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Quick update of Virtual Metrology using Weighted Transfer Lasso

Quick update of Virtual Metrology using Weighted Transfer La...

Joint e-Manufacturing and design Collaboration Symposium (eMdC) & International Symposium on Semiconductor Manufacturing (ISSM)

作者： Kazuya Kikuchi Masaaki Takada Wang Xueting Takumi Ito Yasuhisa Oomuro Gen Li Advanced Semiconductor Device Development Center Toshiba Electronic Devices & Storage Corporation Nomi Japan System AI Lab. Advanced Intelligent Systems Corporate R&D Center Toshiba Corporation Kawasaki-Shi Japan

ISBN: (数字)9798331510589

ISBN: (纸本)9798331510596

This paper reports on a new update method for Virtual Metrology (VM). VM is a widely used technique in equipment quality control (QC) of semiconductor manufacturing. When using VMs in a semiconductor factory, VM models must be updated. The traditional approach is to collect a large amount of data over a long period to update the VM. We aim to update VM quickly, achieving high accuracy in a short period. To achieve this aim, we developed a new method called "Weighted Transfer Lasso". In this paper, we report that it achieves high accuracy with quick update VM using Weighted Transfer Lasso. Weighted Transfer Lasso showed a higher correlation coefficient and reasonable variable selection. Therefore, when we launch the new 300mm equipment, we can achieve quick update of VM using Weighted Transfer Lasso.

关键词： Correlation coefficient Semiconductor device modeling Knowledge engineering Accuracy Input variables Quality control Semiconductor device manufacture Metrology Production facilities

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differentially Private decentralized Traffic Flow Prediction Approach based on Federated Learning 22

Differentially Private Decentralized Traffic Flow Prediction...

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Proceedings of the 2022 10th International Conference on Information Technology: IoT and Smart City

作者： Huimin Tang Nianming Xue Gaoli Wang East China Normal University Software Engineering Institute China Shandong Luruan Digital Technology Co. Ltd. R&D Center China

ISBN: (纸本)9781450397438

Existing centralized deep learning methods get surprising success in traffic flow prediction based on large-scale datasets. However, to protect the privacy of datasets, organizations are not allowed to share local datasets, which causes data exists as silos. The emergence of federated learning has broken this awkward situation. But the new challenge that puzzles us is how to provide meaningful privacy guarantees in federated learning. In this paper, we apply the federated learning to the intelligent transportation domain and propose a traffic flow prediction method based on long short-term memory (LSTM) networks and differential privacy. We introduce blockchain technology to verify the model update parameters in each round and achieve fully decentralized training. Experiments show that we can guarantee the accuracy of the model under a proper privacy budget, and the communication costs of our method are controllable.

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Multimodal misinformation detection based on the multi-granularity consistency

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Neurocomputing 2025年 644卷

作者： Zhang, Shibo Chen, Hongchang Liu, Shuxin Li, ran Jiang, HaoCong dong, Liang Institute of Information Technology PLA Information Engineering University Henan Zheng Zhou450002 China National Digital Switching System Engineering and Technological R&D Center Henan Zheng Zhou450002 China

In the current era of information proliferation, social media platforms frequently present multimodal data that may propagate misinformation. To address this challenge, computer vision techniques have been increasingly applied to online misinformation detection. Existing approaches often concentrate on learning deep semantic features from text and images without sufficiently exploring coherent alignments across multiple granular levels. This could hinder the construction of a comprehensive multimodal detection framework for misinformation detection. To overcome these issues, in this paper, we propose a three-level granularity consistency detection framework that explores image-text alignments at fine-grained, medium-grained, and coarse-grained levels. Meanwhile, we delve into the hierarchical structures of two modalities as well as the intricate semantic relationships between them. Specifically, our framework models token-level consistency through a multi-head cross-attention mechanism, phrase-level consistency via a graph neural network (GNN), and global-level consistency using a contrastive language-image pre-training model (CLIP), respectively. An adaptive fusion module then integrates these consistency features across all three granularities, enabling more nuanced and robust multimodal misinformation detection. Extensive experiments conducted on multiple benchmark datasets demonstrate that our approach substantially improves the performance of multimodal misinformation detection. © 2025

关键词： Tweets

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Fast Solving Algorithm Based on Priority ranking and rule Matching in Virtual Power Plant (VPP)

Fast Solving Algorithm Based on Priority Ranking and Rule Ma...

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Power and Electrical Engineering (ACPEE), 5th Asia Conference on

作者： Jinshuang Hu Jiayi Yang Shuaishuai Liu Shujun Wu Department of Power Market Shanghai Eneplus Intelligent Technology Co. Ltd Shanghai China Software R&D Center Shanghai Eneplus Intelligent Technology Co. Ltd Shanghai China

ISBN: (数字)9798350309638

ISBN: (纸本)9798350309645

Virtual Power Plant (VPP) calculation is a problem of searching optima in high-dimensional space. Its basic optimal solving methodology is to trim uninteresting regions of the search space where global optima are unlikely to be found by setting rules manually or automatically. A new fast solving algorithm based on priority ranking and rule matching of multidimensional responsive features of distributed Energy resources (dErs) is proposed and designed. Theoretical analysis and simulation result show that the new algorithm is with O(n 2 ) time complexity, which means it is fast enough and can be put into practice in real-time VPP’s engineering application scenarios.

