agent solves the total problem. By employing the distributed cooperative problem solving framework for the delivery scheduling problem, we achieved an easy incorporation of various evaluation parameters in the process of scheduling, efficient use and management of scheduling knowledge of various levels, and reduction of computer processing by division of the problem into subproblems.

关键词： Problem-solving Job shop scheduling Processor scheduling Personnel Costs Large-scale systems Vehicles Information technology research and development Systems engineering and theory

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0.1 /spl mu/m level contact hole pattern formation with KrF lithography by resolution enhancement lithography assisted by chemical shrink (rELACS)

0.1 /spl mu/m level contact hole pattern formation with KrF ...

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International Electron devices Meeting (IEdM)

作者： T. Toyoshima T. Ishibashi A. Minanide K. Sugino K. Katayama T. Shoya I. Arimoto N. Yasuda H. Adachi Y. Matsui Advanced Technology R&D Center Mitsubishi Electronic Corporation Amagasaki Hyogo Japan ULSI Development Center Mitsubishi Electronic Corporation Itami Hyogo Japan Ryoden Semiconductor System Engineering Corporation Itami Hyogo Japan

We developed a hole shrink process named rELACS (resolution Enhancement Lithography Assisted by Chemical Shrink) that is a robust and low-cost method. This method makes use of crosslinking reaction between the materials coated on the resist pattern, and the acid existing at the resist wall. By the rELACS, we could shrink KrF resist hole patterns to 0.1 /spl mu/m level. The shrinkage of hole size is dependent on both baking temperature and initial hole size. This process has been established for the fabrication of 0.20 /spl mu/m devices.

关键词： Pattern formation Lithography resists Shape Size control Temperature dependence Chemical processes

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Guest Editorial

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Advanced Performance Materials 1998年第4期5卷 263-264页

作者： Kim, Nack J. Lee, Y.T. Kim, H.M. Center for Advanced Aerospace Materials and Dept. of Materials Science & Engineering Pohang University of Science and Technology Pohang Korea Department of Test and Evaluation Korea Institute of Machinery and Materials Changwon Korea National R&D Planning and Management Science and Technology Policy Institute Cheongryang Seoul Korea

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Impact of nitridation engineering on microscopic SILC characteristics of sub-10-nm tunnel dielectrics

Impact of nitridation engineering on microscopic SILC charac...

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International Electron devices Meeting (IEdM)

作者： T. Ogata M. Inoue T. Nakamura N. Tsuji K. Kobayashi K. Kawase H. Kurokawa T. Kaneoka Y. Ohno H. Miyoshi ULSI Development Center Mitsubishi Electronic Corporation Itami Hyogo Japan Ryoden Semiconductor System Engineering Corporation Itami Hyogo Japan Memory IC Division Mitsubishi Electronic Corporation Itami Hyogo Japan Advanced Technology R&D Center Mitsubishi Electronic Corporation Amagasaki Hyogo Japan

We have statistically analyzed 28800 cells of arrayed stacked gate transistors, and, for the first time, we discuss the effectiveness of NO and N/sub 2/O nitridation in suppressing microscopic SILC (mSILC). We have found that NO nitridation is more effective in suppressing the mSILC than N/sub 2/O nitridation and is very promising for the reduction of bit failures.

关键词： Microscopy dielectric substrates MOS capacitors Electron traps Stress dielectric measurements Charge carrier processes dielectric films Leakage current Gases

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Investigation of Pt/Ta diffusion barrier using hybrid conductive oxide (ruO2) for high dielectric applications

Journal of Vacuum Science & Technology B: Microelectronics a...

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Journal of Vacuum Science & technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 1998年第3期16卷 1137-1141页

作者： dong-Soo Yoon Hong Koo Baik Sung-Man Lee Sang-In Lee Hyun ryu Hwack Joo Lee Department of Metallurgical Engineering Yonsei University Seoul 120-749 Korea Department of Materials Engineering Kangwon National University Chuncheon Kangwon-Do 200-701 Korea Technology Development Semiconductor R&D Center Samsung Electronics Co. San#24 Nongseo-Lee Kiheung-Eup Yongin-City Kyungki-Do 449-900 Korea New Material Evaluation Center KRISS Taejon 305-600 Korea

The Pt/Ta diffusion barrier using hybrid conductive oxide (ruO2) for dynamic random access memory and ferroelectric random access memory capacitor bottom electrodes is proposed. The thermal stability of Pt+ruO2 (50 nm)/Ta+ruO2 (50 nm)/TiSi2/poly-Si/SiO2/Si contact system is investigated and compared to that of the Pt(50 nm)/Ta(50 nm)/TiSi2/poly-Si/SiO2/Si contact system. The Pt+ruO2/Ta+ruO2/TiSi2/poly-Si/SiO2/Si contact system sustained its structure up to 650 °C, whereas Pt/Ta/TiSi2/poly-Si/SiO2/Si contact system was completely degraded after annealing at 650 °C. In the former case, the addition of ruthenium dioxide (ruO2) into the Pt bottom electrode layer led to retardation of the oxygen indiffusion, preventing the indiffusion of oxygen up to 650 °C. In addition, the Ta+ruO2 diffusion barrier showed an amorphous structure and ruO2 is bound to the Ta matrix, inhibiting the interdiffusion of O, Pt, and Si through grain boundaries which can act as fast diffusion paths up to high temperatures. Therefore, it appeared that the barrier properties of Pt/Ta diffusion barrier are improved by using hybrid conductive oxide (ruO2).