关键词： Electrical engineering Energy resources Simulation Asia Virtual power plants Search problems real-time systems

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research on Smart Photovoltaic Power Station Control system Based on dCS Architecture

Research on Smart Photovoltaic Power Station Control System ...

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Computer Communication, Networks and Information Science (CCNIS), International Conference on

作者： Lei Zhan State R&D Center of Control System and Information Security Technologies for Energy Industry Chn Energy Zhishen Control Technology Co. Ltd. Beijing Engineering Research Center of Power Station Automation Beijing China

ISBN: (数字)9798331507046

ISBN: (纸本)9798331507053

Aiming at the operation and maintenance management and control issues of large-scale photovoltaic power stations, a smart photovoltaic power station control system based on dCS architecture was studied. In terms of system architecture design, the design idea based on the “cloud-edge-end” architecture is adopted, and some core equipment and data storage devices in the site are placed in the cloud to achieve centralized management and storage of data. At the same time, some computationally intensive tasks are processed in the cloud to reduce the computing pressure on edge devices. Applying this system to the control of photovoltaic power plants can achieve precise control of operation and maintenance data, and enable the identification and accurate processing of different faults. Comparing the fault identification algorithm used in this system with other algorithms, the results prove that the fault identification accuracy of this algorithm can reach 100℅, creating a large amount of economic benefits for the stable operation of photovoltaic power plants.

关键词： Photovoltaic systems Fault diagnosis Economics Accuracy systems operation systems architecture Computer architecture Control systems Maintenance Monitoring

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An Experimental Study of the Geometrical Effect on the Performance of an Agricultural Air Induction Nozzle 15

An Experimental Study of the Geometrical Effect on the Perfo...

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15th Triennial International Conference on Liquid Atomization and Spray systems, ICLASS 2021

作者： dafsari, reza Alidoost Kasbi, Milad Khaleghi Yu, Seunghwa Choi, Yong Lee, Jeekeun Department of Mechanical system engineering Chonbuk National University Jeonju Korea Republic of Rural Development Administration R&D center Jeonju Korea Republic of

Target spraying has become of prime interest in the agricultural field to avoid the drift or rebound of the chemicals while spraying and consequently minimize water and soil pollution. Air induction nozzles are the means to spray chemicals such as pesticide in large size droplets which can resist the drift due to a potential wind and to minimize the rebound off the target with an explosion of induced air bubbles. To experimentally investigate the effect of the geometry of the air induction nozzle on its performance, a number of components are designed and manufactured to control various dimensions. The spray structure and air to liquid ratio were captured using planner imaging Mie scattering system and flowmeters respectively. Moreover, the mean droplet size was measured using a Malvern particle sizer. The parametric study showed the influence of each geometrical component on the resultant behavior. The result can help the nozzle designers to optimize the design target and enhance atomization efficiency. © 2021 ICLASS 2021 - 15th Triennial International Conference on Liquid Atomization and Spray systems. All rights reserved.

关键词： Geometry

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Measuring^(222)rn in aquatic environment via Pulsed Ionization Chamber radon detector

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Acta Oceanologica Sinica 2023年第8期42卷 185-189,I0001-I0006页

作者： Lijun Song Wen Liu Shibin Zhao Chunqian Li Jinjia Guo Natasha dimova Bochao Xu Frontiers Science Center for Deep Ocean Multispheres and Earth System/Key Laboratory of Marine Chemistry Theory and Technology of Ministry of Education Ocean University of ChinaQingdao 266100China Laboratory for Marine Ecology and Environmental Science Qingdao National Laboratory for Marine Science and TechnologyQingdao 266071China College of Chemistry and Chemical Engineering Ocean University of ChinaQingdao 266100China College of Information Science and Engineering Ocean University of ChinaQingdao 266100China R&D Center for Marine Instruments and Apparatuses Qingdao Marine Science and Technology CenterQingdao 266200China Department of Geological Sciences College of Arts and SciencesUniversity of AlabamaTuscaloosa 35487USA

radon(rn)is a naturally occurring radioactive inert gas in nature,and^(222)rn has been routinely used as a powerful tracer in various aquatic environmental research on timescales of hours to days,such as submarine groundwater *** we developed a new approach to measure^(222)rn in discrete water samples with a wide range of^(222)rn concentrations using a Pulsed Ionization Chamber(PIC)radon *** sensitivity of the new PIC system is evaluated at 6.06 counts per minute for 1 Bq/L when a 500 mL water sample volume is used.A robust logarithmic correlation between sample volumes,ranging from 250 mL to 5000 mL,and system sensitivity obtained in this study strongly suggests that this approach is suitable for measuring radon concentration levels in various natural *** to the currently available methods for measuring radon in grab samples,the PIC system is cheaper,easier to operate and does not require extra accessories(e.g.,drying tubes etc.)to maintain stable measurements throughout the counting procedure.