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An advanced system architecture of CSCW for collaborative education system and its experimental results

An advanced system architecture of CSCW for collaborative ed...

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International Conference on Information Networking

作者： H. Koizumi T. dasai S. Moriya K. Abe N. Shiratori Manufacturing and Inforamtion Systems Mitsubishi Electric Corporation Limited Yokohama Japan Information Technology R&D Center Mitsubishi Electric Corporation Limited Kamakura Kanagawa Japan Faculty of Education Yamagata University Yamagata Japan Department of Engineering University of Tohoku Sendai Japan Research Institute of Electrical Communication University of Tohoku Sendai Japan

In this paper, we propose a methodology for distance learning lessons with the aim of stimulating pupil's desire to learn while enhancing their creative abilities. Based on this concept, we constructed the educational system hiring the modern technologies of CSCW (Computer Supported Cooperative Work) and multimedia communication, and conducted the verification experiments in some elementary schools in Japan with a result of confirming the efficacy of the proposed methodology.

关键词： Collaboration Computer aided instruction Cameras Video equipment Computer displays Multimedia communication Multimedia systems Systems engineering education Information technology research and development

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Purification of a larval settlement-inducing protein complex (SIPC) of the barnacle,Balanus amphitrite

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Journal of Experimental Zoology Part A: Ecological and Integrative Physiology 1998年第1期281卷

作者： Kiyotaka Matsumura Manami Nagano Nobuhiro Fusetani Fusetani Biofouling Project ERATO Japan Science and Technology Corporation c/o Yokohama R&D Center of Niigata Engineering Co. Ltd. Isogo Yokohama 235 Japan

Many species of barnacles live gregariously, and chemical cues from conspecifics are believed to induce settlement of cypris larvae. Settlement-inducing factors from the adult barnacle Balanus amphitrite have been partially purified using a nitrocellulose membrane-based assay. The assay was designed for research on active proteins adsorbed to substrata. A settlement-inducing protein complex (SIPC) with a high molecular weight was purified from whole adult barnacles by ammonium sulphate precipitation, ion exchange chromatography on Mono Q, gel filtration on Superdex 200 Hr, and lectin affinity chromatography on LCA-Sepharose. SdS-polyacrylamide gel electrophoresis of the purified protein complex showed three major protein bands of 76, 88, and 98 kda and one minor band of 32 kda under reducing conditions. Lentil lectin (LCA), a lectin that inhibits adult extract-induced settlement, was found to bind to the subunits of 76, 88, and 98 kda by lectin blotting. Moreover, we isolated three LCA-binding subunits of SIPC by SdS-PAGE and found that each individual subunit also induced larval settlement. It would appear, therefore, that a specific sugar chain of SIPC plays an important role in the settlement of B. amphitrite. J. Exp. Zool. 281:12–20, 1998. © 1998 Wiley-Liss, Inc.

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Lentil lectin inhibits adult extract-induced settlement of the barnacle,Balanus amphitrite

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Journal of Experimental Zoology Part A: Ecological and Integrative Physiology 1998年第3期280卷

作者： Kiyotaka Matsumura Sachiko Mori Manami Nagano Nobuhiro Fusetani Fusetani Biofouling Project ERATO Japan Science and Technology Corporation c/o Yokohama R&D Center of Niigata Engineering Co. Ltd. Isogo-ku Yokohama 235 Japan

For barnacles that live gregariously, chemical cues from conspecifics are believed to induce settlement of cypris larvae. A new assay system, using nitrocellulose membranes, has been developed to study cyprid settlement in response to adsorbed proteins. Using this assay, water-soluble extracts from the adult barnacle, Balanus amphitrite , were found to promote settlement of conspecific cyprids. Adult extract-induced settlement was inhibited by lentil lectin (LCA) and concanavalin A (ConA), but not by wheat germ agglutinin (WGA) or peanut agglutinin (PNA). LCA and ConA did not affect cyprid motility. Pretreatment of cyprids with LCA did not affect settlement, whereas pretreatment of adult extracts with LCA suppressed settlement. Moreover, inhibition of settlement by LCA was cancelled in the presence of methyl α-d-mannopyranoside. It is suggested that an LCA-binding sugar chain of the settlement-inducing glycoprotein is involved in settlement of the barnacle, B. amphitrite. J. Exp. Zool. 280:213–219, 1998. © 1998 Wiley-Liss, Inc.