关键词： ^(222)rn radon measurement Pulsed Ionization Chamber radon detector radon in discrete water samples submarine groundwater discharge

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Mechanical Aspects of Structural Optimization in a Bi-Te Thermoelectric Module for Power Generation

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MrS Online Proceedings Library 2021年第1期842卷 209-214页

作者： Yujiro Nakatani reki Takaku Takehisa Hino Takahiko Shindo Yoshiyasu Itoh Power & Industrial System R&D Center Toshiba Corporation Yokohama Japan

The thermal stress and strain occurring on a Bi-Te thermoelectric module subjected to variable thermal conditions were estimated based on three-dimensional elastic-plastic finite element method (FEM) analysis. The analysis showed that mechanical integrity of the interface between a Bi-Te thermoelement and electrodes of Al and Mo coatings formed by atmospheric plasma spraying was significantly reduced and that shear strain rose to 0.6~1.1% in the vicinity of the interface. Furthermore, to estimate the sensitivity of configurational parameters of the module to the thermal strain, statistical sensitivity analysis based on the design of experiment (doE) and response surface method (rSM) was conducted. The statistical analysis revealed that the thickness of electrode coatings of Al and Mo affected the thermal strain and that the thinner Al coating and the thicker Mo coating reduced the thermal strain. In this study, a thermal fatigue test machine was newly developed with a view to verifying these analytical studies.

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Optical design of dispersive metasurface nano-prism structure for high sensitivity CMOS image sensor

Optical design of dispersive metasurface nano-prism structur...

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2023 International Electron devices Meeting, IEdM 2023

作者： Choi, Chulsoo Park, Jonghoon Lee, Yunki Kim, Bumsuk Kim, Junghoon Kim, Sunwook Kim, Junghyun roh, Sookyoung Ahn, Sungmo Mun, Sangeun Lee, Beomsuk Nah, Seungjoo Park, Howoo Kim, Hyunchul Moon, Changrok Yun, Seokho Ahn, Jungchak Yim, Joonseo Samsung Electronics System Lsi Division Gyeonggi-do Yongin-si Korea Republic of Samsung Advanced Institute of Technology Gyeonggi-do Suwon Korea Republic of Samsung Electronics Semiconductor R&d Center Gyeonggi-do Hwaseong-si Korea Republic of Samsung Electronics Foundry Division Gyeonggi-do Yongin-si Korea Republic of

ISBN: (纸本)9798350327670

In this paper, a meta-photonic structure called nano-prism (NP) is designed by Full EM-wave analysis tool, rigorous coupled wave analysis (rCWA), and experimentally applied on 0.64µm pixel image sensor having 50Mp with 5mm×4mm size as a replacement of conventional µ-lens. In order to apply the NP structure to the product level image sensor, it is very important to secure not only the characteristics in direct light but also the pixel characteristics in the oblique light condition with chief ray angle (CrA). In this paper, NP design and improved pixel characteristics in the oblique light condition are described. Also, one of the key advantage of NP is that the spectral response is adjustable by arranging the pattern design without changing the color filter materials, which is verified in this paper. Furthermore, innovatively improved quantum efficiency (QE) improvement that resulted in 25% of sensitivity and 1.2dB of signal to noise ratio (SNr) improvement, and other important sensor characteristics such as auto-focus and resolution are also demonstrated in this paper. © 2023 IEEE.

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Application of Nano Copper Paste in Large-Area Sintering: A Study on Enhancing Its Sintering Performance

Application of Nano Copper Paste in Large-Area Sintering: A ...

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International Conference on (ICEPT) Electronic Packaging Technology

作者： Chenshan Gao Shizhen Li Qian Yao Yuhong Li Jiafeng Liu Tiancheng Tian Lingen Wang Shaohui Wu Huaiyu Ye School of Microelectronics Southern University of Science and Technology Shenzhen China Shennan Circuits Co. LTD Shenzhen China R&D Departnment Sky Chip Interconnection Technology Co.LTD Shenzhen China School of Software Shenyang University of Technology Shenyang China R&D Departnment Suzhou Boschman Semiconductor Equipment Co.LTD Suzhou China R&D Departnment Boschman Technologies B. V. Amsterdam Netherlands R&D Center AKMMeadville Electronics (Xiamen) Co. LTD Xiamen China

ISBN: (数字)9798350353808

ISBN: (纸本)9798350353815

Silicon carbide power chips require interconnection materials with high thermal and electrical conductivity, stability at high temperatures, and resistance to electro migration. Nano-metal sintering technology, particularly using nano-silver and nano-copper, has emerged as a promising solution. This study investigates the large-area sintering (LAS) performance of different substrates and printing thicknesses. The results show that pure copper (Cu) substrates provide superior bonding compared to nickel (Ni)-plated ones, and the sintered layer thickness varies significantly with stencil thickness. The presence of a cross-shaped channel improves the volatilization of organic compounds, reducing porosity. These findings highlight the potential of nano-metal sintering materials in enhancing the reliability and performance of high-power chips.

关键词： Thermal resistance Sintering Materials reliability Tin Copper Nanostructured materials Bonding

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