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Abstracts of presentations at the 19th Congress of the Israeli Phytopathological Society - February 16-17, 1998, ArO, the Volcani center, Bet dagan, Israel

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PHYTOPArASITICA 1998年第2期26卷 153-174页

作者： [Anonymous] Dept. of Ornamental Horticulture ARO Newe Ya’ar Research Center Ramat Yishay Israel Extension Service Ministry of Agriculture Tel Aviv Israel Dept. of Plant Pathology ARO The Volcani Center Bet Dagan Israel Kibbutz Bar’am M.P. Merom Israel Dept. of Plant Pathology ARO Gilat Experiment Station M.P. Negev Israel Dept. of Plant Pathology Israel Dept. of Field Crops ARO The Volcani Center Bet Dagan Israel Dept. of Plant Pathology and Microbiology The Hebrew University of Jerusalem Faculty of Agricultural Food and Environmental Quality Sciences Rehovot Inst. for Cereal Crops Improvement (ICCI) The George S. Wise Faculty of Life Sciences Tel-Aviv University Tel Aviv Israel Dept. of Plant Pathology ARO The Volcani Center Bet Dagan Dept. of Plant Pathology and Microbiology The Hebrew University of Jerusalem Food and Environmental Quality Sciences Rehovot Israel Official Seed Testing Laboratory Israel Depts. of Plant Pathology Israel Extension Service Ministry of Agriculture Tel Aviv Virology ARO The Volcani Center Bet Dagan Dept. of Entomology The Hebrew University of Jerusalem Faculty of Agricultural Food and Environmental Sciences Rehovot Israel Dept. of Life Sciences Bar-Ilan University Ramat Gan Israel Recherche en Sciences de la Vie et de la Santé Laval University University City Quebec Canada Dept. of Agronomy and Natural Resources ARO The Volcani Center Bet Dagan Israel Dept. of Plant Science The George S. Wise Faculty of Life Sciences Tel-Aviv University Tel Aviv Israel Dept. of Ornamental Horticulture ARO The Volcani Center Bet Dagan Israel Dept. of Plant Pathology ARO The Volcani Center Bet Dagan Israel Inst. de Agricultura Sostenible CSIC Cordoba Spain Dept. of Plant Science Israel Dept. of Biology Technion-Israel Institute of Technology Haifa Israel Inst. of Cereal Crops Improvement Tel-Aviv University Tel Aviv Arava R&D Sapir Center M.P. Central Dept. of Agricultural Botany Israel Dept. of Vegetable Crops ARO Newe Ya’ar Resea

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Evaluation of a novel alginate gel dressing: Cytotoxicity to fibroblastsin vitroand foreign-body reaction in pig skinin vivo

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Journal of Biomedical Materials research Part B: Applied Biomaterials 1998年第2期39卷

作者： Yoshihisa Suzuki Yoshihiko Nishimura Masao Tanihara Kyoko Suzuki Tatsuo Nakamura Yasuhiko Shimizu Yoshio Yamawaki Yoshimi Kakimaru Department of Plastic and Reconstructive Surgery Faculty of Medicine Kyoto University Shogoin Sakyo-ku Kyoto 606 Japan Graduate School of Material Science Nara Institute of Science and Technology Nara Japan Research Center for Biomedical Engineering Kyoto University Kyoto Japan Medical R&D Kuraray Co. Ltd. Okayama Japan

Calcium alginate dressings have beneficial effects on wound healing by providing a moist wound environment. However, cytotoxicity and the nonbiodegradable nature of calcium alginate dressings induce unresolved chronic foreign-body reaction. In this study, a novel freeze-dried alginate gel dressing (AGA-100) low in calcium ions was evaluated for cytotoxicity to L929 cells in vitro and in full-thickness pig wounds in vivo . Cytotoxicity testing on L929 cells showed the cytocompatibility of AGA-100 extracts, while extracts from Kaltostat, a well-established alginate dressing, induced cytopathic effects. In an in vivo study using pigskin, AGA-100, Kaltostat, and gauze were applied on 1-in-diameter circular full-thickness wounds on the back of pigs and the time course of wound closure was evaluated. Kaltostat and gauze dressings were used as controls. For histologic evaluation, wound tissue was harvested on day 18. AGA-100-treated wounds showed rapid wound closure compared to control wounds on day 15. Foreign-body reaction was marked in Kaltostat- and gauze-treated wounds, and differed significantly from AGA-100-treated wounds. Based on these data, AGA-100 could reduce the cytotoxicity to fibroblasts and foreign-body reaction that have been observed with currently available calcium alginate dressings; it was also found to be useful as an alginate dressing. © 1998 John Wiley & Sons, Inc. J Biomed Mater res , 39 , 317–322, 1998.

关键词： calcium alginate dressing wound healing foreign body occlusive dressing artificial skin

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